CN206754585U - Core assembly and mass flow controller - Google Patents
Core assembly and mass flow controller Download PDFInfo
- Publication number
- CN206754585U CN206754585U CN201720440394.1U CN201720440394U CN206754585U CN 206754585 U CN206754585 U CN 206754585U CN 201720440394 U CN201720440394 U CN 201720440394U CN 206754585 U CN206754585 U CN 206754585U
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- core assembly
- seal
- extrusion
- press section
- mounting hole
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Abstract
The utility model discloses a kind of core assembly and a kind of mass flow controller.The core assembly includes the valve element and seal being in the form of a column, the spool end is provided with mounting hole, a part for the seal is arranged in the mounting hole, the core assembly also includes the extrusion for protruding from the spool end, the extrusion is coaxially disposed in a ring and with the mounting hole, the extrusion includes connecting portion and press section, the first end of the connecting portion is fixedly connected with the press section, second end of the connecting portion is fixedly connected with the spool end, another part of the seal is arranged in the extrusion, and the press section can be deformed upon to the seal and contacted, to cause the seal to be fixedly installed on the valve core inside.Core assembly of the present utility model, without needing too high machining accuracy to can be achieved to fix, the machining accuracy of the core assembly can be effectively reduced, reduces the cost of manufacture of the core assembly.
Description
Technical field
It the utility model is related to flowmeter technology field, and in particular to a kind of core assembly and one kind include the core assembly
Mass flow controller.
Background technology
Traditional, mass flow controller (Mass Flow Controller, MFC) is by mass flowmenter, controller group
Into it not only has the function of flowmeter, moreover it is possible to automatically control gas flow, i.e. user can carry out flow set as needed,
MFC is automatically constant in setting value by flow.Mass flowmenter is mainly by current divider passage, flow sensor and amplifying circuit
Formed Deng part, on this basis, along with regulating valve and PID (Proportion Integration
Differentiation, PID) control circuit just constitutes mass flow controller.
The encapsulant of the core assembly of regulation valve of quality and flow controller is divided into metal sealing and nonmetallic sealing two is big
Class.The material of metal sealing is generally stainless steel resistant material.Any gas can be used for using the MFC of metal sealing in principle
Body, including various corrosive gas and special gas.But because the MFC prices of flow controller metal sealing are higher, therefore,
For less demanding occasion, using the MFC of nonmetallic sealing.Nonmetallic hermetic unit can be rubber, polychlorostyrene trifluoro second
Alkene, polytetrafluoroethylene (PTFE).
Specifically, existing mass flow controller core assembly, as depicted in figs. 1 and 2, core assembly 100 include setting
The valve element 110, seal 120 and pressure ring 130 of mounting hole (unmarked) are equipped with, when assembling the core assembly 100, first by seal
120 are embedded into mounting hole 110, and pressure ring 130 is embedded into mounting hole again afterwards, are fixed seal 120 by pressure ring 130
Valve core inside is arranged on, to form required core assembly 100.
But using the core assembly 100 of said structure, to the chi of above-mentioned valve element 110, seal 120 and pressure ring 130
Very little requirement on machining accuracy is high, and processing cost is higher, and not easily assembling.
Therefore, a kind of core assembly that can reduce machining accuracy how is designed as this area technology urgently to be resolved hurrily
Problem.
Utility model content
The machining accuracy height that the utility model is intended at least solve valve element, seal and pressure ring present in prior art is led
The problem of processing cost of cause is higher, it is proposed that a kind of core assembly and a kind of mass flow control including the core assembly
Device.
To achieve these goals, first aspect of the present utility model, there is provided a kind of core assembly, the core assembly
Including the valve element and seal being in the form of a column, the spool end is provided with mounting hole, and a part for the seal is arranged on institute
State in mounting hole, the core assembly also includes protruding from the extrusion of the spool end, the extrusion in a ring and with
The mounting hole is coaxially disposed, and the extrusion includes connecting portion and press section, the first end of the connecting portion and the extruding
Portion is fixedly connected, and the second end of the connecting portion is fixedly connected with the spool end, and another part of the seal is set
In the extrusion, and the press section can be deformed upon to the seal and contacted, to cause the seal to consolidate
Surely it is arranged on the valve core inside.
Preferably, the valve element includes fixed part and the spiral shell for being connected with the fixed part and being coaxially disposed with the fixed part
Line portion, the fixed part are provided with the mounting hole on the end of the threaded portion, and the external diameter of the threaded portion is less than
The external diameter of the fixed part.
Preferably, the connecting portion is in the form of a column, and the diameter of the outline of the press section is from described the of the connecting portion
End successively decreases successively to away from the direction of the first end.
Preferably, the seal includes sealing and the extrusion fit portion being fixedly connected with the sealing, described close
Envelope portion is located in the mounting hole, and the extrusion fit portion is arranged in the extrusion, and is contacted with the press section.
Preferably, the external diameter in the extrusion fit portion is less than the external diameter of the sealing, and the extrusion fit portion and institute
The connection transition position for stating sealing is provided with chamfering, and the press section contacts at the chamfering with the extrusion fit portion.
Preferably, the end face of the remote valve element of the press section and the end of the remote mounting hole of the seal
Face is concordant.
Preferably, the extrusion is integrally formed with the valve element.
Preferably, the internal diameter of the mounting hole is equal or slightly larger than the external diameter of the seal.
Preferably, the seal is made up of rubber, polychlorotrifluoroethylene or polytetrafluoroethylene (PTFE).
Second aspect of the present utility model, there is provided a kind of mass flow controller, the mass flow controller include valve
Core assembly, the core assembly is using the core assembly recorded above.
Core assembly of the present utility model, in assembling, first seal is assembled in the mounting hole at spool end, this
Can be interference fits or interference fit between place's seal and mounting hole, to improve the sealing for assembling the core assembly formed
Performance.Afterwards using the extrusion for being arranged on the end, the press section of the extrusion, which can be deformed upon to seal, to be connect
Touch, specifically, operator can by the press section apply extruding force so that the press section deforms upon, so as to so that
Obtain press section to contact with seal, and then allow seal to be fixedly installed on valve core inside, relative to traditional using pressure
Seal is fixed on the structure of the core assembly of valve core inside by ring, and the core assembly of the structure does not have to need too high processing essence
Degree can be achieved to fix, therefore, it is possible to effectively reduce the machining accuracy of the core assembly, so as to reduce the core assembly
Cost of manufacture.
Mass flow controller of the present utility model, has the core assembly of said structure, and the core assembly can utilize
In the cooperation of the press section and seal of the outwardly extrusion of spool end, most seal is fixed on valve core inside at last,
Relative to the structure of traditional core assembly that seal is fixed on to valve core inside using pressure ring, the core assembly of the structure is not
With needing too high machining accuracy to can be achieved to fix, therefore, it is possible to effectively reduce the machining accuracy of the core assembly, so as to
To reduce the cost of manufacture of the core assembly, and then the cost of manufacture of mass flow controller can be reduced.
Brief description of the drawings
Accompanying drawing is to be further understood for providing to of the present utility model, and a part for constitution instruction, and following
Embodiment be used to explain the utility model together, but do not form to limitation of the present utility model.In the accompanying drawings：
Fig. 1 is the structural representation of core assembly in the prior art；
Fig. 2 is the sectional view of core assembly shown in Fig. 1；
Fig. 3 is the structural representation of core assembly in the utility model.
Fig. 4 is the sectional view of core assembly shown in Fig. 3.
Description of reference numerals
100：Core assembly；
110：Valve element；
111：Fixed part；
112：Threaded portion；
120：Seal；
121：Sealing；
122：Extrusion fit portion；
130：Pressure ring；
140：Extrusion；
141：Connecting portion；
142：Press section.
Embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.It should be appreciated that herein
Described embodiment is merely to illustrate and explained the utility model, is not limited to the utility model.
It is of the present utility model in a first aspect, being related to a kind of core assembly 100 with reference to figure 3 and Fig. 4.The core assembly 100
Valve element 110 and seal 120 including being in the form of a column (for example, cylindrical structural), there is mounting hole in the end set of valve element 110
(unmarked), a part for the seal 120 are arranged in the mounting hole.Wherein, the core assembly 100 also includes convex
For the extrusion 140 of the end of valve element 110, the extrusion 140 is coaxially disposed in a ring and with the mounting hole.It is described
Extrusion 140 includes connecting portion 141 and press section 142, and the first end of the connecting portion 141 is fixed with the press section 142 to be connected
Connect, the second end of the connecting portion 141 is fixedly connected with the end of valve element 110, and another part of the seal 120 is set
In the extrusion 140, and the press section 142 of the extrusion 140 can be deformed upon to the seal 120 and connect
Touch, to cause the seal 120 to be fixedly installed on inside the valve element 110, namely fix and be sealingly disposed in the installation
In hole.
Above-mentioned extrusion 140 is coaxially disposed in a ring and with the mounting hole, that is to say, that extrusion 140 be provided with
The coaxial handle hole of mounting hole (unmarked), the handle hole are used for the another part for accommodating seal 120.
When assembling the core assembly 100, first seal 120 is assembled in the mounting hole of the end of valve element 110, it is close herein
It can be interference fits or interference fit between sealing 120 and mounting hole, the close of the core assembly 100 formed is assembled to improve
Sealing property, it is of course also possible to take other sealed connection modes, it is not limited thereto.Afterwards using being arranged on the end
Extrusion 140, operator to extrusion 140 apply extruding force, press section 142 can be caused to occur bending and deformation so that should
The madial wall of press section 142 is engaged with seal 120, and then seal 120 is fixedly installed in valve element 110
Portion.
It should be noted that not defined for the concrete structure of extrusion 140, it should meet to the extruding
When the press section 142 of part 140 presses, deformation can be produced and contacted with seal 120, seal 120 is fixed on valve
The inside of core 110.
The core assembly 100 of the present embodiment structure, utilize the extruding in the outwardly extrusion 140 in the end of valve element 110
Portion 142 and the cooperation of seal 120, most seal 120 is fixed on inside valve element 110 at last, and pressure ring is used relative to traditional
130 are fixed on seal 120 structure of the core assembly 100 inside valve element 110, and the core assembly 100 of the structure does not have to need
Too high machining accuracy is wanted to can be achieved to fix, therefore, it is possible to effectively reduce the machining accuracy of the core assembly 100, so as to
To reduce the cost of manufacture of the core assembly 100.
In addition, the core assembly 100 of the present embodiment structure, in assembling, annular extrusion 140 with seal 120
When being engaged, by increasing capacitance it is possible to increase lifting surface area between the two, avoid because firmly it is excessive seal 120 is damaged etc. it is existing
As occurring.
Preferably, above-mentioned valve element 110 include fixed part 111 and be connected with the fixed part 111 and with the fixed part 111
The threaded portion 112 being coaxially disposed, the fixed part 111 are provided with the mounting hole on the end of the threaded portion 112,
The external diameter of the threaded portion 112 is less than the external diameter of the fixed part 111.Wherein, the threaded portion 112 can be used for the valve element group
Part 100 is assembled on the product of other core assemblies 100 for needing the structure, for example, mass flow controller etc..
The core assembly 100 of the present embodiment structure, is a kind of concrete structure of valve element 110, and valve element 110 includes being used to seal
The fixed part 111 of seal 120, and the threaded portion 112 core assembly 100 being assembled in other elements, it is simple in construction,
Meanwhile it is also convenient for assembling.
Preferably, above-mentioned connecting portion 141 is in the form of a column, and the diameter of the outline of the press section 142 is from the connecting portion 141
First end at successively decrease successively to away from the direction of the first end.
That is, 141 cylindrical structure of connecting portion, press section 142 is in truncated cone-shaped structure, the cylindrical-shaped structure and
The centre of truncated cone-shaped structure is provided with above-mentioned handle hole, so that seal 120 can be assembled to valve element 110 through the handle hole
Mounting hole in, and another part of the seal 120 is also located in the handle hole, applies extruding force to press section 142 so that
Press section 142 bends deformation, can reduce the gap between handle hole and seal 120, until the inner side of press section 142
Wall is engaged with seal 120, realizes and seal 120 is fixed on inside valve element 110.
The core assembly 100 of the present embodiment structure, is a kind of specific structure of extrusion 140, the press section of the structure
142 can facilitate operator to apply extruding force to the press section 142, and simple in construction, can reduce cost of manufacture.
Preferably, above-mentioned seal 120 includes sealing 121 and the extrusion fit being fixedly connected with the sealing 121
Portion 122.Wherein, the sealing 121 is located in the mounting hole, and the extrusion fit portion 122 is arranged on the extrusion 140
It is interior, and contacted with the press section 142.
That is, when assembling the core assembly 100, the seal 120 sequentially pass through extrusion 140 handle hole and
The mounting hole of valve element 110, finally so that the sealing 121 of seal 120 is located in mounting hole, and with the closed company of the mounting hole
Connect, the extrusion fit portion 122 of seal 120 is located in handle hole, and is engaged in handle hole with press section 142, will
Extrusion fit portion 122 is fixed on valve element 110, so that whole seal 120 is fixed on valve element 110.
The core assembly 100 of the present embodiment structure, seal 120 therein are made up of two-part structure, be respectively and valve
The sealing 121 and the extrusion fit portion 122 being connected that is engaged with press section 142 that core 110 is tightly connected.Therefore, in reality
During the processing and fabricating seal 120, it can only control the machining accuracy at sealing 121 of a relatively high, be connect with press section 142
The machining accuracy touched at the extrusion fit portion 122 coordinated is relatively low, so as to further reduce cost of manufacture.In addition,
Because press section 142 is only engaged with extrusion fit portion 122, therefore, at this apply extruding force when, will not be because exerting oneself
The sealing 121 for playing sealing decisive role is damaged greatly, it is thus possible to which sealing property is enough effectively ensured, improving should
The service life of core assembly 100.
Preferably, the external diameter in above-mentioned extrusion fit portion 122 is less than the external diameter of the sealing 121, and the extrusion fit
The connection transition position of portion 122 and the sealing 121 is provided with chamfering, and the press section 142 squeezes at the chamfering with described
Press-fitted portions 122 contact.
That is, when applying extruding force to the press section 142, the press section 142 is finally matched somebody with somebody with the extruding at chamfering
Conjunction portion 122 is engaged.
Above-mentioned chamfering structure, also there is positioning or spacing function.That is, equivalent to the deformation to press section 142
Degree plays positioning or spacing function, when extruding the press section 142, can cause the press section 142 finally and chamfering
The extrusion fit portion 122 at place contacts, at this point it is possible to stop pressing, is completed.
Preferably, the end face of the remote valve element 110 of above-mentioned press section 142 and the seal 120 away from described
The end face of mounting hole is concordant.
It should be appreciated that the end face of the remote valve element 110 of press section 142 herein and the seal 120
End face away from the mounting hole is concordant, refers to：Finally it is completed the end face of the remote valve element 110 of rear press section 142
It is concordant with the end face of the remote mounting hole of the seal 120.Therefore, can be by rationally setting extrusion fit portion 122
Length and chamfering structure position, can cause to press section 142 apply extruding force when, it finally matches somebody with somebody with the extruding at chamfering
Conjunction portion 122 is in contact, meanwhile, outer face is concordant with the outer face in extrusion fit portion 122, can cause the core assembly 100
Structure is compacter, good appearance.
Preferably, above-mentioned press section 142 is integrally formed with the valve element 110.
The press section 142 of the present embodiment structure is integrally formed with valve element 110, can further simplify the core assembly
100 manufacture craft, reduce the cost of manufacture of the core assembly 100.
Preferably, the internal diameter of above-mentioned mounting hole is equal or slightly larger than the external diameter of the seal 120.
More specifically, the internal diameter of mounting hole is equal or slightly larger than the external diameter of the sealing 121 of the seal 120.Also
It is to say, mounting hole and seal 120, between the two using transition or interference fit, to ensure sealing property between the two, from
And it can integrally improve the sealing of the core assembly 100.
Preferably, above-mentioned seal 120 is made up of rubber, polychlorotrifluoroethylene or polytetrafluoroethylene (PTFE).
The core assembly 100 of the present embodiment structure, belongs to the concrete structure using nonmetallic materials sealed valve core 110.Pass
The concrete structure of the core assembly 100 of system mainly includes following two kinds：
Using the core assembly 100 of metal material sealed valve core 110, the cost of core assembly 100 of the structure is higher.
Using the core assembly 100 of nonmetallic materials sealed valve core 110, Fig. 1 is may be referred to, due to using pressure ring 130 will
Seal 120 is fixed in the mounting hole of valve element 110, the requirement on machining accuracy of pressure ring 130, valve element 110 and seal 120 compared with
Height, therefore, cost of manufacture are higher.
The core assembly 100 of the present embodiment structure, the seal 120 made using nonmetallic materials, can reduce valve element
The cost of component 100, in addition, the end set in valve element 110 has extrusion 140, utilize the press section 142 of the extrusion 140
With being engaged for seal 120, seal 120 is fixed on inside valve element 110, it is not necessary to too high machining accuracy, therefore,
The cost of manufacture of the core assembly 100 can be reduced.
Second aspect of the present utility model, there is provided a kind of mass flow controller (not showed that in figure), the quality stream
Amount controller includes core assembly, and the core assembly includes the core assembly 100 recorded above.
The mass flow controller of the present embodiment structure, there is the core assembly 100 of said structure, the core assembly 100
The cooperation of the press section 142 and seal 120 in the outwardly extrusion 140 in the end of valve element 110 can be utilized, it is most close at last
Sealing 120 is fixed on inside valve element 110, and seal 120 is fixed on inside valve element 110 using pressure ring 130 relative to traditional
Core assembly 100 structure, the core assembly of the structure do not have to need too high machining accuracy to can be achieved to fix, therefore,
The machining accuracy of the core assembly 100 can be effectively reduced, so as to reduce the cost of manufacture of the core assembly 100, and then
The cost of manufacture of mass flow controller can be reduced.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and used exemplary
Embodiment, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (10)
1. a kind of core assembly, the core assembly includes the valve element and seal being in the form of a column, and the spool end is provided with peace
Hole is filled, a part for the seal is arranged in the mounting hole, it is characterised in that the core assembly also includes protruding from
The extrusion of the spool end, the extrusion are coaxially disposed in a ring and with the mounting hole, and the extrusion includes connecting
Socket part and press section, the first end of the connecting portion are fixedly connected with the press section, the second end of the connecting portion with it is described
Spool end is fixedly connected, and another part of the seal is arranged in the extrusion, and the press section can occur
Deformation with the seal to contacting, to cause the seal to be fixedly installed on the valve core inside.
2. core assembly according to claim 1, it is characterised in that the valve element include fixed part and with the fixed part
The threaded portion for connecting and being coaxially disposed with the fixed part, the fixed part are set on the end of the threaded portion
Mounting hole is stated, the external diameter of the threaded portion is less than the external diameter of the fixed part.
3. core assembly according to claim 1, it is characterised in that the connecting portion is cylindrical in shape, outside the press section
The diameter of profile successively decreases successively from the first end of the connecting portion to away from the direction of the first end.
4. core assembly according to claim 1, it is characterised in that the seal include sealing and with the sealing
The extrusion fit portion that portion is fixedly connected, for the sealing position in the mounting hole, the extrusion fit portion is arranged on described squeeze
In casting die, and contacted with the press section.
5. core assembly according to claim 4, it is characterised in that the external diameter in the extrusion fit portion is less than the sealing
The external diameter in portion, and the extrusion fit portion and the connection transition position of the sealing are provided with chamfering, the press section is described
Contacted at chamfering with the extrusion fit portion.
6. according to the core assembly described in claim 1 to 5 any one, it is characterised in that the press section away from described
The end face of valve element is concordant with the end face of the remote mounting hole of the seal.
7. according to the core assembly described in claim 1 to 5 any one, it is characterised in that the extrusion and the valve element
It is integrally formed.
8. according to the core assembly described in claim 1 to 5 any one, it is characterised in that the internal diameter of the mounting hole is equal to
Or the external diameter slightly larger than the seal.
9. according to the core assembly described in claim 1 to 5 any one, it is characterised in that the seal is by rubber, polychlorostyrene
Trifluoro-ethylene or polytetrafluoroethylene (PTFE) are made.
10. a kind of mass flow controller, the mass flow controller includes core assembly, it is characterised in that the valve element
Component is using the core assembly described in claim 1 to 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720440394.1U CN206754585U (en) | 2017-04-25 | 2017-04-25 | Core assembly and mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720440394.1U CN206754585U (en) | 2017-04-25 | 2017-04-25 | Core assembly and mass flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206754585U true CN206754585U (en) | 2017-12-15 |
Family
ID=60615953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720440394.1U Active CN206754585U (en) | 2017-04-25 | 2017-04-25 | Core assembly and mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206754585U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110500406A (en) * | 2019-06-27 | 2019-11-26 | 北京七星华创流量计有限公司 | Sealing structure and mass flow controller |
| CN110848389A (en) * | 2019-10-25 | 2020-02-28 | 海天塑机集团有限公司 | Rotary sealing structure in strong acid or strong alkali environment |
-
2017
- 2017-04-25 CN CN201720440394.1U patent/CN206754585U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110500406A (en) * | 2019-06-27 | 2019-11-26 | 北京七星华创流量计有限公司 | Sealing structure and mass flow controller |
| CN110848389A (en) * | 2019-10-25 | 2020-02-28 | 海天塑机集团有限公司 | Rotary sealing structure in strong acid or strong alkali environment |
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