CN206751914U - A kind of device for rod-shaped workpiece magnetron sputtering plating - Google Patents
A kind of device for rod-shaped workpiece magnetron sputtering plating Download PDFInfo
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- CN206751914U CN206751914U CN201720167825.1U CN201720167825U CN206751914U CN 206751914 U CN206751914 U CN 206751914U CN 201720167825 U CN201720167825 U CN 201720167825U CN 206751914 U CN206751914 U CN 206751914U
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- rod
- shaped workpiece
- magnetron sputtering
- sputtering plating
- locating dowel
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Abstract
A kind of device for rod-shaped workpiece magnetron sputtering plating, it includes the fixed gear that two identicals are fixedly connected by least three circumferential the first uniform locating dowels, each fixed gear rotatable connection has concentric runner, two runners are fixedly connected by least three circumferential the second uniform locating dowels, two runners are provided with multipair telescopic 3rd locating dowel, and each 3rd locating dowel is connected by the moving gear of identical first with the corresponding fixed gear engagement.A kind of device for rod-shaped workpiece magnetron sputtering plating provided by the utility model, it can effectively realize the batch plated film of rod-shaped workpiece, and the coating quality of the side wall near two end faces of energy effective guarantee rod-shaped workpiece.
Description
Technical field
Material surface coating technique field is the utility model is related to, it is more particularly to a kind of to be used for rod-shaped workpiece magnetron sputtering
The device of film.
Background technology
For rod-shaped workpiece, i.e. solid cylindrical workpiece, plated film is carried out when needing to pass through rectangle magnetic control target to its outer surface
When, conventional method is in annular region design rotation-revolution mechanism, and workpiece clamping mechanism.But these existing clamping machines
Structure has a defect, exactly in order to prevent workpiece from being come off in rotation+revolution from clamping device, often above and below clamping device
End is provided with " recessed " type frock, by the termination point casing of workpiece in " recessed " type frock, i.e., clamps workpiece by " recessed " type frock
Termination come avoid workpiece produce lateral displacement.Come off problem although so doing and solving workpiece, " recessed " type frock meeting during sputtering
The side composition of two terminations of workpiece is blocked, so as to form sputtering shade in two terminations of workpiece side, that is, sputtered not
Up, defect is left to workpiece, is that this often will carry out secondary operation to workpiece after sputter coating in actual production, such as
The part that two terminations do not sputter is ground off, or cut away, can thus increase the processing step of manufacture, and is either ground off,
Still cut away, be required for carrying out workpiece the clamping of side, otherwise can not stress, so and the film on having sputtered can be made
Into damage.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of device for rod-shaped workpiece magnetron sputtering plating, with
The problem of being formerly mentioned is reduced or avoided.
In order to solve the above technical problems, the utility model proposes a kind of dress for rod-shaped workpiece magnetron sputtering plating
Put, it includes the fixed gear that two identicals are fixedly connected by least three circumferential the first uniform locating dowels, each described fixed
Gear rotatable connection has concentric runner, and two runners are fixed by least three circumferential the second uniform locating dowels to be connected
Connect, two runners are provided with multipair telescopic 3rd locating dowel, and each 3rd locating dowel passes through identical first
Moving gear connects with the corresponding fixed gear engagement.
Preferably, the runner is provided with tooth form in side wall.
Preferably, the 3rd locating dowel includes a guide cylinder, and order is provided with spring and moveable in guide cylinder
Locating rod.
Preferably, the end face for being used to clamp the rod-shaped workpiece of the 3rd locating dowel is plane.
Preferably, the end face for being used to clamp the rod-shaped workpiece of the 3rd locating dowel is the sphere that section is radian.
Preferably, the radian for being used to clamp the section of the end face of the rod-shaped workpiece of the 3rd locating dowel is 0.1-
0.4。
Preferably, the maximum gauge of the end face for clamping the rod-shaped workpiece of the 3rd locating dowel is described bar-shaped
1.1-1.3 times of the diameter of the end face of workpiece.
A kind of device for rod-shaped workpiece magnetron sputtering plating provided by the utility model, it can effectively realize bar-shaped work
The batch plated film of part, and the coating quality of the side wall near two end faces of energy effective guarantee rod-shaped workpiece.
Brief description of the drawings
The following drawings is only intended to, in doing the utility model schematic illustration and explanation, not limit model of the present utility model
Enclose.Wherein,
Fig. 1 is a kind of dress for rod-shaped workpiece magnetron sputtering plating according to a specific embodiment of the present utility model
The stereochemical structure principle schematic put.
Embodiment
In order to which the technical characteristics of the utility model, purpose and effect are more clearly understood, now control illustrates
Specific embodiment of the present utility model.Wherein, identical part uses identical label.
Fig. 1 is a kind of dress for rod-shaped workpiece magnetron sputtering plating according to a specific embodiment of the present utility model
The stereochemical structure principle schematic put；Shown in Figure 1, the utility model provides one kind and is used for rod-shaped workpiece magnetron sputtering
The device of film, it includes the fixed gear 12 that two identicals are fixedly connected by least three circumferential the first uniform locating dowels 11,
Each rotatable connection of fixed gear 12 has a concentric runner 22, and two runners 22 pass through at least three circumferential uniform the
Two locating dowels 21 are fixedly connected, and two runners 22 are provided with multipair telescopic 3rd locating dowel 31, and each described 3rd
Locating dowel 31 is connected by the first moving gear of identical 32 with the corresponding engagement of fixed gear 12.
It is when needing the rod-shaped workpiece (not shown) to solid cylindrical to carry out magnetron sputtering plating, this practicality is new
The device for rod-shaped workpiece magnetron sputtering plating that type is provided is placed in vacuum chamber, makes the axle of two fixed gears 12
Line and horizontal plane and with the diameter parallel in rectangular target source 2, using paired the 3rd locating dowel 31 from rod-shaped workpiece
Two end faces clamp rod-shaped workpiece, so that the axis and horizontal plane of rod-shaped workpiece.Drive at least one described turn
The rotation of wheel 22, by second locating dowel 21, two runners 22 can coaxial synchronous rotation, the rotation of the runner 22 is
Revolution of the 3rd locating dowel 31 around the axis of the runner 22 can be driven, described the first of the 3rd locating dowel 31 moves
Gear 32 with engaging for the fixed gear 12 by driving the 3rd locating dowel 31 to surround own axes rotation.So, each pair
The rod-shaped workpiece of 3rd locating dowel 31 clamping can just have equal opportunity by the working region in rectangular target source (in figure
Region shown in dotted line), and the side wall of each rod-shaped workpiece also has working region of the equal opportunity by rectangular target source.So as to
The product quality that batch plated film is carried out to rod-shaped workpiece can be ensured.
Two upper and lower fixed gears 12 are identical, that is to say, that pass through at least three circumferential uniform the after assembling
Two fixed gears 12 that one locating dowel 11 is fixedly connected can ensure the coincidence in horizontal plane projection, so as to ensure described in each pair
The rotation of the first moving gear 32 of 3rd locating dowel 31 is consistent.
The runner 22 can be directly rotatably connected by bearing and the fixed gear 12, it is of course also possible to be point
Do not slotted in the rigging position opposing sidewalls of the runner 22 and the fixed gear 12, steel ball is then loaded in groove to realize
Runner 22 is stated to be rotatably connected with the fixed gear 12.No matter which kind of connected mode is used, as long as the runner 22 can be ensured
It is rotatably connected with the coaxial of fixed gear 12.
The runner 22 can be provided with tooth form in side wall, can so be easy to as shown in figure 1, using external drive gear 3 come
It is driven, certainly, is driven it will be appreciated by those skilled in the art that the modes such as drive belt can also be used in the runner 22
It is dynamic.
In technical scheme provided by the utility model, the 3rd locating dowel 31 is by withstanding the bar-shaped work described in each pair
The rod-shaped workpiece is fixed in two end faces of part (not shown), the fixed gear 12, the runner 2 and described first dynamic
Gear 32 is identical, and position is relative, also implies that in the runner 2 surrounds the rotary course of fixed gear 12, corresponding
Every a pair first moving gears 32 can keep coaxial position.That is, by every a pair the 3rd locating dowels 31 from
The rod-shaped workpiece (not shown) of end face clamping can keep synchronous revolution, again when being clamped by the 3rd locating dowel 31
Synchronous rotation can be kept.
3rd locating dowel 31 can include a guide cylinder, and order is provided with spring and movably determined in guide cylinder
Position bar, when depressing the locating rod, can load rod-shaped workpiece, and spring can withstand the locating rod and come to rod-shaped workpiece afterwards
Clamped.
Certainly, the 3rd locating dowel 31 can also use other Collapsible structures, for example, the 3rd locating rod 31
Can include a guide cylinder, a telescopic locating rod is provided with guide cylinder, guide cylinder side wall is provided with stop spiral shell
Nail, can be moved and fixed to locating rod by adjusting the elastic of the limit screw.
Because technical scheme provided by the present invention can ensure that the 3rd locating dowel 31 begins in the process of running described in each pair
Coaxial position is maintained at eventually, and therefore, the end face for being used to clamp the rod-shaped workpiece of the 3rd locating dowel 31 can be plane.
Certainly, in order to which the operation for overcoming the assembly displacement in manufacturing process caused by the tolerance and rigging error of each part to bring lacks
Fall into, the operative end surface (end face for being used to clamp the rod-shaped workpiece) of each 3rd locating dowel 31 may be configured as section and be
The sphere of radian, so can effectively clamp the end face of the rod-shaped workpiece, and can possess certain certralizing ability, and the described 3rd
The radian in the section of the operative end surface (end face for being used to clamp the rod-shaped workpiece) of locating dowel 31 can be 0.1-0.4.
In the range of this, in magnetron sputtering process, because sputtering acts on, the cambered surface of the operative end surface of the 3rd locating dowel can be ensured to described
Effective sputtering of the side wall of rod-shaped workpiece, so as to ensure effective plated film to the side wall of the rod-shaped workpiece.
In a preferred embodiment, the operative end surface of the 3rd locating dowel 31 (is used to clamp the rod-shaped workpiece
End face) section radian can be 0.3.
Certainly, in order to effectively cover the end face of the rod-shaped workpiece, the operative end surface of the 3rd locating dowel 31
Maximum gauge can be 1.1-1.3 times of the diameter of the end face of the rod-shaped workpiece.It can so ensure that sputter coating effectively covers
The side wall of the end face of the rod-shaped workpiece.
A kind of device for rod-shaped workpiece magnetron sputtering plating provided by the utility model, it can effectively realize bar-shaped work
The batch plated film of part, and the coating quality of the side wall near two end faces of energy effective guarantee rod-shaped workpiece.
It will be appreciated by those skilled in the art that although the utility model is described in the way of multiple embodiments
, but not each embodiment only includes an independent technical scheme.So narration is just for the sake of clear in specification
For the sake of, the skilled in the art should refer to the specification as a whole is understood, and by skill involved in each embodiment
Art scheme, which is regarded as, can be mutually combined into the modes of different embodiments to understand the scope of protection of the utility model.
The schematical embodiment of the utility model is the foregoing is only, is not limited to model of the present utility model
Enclose.Any those skilled in the art, the equivalent variations made on the premise of design of the present utility model and principle is not departed from,
Modification and combination, the scope of the utility model protection all should be belonged to.
Claims (7)
1. a kind of device for rod-shaped workpiece magnetron sputtering plating, it is characterised in that it includes two identicals by least three
The fixed gear that the first uniform locating dowel of individual circumference is fixedly connected, each fixed gear are rotatably connected and have concentric runner, and two
The individual runner is fixedly connected by least three circumferential the second uniform locating dowels, and two runners are provided with multipair stretch
3rd locating dowel of contracting, each 3rd locating dowel are connected by the moving gear of identical first with the corresponding fixed gear engagement
Connect.
2. the device according to claim 1 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
Position post includes a guide cylinder, and order is provided with spring and moveable locating rod in guide cylinder.
3. the device according to claim 1 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
The end face for being used to clamp the rod-shaped workpiece of position post is plane.
4. the device according to claim 1 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
The end face for being used to clamp the rod-shaped workpiece of position post is the sphere that section is radian.
5. the device according to claim 4 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
The radian for being used to clamp the section of the end face of the rod-shaped workpiece of position post is 0.1-0.4.
6. the device according to claim 5 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
The radian for being used to clamp the section of the end face of the rod-shaped workpiece of position post is 0.3.
7. the device according to claim 4 for rod-shaped workpiece magnetron sputtering plating, it is characterised in that the described 3rd is fixed
The maximum gauge of the end face for clamping the rod-shaped workpiece of position post is the 1.1-1.3 of the diameter of the end face of the rod-shaped workpiece
Times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720167825.1U CN206751914U (en) | 2017-02-23 | 2017-02-23 | A kind of device for rod-shaped workpiece magnetron sputtering plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720167825.1U CN206751914U (en) | 2017-02-23 | 2017-02-23 | A kind of device for rod-shaped workpiece magnetron sputtering plating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206751914U true CN206751914U (en) | 2017-12-15 |
Family
ID=60609567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720167825.1U Active CN206751914U (en) | 2017-02-23 | 2017-02-23 | A kind of device for rod-shaped workpiece magnetron sputtering plating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
| CN109306463A (en) * | 2018-12-19 | 2019-02-05 | 浙江工业大学 | A kind of self-action pole sample plated film clamping device suitable for magnetic control sputtering device |
-
2017
- 2017-02-23 CN CN201720167825.1U patent/CN206751914U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
| CN109306463A (en) * | 2018-12-19 | 2019-02-05 | 浙江工业大学 | A kind of self-action pole sample plated film clamping device suitable for magnetic control sputtering device |
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