CN206740681U - A kind of Electronic Speculum cross sectional testing platform - Google Patents
A kind of Electronic Speculum cross sectional testing platform Download PDFInfo
- Publication number
- CN206740681U CN206740681U CN201720461578.6U CN201720461578U CN206740681U CN 206740681 U CN206740681 U CN 206740681U CN 201720461578 U CN201720461578 U CN 201720461578U CN 206740681 U CN206740681 U CN 206740681U
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- Prior art keywords
- test board
- space
- cross sectional
- electronic speculum
- test
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Abstract
The utility model discloses a kind of Electronic Speculum cross sectional testing platform, including test platform, on the test platform at least two test boards are arranged at intervals with along a direction, the space for placing sample to be tested is formed between the two neighboring test board, at least one side sets the elastic probe of oriented other side's extension in two sides corresponding to each space, during test, sample is erected in the space, and is held between the elastic probe of the one side in the space and another side or is held between the elastic probe of two sides in the space.The Electronic Speculum cross sectional testing platform, can effectively improve the definition of test pictures, simple in construction, easy to operate, save cost, and sample can be avoided to fall into pollution cavity in the vacuum chamber of Electronic Speculum.
Description
Technical field
It the utility model is related to magnetic sample test device technical field, more particularly to a kind of Electronic Speculum cross sectional testing platform.
Background technology
Cross sectional testing always is the important component of Electronic Speculum test, but existing cross sectional testing platform extremely has
Limit, generally all be borrow common platform a part tested, as shown in figure 1, its test when, by sample to be tested
100 are pasted onto the side of the test platform 1 ' of circle, and there will be following problem：
1st, the contact point between sample 100 and test platform 1 ' is less, thus can not gather more data, and electric conductivity
It is bad；
2nd, a large amount of conductive tapes are needed to use, and sample is used only once, and causes to waste；
3rd, change angle is needed frequently in test sample, it is necessary to which operating personnel have higher level；
4th, sample is simply simply bonded at the edge of test platform 1 ', easily falls into Electronic Speculum vacuum cavity, causes cavity dirty
Dye；
5th, when preparing sample, because the PERC places for needing to observe with the naked eye cannot be directly viewed, thus sample is being prepared
After product, can test target sample can not determine, it has very big blindness；
This causes existing light microscopic can not complete the test job of silico-aluminum thickness degree.
Therefore, need badly and propose a kind of new Electronic Speculum cross sectional testing platform, for preferably carrying out cross sectional testing.
Utility model content
The purpose of this utility model is to propose a kind of Electronic Speculum cross sectional testing platform, can effectively improve the clear of test pictures
Clear degree, it is simple in construction, it is easy to operate, cost is saved, and sample can be avoided to fall into pollution cavity in the vacuum chamber of Electronic Speculum.
To use following technical scheme up to this purpose, the utility model：
A kind of Electronic Speculum cross sectional testing platform, including test platform, on the test platform along a direction be arranged at intervals with to
Lack two test boards, the space for placing sample to be tested is formed between the two neighboring test board, each space
At least one side sets the elastic probe of oriented other side extension in corresponding two sides, and during test, sample is erected on described
In space, and it is held between the elastic probe of the one side in the space and another side or is held on two of the space
Between the elastic probe of side.
As a kind of preferred embodiment, one in two test boards corresponding to each space sets for fixation
The baffle plate put, another is can be on the test platform toward and away from the slip test board of baffle plate movement.
As a kind of preferred embodiment, two test boards corresponding to each space are can be in the test
The slip test board moved towards on platform.
As a kind of preferred embodiment, the top surface of the test platform offers the chute extended along the direction,
The slip test board is arranged in the chute and can be along the slide.
As a kind of preferred embodiment, each sidepiece for sliding test board is connected with fixed block, the fixed block
It can be fixed in the chute and slide or remove the chute to limit the slip test board to unclamp to the slip survey
Test plate (panel) it is spacing.
As a kind of preferred embodiment, the fixed block is elastic component,
When limiting the slip test board slip, the fixed block is caught in tight fit in the chute；
Unclamp to it is described slip test board it is spacing when, the fixed block is suspended in the top of the chute.
As a kind of preferred embodiment, the fixed block is latch, along the bearing of trend of the chute in the chute
It is arranged at intervals with multiple pin holes；
When limiting the slip test board slip, the latch, which is inserted in the pin hole, to be coordinated；
Unclamp to the slip test board it is spacing when, the latch removes the pin hole.
As a kind of preferred embodiment, the test board that slides is provided with the elasticity corresponding to the side in the space
Probe.
As a kind of preferred embodiment, there are multiple elasticity each side for sliding test board with array arrangement
Probe.
As a kind of preferred embodiment, the elastic probe is extensible probe.
Electronic Speculum cross sectional testing platform of the present utility model, by being arranged at intervals with least two along a direction on test platform
Individual test board, the space for placing sample to be tested, two sides corresponding to each space are formed between two neighboring test board
At least one side sets the elastic probe of oriented other side extension in face, and during test, sample is erected in space, and is held on this
Between the elastic probe of the one side in space and another side or it is held between the elastic probe of two sides in the space, by
Erect and place in sample, consequently facilitating the end face of observation sample；And fixation is clamped to sample by elastic probe, can not only
Enough avoid damaging sample, and clamp stabilization, sample can be avoided to fall into pollution cavity in the vacuum chamber of Electronic Speculum, and then from can having
Effect improves the definition of test pictures, simple in construction, easy to operate, saves cost.
Brief description of the drawings
Fig. 1 is the structural representation of light microscopic of the prior art；
Fig. 2 is the cross-sectional view for the Electronic Speculum cross sectional testing platform that the utility model embodiment 1 provides；
Fig. 3 is the overlooking the structure diagram of the Electronic Speculum cross sectional testing platform in Fig. 2；
Fig. 4 is the positive structure schematic of the slip test board in Fig. 2；
Fig. 5 is the cross-sectional view for the Electronic Speculum cross sectional testing platform that the utility model embodiment 2 provides.
In figure：100- samples；
1 '-test platform；
1- test platforms；11- chutes；2- baffle plates；3- slides test board；4- elastic probes；5- fixed blocks.
Embodiment
2-5 and the technical solution of the utility model is further illustrated by embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Figures 2 to 4, a kind of Electronic Speculum cross sectional testing platform, including test platform 1, along a side on the test platform 1
To at least two test boards are arranged at intervals with, formed between the two neighboring test board for placing sample 100 to be tested
Space, each at least one side sets the elastic probe 4 of oriented other side's extension, test in two sides corresponding to the space
When, sample 100 is erected in the space, and be held on the one side in the space the elastic probe 4 and another side it
Between or be held between the elastic probe 4 of two sides in the space.Erect and placed due to sample, consequently facilitating observation sample
The end face of product；And fixation is clamped to sample by elastic probe, it can not only avoid damaging sample, and stabilization is clamped,
Sample can be avoided to fall into pollution cavity in the vacuum chamber of Electronic Speculum, and then the definition of test pictures, structure can be effectively improved
Simply, it is easy to operate, save cost.
As shown in Figure 2 and Figure 3, in the present embodiment, one in two test boards corresponding to each space is
The baffle plate of fixed setting, another is can be on the test platform 1 toward and away from the slip test board of baffle plate movement
3.In practical operation, baffle plate is fixed, and test board 3 is slided in regulation can adjust the space slided between test board and baffle plate
Width, and then the sample for adapting to different dimensions is clamped test.
At this moment, the test board 3 that slides is provided with the elastic probe 4 corresponding to the side in the space.Further,
As shown in figure 4, there are multiple elastic probes 4 side for sliding test board 3 with array arrangement.Preferably, the elasticity
Probe 4 is extensible probe.Using extensible probe when clamping sample 100, clamping dynamics can be adjusted in real time, so as to
Effectively avoid tension damage sample 100 or pine clamping excessively not tight.
Further, in order to realize the slip of slip test board 3, the top surface of the test platform 1 is offered along described
The chute 11 of direction extension, the slip test board 3 are arranged in the chute 11 and can slided along the chute 11, because
And by the guiding of chute 11 when sliding, it is ensured that slide reliability.
Especially, it is necessary to be fixed in chute 11, to ensure to sample after sliding test board 3 and sliding into commitment positions
Clamping, thus each sidepiece for sliding test board 3 is connected with fixed block 5, and the fixed block 5 can be fixed on the cunning
In groove 11 chute 11 is slided or removed to unclamp to the spacing of the slip test board 3 to limit the slip test board 3.
As a kind of preferred embodiment, the fixed block 5 is elastic component, at this moment,
When limiting slip test board 3 slip, the fixed block 5 is caught in tight fit in the chute 11；
Unclamp to it is described slip test board 3 it is spacing when, the fixed block 5 is suspended in the top of the chute 11.
As another preferred embodiment, the fixed block 5 is latch, prolonging along the chute 11 in the chute 11
Stretch direction and be arranged at intervals with multiple pin holes；At this moment,
When limiting slip test board 3 slip, the latch, which is inserted in the pin hole, to be coordinated；
Unclamp to the slip test board 3 it is spacing when, the latch removes the pin hole.
By the fixation of fixed block 5, it can to slide the optional position that test board 3 is fixed on chute 11, thus can be with
Meet gripping for the sample 100 of various sizes specification.
On the basis of said structure, Electronic Speculum cross sectional testing platform of the present utility model also includes magnifying glass, and magnifying glass leads to
Cross universal connection rod to be connected on test platform 1, and magnifying glass can be moved to the top in any of the above-described space, can so lead to
The feature to be measured crossed on the end face of magnifying glass amplification sample 100, thus it is easy to naked eyes identification to be put into whether the sample in space meets
Testing requirement, do not meet such as, other samples can be changed in time.
Embodiment 2
It is as shown in figure 5, it is different from the part of embodiment 1, in the present embodiment, two corresponding to each space
The test board is the slip test board 3 that can be moved towards on the test platform 1.Now, two corresponding to each space
Individual two sides for sliding test board 3 are equipped with elastic probe 4, can by mobile two slide test boards or one of them
Test board is slided to adjust the width in adjacent space between the two so that regulation is more flexible, convenient；And the elasticity of both direction
Probe extrudes two sides of sample 100 simultaneously so that stress more balances.
Therefore, Electronic Speculum cross sectional testing platform of the present utility model, it has the advantage that：
1st, it can all be contacted with full wafer with test platform, add electric conductivity, become apparent from test pictures；
2nd, a large amount of conductive tapes need not be used, sample can be with Reusability；
3rd, this platform operations is easy, without operator training；
4th, this platform can clamp sample in operation, avoid falling into Electronic Speculum vacuum chamber pollution cavity；
5th, this platform is visual in sampling, avoids and blindly tests.
The test of the sample and monolithic sample of its thin slice that is particularly suitable for use in, can reach preferable effect.
Technical principle of the present utility model is described above in association with specific embodiment.These descriptions are intended merely to explain this reality
With new principle, and the limitation to scope of protection of the utility model can not be construed in any way.Based on explanation herein,
Those skilled in the art, which would not require any inventive effort, can associate other embodiments of the present utility model,
These modes are fallen within the scope of protection of the utility model.
Claims (10)
1. a kind of Electronic Speculum cross sectional testing platform, including test platform (1), it is characterised in that along a side on the test platform (1)
To at least two test boards are arranged at intervals with, formed between the two neighboring test board for placing sample to be tested (100)
Space, at least one side sets the elastic probe (4) of oriented other side's extension in two sides corresponding to each space,
During test, sample (100) is erected in the space, and is held on the elastic probe (4) of the one side in the space and another
Between one side or it is held between the elastic probe (4) of two sides in the space.
2. Electronic Speculum cross sectional testing platform according to claim 1, it is characterised in that two institutes corresponding to each space
A baffle plate for fixed setting in test board is stated, another is can be on the test platform (1) toward and away from described
The slip test board (3) of baffle plate movement.
3. Electronic Speculum cross sectional testing platform according to claim 1, it is characterised in that two institutes corresponding to each space
It is the slip test board (3) that can be moved towards on the test platform (1) to state test board.
4. the Electronic Speculum cross sectional testing platform according to Claims 2 or 3, it is characterised in that the top surface of the test platform (1)
The chute (11) extended along the direction is offered, the slip test board (3) is arranged in the chute (11) and can
Slided along the chute (11).
5. Electronic Speculum cross sectional testing platform according to claim 4, it is characterised in that each slip test board (3)
Sidepiece is connected with fixed block (5), and the fixed block (5) can be fixed in the chute (11) to limit the slip test board
(3) chute (11) is slided or removes to unclamp to the spacing of the slip test board (3).
6. Electronic Speculum cross sectional testing platform according to claim 5, it is characterised in that the fixed block (5) is elastic component,
When limiting slip test board (3) slip, the fixed block (5) is caught in tight fit in the chute (11)；
Unclamp to it is described slip test board (3) it is spacing when, the fixed block (5) is suspended in the top of the chute (11).
7. Electronic Speculum cross sectional testing platform according to claim 5, it is characterised in that the fixed block (5) is latch, described
In chute (11) multiple pin holes are arranged at intervals with along the bearing of trend of the chute (11)；
When limiting slip test board (3) slip, the latch, which is inserted in the pin hole, to be coordinated；
Unclamp to the slip test board (3) it is spacing when, the latch removes the pin hole.
8. the Electronic Speculum cross sectional testing platform according to Claims 2 or 3, it is characterised in that the slip test board (3) is corresponding
The side in the space is provided with the elastic probe (4).
9. Electronic Speculum cross sectional testing platform according to claim 8, it is characterised in that each slip test board (3)
There are multiple elastic probes (4) side with array arrangement.
10. the Electronic Speculum cross sectional testing platform according to claim 1 or 9, it is characterised in that the elastic probe (4) is can
Pogo pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720461578.6U CN206740681U (en) | 2017-04-28 | 2017-04-28 | A kind of Electronic Speculum cross sectional testing platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720461578.6U CN206740681U (en) | 2017-04-28 | 2017-04-28 | A kind of Electronic Speculum cross sectional testing platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206740681U true CN206740681U (en) | 2017-12-12 |
Family
ID=60562385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720461578.6U Expired - Fee Related CN206740681U (en) | 2017-04-28 | 2017-04-28 | A kind of Electronic Speculum cross sectional testing platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206740681U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112435955A (en) * | 2019-08-26 | 2021-03-02 | 合肥晶合集成电路股份有限公司 | Supporting device for wafer splinters and fixing method thereof |
-
2017
- 2017-04-28 CN CN201720461578.6U patent/CN206740681U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112435955A (en) * | 2019-08-26 | 2021-03-02 | 合肥晶合集成电路股份有限公司 | Supporting device for wafer splinters and fixing method thereof |
| CN112435955B (en) * | 2019-08-26 | 2024-04-16 | 合肥晶合集成电路股份有限公司 | Wafer crack supporting device and fixing method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171212 Termination date: 20210428 |