CN206713241U - Cooler and cooling system and vacuum plasma equipment - Google Patents
Cooler and cooling system and vacuum plasma equipment Download PDFInfo
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- CN206713241U CN206713241U CN201720421014.XU CN201720421014U CN206713241U CN 206713241 U CN206713241 U CN 206713241U CN 201720421014 U CN201720421014 U CN 201720421014U CN 206713241 U CN206713241 U CN 206713241U
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Abstract
A kind of cooler is the utility model is related to, it includes reservoir, temperature control mechanism, drain pipe road, outer defeated pipeline, liquid back pipe road, the first liquid valve being arranged on outer defeated pipeline, the second liquid valve being arranged on liquid back pipe road, the gas ejector sleeve road being connected between outer defeated pipeline and liquid back pipe road and the triple valve being arranged on gas ejector sleeve road；The import connection source of the gas of triple valve, the first outlet of triple valve are connected by the gas ejector sleeve road and the outer defeated pipeline connection, the second outlet of triple valve by the gas ejector sleeve road with liquid back pipe road.Above-mentioned cooler, it can treat cooling device by the way of gas pushes away with coolant and be rinsed, so as to wash away chip from equipment to be cooled, and then avoid blocking, so as to the normal operation of the equipment of guarantee, it is ensured that the quality of product.The utility model additionally provides a kind of cooling system and vacuum plasma equipment.
Description
Technical field
Cooling technology field is the utility model is related to, more particularly to a kind of cooler and cooling system and vacuum plasma
Equipment.
Background technology
In vacuum plasma equipment, cooler (chiller) can be all used, cooler is used to balance heating and cooling system
System, and then improve the stability of technique.
But vacuum plasma equipment can produce chip (such as the reason such as corrosion of piping), chip meeting in the process of running
The capillary pipeline of battery lead plate and cavity heating part is caused to block, part chip can be also adhered in equipment to lead by heating
Phenomena such as causing abnormal temperature control, pressure anomaly, so as to cause the product of production bad.
Utility model content
Based on this, it is necessary to the problem of being blocked for vacuum plasma equipment in the prior art, there is provided one kind can clean
Chip, the cooler for preventing vacuum plasma equipment from blocking.
A kind of cooler, including：
Reservoir, for storing coolant；
Temperature control mechanism；
Drain pipe road, for connecting the temperature control mechanism and the reservoir；
Outer defeated pipeline, for connecting the temperature control mechanism and equipment to be cooled；
Liquid back pipe road, for connecting the reservoir and equipment to be cooled；
First liquid valve, it is arranged on the outer defeated pipeline；
Second liquid valve, it is arranged on the liquid back pipe road；
Gas ejector sleeve road, it is connected between the outer defeated pipeline and the liquid back pipe road, to introduce air pressure and utilize air pressure
Coolant is pushed into equipment to be cooled；
And triple valve, it is arranged on the gas ejector sleeve road；The import connection source of the gas of the triple valve, the triple valve
First outlet passes through the gas ejector sleeve by the gas ejector sleeve road and the outer defeated pipeline connection, the second outlet of the triple valve
Road connects with liquid back pipe road.
Above-mentioned cooler, it can treat cooling device by the way of gas pushes away with coolant and be rinsed, so as to by chip
Wash away from equipment to be cooled, and then avoid blocking, so as to the normal operation of the equipment of guarantee, it is ensured that the matter of product
Amount.
In one of the embodiments, the cooler also includes being used to control the first liquid valve, the second liquid valve
And the controller of the triple valve.
In one of the embodiments, the controller includes positive mold cleaning formula；Under the positive mold cleaning formula, the controller
The first liquid valve is controlled to close, the second liquid valve is opened, the first outlet of the triple valve is opened, second outlet is closed.
In one of the embodiments, the controller includes backwash mode；Under the backwash mode, the controller
The first liquid valve is controlled to open, the second liquid valve is closed, the first outlet of the triple valve is closed, second outlet is opened.
In one of the embodiments, the controller includes concussion mold cleaning formula；Under the concussion mold cleaning formula, alternately enter
The positive mold cleaning formula of row and backwash mode；
Under the positive mold cleaning formula, the controller controls the first liquid valve to close, the second liquid valve is opened, be described
The first outlet of triple valve is opened, second outlet is closed；
Under the backwash mode, the controller controls the first liquid valve to open, the second liquid valve is closed, be described
The first outlet of triple valve is closed, second outlet is opened.
In one of the embodiments, the cooler also includes timing unit, the timing unit and the controller
Electrical connection.
In one of the embodiments, the cooler also includes：
Blowoff line, connected with the reservoir；
And blowoff valve, it is arranged on the blowoff line.
In one of the embodiments, the blowoff valve is hand-operated valve.
The utility model additionally provides a kind of cooling system.
A kind of cooling system, including cooler provided by the utility model.
Above-mentioned cooling system, can be by the way of gas pushes away due to using cooler provided by the utility model, and use is cold
But liquid is treated cooling device and is rinsed, so as to which chip be washed away from equipment to be cooled, so blocking is avoided, so as to
The normal operation of the equipment of guarantee, it is ensured that the quality of product.
The utility model additionally provides a kind of vacuum plasma equipment.
A kind of vacuum plasma equipment, including cooling system provided by the utility model.
Above-mentioned vacuum plasma equipment, due to using cooling system provided by the utility model, it can use what gas pushed away
Mode, treat cooling device with coolant and be rinsed, so as to which chip be washed away from equipment to be cooled, so avoid
Block, so as to ensure the normal operation of equipment, it is ensured that the quality of product.
Brief description of the drawings
Fig. 1 is the structural representation of the cooler of the embodiment of the utility model one, is now in normal mode of operation.
Fig. 2 is state principle figure of the cooler under backwash mode in Fig. 1.
Fig. 3 is state principle figure of the cooler under positive mold cleaning formula in Fig. 1.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with specific embodiment party
Formula, the utility model is further elaborated.It should be appreciated that embodiment described herein is only solving
The utility model is released, is not used to limit the utility model.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " bag
Include the arbitrary and all combination of the Listed Items of one or more correlations.
Referring to Fig. 1-3, the cooler 100 of an embodiment of the present utility model, including fluid reservoir 110, temperature control mechanism 120,
Drain pipe road 31, outer defeated pipeline 32, liquid back pipe road 33, the first liquid valve 61, the second liquid valve 62, gas ejector sleeve road 40 and triple valve
70。
Wherein, the main function of reservoir 110 is, for storing coolant.The utility model is not limited reservoir 110
System, as long as can be used in storing coolant, its shape and structure can use it is well known in the art variously-shaped and
Structure.
Wherein, temperature control mechanism 120 is the core component of cooler, for coolant to be cooled into assigned temperature.This practicality
New temperature control mechanism can use various temperature control mechanisms well known in the art, will not be repeated here.
Wherein, the main function on drain pipe road 31 is, for connecting temperature control mechanism 120 and reservoir 110.That is,
Drain pipe road 31 is located between the import of temperature control mechanism 120 and the liquid outlet of reservoir 110, the coolant warp in reservoir 110
Import of the liquid outlet of reservoir 110 along drain pipe road 31 from temperature control mechanism 120 enters temperature control mechanism 120.
Wherein, the main function of outer defeated pipeline 32 is, for connecting temperature control mechanism 120 and equipment 8 to be cooled.Namely
Say, outer defeated pipeline 32 is located between the outlet of temperature control mechanism 120 and the liquid feeding end of equipment to be cooled 8, and temperature control mechanism 120 will cool down
Liquid is cooled to assigned temperature, and the then outlet through temperature control mechanism is transmitted into equipment 8 to be cooled by outer defeated pipeline 32, so as to real
Now treat the cooling down operation of cooling device 8.
Wherein, the main function on liquid back pipe road 33 is, for connecting reservoir 110 and equipment 8 to be cooled.That is,
Liquid back pipe road 33 is located between the liquid return hole of reservoir 110 and the outlet end of equipment to be cooled 8, and equipment 8 to be cooled goes out liquid from it
The coolant of outflow is held, is returned to through liquid back pipe road 33 from the liquid return hole of reservoir 110 in reservoir 110, so as to realize coolant
Recycle, form the circulation loop of coolant.
Wherein, the first liquid valve 61 is arranged on outer defeated pipeline 32, and its main function is, for turning off outer defeated pipeline 32.
That is when the first liquid valve 61 is closed, the outlet of temperature control mechanism 120 is closed；When the first liquid valve 61 is opened, coolant is just
Often equipment 8 to be cooled is flowed into from outer defeated pipeline 32.
Wherein, the second liquid valve 62 is arranged on liquid back pipe road 33, and its main function is, for turning off liquid back pipe road 33.
That is when the second liquid valve 62 is closed, the liquid return hole of reservoir 110 is closed；When the second liquid valve 62 is opened, coolant is just
Often reservoir 110 is flowed into from liquid back pipe road 33.
Wherein, the main function on gas ejector sleeve road 40 is to introduce air pressure and coolant is pushed into equipment to be cooled using air pressure
8.Gas ejector sleeve road 40 is connected between outer defeated pipeline 32 and liquid back pipe road 33.So gas ejector sleeve road 40 and equipment 8 to be cooled it
Between form path, so as to by coolant be pushed into cooling device 8.Specifically, the one end on gas ejector sleeve road 40 is connected to the first liquid
Between valve 61 and the liquid feeding end of equipment to be cooled 8, the other end be connected to the second liquid valve 61 and equipment 8 to be cooled outlet end it
Between.
Wherein, triple valve 70 is arranged on gas ejector sleeve road 40.In order to facilitate description, by outer defeated pipeline 32 and triple valve 70 it
Between gas ejector sleeve road 40 be named as the first sub- gas ejector sleeve road 41, the gas ejector sleeve road 40 between liquid back pipe road 33 and triple valve 70 is ordered
Entitled second sub- gas ejector sleeve road 42.The import (not shown) connection source of the gas (not shown) of triple valve 70, the first of triple valve 70 goes out
Mouth 71 is connected by the first sub- gas ejector sleeve road 41 with outer defeated pipeline 32, and the second outlet 72 of triple valve 70 passes through the second sub- gas ejector sleeve
Road 42 connects with liquid back pipe road 33.So when the first outlet 71 of triple valve 70 is opened, when second outlet 72 is closed, gas is from the
One sub- gas ejector sleeve road promotes the coolant of outer defeated pipeline to the direction of equipment 8 to be cooled.When the first outlet 71 of triple valve 70 is closed
Close, when second outlet 72 is opened, gas is from the second sub- tunnel of gas ejector sleeve 42 by the coolant on liquid back pipe road 33 to the side of equipment 8 to be cooled
It is to propulsion, i.e., reverse to promote.
In the present embodiment, cooler 100 also includes controller 150.Wherein, the main function of controller 150 is to be used for
Control the first liquid valve 61, the second liquid valve 62 and triple valve 70.Controller 150 is by controlling the first liquid valve 61, the second liquid valve 62
And triple valve 70, coolant cleaning equipment to be cooled is employed certainly so as to reach the purpose for automatically controlling coolant, and then realize
Purpose.
In the present embodiment, the first liquid valve 61, the second liquid valve 62 and triple valve 70 are magnetic valve.So convenient control
Device 150 controls the first liquid valve 61, the second liquid valve 62 and triple valve 70 by control line 90.It is, of course, understood that this reality
Magnetic valve is not limited to new, can also be other types of valve.
In the normal mode of operation, referring to Fig. 1, the coolant in reservoir 110, temperature control mechanism is entered through drain pipe road 31
120 cool down coolant, then coolant through the outer defeated liquid valve 61 of pipeline 32 and first, flow into will be to be cooled in equipment 8 to be cooled
Equipment 8 cools down.After cooling, coolant flows out from the outlet end of equipment 8 to be cooled, through the liquid valve 62 of liquid back pipe road 33 and second,
It flow back into reservoir 110；So circulation, equipment 8 to be cooled is cooled down with realizing.
In the present embodiment, controller 150 includes backwash mode；Under backwash mode, controller 150 controls the first liquid valve
61 are opened, the second liquid valve 62 is closed, the first outlet of triple valve 70 71 is closed, second outlet 632 is opened.Referring to Fig. 2, in the mould
Under formula, gas enters from the import of triple valve 70, gone out from second outlet 72, subsequently into the second gas hairclipper pipeline 42, the pressure of gas
Coolant in liquid back pipe road 33 is inversely pushed into equipment 8 to be cooled by power, and reverse cleaning is carried out so as to treat cooling device 8；
Coolant after cleaning is inverse through the outer defeated liquid valve 61 of pipeline 32 and first, temperature control device 120 from the liquid feeding end of equipment 8 to be cooled
To being back in reservoir 110.
In the present embodiment, controller 150 includes positive mold cleaning formula；Under positive mold cleaning formula, controller 150 controls the first liquid valve
61 are closed, the second liquid valve 62 is opened, the first outlet of triple valve 70 71 is opened, second outlet 72 is closed.Referring to Fig. 3, in the mould
Under formula, gas enters from the import of triple valve 70, gone out from first outlet 71, subsequently into the first gas hairclipper pipeline 41, the pressure of gas
Coolant in outer defeated pipeline 32 is pushed into equipment 8 to be cooled by power, and positive cleaning is carried out so as to treat cooling device 8；Cleaning
Coolant afterwards, through the liquid valve 62 of liquid back pipe road 34 and second, is flowed back in reservoir 110 from the outlet end of equipment 8 to be cooled.
In the present embodiment, controller 150 includes concussion mold cleaning formula；Under earthquake mold cleaning formula, alternately positive mold cleaning formula
And backwash mode.So by just washing, backwash constantly convert repeatedly, coolant in equipment 8 to be cooled is produced concussion, so as to
Chip concussion in equipment 8 to be cooled is washed away.It so can further improve cleaning performance.
In the present embodiment, cooler 100 also includes timing unit (not shown), and timing unit is electrically connected with controller 150
Connect.Timing unit received the specified time of user's setting, such as the specified time set as 5 minutes, then the basis of control unit 150
Timing unit control backwash mode 5 minutes, then positive mold cleaning formula 5 minutes, so move in circles several times.
It is, of course, understood that controller of the present utility model, it is not limited to there are three kinds of cleaning models, may be used also
There was only a kind of cleaning model, even positive mold cleaning formula or backwash mode or concussion mold cleaning formula；Also it is or only therein two kinds.Also
It is understood that the utility model can also be not provided with controller, pass through each valve of manual control.
In the present embodiment, cooler 100 also includes blowoff line 34 and blowoff valve 63.Wherein, blowoff line 34 with
Reservoir 110 connects.Blowoff valve 63 is arranged on blowoff line 34, for turning off blowoff line 34.When blowoff valve 63 is opened,
Coolant, through its sewage draining exit, flows out from reservoir 110 from blowoff line 34, so as to realize blowdown.After so cleaning, storage
Coolant in liquid bath 110 contains chip, can be discharged by blowoff line 34, further improves the service life of cooler 100.
In the present embodiment, blowoff valve 63 is hand-operated valve.So facilitate opportunity and the duration of user oneself control of sewage disposal.
Above-mentioned cooler, it can treat cooling device by the way of gas pushes away with coolant and be rinsed, so as to by chip
Wash away from equipment to be cooled, and then avoid blocking, so as to the normal operation of the equipment of guarantee, it is ensured that the matter of product
Amount.
The utility model additionally provides a kind of cooling system.
A kind of cooling system, including cooler provided by the utility model.
Certainly, above-mentioned cooling system also includes equipment to be cooled.
Above-mentioned cooling system, can be by the way of gas pushes away due to using cooler provided by the utility model, and use is cold
But liquid is treated cooling device and is rinsed, so as to which chip be washed away from equipment to be cooled, so blocking is avoided, so as to
Ensure the normal operation of equipment, it is ensured that the quality of product.
The utility model additionally provides a kind of vacuum plasma equipment.
A kind of vacuum plasma equipment, including cooling system provided by the utility model.
Above-mentioned vacuum plasma equipment, due to using cooling system provided by the utility model, it can use what gas pushed away
Mode, treat cooling device with coolant and be rinsed, so as to which chip be washed away from equipment to be cooled, so avoid
Block, so as to ensure the normal operation of equipment, it is ensured that the quality of product.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. cooler, it is characterised in that including：Reservoir, for storing coolant；Temperature control mechanism；Drain pipe road, for connecting the temperature control mechanism and the reservoir；Outer defeated pipeline, for connecting the temperature control mechanism and equipment to be cooled；Liquid back pipe road, for connecting the reservoir and equipment to be cooled；First liquid valve, it is arranged on the outer defeated pipeline；Second liquid valve, it is arranged on the liquid back pipe road；Gas ejector sleeve road, it is connected between the outer defeated pipeline and the liquid back pipe road, to introduce air pressure and utilize air pressure will be cold But liquid is pushed into equipment to be cooled；And triple valve, it is arranged on the gas ejector sleeve road；The import connection source of the gas of the triple valve, the first of the triple valve Outlet by the gas ejector sleeve road and the outer defeated pipeline connection, the second outlet of the triple valve by the gas ejector sleeve road with Liquid back pipe road connects.
- 2. cooler according to claim 1, it is characterised in that the cooler also includes being used to control first liquid The controller of valve, the second liquid valve and the triple valve.
- 3. cooler according to claim 2, it is characterised in that the controller includes positive mold cleaning formula；Just washed described Under pattern, the controller controls the first liquid valve to close, the second liquid valve is opened, the first outlet of the triple valve is beaten Open, second outlet is closed.
- 4. cooler according to claim 2, it is characterised in that the controller includes backwash mode；In the backwash Under pattern, the controller controls the first liquid valve to open, the second liquid valve is closed, the first outlet of the triple valve is closed Close, second outlet is opened.
- 5. cooler according to claim 2, it is characterised in that the controller includes concussion mold cleaning formula；In the shake Swing under mold cleaning formula, alternately positive mold cleaning formula and backwash mode；Under the positive mold cleaning formula, the controller controls the first liquid valve to close, the second liquid valve is opened, the threeway The first outlet of valve is opened, second outlet is closed；Under the backwash mode, the controller controls the first liquid valve to open, the second liquid valve is closed, the threeway The first outlet of valve is closed, second outlet is opened.
- 6. cooler according to claim 5, it is characterised in that the cooler also includes timing unit, the timing Unit electrically connects with the controller.
- 7. cooler according to claim 1, it is characterised in that the cooler also includes：Blowoff line, connected with the reservoir；And blowoff valve, it is arranged on the blowoff line.
- 8. cooler according to claim 7, it is characterised in that the blowoff valve is hand-operated valve.
- 9. a kind of cooling system, it is characterised in that including the cooler described in claim any one of 1-8.
- 10. a kind of vacuum plasma equipment, it is characterised in that including the cooling system described in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720421014.XU CN206713241U (en) | 2017-04-20 | 2017-04-20 | Cooler and cooling system and vacuum plasma equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720421014.XU CN206713241U (en) | 2017-04-20 | 2017-04-20 | Cooler and cooling system and vacuum plasma equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206713241U true CN206713241U (en) | 2017-12-05 |
Family
ID=60455773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720421014.XU Active CN206713241U (en) | 2017-04-20 | 2017-04-20 | Cooler and cooling system and vacuum plasma equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206713241U (en) |
-
2017
- 2017-04-20 CN CN201720421014.XU patent/CN206713241U/en active Active
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