The internal flaw on-line measuring device of glass substrate
Technical field
Glass manufacturing area is the utility model is related to, is filled more particularly to a kind of internal flaw on-line checking of glass substrate
Put.
Background technology
Due to that in the production process of glass, the impurity such as fusing point such as bubble, metal, carbon deposit inevitably can be higher than into glass
The material of glass melting temperature is entrained into glass, so as to cause the inside of the glass after production to contain particle, bubble and horsestone
Deng impurity.
The presence of inside glass impurity can cause glass to occur a series of problem in use, such as bubble be present
When, if the etching operation that secondary skiving is carried out to thickness of glass occurs burning or melted;When metallic particles be present, printed circuit
Short circuit phenomenon occurs, so as to cause its display being prepared bright spot or dim spot to be present;Calculus particle be present can make its system
Open defect be present in standby obtained display.Therefore, need to detect glass after glass production, exclude in time containing miscellaneous
The glass of matter.
In addition, in the production process of glass, it is also necessary to which the thickness of glass is detected.Therefore, in the whole of glass
In production process, not only need to detect the internal flaw of glass, it is also necessary to measure the thickness of glass, this is serious
It has impact on the running efficiency of production line.
Utility model content
The purpose of this utility model be in order to overcome the low problem of glass substrate production line running efficiency existing for prior art,
A kind of internal flaw on-line measuring device of glass substrate is provided, the internal flaw on-line measuring device of the glass substrate can be same
When detect glass substrate internal flaw and measure glass substrate thickness, so as to improve the operating of glass substrate production line
Efficiency.
To achieve these goals, on the one hand the utility model provides the internal flaw on-line checking of a kind of glass substrate
Device, the internal flaw on-line measuring device of the glass substrate include being capable of the clamping device of clamping glass substrate and are located at
The detection light source of the side edge of the glass substrate, the internal flaw on-line measuring device of the glass substrate also include peace
Loaded on the clamping device and positioned at the thickness measurement sensor of at least side of the glass substrate.
Preferably, the thickness measurement sensor include be installed on the clamping device body and be connected with the body can
Flexible probe, wherein, the scalable probe can stretch perpendicular to the surface of the glass substrate.
Preferably, the distance of the scalable probe and a lateral edges for the glass substrate is 5mm-40mm.
Preferably, the internal flaw on-line measuring device of the glass substrate includes what is electrically connected with the thickness measurement sensor
Measure display instrument.
Preferably, the clamping device include respectively positioned at the glass substrate both sides and the first clamping plate that is oppositely arranged and
Second clamping plate, wherein, the first clamping plate and/or the second clamping plate can be reciprocal along the thickness direction of the glass substrate
It is mobile.
Preferably, the first clamping plate and the second clamping plate are along the level perpendicular to the glass substrate direct of travel
Direction extends.
Preferably, multiple thickness measurement sensors, multiple surveys are provided with the first clamping plate and/or the second clamping plate
Thick sensor is arranged side by side in corresponding clamping plate.
Preferably, offered in the first clamping plate and/or the second clamping plate for installing the thickness measurement sensor
Hole.
Preferably, the thickness measurement sensor is provided with the first clamping plate and the second clamping plate, positioned at described
The thickness measurement sensor on one clamping plate and the second clamping plate is positioned opposite to each other.
Preferably, the detection light source includes line source.
In the above-mentioned technical solutions, by setting the detection light source and the thickness measuring being installed on the clamping device
Sensor so that the inside that the internal flaw on-line measuring device of the glass substrate can not only detect the glass substrate lacks
Fall into, and the thickness of the glass substrate can also be measured simultaneously, so not only increase the running efficiency of production line, and subtract
Area shared by small equipment, therefore greatly reduce the production cost of the glass substrate.
Brief description of the drawings
Fig. 1 is the overall structure of the internal flaw on-line measuring device of the glass substrate of the utility model preferred embodiment
Schematic diagram;
Fig. 2 is that (thickness measuring is not shown in the clamping device of the internal flaw on-line measuring device of the glass substrate shown in Fig. 1
Sensor) overlooking the structure diagram.
Description of reference numerals
10- glass substrates;11- clamping devices;110- first clamping plates;111- second clamping plates;112- holes;12- detects light source;
13- thickness measurement sensors;14- measures display instrument;15- drivers;16- drive shafts;17- connectors.
Embodiment
In the utility model, in the case where not making opposite explanation, the noun of locality such as " upper and lower, left and right " used is usual
Refer to understand with reference to the orientation in the orientation and practical application shown in accompanying drawing.
The utility model provides a kind of internal flaw on-line measuring device of glass substrate, the inside of the glass substrate
On-line detection device of defects includes being capable of the clamping device 11 of clamping glass substrate 10 and positioned at a side of glass substrate 10
Detection light source 12 at edge, the internal flaw on-line measuring device of the glass substrate also include being installed on clamping device 11 and
Thickness measurement sensor 13 positioned at least side of glass substrate 10.By setting detection light source 12 and pacifying on clamping device 11
Fill thickness measurement sensor 13 so that the internal flaw on-line measuring device of the glass substrate can not only detect the interior of glass substrate 10
Portion's defect, and the thickness of glass substrate 10 can also be measured simultaneously.When by the internal flaw on-line checking of the glass substrate
When device is applied in the production line of glass substrate, clamping device 11 clamps glass substrate 10, then detects light source 12 and sends
The edge of light directive glass substrate 10, by observing just it can be found that the inside of glass substrate 10 whether there is defect, at the same time,
Thickness measurement sensor 13 measure the thickness of glass substrate 10 for example it is measurable go out glass substrate 10 advance perpendicular to glass substrate 10
Direction (when glass substrate 10 on a production line when move under the drive of conveyer) horizontal direction thickness, so examining
The inside of survey glass substrate 10 can also measure the thickness of glass substrate 10 while whether there is defect, not only increase life
The running efficiency of producing line, and the area shared by equipment is reduced, greatly reduce production cost.Furthermore, it is necessary to explanation
It is that line source can be selected as detection light source 12.
Wherein, the concrete form of thickness measurement sensor 13 can be selected according to actual conditions, as long as glass base can be measured
The thickness of plate 10.Preferably, thickness measurement sensor 13 may include the body for being installed on the clamping device 11 and with described
The scalable probe of body connection, wherein, the scalable probe can stretch perpendicular to the surface of glass substrate 10, so, when
During 11 clamping glass substrate 10 of clamping device, the scalable probe, which can retract, produces retraction amount.
, can in order to improve independently working between the detection operation of internal flaw and the thickness measure operation of glass substrate 10
So that the distance of the scalable probe and the lateral edges of glass substrate 10 is 5mm-40mm, when by the scalable spy
Head is set within the above range with the distance between lateral edges for glass substrate 10, can improve internal flaw simultaneously
Detection operation and the accuracy of the thickness measure operation of glass substrate 10.It is further preferred that it may be such that the scalable probe
Distance with a lateral edges for glass substrate 10 is 8mm-30mm, it is further preferred that may be such that the scalable spy
The distance of head and a lateral edges for glass substrate 10 is 9mm-15mm.
As shown in fig. 1, the measurement display instrument 14 electrically connected with thickness measurement sensor 13 can be set in order to reading numerical values.Tool
Body, thickness measurement sensor 13 can be electrically connected by signal wire and measurement display instrument 14.When the scalable probe produces retraction amount
When, measurement display instrument 14 will show corresponding numerical value.
Preferably, following structures can be selected in clamping device 11.As shown in fig. 1, clamping device 11 may include to be located at respectively
The both sides of glass substrate 10 and the first clamping plate 110 and second clamping plate 111 being oppositely arranged, wherein, first clamping plate 110 and/or second
Clamping plate 111 can move back and forth along the thickness direction of glass substrate 10.Further, since clamping device 11 possesses said structure,
The light overwhelming majority that can also carry out causing detection light source 12 to send during Inner Defect Testing operation in glass substrate 10 passes through
The inside of glass substrate 10, so as to improve the accuracy rate of detection.Further, first clamping plate 110 and second clamping plate 111
Along the glass substrate 10 being extended so as to perpendicular to the horizontal direction of the direct of travel of glass substrate 10 during clamping is advanced.
For the ease of and firm clamping glass substrate 10, be preferably placed at the energy of second clamping plate 111 of the lower section of glass substrate 10
Enough to be moved back and forth along the thickness direction of glass substrate 10, the first clamping plate 110 above glass substrate 10 is fixed.When
When needing to clamp glass substrate 10 so that second clamping plate 111 moves towards the surface of glass substrate 10.Wherein, driving folder
The mode of plate movement can be a variety of, for example, with reference to shown in Fig. 1 and Fig. 2, can be set with driver 15 as oscillating cylinder is connected
Drive shaft 16 and the both ends connector 17 connected with drive shaft 16 and corresponding clamping plate respectively, wherein, drive shaft 16 can be along hanging down
Directly extend in the horizontal direction of the direct of travel of glass substrate 10.Under driving of the drive shaft 16 in oscillating cylinder, it can drive
Corresponding clamping plate surround the reciprocating rotation of drive shaft 16, so as to realize clamping plate towards the surface movement of glass substrate 10 or towards remote
Move on surface from glass substrate 10.Additionally, it is preferred that thickness measurement sensor 13 is installed in moveable second clamping plate 111.
In order to measure the thickness value not existed together of glass substrate 10 simultaneously, can be pressed from both sides in first clamping plate 110 and/or second
Multiple thickness measurement sensors 13 are set on plate 111, and multiple thickness measurement sensors 13 are arranged side by side in corresponding clamping plate.As shown in Figure 2,
The hole 112 that can be opened up in first clamping plate 110 and/or second clamping plate 111 is in order to install thickness measurement sensor 13, when mounted,
Thickness measurement sensor 13 may pass through hole 112 so as to be fixed.
When being provided with thickness measurement sensor 13 in first clamping plate 110 and second clamping plate 111, positioned at the He of first clamping plate 110
Thickness measurement sensor 13 in second clamping plate 111 is positioned opposite to each other to be capable of the thickness of accurate measurement glass substrate 10, especially
When the quasi- bulge in measured place village of glass substrate 10 or depression defect, thickness measurement sensor 13 positioned opposite to each other can be accurate
Measure the thickness of glass substrate 10.When the thickness measurement sensor 13 being arranged in pairs up and down measures the thickness of glass substrate 10, use
Following calculations obtain the thickness of glass substrate 10:When 11 clamping glass substrate 10 of clamping device, it is arranged in pairs up and down
The scalable probe in thickness measurement sensor 13, which is retracted, produces retraction amount, is then retracted caused by clamping glass substrate 10
Amount sum produces with the scalable probe in the thickness measurement sensor 13 being arranged in pairs up and down in not clamping glass substrate 10
Retraction amount sum between difference can calculate the thickness of glass substrate 10.
Preferred embodiment of the present utility model, still, the utility model and unlimited is described in detail above in association with accompanying drawing
In this.In range of the technology design of the present utility model, a variety of simple variants can be carried out to the technical solution of the utility model.
It is combined in any suitable manner including each particular technique feature.In order to avoid unnecessary repetition, the utility model
Various combinations of possible ways are no longer separately illustrated.But these simple variants and combination should equally be considered as the utility model institute
Disclosure, belong to the scope of protection of the utility model.