CN206670362U - One kind solidification furnace chamber - Google Patents

Abstract

The utility model provides a kind of solidification furnace chamber, and the solidification furnace chamber includes chamber body, chamber door, first sealing device and the second sealing device, wherein：The first sealing device is arranged on the edge of the chamber body, second sealing device is arranged on the edge of the chamber door, the first sealing device and second sealing device are in contact, so that the chamber body forms a closing space with the chamber door；When the first sealing device and second sealing device are in the state being brought into tight contact with each other, the closing space is sealing space；When the first sealing device and second sealing device are in the state of relaxation contact mutually, the closing space is non-tight space.

Description

One kind solidification furnace chamber

Technical field

Photoelectric material manufacturing technology field is the utility model is related to, more particularly to a kind of solidification furnace chamber.

Background technology

High temperature furnace kind equipment is uniform in order to ensure the basal plate heated in photoelectric material, and substrate need to be placed in sealing stable environment Under, that is, solidify in furnace chamber, and sealing structure need to be designed at the chamber door of solidification furnace chamber.

The solidification furnace chamber used at present is provided with axle, chamber door pivoting, similar to shutter in chamber door upper end The mechanism of formula, sealing strip are fixed on chamber door surrounding, and sealing strip uses polyimide material, is sealed in chamber door switch motion Bar can rub with solidification furnace chamber or chamber door, easily cause the material of sealing strip to deform so that sealing effectiveness declines, shadow Ring substrate by thermal effect.

Thus, it is desirable to design a kind of solidification furnace chamber of good sealing effect.

Utility model content

The purpose of this utility model is to provide a kind of solidification furnace chamber, to solve existing solidification furnace chamber and chamber door Between sealing effectiveness it is bad the problem of.

In order to solve the above technical problems, the utility model provides a kind of solidification furnace chamber, the solidification furnace chamber includes chamber Room body, chamber door, first sealing device and the second sealing device, wherein：

The first sealing device is arranged on the edge of the chamber body, and second sealing device is arranged on the chamber The edge of room door, the first sealing device and second sealing device are in contact, and make the chamber body and the chamber Door forms a closing space；

When the first sealing device and second sealing device are in the state being brought into tight contact with each other, the closing is empty Between be sealing space；

When the first sealing device and second sealing device are in the state of relaxation contact mutually, the closing is empty Between be non-tight space.

Optionally, in described solidification furnace chamber, the first sealing device and second sealing device are tight mutually The tactile pressure size of contiguity is 0.2 MPa~0.3 MPa.

Optionally, in described solidification furnace chamber, the first sealing device and second sealing device are loose mutually The pressure size of contact of relaxing is the pa of 0 pa~100.

Optionally, in described solidification furnace chamber, the first sealing device includes the first sealing air bag, described There is the first air-filled pore on the surface of first sealing air bag.

Optionally, in described solidification furnace chamber, second sealing device includes the second sealing air bag, described There is the second air-filled pore on the surface of second sealing air bag.

Optionally, in described solidification furnace chamber, the solidification furnace chamber also includes aerating and exhaust device, the inflation/deflation Device is that the described first sealing air bag is inflated for deflated by first air-filled pore, and the aerating and exhaust device passes through described Second air-filled pore is that the described second sealing air bag is inflated for deflated.

Optionally, in described solidification furnace chamber, the first sealing air bag is installed on the chamber body Edge, the second sealing air bag are installed on the edge of the chamber door, the first sealing air bag and described the Two sealing air bags form just relative position relationship and contacted with each other.

Optionally, in described solidification furnace chamber, the first sealing air bag and the second sealing inflating air The quantity of capsule is multiple, and the first sealing air bag is equal with the quantity of the described second sealing air bag.

Optionally, in described solidification furnace chamber, multiple first sealing air bags are distributed evenly in described The edge of chamber body, multiple second sealings air bags are distributed evenly in the edge of the chamber door, and described first Sealing air bag and the second sealing air bag are staggered and contacted with each other.

Optionally, in described solidification furnace chamber, the first sealing air bag and the second sealing inflating air Capsule is shaped as spheroid, cuboid or spheroid.

, can be in sealing space and non-by the state of the closing space in solidification furnace chamber provided by the utility model The conversion of sealing space, the first sealing device and second sealing device are in the state being brought into tight contact with each other, can also In the state of mutual relaxation contact, when both are in the state being brought into tight contact with each other, the chamber body edge and the chamber door The first sealing device at edge and the second sealing device can be very good sealing and curing furnace chamber；Further, when the first sealing Device and second sealing device are in the state that relaxation contacts mutually, even if the chamber body and the chamber door are also in shape Into the closing space, but first sealing device and the second sealing device are connect with very little or the pressure being substantially not present Touch, even if chamber door carries out the first sealing device of door opening action, the chamber body edge and the chamber door edge now And second will not also cause very big frictional force between sealing device, first sealing device and the second sealing device will not be caused The abrasion of material, good sealing effectiveness can be always maintained at.

Further, the pressure size that first sealing device and the second sealing device are brought into tight contact with each other be 0.2 MPa~ 0.3 MPa, it can be very good to be sealed；First sealing device and the second sealing device pressure size that relaxation contacts mutually are The pa of 0 pa~100, when both are directly subjected to displacement, frictional force also very little.

Specifically, the aerating and exhaust device is the described first sealing air bag inflation by first air-filled pore or put Gas, the aerating and exhaust device are that the described second sealing air bag is inflated for deflated by second air-filled pore, sealing device Inflatable seal structure is designed as, inflatable seal structure operation is simple and convenient, and can carry out pressure by aerating and exhaust device Monitoring, whole system is set to provide reliability.In addition, the first sealing air bag and the second sealing shape of air bag, quantity, Installation site, sealing means and material can also be selected as the case may be, and applicable scope is wider.

Further, inflatable seal structure can coordinate Direct Action Type chamber door, and chamber door is no longer rotated, but directly Under upper, straight, straight left or straight right direction movement, to complete chamber door and the chamber body cutting between close to position and away from position Change, directly driven by cylinder, control mode is simple, and sealing action, the first sealing are carried out again after chamber body in chamber door Air bag and the second sealing air bag inflation after chamber door closing are sealed, and reduce the loss that friction belt is come.

In addition, the aerating and exhaust device can be the cylinder charge or deflation, because the aerating and exhaust device is pneumatically to fill Put, the aerating and exhaust device can be cylinders providing power, be cylinder charge or deflation, change the gas pressure intensity in cylinder, to drive Dynamic chamber door moves, and the technical scheme can make solidification furnace chamber reduce by a power set, greatly reduces the complexity of system Degree, reduce cost.

In a word, the chamber door opening and closing movement in the utility model simplifies, and reduces sealing device abrasion, and sealing effectiveness is more preferable.

Brief description of the drawings

Fig. 1 is that first sealing device and the second sealing device are in be brought into tight contact with each other in the utility model embodiment State schematic diagram；

Fig. 2 is that first sealing device and the second sealing device contact in relaxation mutually in the utility model embodiment State schematic diagram；

Fig. 3 is that the position relationship of solidification furnace chamber chamber body and chamber door is remote in the utility model embodiment The schematic diagram offed normal；

Fig. 4~6 are another structural representations for solidifying furnace chamber in the utility model embodiment；

Shown in figure：11- chamber bodies；12- chamber doors；13- first sealing devices；The sealing devices of 14- second；15- fills Means of deflation；16- cylinders.

Embodiment

Below in conjunction with the drawings and specific embodiments to the utility model proposes solidification furnace chamber be described in further detail. According to following explanation and claims, advantages and features of the present utility model will become apparent from.It should be noted that accompanying drawing uses Very simplified form and use non-accurately ratio, only facilitating, lucidly aid in illustrating the utility model embodiment Purpose.

Core concept of the present utility model is the solidification furnace chamber for providing a kind of good sealing effect.

To realize above-mentioned thought, the utility model provides a kind of solidification furnace chamber, and the solidification furnace chamber includes chamber Body, chamber door, first sealing device and the second sealing device, wherein：Close the position of the chamber body and the chamber door System is included close to position；When the position relationship of the chamber body and the chamber door is in close to position, the chamber body and institute State chamber door and form a closing space；The first sealing device is arranged on the edge of the chamber body, second sealing Device is arranged on the edge of the chamber door, and the first sealing device and second sealing device match；When described When one sealing device and second sealing device are in the state being brought into tight contact with each other, the closing space is sealing space；When When the first sealing device and second sealing device are in the state of relaxation contact mutually, the closing space is non-tight Space.

A kind of solidification furnace chamber, the curing oven are provided as shown in Fig. 1~2, in specific embodiment of the present utility model Chamber includes chamber body 11, chamber door 12, the sealing device 14 of first sealing device 13 and second, wherein：First sealing Device 13 is arranged on the edge of the chamber body 11, and second sealing device 14 is arranged on the edge of the chamber door 12, The first sealing device 13 and second sealing device 14 are in contact, so that the chamber body 11 and the chamber door 12 Position relationship be in close to position, it is described when the position relationship of the chamber body 11 and the chamber door 12 is in close to position Chamber body 11 forms a closing space with the chamber door 12；Substrate in photoelectric material is just placed in the closing space Row is heated and handles.The state of the closing space includes sealing state and non-tight state, when the first sealing device 13 and institute When stating the second sealing device 14 in the state being brought into tight contact with each other, the closing space is sealing space；When the described first sealing When device 13 and second sealing device 14 are in the state of relaxation contact mutually, the closing space is non-tight space.It is close Envelope state is chamber body 11 and the tight closure of chamber door 12, and the gas in chamber body 11 can not be leaked to outside solidification furnace chamber. Chamber body 11 and the chamber door 12 close to when, because the first sealing device 13 is arranged on the chamber body 11 Edge, second sealing device 14 are arranged on the edge of the chamber door 12, first sealing device 13 and second sealing Device 14 can touch between each other.

, can be in sealing space and non-by the state of the closing space in solidification furnace chamber provided by the utility model The conversion of sealing space, the first sealing device 13 and second sealing device 14 are in the state being brought into tight contact with each other, Can be in the state of relaxation contact mutually, when both are in the state that is brought into tight contact with each other, respectively positioned at the side of chamber body 11 The sealing device 14 of first sealing device 13 and second at edge and the edge of the chamber door 12 can be very good sealing and curing furnace chamber； Further, when the state that first sealing device 13 and second sealing device 14 contact in relaxing mutually, even if the chamber Room body 11 and the chamber door 12 are also forming the closing space, but the sealing device 14 of first sealing device 13 and second with The pressure being substantially not present is contacted, even if chamber door 12 carries out door opening action now, the of the edge of chamber body 11 Very big frictional force will not be also caused between one sealing device 13 and second sealing device 14 at the edge of the chamber door 12, will not The abrasion of the material of the sealing device 14 of first sealing device 13 and second is caused, good sealing effectiveness can be always maintained at.

It is described installed in the described first close of the edge of chamber body 11 specifically, in described solidification furnace chamber The pressure size that seal apparatus 13 and second sealing device 14 installed in the edge of chamber door 12 are brought into tight contact with each other is 0.2 MPa~0.3 MPa, it can be very good to be sealed.It is described installed in the described first close of the edge of chamber body 11 Seal apparatus 13 and installed in the edge of chamber door 12 second sealing device 14 mutually relaxation contact pressure size be 0 The pa of pa~100, when both are directly subjected to displacement, frictional force also very little.

As shown in Figures 1 to 3, in described solidification furnace chamber, the first sealing device 13 includes the first sealing and inflated Air bag, there is the first air-filled pore on the surface of the first sealing air bag, second sealing device 14 is close including second Air bag is sealed, there is the second air-filled pore on the surface of the second sealing air bag, the solidification furnace chamber also includes filling Means of deflation 15, the aerating and exhaust device 15 are the described first sealing air bag inflation by first air-filled pore or put Gas, the aerating and exhaust device 15 is that the described second sealing air bag is inflated for deflated by second air-filled pore, described to fill Means of deflation 15 is blower fan or high-pressure air source, such as compression drying air (CDA), the pressure of the high-pressure air source for 0.5 MPa~ Between 0.7 MPa.

Specifically, the aerating and exhaust device 15 by first air-filled pore be described first sealing air bag inflation or Deflate, the aerating and exhaust device 15 is that the described second sealing air bag is inflated for deflated by second air-filled pore, sealing Device is designed as inflatable seal structure, and inflatable seal structure operation is simple and convenient, and can be entered by aerating and exhaust device 15 Row pressure monitor, whole system is set to provide reliability.In addition, the shape of the first sealing air bag and the second sealing air bag Shape, quantity, installation site, sealing means and material can also be selected as the case may be, and applicable scope is wider.

When the quantity of the first sealing air bag and the second sealing air bag is one, as shown in figure 4, described the One sealing air bag is installed on the edge of the chamber body 11, and the second sealing air bag is installed on the chamber door 12 edge, when the position relationship of the chamber body 11 and the chamber door 12 is in close to position, first sealing is filled Gas air bag forms just relative position relationship with the described second sealing air bag and contacted with each other.The first sealing inflating air Capsule and the second sealing air bag are shaped as cylinder, cuboid or ellipsoid cylinder, the first sealing inflating air in Fig. 4 Capsule and the second sealing air bag are shaped as ellipsoid cylinder.

When the quantity of the first sealing air bag and the second sealing air bag is multiple, as shown in Fig. 5~6, and The first sealing air bag is equal with the quantity of the described second sealing air bag, multiple first sealing air bags The edge of the chamber body 11 is distributed evenly in, multiple second sealing air bags are distributed evenly in the chamber The edge of door 12, when the position relationship of the chamber body 11 and the chamber door 12 is in close to position, first sealing Air bag and the second sealing air bag are staggered and contacted with each other, the first sealing air bag and described the Two sealing air bags are shaped as spheroid, cuboid or spheroid, the first sealing air bag in Fig. 5 and described the Two sealing air bags are shaped as spheroid, the first sealing air bag and the second sealing inflating air in Fig. 6 Capsule is shaped as spheroid.

The visual chamber body of quantity of the first sealing air bag and the second sealing air bag 11 and the size of chamber door 12, and need to be spaced the great distance installation one first sealing air bag or described the Two seal air bags to determine, the first sealing air bag and the second sealing air bag are staggeredly uniform two-by-two It is installed on the edge of chamber body 11 and the edge of the chamber door 12, every a pair close the first sealing air bags A pair of sealing air bags are formed with the described second sealing air bag, wherein, the side wall of a pair of sealing air bags reaches phase The mutually effect of contact and closing seam.If in order to reduce the technique effect of friction, spherical or elliposoidal sealing inflation may be selected Air bag, as shown in figs. 4 to 6, if in order to increase the sealing between sealing air bag, the sealing that cuboid may be selected is filled Gas air bag, the material that the material that seals air bag is preferably wear-resisting, pliability is good, anti-leak result is good.

Further, the position relationship of the chamber body 11 and the chamber door 12 is also included away from position, such as Fig. 3 institutes Show, when the position relationship of the chamber body 11 and the chamber door 12 is in away from position, the chamber body 11 and the chamber Room door 12 is remote, and the chamber body 11 forms an open space.The solidification furnace chamber also includes a cylinder 16, the cylinder The 16 driving chamber doors 12 move or carried chamber door 12 and remain stationary as, and cylinder 16 includes cylinder body and cylinder wall, cylinder Body is fixed in chamber body 11, or is fixed in other fixed equipments, and cylinder body remains stationary as；Cylinder wall and chamber door 12 connections, gas pressure intensity in cylinder body change can driving gas casing wall carry out straight up and down or straight left straight right motion, gas Casing wall drive chamber door 12 carry out it is directly upper, straight under, straight left or straight right direction movement, when chamber door 12 is opened, i.e., and chamber body 11 switch to away from position from close to position, and cylinder wall can drive chamber door 12 to move, when chamber door 12 closes, i.e., with chamber body 11 Position relationship be close to position when, cylinder wall carrying chamber door 12 remain stationary as.Cylinder makes the chamber door 12 and the chamber The position relationship of body 11 switches between the close position and the remote position, and the cylinder 14 drives the chamber door to carry out Direct Action Type is moved, i.e., chamber door carry out it is directly upper, straight under, straight left or straight right motion.Inflatable seal respective outer side edges Direct Action Type chamber Door, chamber door no longer rotated, but it is straight it is upper, straight under, straight left or straight right direction movement, to complete chamber door 12 and the chamber Switching of the room body 11 between close to position and away from position, is directly driven, control mode is simple, is leaned in chamber door 12 by cylinder 16 Sealing action is carried out after abluminal compartment body 11 again, a pair of sealing air bags inflation after the closing of chamber door 12 carries out close Envelope, reduce the loss that friction belt is come.

Inflatable seal structure can coordinate Direct Action Type chamber door, and chamber door is no longer rotated, but it is straight upper, straight under, it is straight Left or straight right direction movement, to complete the switching of chamber door and the chamber body between close to position and away from position, by cylinder Direct drive, control mode is simple, and sealing action is carried out again after chamber body in chamber door, the first sealing air bag and Second sealing air bag inflation after chamber door closing is sealed, and reduces the loss that friction belt is come.

In addition, in described solidification furnace chamber, the aerating and exhaust device 15 is also inflated for deflated for the cylinder 16.By It is pneumatic means in the aerating and exhaust device 15, the aerating and exhaust device 15 can be that cylinder 16 provides power, be inflated for cylinder 16 Or deflate, change the gas pressure intensity in cylinder 16, to drive chamber door 12 to move, the technical scheme can make solidification furnace chamber Reduce by a power set, greatly reduce the complexity of system, reduce cost.

In a word, the chamber door opening and closing movement in the utility model simplifies, and reduces sealing device abrasion, and sealing effectiveness is more preferable.

To sum up, the various configuration for solidifying furnace chamber is described in detail above-described embodiment, certainly, the utility model bag Include but be not limited to configuration cited in above-mentioned implementation, enter line translation on the basis of any configuration provided in above-described embodiment Content, belong to the scope that the utility model is protected.Those skilled in the art can lift one according to the content of above-described embodiment Anti- three.

Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other The difference of embodiment, between each embodiment identical similar portion mutually referring to.Foregoing description is only to this practicality The description of new preferred embodiment, not to any restriction of the scope of the utility model, the ordinary skill in the utility model field Any change, the modification that personnel do according to the disclosure above content, belong to the protection domain of claims.

Claims (10)

1. one kind solidification furnace chamber, it is characterised in that the solidification furnace chamber includes chamber body, chamber door, the first sealing dress Put and the second sealing device, wherein：

The first sealing device is arranged on the edge of the chamber body, and second sealing device is arranged on the chamber door Edge, the first sealing device and second sealing device be in contact, and makes the chamber body and the chamber door shape Into a closing space；

When the first sealing device and second sealing device are in the state being brought into tight contact with each other, the closing space is Sealing space；

When the first sealing device and second sealing device are in the state of relaxation contact mutually, the closing space is Non-tight space.

2. solidification furnace chamber as claimed in claim 1, it is characterised in that the first sealing device and the second sealing dress It is 0.2 MPa~0.3 MPa to put the pressure size being brought into tight contact with each other.

3. solidification furnace chamber as claimed in claim 1, it is characterised in that the first sealing device and the second sealing dress The pressure size for putting relaxation contact mutually is the pa of 0 pa~100.

4. solidification furnace chamber as claimed in claim 1, it is characterised in that the first sealing device includes the first sealing and inflated Air bag, it is described first sealing air bag surface on there is the first air-filled pore.

5. solidification furnace chamber as claimed in claim 4, it is characterised in that second sealing device includes the second sealing and inflated Air bag, it is described second sealing air bag surface on there is the second air-filled pore.

6. solidification furnace chamber as claimed in claim 5, it is characterised in that the solidification furnace chamber also includes aerating and exhaust device, The aerating and exhaust device is that the described first sealing air bag is inflated for deflated by first air-filled pore, the inflation/deflation dress It is that the described second sealing air bag is inflated for deflated to put by second air-filled pore.

7. solidification furnace chamber as claimed in claim 5, it is characterised in that the first sealing air bag is installed on the chamber The edge of room body, the second sealing air bag are installed on the edge of the chamber door, the first sealing air bag Just relative position relationship is formed with the described second sealing air bag and is contacted with each other.

8. solidification furnace chamber as claimed in claim 5, it is characterised in that the first sealing air bag and described second close Envelope air bag quantity be it is multiple, and it is described first sealing air bag with described second seal air bag quantity phase Deng.

9. solidification furnace chamber as claimed in claim 8, it is characterised in that multiple first sealing air bags equably divide The edge of the chamber body is distributed in, multiple second sealing air bags are distributed evenly in the edge of the chamber door, The first sealing air bag and the second sealing air bag are staggered and contacted with each other.

10. solidification furnace chamber as claimed in claim 9, it is characterised in that the first sealing air bag and described second Sealing air bag is shaped as spheroid, cuboid or spheroid.