CN206654736U - The recovery system of chlorosilane waste liquid - Google Patents
The recovery system of chlorosilane waste liquid Download PDFInfo
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- CN206654736U CN206654736U CN201720382666.7U CN201720382666U CN206654736U CN 206654736 U CN206654736 U CN 206654736U CN 201720382666 U CN201720382666 U CN 201720382666U CN 206654736 U CN206654736 U CN 206654736U
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Abstract
The utility model provides a kind of recovery system of chlorosilane waste liquid.The recovery system includes feed unit, carrier gas heating unit, spray drying unit and gas-solid separative element；Wherein spray drying unit is provided with charging aperture, carrier gas inlet and gas-solid mixture outlet, and charging aperture is connected with feed unit, and carrier gas inlet is connected with carrier gas heating unit, and gas solid separation unit is connected with gas-solid mixture outlet.The retracting device that the application provides, suitable for chlorosilane waste liquid separation of solid and liquid, realizes the pollution-free processing of waste residue；And the condition such as pressure during said apparatus use, temperature is more gentle, it is easy to safety in production, stable operation；Equipment and materials selection is convenient, design and processing and manufacturing of equipment are simple, disposably puts into small；The advantages such as automaticity is high, maintenance cost is low.
Description
Technical field
Field of polysilicon production is the utility model is related to, in particular to a kind of recovery system of chlorosilane waste liquid.
Background technology
Silicon tetrachloride cold hydrogenation system, trichlorosilane synthesis system or rectifying and purifying system in polycrystalline silicon preparing process are led to
A certain amount of chlorosilane waste liquid can be often discharged, contains substantial amounts of chlorosilane in raffinate, also containing trickle silica flour and metal chlorination
Thing.Due to being easy to occluding device and pipeline containing silica flour and metal chloride, chlorosilane waste liquid.If chlorosilane is given up simultaneously
The directly outer row's processing of liquid, not only results in the loss of chlorosilane, chlorosilane is easily formed acid mist after being contacted with air or water
Pollute environment.Thus need to reclaim chlorosilane in caused chlorosilane waste liquid in polysilicon production process.
Mainly there are Hydrolyze method, filtration method, burning method and evaporation for the recovery method of chlorosilane waste liquid both at home and abroad.
Hydrolyze method is the method that domestic polysilicon enterprise generally uses, and concrete technology is that chlorosilane gives up in hydrolysis device
Liquid, which is passed through in water, is hydrolyzed reaction, obtains hydrogen chloride gas and acid waste water and silica solid slag, then hydrogen chloride gas
Body is reclaimed after tail gas elution and condensation process, and silica solid slag is directly filled or utilized after simple neutralisation treatment.Due to
Raffinate amount is larger, and the method generates substantial amounts of acid waste water and hydrolysis residue, thus its three-protection design load is larger, environmental pollution
Also it is very serious.
Filtration method is that raffinate passed through into filter, filters the impurity such as solid dust and metal chloride in raffinate, obtains
The filtrate arrived recycles.The method has reclaimed chlorosilane to a certain extent, but trickle dust and metal chloride pole
Easily block pipeline and equipment, it is difficult to realize continuous production, it is big to overhaul difficulty.
Burning method is that chlorosilane waste liquid is carried out to burning conversion under the high temperature conditions is silica.The method is in certain journey
Solve the process problem of raffinate on degree, but the quality of silica is not high, while substantial amounts of chlorination is produced in burning process
Hydrogen, and the once investment of burning facility is higher.
Evaporation is that chlorosilane waste liquid is passed through in evaporating kettle, chlorosilane is evaporated under external heat, after condensation
Reclaimed.The method has reclaimed part chlorosilane to a certain extent, but shortcoming is the disposal ability very little of evaporating kettle, blocks
Seriously, and heat transfer effect is bad, and energy consumption is higher.
Utility model content
Main purpose of the present utility model is to provide a kind of recovery system of chlorosilane waste liquid, to solve existing chlorine silicon
The problem of processing method feature of environmental protection difference of alkane waste liquid.
To achieve these goals, the utility model provides a kind of recovery system of chlorosilane waste liquid on one side, should
Recovery system includes：Feed unit；Carrier gas heating unit；Unit is spray-dried, spray drying unit is provided with charging aperture, carrier gas
Entrance and gas-solid mixture outlet, and charging aperture is connected with feed unit, carrier gas inlet is connected with carrier gas heating unit；And
Gas solid separation unit, gas solid separation unit are connected with gas-solid mixture outlet.
Further, feed unit includes：Chlorosilane waste liquid feeding mechanism, chlorosilane waste liquid feeding mechanism are provided with waste liquid
Outlet, and vaporising device, vaporising device are provided with waste liquid entrance and steam extraction raffinate outlet, and waste liquid entrance passes through waste liquid with waste liquid outlet
Transfer pipeline is connected, and steams extraction raffinate outlet and is connected with spray drying unit by steaming extraction raffinate transfer pipeline.
Further, feed unit also includes：First filter, it is arranged on waste liquid transfer pipeline, the first filtering dress
Install and be equipped with liquid-phase outlet and solid-phase outlet, and liquid-phase outlet is connected with waste liquid entrance；And complexing agent charging device, complexing agent
Charging device is provided with dog-house, and along the flow direction of chlorosilane waste liquid, dog-house is with being located at the first filter upstream
Waste liquid transfer pipeline is connected.
Further, carrier gas heating unit includes：Carrier gas feeding mechanism, carrier gas feeding mechanism by carrier gas transfer pipeline with
Spray drying unit is connected；And heater, heater are arranged on carrier gas transfer pipeline.
Further, spray drying unit includes atomizer, and atomizer is arranged on charging aperture.
Further, gas solid separation unit includes：Cyclone separator, cyclone separator are provided with gas-solid mixture and entered
Mouth and rotation divide gas vent, and gas-solid mixture entrance is connected with gas-solid mixture outlet；And second filter, the second filtering
Device is provided with rotation point gas access and the outlet of thick chlorosilane gas, and a rotation point gas access divides gas vent to be connected with rotation.
Further, recovery system also includes condensing unit, and condensing unit includes：Condensing unit, condensing unit are provided with
Thick chlorosilane gas entrance and chlorosilane liquid produced outlet, thick chlorosilane gas entrance are connected with the outlet of thick chlorosilane gas；And
Chlorosilane liquid produced storage tank, chlorosilane liquid produced storage tank are provided with chlorosilane liquid produced entrance, chlorosilane liquid produced entrance and chlorosilane liquid produced
Outlet is connected.
Further, condensing unit is additionally provided with fixed gas outlet, and fixed gas outlet is connected with carrier gas transfer pipeline.
Further, vaporising device is additionally provided with chlorosilane gas outlet, and chlorosilane gas outlet is stored up with chlorosilane liquid produced
Tank is connected by chlorosilane gas transfer pipeline.
Further, recovery system also includes tail gas condensation device, and tail gas condensation device is arranged on chlorosilane gas conveying
On pipeline.
Further, recovery system also includes gas dust-removing device, and gas dust-removing device is arranged on chlorosilane gas outlet
On stream between tail gas condensation device, and gas dust-removing device is provided with dust outlet, and dust outlet leads to vaporising device
Dust transfer pipeline is crossed to be connected.
Further, feed unit also includes steaming extraction raffinate storage tank, steams extraction raffinate storage tank and is arranged on and steams on extraction raffinate transfer pipeline.
Using the technical solution of the utility model, the processing procedure of chlorosilane waste liquid can be realized at low cost, simultaneously
The clean manufacturing of polysilicon is also achieved, reduces the discharge of cost of investment and chlorion, remarkable in economical benefits is environment-friendly,
Thus the technique has excellent economical and environmentally friendly benefit.
Brief description of the drawings
The Figure of description for forming the part of the application is used for providing further understanding to of the present utility model, this practicality
New schematic description and description is used to explain the utility model, does not form to improper restriction of the present utility model.
In the accompanying drawings：
Fig. 1 is shown according to a kind of chlorosilane Mead-Bauer recovery system of typical embodiment offer of the present utility model
Structural representation.
Wherein, above-mentioned accompanying drawing marks including the following drawings：
10th, feed unit；11st, chlorosilane waste liquid feeding mechanism；111st, waste liquid outlet；12nd, vaporising device；121st, waste liquid enters
Mouthful；122nd, extraction raffinate outlet is steamed；123rd, chlorosilane gas export；13rd, the first filter；131st, liquid-phase outlet；14th, complexing agent is thrown
Expect device；141st, dog-house；15th, extraction raffinate storage tank is steamed；
20th, carrier gas heating unit；21st, carrier gas feeding mechanism；22nd, heater；
30th, it is spray-dried unit；
31st, charging aperture；32nd, carrier gas inlet；33rd, gas-solid mixture exports；
40th, gas solid separation unit；41st, cyclone separator；411st, gas-solid mixture entrance；412nd, rotation divides gas vent；
42nd, the second filter；421st, rotation divides gas access；422nd, thick chlorosilane gas outlet；
50th, condensing unit；51st, condensing unit；511st, thick chlorosilane gas entrance；512nd, chlorosilane liquid produced exports；513、
Fixed gas exports；52nd, chlorosilane liquid produced storage tank；521st, chlorosilane liquid produced entrance；53rd, tail gas condensation device；54th, dedusting fills
Put；541st, dust outlet.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Describe the utility model in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
As described by background technology, the existing processing method to chlorosilane waste liquid has that the feature of environmental protection is poor to ask
Topic.In order to solve the above-mentioned technical problem, the utility model provides a kind of recovery system of chlorosilane waste liquid, as shown in figure 1, should
Recovery system includes feed unit 10, carrier gas heating unit 20, spray drying unit 30 and gas-solid separative element 40.Wherein spray
Drying unit 30 is provided with charging aperture 31, carrier gas inlet 32 and gas-solid mixture outlet 33, and charging aperture 31 and feed unit 10
It is connected, carrier gas inlet 32 is connected with carrier gas heating unit 20, and gas solid separation unit 40 is connected with gas-solid mixture outlet 33
It is logical.
Above-mentioned chlorosilane waste liquid is the mixture for including silicon tetrachloride liquid, silica flour, aluminium chloride, iron chloride and titanium chloride,
The boiling point difference of each component causes the volatility of each component to have certain otherness.It is single that chlorosilane waste liquid is passed through spray drying
Member 30, the heat of the carrier gas provided using carrier gas heating unit 20, under high-temperature low-pressure, gas is rapidly evaporated to by chlorosilane liquid produced
The chlorosilane of state, so as to obtain chlorosilane gas-solid mixture.In the presence of carrier gas, above-mentioned gas-solid mixture is through gas solid separation list
Chlorosilane gas are separated and obtain chlorosilane gas and the higher boiling polymer and silicon powder particle that settle down by member 40.Point
Polysilicon preparation system is may return to from obtained chlorosilane gas to be recycled.
The chlorosilane waste liquid recovery apparatus that the application provides, suitable for separation of solid and liquid, realizes the pollution-free processing of waste residue；
And the condition such as pressure during said apparatus use, temperature is more gentle, it is easy to safety in production, stable operation；Equipment and materials
Selection is convenient, the design of equipment and processing and manufacturing are simple, disposably puts into small；The advantages such as automaticity is high, maintenance cost is low.
The recovery of chlorosilane waste liquid can be realized at low cost using above-mentioned retracting device processing chlorosilane waste liquid, realize polysilicon
Clean manufacturing, reduce cost of investment, reduce the discharge of chlorion, remarkable in economical benefits is environment-friendly, thus the technique has
Excellent economical and environmentally friendly benefit.It is preferred that carrier gas is nitrogen and inert gas.
Carrying out processing to chlorosilane waste liquid using the chlorosilane recovery system that the application provides has cost low, environment-friendly
And the advantages of high financial profit.In a preferred embodiment, as shown in figure 1, above-mentioned feed unit 10 includes chlorosilane
Waste liquid feeding mechanism 11 and vaporising device 12.Chlorosilane waste liquid feeding mechanism 11 is provided with waste liquid outlet 111, and vaporising device 12 is set
It is equipped with waste liquid entrance 121 and steams extraction raffinate outlet 122, waste liquid entrance 121 is connected with waste liquid outlet 111 by waste liquid transfer pipeline
It is logical, steam extraction raffinate outlet 122 and be connected with spray drying unit 30 by steaming extraction raffinate transfer pipeline.Chlorosilane waste liquid is being passed through spray
Before mist drying unit 30, chlorosilane waste liquid first is passed through into vaporising device 12 to enter to the chlorosilane gas in chlorosilane waste liquid
Row initial gross separation, so as to be advantageous to improve the rate of recovery of chlorosilane gas.Preferably vaporising device 12 is from stirring evaporator, tool
The evaporator for having agitating function can improve the disengagement area of chlorosilane waste liquid, so as to be advantageous to further improve evaporation effect and
The rate of recovery of chlorosilane gas.
In a preferred embodiment, as shown in figure 1, above-mentioned feed unit 10 also includes the He of the first filter 13
Complexing agent charging device 14.Wherein the first filter 13 is arranged on waste liquid transfer pipeline, and the first filter 13 is set
There are liquid-phase outlet 131 and solid-phase outlet, and above-mentioned liquid-phase outlet 131 is connected with waste liquid entrance 121.Complexing agent charging device 14
Dog-house 141 is provided with, along the flow direction of chlorosilane waste liquid, dog-house 141 and giving up positioned at the upstream of the first filter 13
Liquid transfer pipeline is connected.
As it was noted above, containing a certain amount of metal chlorination compound in chlorosilane waste liquid, specific composition is shown in Table 1.
Table 1
The mainly alchlor wherein having a great influence, if not removing it easy occluding device and pipeline.To understand
Certainly above mentioned problem, the chlorosilane waste liquid recovery apparatus that the application provides are thrown by complexing agent charging device 14 into chlorosilane waste liquid
Enter, separated out after complexing agent and the generation complex reaction of above-mentioned metallic compound from chlorosilane waste liquid, then again by the first filtering
Device 13 removes it from waste liquid.This greatly reduces AlCl3The partial pressure of gas phase in the first filter 13 so that
AlCl3Rest in the slag phase of filter, so as to advantageously reduce AlCl3Subsequent evaporation condensation deposition is to equipment, the blocking of pipeline
Risk, and reduce the frequency of parking maintenance, also help the range of choice of carrier gas temperature in subsequent spray drying unit.Complexing
Agent is NaCl.Complexing agent sets feed pump on the stream between the first filter 13 and vaporising device 12, and this is advantageous to make
Chlorosilane waste liquid keeps more constant feed liquor speed, so that removal process is carried out under more steady environment.
In a preferred embodiment, as shown in figure 1, above-mentioned carrier gas heating unit 20 includes carrier gas feeding mechanism 21
With heater 22.Wherein carrier gas feeding mechanism 21 is connected by carrier gas transfer pipeline with spray drying unit 30；Heating dress
22 are put to be arranged on carrier gas transfer pipeline.Carrier gas can be heated to by heater 22 by required temperature, so as to be spraying
Chlorosilane in drying unit 30 is changed into gaseous state from liquid and provides heat.Above-mentioned heater 22 can use this area any
It can be the device of carrier gas heating.It is preferred that above-mentioned heater 22 is heat-exchanger rig, using heating of the heat-exchanger rig as carrier gas
Device 22 is advantageous to improve the capacity usage ratio of a whole set of recovery system.
In a preferred embodiment, above-mentioned spray drying unit 30 includes atomizer, and atomizer is arranged on charging
On mouth 31.It is spray-dried at the charging aperture 31 of unit 30 and is provided with atomizer, chlorosilane waste liquid and high temperature carrier gas enters atomizer
Afterwards, chlorosilane waste liquid is atomized into fine drop, while silica flour and high polymer contained in waste liquid fall into spray drying system
Outlet at bottom.It is preferred that above-mentioned atomizer has rotation type atomization nozzle.Above-mentioned atomizer operating is easy and has bigger spirit
Activity, additionally it is possible to make powder granularity be evenly distributed, and droplet size, no blockage problem are controlled by adjusting rotating speed；Inert carrier gas
Into spray dryer, heat exchange is carried out with chlorosilane droplet, after centrifugal spray, surface area greatly increases, in high temperature gas flow
In, moment is evaporated, and rate of drying is fast.
Gas-solid separating device in above-mentioned chlorosilane recovery system can use gas-solid separating device commonly used in the art.One
In kind preferred embodiment, as shown in figure 1, above-mentioned gas solid separation unit 40 includes the filtering dress of cyclone separator 41 and second
Put 42.Wherein cyclone separator 41 is provided with gas-solid mixture entrance 411 and rotation divides gas vent 412, and gas-solid mixture enters
Mouth 411 is connected with gas-solid mixture outlet 33；Second filter 42 is provided with rotation point gas access 421 and thick chlorosilane gas
Body outlet 422, rotation point gas access 421 divide gas vent 412 to be connected with rotation.
The dried gas-solid mixture containing chlorosilane gas of spray-dried unit output fills by cyclonic separation
41 and second are put after filter 42, the chlorosilane gas in above-mentioned gas-solid mixture and solid slag are separated, then will point
The chlorosilane gas separated out are delivered to follow up device and recycled, and solid slag is arranged from the outlet at bottom of the second filter
Go out.Gas-solid separating device simultaneously comprising the filter 42 of cyclone separator 41 and second superposition use be advantageous to improve gas phase with
The separative efficiency of solid phase, so as to be advantageous to improve the purity of chlorosilane gas.It is preferred that above-mentioned gas-solid separating device is one or more
The individual cyclone separator and filter set in parallel or series, this is advantageous to the purity for further improving chlorosilane.It is preferred that whirlwind
Separator 41 is rotoclone collector.Second filter 42 is filtering type dust-precipitator or cottrell.
In a preferred embodiment, as shown in figure 1, above-mentioned recovery system also includes condensing unit 50, it includes
Condensing unit 51 and chlorosilane liquid produced storage tank 52.Condensing unit 51 is provided with thick chlorosilane gas entrance 511 and chlorosilane liquid produced
Outlet 512, thick chlorosilane gas entrance 511 are connected with thick chlorosilane gas outlet 422；Chlorosilane liquid produced storage tank 52 is provided with
Chlorosilane liquid produced entrance 521, chlorosilane liquid produced entrance 521 are connected with chlorosilane liquid produced outlet 512.Through gas solid separation unit 40
Obtained thick chlorosilane gas obtain chlorosilane liquid produced by condensing unit 50, are then stored at chlorosilane liquid produced storage tank 52.
In a preferred embodiment, as shown in figure 1, above-mentioned condensing unit 51 is additionally provided with fixed gas outlet 513,
Fixed gas outlet 513 is connected with carrier gas transfer pipeline.Thick chlorosilane gas obtain the chlorosilane of cleaning by condensing unit 51
Gas and carrier gas, carrier gas enter the carrier gas transfer pipeline of carrier gas heating unit 20 after the discharge of fixed gas outlet 513, and this is advantageous to
Recycled carrier gas.
In a preferred embodiment, as shown in figure 1, above-mentioned vaporising device 12 is additionally provided with chlorosilane gas outlet
123, chlorosilane gas outlet 123 is connected with chlorosilane liquid produced storage tank 52 by chlorosilane gas transfer pipeline.Evaporation is filled
12 chlorosilane gas outlet 123 is put with chlorosilane liquid produced storage tank 52 to be connected and be advantageous to by way of natural condensation to evaporate
Go out chlorosilane gas and carry out condensation recovery.
In a preferred embodiment, as shown in figure 1, above-mentioned recovery system also includes tail gas condensation device 53, tail
Gas condensing unit 53 is arranged on chlorosilane gas transfer pipeline.Tail gas condensation device is set on chlorosilane gas transfer pipeline
53 are advantageous to improve the condensation efficiency of the chlorosilane gas escaped from vaporising device 12, and then improve the rate of recovery of chlorosilane.
It is preferred that setting gas dust-removing device 54 on stream between above-mentioned tail gas condensation device 53 and above-mentioned vaporising device 12, this is favourable
Dust in the chlorosilane steam that will be escaped from vaporising device 12, so as to be advantageous to improve the chlorosilane liquid produced finally reclaimed
Purity.While above-mentioned gas dust arrester 54 is provided with the dust being connected with vaporising device 12 by dust transfer pipeline and gone out
Mouth 541, this dust for being advantageous to isolate from chlorosilane gas is collected, so as in follow-up gas solid separation unit 40
In focused on, mitigate the labor intensity of operating personnel.
In a preferred embodiment, as shown in figure 1, above-mentioned feed unit 10, which also includes being arranged on, steams extraction raffinate conveying
Steaming extraction raffinate storage tank 15 on pipeline.Steaming extraction raffinate storage tank 15 on extraction raffinate transfer pipeline is steamed, can not only be spray drying unit
30 continuously provide material to be dried, and then improve the stability of spray process in spray drying unit 30.
In a preferred embodiment, as shown in figure 1, above-mentioned feed unit 10 also includes chlorosilane waste liquid buffering
Tank, along the flow direction of chlorosilane waste liquid, chlorosilane waste liquid surge tank is arranged on the upstream of complexing agent charging device 14.
The upstream setting chlorosilane waste liquid surge tank of complexing agent charging device 14 is advantageous to improve the stability of whole Mead-Bauer recovery system.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for this
For the technical staff in field, the utility model can have various modifications and variations.It is all in the spirit and principles of the utility model
Within, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.
Claims (12)
1. the recovery system of chlorosilane waste liquid, it is characterised in that the recovery system includes：
Feed unit (10)；
Carrier gas heating unit (20)；
Unit (30) is spray-dried, the spray drying unit (30) is provided with charging aperture (31), carrier gas inlet (32) and gas-solid
Mixture outlet (33), and the charging aperture (31) is connected with the feed unit (10), the carrier gas inlet (32) and institute
Carrier gas heating unit (20) is stated to be connected；And
Gas solid separation unit (40), the gas solid separation unit (40) are connected with gas-solid mixture outlet (33).
2. recovery system according to claim 1, it is characterised in that the feed unit (10) includes：
Chlorosilane waste liquid feeding mechanism (11), the chlorosilane waste liquid feeding mechanism (11) are provided with waste liquid outlet (111), and
Vaporising device (12), the vaporising device (12) is provided with waste liquid entrance (121) and steams extraction raffinate outlet (122), described useless
Liquid entrance (121) is connected with the waste liquid outlet (111) by waste liquid transfer pipeline, the steaming extraction raffinate outlet (122) and institute
Spray drying unit (30) is stated by steaming extraction raffinate transfer pipeline to be connected.
3. recovery system according to claim 2, it is characterised in that the feed unit (10) also includes：
First filter (13), it is arranged on the waste liquid transfer pipeline, first filter (13) is provided with liquid phase
(131) and solid-phase outlet are exported, and the liquid-phase outlet (131) is connected with the waste liquid entrance (121)；And
Complexing agent charging device (14), the complexing agent charging device (14) are provided with dog-house (141), and along the chlorosilane
The flow direction of waste liquid, the dog-house (141) and the waste liquid delivery pipe positioned at the first filter (13) upstream
Road is connected.
4. recovery system according to claim 2, it is characterised in that the carrier gas heating unit (20) includes：
Carrier gas feeding mechanism (21), the carrier gas feeding mechanism (21) pass through carrier gas transfer pipeline and the spray drying unit
(30) it is connected；And
Heater (22), the heater (22) are arranged on the carrier gas transfer pipeline.
5. recovery system according to claim 4, it is characterised in that the spray drying unit (30) includes atomizer,
The atomizer is arranged on the charging aperture (31).
6. the recovery system according to claim 4 or 5, it is characterised in that the gas solid separation unit (40) includes：
Cyclone separator (41), the cyclone separator (41) is provided with gas-solid mixture entrance (411) and rotation divides gas
Export (412), the gas-solid mixture entrance (411) is connected with gas-solid mixture outlet (33)；And
Second filter (42), second filter (42) are provided with rotation point gas access (421) and thick chlorosilane gas
Body exports (422), and the rotation point gas access (421) divides gas vent (412) to be connected with the rotation.
7. recovery system according to claim 6, it is characterised in that the recovery system also includes condensing unit (50),
The condensing unit (50) includes：
Condensing unit (51), the condensing unit (51) are provided with thick chlorosilane gas entrance (511) and chlorosilane liquid produced outlet
(512), the thick chlorosilane gas entrance (511) is connected with the thick chlorosilane gas outlet (422)；And
Chlorosilane liquid produced storage tank (52), the chlorosilane liquid produced storage tank (52) are provided with chlorosilane liquid produced entrance (521), the chlorine
Silane liquid inlet (521) is connected with chlorosilane liquid produced outlet (512).
8. recovery system according to claim 7, it is characterised in that the condensing unit (51) is additionally provided with fixed gas and gone out
Mouth (513), the fixed gas outlet (513) are connected with the carrier gas transfer pipeline.
9. recovery system according to claim 7, it is characterised in that the vaporising device (12) is additionally provided with chlorosilane gas
Body exports (123), and the chlorosilane gas outlet (123) is conveyed with the chlorosilane liquid produced storage tank (52) by chlorosilane gas
Pipeline is connected.
10. recovery system according to claim 9, it is characterised in that the recovery system also includes tail gas condensation device
(53), the tail gas condensation device (53) is arranged on the chlorosilane gas transfer pipeline.
11. recovery system according to claim 10, it is characterised in that the recovery system also includes gas dust-removing device
(54), the gas dust-removing device (54) is arranged on the chlorosilane gas outlet (123) and the tail gas condensation device (53)
Between stream on, and the gas dust-removing device (54) is provided with dust outlet (541), the dust outlet (541) and institute
Vaporising device (12) is stated by dust transfer pipeline to be connected.
12. recovery system according to claim 2, it is characterised in that the feed unit (10) also includes steaming extraction raffinate storage
Tank (15), the steaming extraction raffinate storage tank (15) are arranged on the steaming extraction raffinate transfer pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720382666.7U CN206654736U (en) | 2017-04-12 | 2017-04-12 | The recovery system of chlorosilane waste liquid |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720382666.7U CN206654736U (en) | 2017-04-12 | 2017-04-12 | The recovery system of chlorosilane waste liquid |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106927469A (en) * | 2017-04-12 | 2017-07-07 | 中国恩菲工程技术有限公司 | The recovery system of chlorosilane waste liquid |
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2017
- 2017-04-12 CN CN201720382666.7U patent/CN206654736U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106927469A (en) * | 2017-04-12 | 2017-07-07 | 中国恩菲工程技术有限公司 | The recovery system of chlorosilane waste liquid |
| CN106927469B (en) * | 2017-04-12 | 2023-12-15 | 中国恩菲工程技术有限公司 | Recovery system of chlorosilane waste liquid |
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