CN206627759U - A kind of photoresist trimming machine - Google Patents
A kind of photoresist trimming machine Download PDFInfo
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- CN206627759U CN206627759U CN201720416655.6U CN201720416655U CN206627759U CN 206627759 U CN206627759 U CN 206627759U CN 201720416655 U CN201720416655 U CN 201720416655U CN 206627759 U CN206627759 U CN 206627759U
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- telescopic boom
- chamber
- solvent
- motor
- motion arm
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Abstract
It the utility model is related to a kind of photoresist trimming machine, including vacuum glue spreading apparatus, the vacuum glue spreading apparatus includes a clear hard chamber and one is located at exterior thereto and the vavuum pump being connected with chamber, rotating gluing coating platform, coating nozzle and Frictioning device are provided with the chamber, the coating nozzle is arranged on Frictioning device and positioned at the overcentre of rotating gluing coating platform；The Frictioning device includes the motion arm being connected with chamber roof, the solvent spray device for being fixed on the solvent shower nozzle of motion arm free end and being connected with solvent shower nozzle, the motion arm is arranged in a L-type support being connected with cavity bottom, motion arm includes the first telescopic boom and the second telescopic boom, first telescopic boom is vertically arranged, its one end is rotatably connected with L-type support free end lower wall and positioned at the overcentre of rotating gluing coating platform, first telescopic boom rotates around the tie point of the first telescopic boom and L-type support free end lower wall, its other end is connected with horizontally disposed second telescopic boom one end；The coating nozzle is arranged on the first telescopic boom and the second telescopic boom junction.
Description
Technical field
A kind of photoresist trimming machine is the utility model is related to, belongs to material processing plant field.
Background technology
At present, base wafer glue coating is completed using photoresist spinner, substrate is placed on rotating gluing coating platform, light is added dropwise
After photoresist, by controlling the rotation of rotating gluing coating platform so that substrate coats the very thin photoresist of last layer.But due to centrifugation
The influence of upper and lower surface air velocity in power and substrate rotation process so that the photoresist outward flange of coating is slightly raised, rear
Need to cover mask plate on substrate in continuous exposure process, due to the formation of projection so that between mask plate and substrate occurring
Gap, the gap cause exposure area to change.In the prior art in order to eliminate projection, the method for use is after gluing, by photoetching
Glue is dried, and then manually strikes off bossing with cutter.Strike off that photoresist projection efficiency is low and quality is not easy control with cutter.
Utility model content
In order to solve the problems, such as that photoresist edge protuberance removes time-consuming, poorly efficient and not accurate in the prior art, this practicality is new
Type provides a kind of photoresist trimming machine.
The technical solution of the utility model is as follows：A kind of photoresist trimming machine, including vacuum glue spreading apparatus, the vacuum apply
Adhesive dispenser includes a clear hard chamber and one is located at exterior thereto and the vavuum pump being connected with chamber, is provided with the chamber
Rotating gluing coating platform, coating nozzle and Frictioning device, the coating nozzle are arranged on Frictioning device and positioned at the center of rotating gluing coating platform
Top；
Motion arm that the Frictioning device includes being connected with chamber roof, be fixed on the solvent shower nozzle of motion arm free end with
And the solvent spray device connected with solvent shower nozzle, the motion arm are arranged in a L-type support being connected with cavity bottom, behaviour
Making arm includes the first telescopic boom and the second telescopic boom, and first telescopic boom is vertically arranged, and its one end and L-type support are certainly
Be rotatably connected by end lower wall and positioned at rotating gluing coating platform overcentre, the first telescopic boom around the first telescopic boom with
The tie point rotation of L-type support free end lower wall, its other end are connected with horizontally disposed second telescopic boom one end；It is described
Coating nozzle is arranged on the first telescopic boom and the second telescopic boom junction.
Wherein, first telescopic boom and the second telescopic boom surface are provided with scale.
Wherein, first telescopic boom is connected with the rotating shaft of the first motor, the first flexible branch of the first motor driving
Arm stretches, and first motor electrically connects with the first motor controller, and the first motor controller controls the first motor
Start and stop；Second telescopic boom is connected with the rotating shaft of the second motor, and the second motor drives the second telescopic boom to stretch, institute
State the second motor to electrically connect with the second motor controller, the second motor controller controls the second motor start and stop.
Wherein, the solvent shower nozzle and motion arm intersection are vertically arranged with one and isolate gear with solvent shower nozzle equal in width
Plate, the isolation baffle plate wherein one end are provided with an extension, rubber roller, the rubber roller table are connected with the extension
Face is covered with water-absorbing material.
Wherein, the solvent spray device includes pneumatic diaphragm pump and solvent tank, and the pneumatic diaphragm pump includes pump chamber, set
Put the barrier film in pump chamber, pump chamber is separated into solution cavity and air chamber by the barrier film, the solution cavity be provided with solution inlet and
Taphole, ball-cock assembly is provided with the solution inlet and taphole, the solution inlet connects with solvent tank, described
Taphole connects with solvent shower nozzle；The air chamber connects with the plunger shaft of an electric piston.
The utility model has the advantages that：
1st, motion arm of the present utility model is formed by connecting by vertical and horizontally disposed telescopic boom, so as to adjust
The stroke of vertical direction and horizontal direction, motion arm is set precisely to adjust；
2nd, isolation baffle plate is provided with below the solvent shower nozzle of Frictioning device of the present utility model and motion arm junction, prevented
Removed from the solvent that solvent shower nozzle sprays by the photoresist within edge；
3rd, Frictioning device of the present utility model is provided with rubber roller, and rubber roller is then by after dissolving after solvent sprays
Photoresist wipes, and prevents the photoresist after dissolving from continuing to be bonded on crystal；
4th, solvent spray device of the present utility model realizes the ejection of solvent using pneumatic diaphragm pump, solvent pneumatically every
In membrane pump without and cylinder contact, it is safe, and the outlet of pneumatic diaphragm pump is provided with ball-cock assembly, it is in a non-operative state, floating
Ball valve can seal passage, reduce the volatilization of spirit solvent.
Brief description of the drawings
Fig. 1 is vacuum glue spreading apparatus structural representation of the present utility model；
Fig. 2 is Frictioning device structural representation of the present utility model；
Fig. 3 is solvent spray device feed liquor procedure structure schematic diagram of the present utility model；
Fig. 4 is that solvent spray device of the present utility model goes out liquid procedure structure schematic diagram.
Reference is expressed as in figure：
1- vacuum glue spreading apparatus, 11- chambers, 12- vavuum pumps, 13- rotating gluing coating platforms, 14- coating nozzles, 2- Frictioning devices,
21- motion arms, the telescopic booms of 211- first, the telescopic booms of 212- second, 22- solvent shower nozzles, 23- solvent sprays device, 231-
Pneumatic diaphragm pump, 232- pump chambers, 2321- solution cavities, 2322- air chambers, 2323- solution inlets, 2324- tapholes, 2325-
Ball-cock assembly, 233- barrier films, 234- electric pistons, 235- solvent tanks, 24- isolation baffle plates, 25- extensions, 26- rubber rollers.
Embodiment
The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.Referring to Fig. 1 to Fig. 2, one
Kind photoresist trimming machine, including vacuum glue spreading apparatus 1, the vacuum glue spreading apparatus 1 are set including a clear hard chamber 11 and one
In being provided with rotating gluing coating platform 13, coating nozzle 14 in the outside of chamber 11 and the vavuum pump 12 being connected with chamber 11, the chamber 11
With Frictioning device 2, the coating nozzle 14 is arranged on Frictioning device 2 and positioned at the overcentre of rotating gluing coating platform 13；
Motion arm 21 that the Frictioning device 2 includes being connected with the top of chamber 11, it is fixed on the molten of the free end of motion arm 21
Agent shower nozzle 22 and the solvent spray device 23 connected with solvent shower nozzle 22, the motion arm 21 are arranged on one and the bottom of chamber 11
In the L-type support of connection, motion arm 21 includes the first telescopic boom 211 and the second telescopic boom 212, first telescopic boom
211 are vertically arranged, and its one end is rotatably connected with L-type support free end lower wall and on the center of rotating gluing coating platform 13
Side, the first telescopic boom 211 rotate around the tie point of the first telescopic boom 211 and L-type support free end lower wall, and its is another
End is connected with horizontally disposed one end of second telescopic boom 212；The coating nozzle 14 is arranged on the first telescopic boom 211 and second
The junction of telescopic boom 212.
Preferably, the surface of 211 and second telescopic boom of the first telescopic boom 212 is provided with scale.
Preferably, first telescopic boom 211 is connected with the rotating shaft of the first motor, and the first motor driving first is stretched
Contracting support arm 211 is flexible, and first motor electrically connects with the first motor controller, the first motor controller control first
Motor start and stop；Second telescopic boom 212 is connected with the rotating shaft of the second motor, the second flexible branch of the second motor driving
Arm 212 is flexible, and second motor electrically connects with the second motor controller, and the control second of the second motor controller is electronic
Machine start and stop.
Preferably, the solvent shower nozzle 22 is wide with solvent shower nozzle 22 with being vertically arranged with one below the intersection of motion arm 21
The isolation baffle plate 24 of degree, the isolation baffle plate 24 wherein one end are provided with an extension 25, rubber are connected with the extension 25
Roller 26, the surface of rubber roller 26 is covered with water-absorbing material.
Preferably, pneumatic diaphragm pump 231 and solvent tank 235, institute are included referring to Fig. 3 and Fig. 4, the solvent spray device 23
Stating pneumatic diaphragm pump 231 includes pump chamber 232, the barrier film 233 being arranged in pump chamber 232, and the barrier film 233 separates pump chamber 232
Into solution cavity 2321 and air chamber 2322, the solution cavity 2321 is provided with solution inlet 2323 and taphole 2324, described molten
Ball-cock assembly 2325 is provided with liquid entrance 2323 and taphole 2324, the solution inlet 2323 connects with solvent tank 235,
The taphole 2324 connects with solvent shower nozzle 22；The air chamber 2322 connects with the plunger shaft of an electric piston 234.
Utility model works principle：
In chamber 1, secure the wafer on rotating gluing coating platform 13, spin coating after the photoresist to be dripped from coating nozzle 14
Platform 13 rotates, and after required position is glued, when photoresist is fluid state, need to remove the outer peripheral photoresist of glue sites
Remove.The photoresist of reserved center percentage 90,10 photoresists of its outer ring are removed, first, the flexible branch of adjustment first
Arm 211 is to photoresist center, and flexible first telescopic boom 211 adjusts its height and position from photoresist, adjustment second
The stroke of telescopic boom 212, the solvent shower nozzle 22 of its end is set to be directed at the photoresist position that needs remove；Control first is flexible
Support arm 211 rotates about itself and top attachment points, and solvent shower nozzle, which is sprayed after alcohol dissolves photoresist, while rotation goes
Remove.
Embodiment of the present utility model is the foregoing is only, not thereby limits the scope of the claims of the present utility model, it is every
The equivalent structure or equivalent flow conversion made using the utility model specification and accompanying drawing content, or be directly or indirectly used in
Other related technical areas, similarly it is included in scope of patent protection of the present utility model.
Claims (5)
- A kind of 1. photoresist trimming machine, it is characterised in that：Including vacuum glue spreading apparatus（1）, the vacuum glue spreading apparatus（1）Including One clear hard chamber（11）Chamber is located at one（11）Outside and and chamber（11）The vavuum pump of connection（12）, the chamber （11）Inside it is provided with rotating gluing coating platform（13）, coating nozzle（14）And Frictioning device（2）, the coating nozzle（14）It is arranged on and scrapes mucilage binding Put（2）Go up and be located at rotating gluing coating platform（13）Overcentre；The Frictioning device（2）Including motion arm（21）, be fixed on motion arm（21）The solvent shower nozzle of free end（22）And with Solvent shower nozzle（22）The solvent spray device of connection（23）, the motion arm（21）It is arranged on one and chamber（11）Bottom connection In L-type support, motion arm（21）Including the first telescopic boom（211）With the second telescopic boom（212）, first telescopic boom （211）It is vertically arranged, its one end and L-type support free end lower wall are rotatably connected and are located at rotating gluing coating platform（13）Center Top, the first telescopic boom（211）Around the first telescopic boom（211）Rotated with the tie point of L-type support free end lower wall, Its other end and horizontally disposed second telescopic boom（212）One end connects；The coating nozzle（14）It is arranged on the first flexible branch Arm（211）With the second telescopic boom（212）Junction.
- A kind of 2. photoresist trimming machine as claimed in claim 1, it is characterised in that：First telescopic boom（211）With Two telescopic booms（212）Surface is provided with scale.
- A kind of 3. photoresist trimming machine as claimed in claim 1, it is characterised in that：First telescopic boom（211）With The rotating shaft connection of one motor, the first motor drive the first telescopic boom（211）It is flexible, first motor and the first electricity Motivation controller electrically connects, and the first motor controller controls the first motor start and stop；Second telescopic boom（212）With The rotating shaft connection of two motor, the second motor drive the second telescopic boom（212）It is flexible, second motor and the second electricity Motivation controller electrically connects, and the second motor controller controls the second motor start and stop.
- A kind of 4. photoresist trimming machine as claimed in claim 1, it is characterised in that：The solvent shower nozzle（22）With motion arm （21）One and solvent shower nozzle are vertically arranged with below intersection（22）The isolation baffle plate of equal in width（24）, the isolation baffle plate（24） Wherein one end is provided with an extension（25）, the extension（25）On be connected with rubber roller（26）, the rubber roller（26） Surface is covered with water-absorbing material.
- A kind of 5. photoresist trimming machine as described in any one of Claims 1-4, it is characterised in that：The solvent spray device （23）Including pneumatic diaphragm pump（231）And solvent tank（235）, the pneumatic diaphragm pump（231）Including pump chamber（232）, be arranged on Pump chamber（232）Interior barrier film（233）, the barrier film（233）By pump chamber（232）It is separated into solution cavity（2321）And air chamber （2322）, the solution cavity（2321）Provided with solution inlet（2323）And taphole（2324）, the solution inlet（2323） And taphole（2324）Place is provided with ball-cock assembly（2325）, the solution inlet（2323）With solvent tank（235）Connection, institute State taphole（2324）With solvent shower nozzle（22）Connection；The air chamber（2322）With an electric piston（234）Plunger shaft Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720416655.6U CN206627759U (en) | 2017-04-20 | 2017-04-20 | A kind of photoresist trimming machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720416655.6U CN206627759U (en) | 2017-04-20 | 2017-04-20 | A kind of photoresist trimming machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206627759U true CN206627759U (en) | 2017-11-10 |
Family
ID=60205889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720416655.6U Active CN206627759U (en) | 2017-04-20 | 2017-04-20 | A kind of photoresist trimming machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206627759U (en) |
-
2017
- 2017-04-20 CN CN201720416655.6U patent/CN206627759U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190428 Address after: 350100 Fujian Province Fuzhou Minhou County Shangjie Town Science and Technology East Road 8 Pioneer Building 3 Floor 304-A118 Patentee after: Fujian Ruichuang Photoelectric Technology Co., Ltd. Address before: 350100 Room 726, Building 3, Haixi Research Institute of Chinese Academy of Sciences (Fujian Institute of Material Structure, Chinese Academy of Sciences), Shangjie Town, Minhou County, Fuzhou City, Fujian Province Patentee before: FUJIAN ZHONGKE JINGCHUANG PHOTOELECTRIC TECHNOLOGY CO., LTD. |