CN206609810U - A kind of X-fluorescence test device of coating - Google Patents

Abstract

The utility model discloses a kind of X-fluorescence test device of coating, belong to detection device technical field, including optical system for testing and imaging optical path, the optical system for testing includes X ray light pipes, speculum, collimater and close shot LED；The imaging optical path includes detector, fixed lens microscope group, moving lens microscope group and CCD, and optical system for testing and the imaging optical path system is coaxial below speculum, in addition to the anti-hardened structure of wound；Test device of the present utility model, it is ensured that X ray fluorometric investigations point is same point with imaging system central point, can realize intuitive and accurate test effect；And using two sets illuminators, no matter the phenomenons such as uneven light when close shot illuminator or distant view illuminator eliminate panorama and close shot is shot, speck, shade can be realized；Dependable performance is ensured using anti-wound plate design.

Description

A kind of X-fluorescence test device of coating

Technical field

The utility model is related to testing equipment field, more particularly to a kind of coating X-fluorescence test device.

Background technology

The analysis of coating material refers to the thickness to coating and film and the analysis of component, and conventional analysis method has wet-chemical Analysis, glow discharge, emission spectrographic analysis (GD-OES) and XRF etc..It is selected that wet-chemical analysis must select appropriate solvent to dissolve Layer, be measured again after successively dissolving, method is accurate but wastes time and energy, particularly the selection of solvent nor easy thing.GD-OES Method inert atom successively bombards and peel test specimen top layer, then with emission spectrometry it.This method can realize section Or bed-by-bed analysis, but measurement it is repeated unsatisfactory.X-fluorescence method (XRF) can complete the same of component and thickness with non-destructive When determine, the measurement range of thickness is depending on material and element, usually 1nm-100um.X-fluorescence method is analyzed coating and determined with conventional Amount analysis compares, and the characteristic x-ray fluorescence intensity for being tested element is not only relevant with the composition of element to be measured and base material in film, And, device that existing use X-fluorescence method (XRF) to coating tested relevant with the thickness of film, there is intuitive, standard The problem of true property etc. is poor.

Utility model content

The purpose of this utility model is that the X-fluorescence test device for providing a kind of coating, to solve the above problems.

To achieve these goals, the technical solution adopted in the utility model is such：A kind of X-fluorescence test of coating Device, including optical system for testing and imaging optical path, wherein,

The optical system for testing includes X-ray light pipes, X-ray light pipes top and is provided with X-ray light pipes briquetting, lower section and sets Speculum is equipped with, and is provided with the speculum installation axle for installing speculum, collimater is installed below the speculum, Close shot LED is provided with below the collimater；

The imaging optical path includes detector, and the detector is located at the side of the speculum, in addition to fixed lens Microscope group, moving lens microscope group and CCD, in addition to linear stepping motor A, line slideway A, linear stepping motor B and line slideway B, the linear stepping motor A export rotating torque, and driving is fixed on the feed screw nut A movements on moving lens microscope group frame, from And drive moving lens microscope group to be moved on line slideway A；The linear stepping motor B exports rotating torque, and driving is fixed on Feed screw nut B movements on fixed lens microscope group frame, so as to drive fixed lens microscope group to be moved on line slideway B；

Optical system for testing and the imaging optical path system is coaxial below speculum；

Also include the anti-hardened structure of wound, the anti-hardened structure of wound includes anti-wound plate, and the anti-wound plate is located at the bottom of whole device Set above portion, the anti-wound plate and be provided with optoelectronic switch in fixed plate, the fixed plate.

It is used as preferred technical scheme：It is additionally provided with the speculum tabletting for stationary mirror.

It is used as preferred technical scheme：Close shot LED lamp cover is additionally provided with the close shot LED.

It is used as preferred technical scheme：The anti-wound plate is connected with fixed plate by bolt structure.

It is used as preferred technical scheme：The optoelectronic switch is fixed in fixed plate by optoelectronic switch support.

Compared with prior art, the utility model has the advantage of：

1. whole light path system includes imaging optical path and optical system for testing, two-way optical system is in speculum the following is coaxial , it is ensured that X-ray fluorometric investigations point is same point with imaging system central point, can realize intuitive and accurate test effect；

2. using two sets illuminators, and though can realize close shot illuminator or distant view illuminator eliminate panorama with The phenomenons such as light is uneven, speck, shade when close shot is shot；

3. using anti-wound plate design method in safety so that instrument has very high reliability；Anti- wound plate uses four Any point contacts sample on optoelectronic switch mode, anti-wound plate, and can triggering four optoelectronic switches, at least one is acted, and makes movement Stop, simple in construction, dependable performance.

Brief description of the drawings

Fig. 1 is the front view of the utility model embodiment (A-A cuts open figure)；

Fig. 2 is the upward view of the utility model embodiment；

Fig. 3 is right side view；

Fig. 4 is Fig. 2 B-B sectional views；

Fig. 5 is Fig. 1 C-C sectional views

In figure：1st, X-ray light pipes briquetting；2nd, screw；3rd, distant view LED；4th, pad；5th, anti-wound plate light barrier；6th, distant view LED lamp holder；7th, speculum；8th, X-ray light pipes；9、CCD；10th, feed screw nut B；11st, close shot LED lamp cover；12nd, detector； 13rd, anti-wound plate stud；14th, collimater；15th, speculum installation axle；16th, speculum tabletting；17th, close shot LED；18th, straight line is led Rail B；19th, linear stepping motor B；20th, collimater seat；21st, fixed lens microscope group；22nd, linear stepping motor A；23rd, moving lens Microscope group；24th, line slideway A；25th, feed screw nut A；26th, optoelectronic switch；27th, anti-wound plate；28th, fixed plate；29th, optoelectronic switch branch Frame；30th, distant view lamp window；31st, illumination region.

Embodiment

Below in conjunction with accompanying drawing, the utility model is described in further detail.

Embodiment 1：

Referring to Fig. 1-5, a kind of X-fluorescence test device of coating, including optical system for testing and imaging optical path, wherein,

The optical system for testing include X-ray light pipes 8, the top of X-ray light pipes 8 be provided with X-ray light pipes briquetting 1, under Side is provided with speculum 7, and is provided with the speculum installation axle 15 for installing speculum 7, is additionally provided with for fixation reflex The speculum tabletting 16 of mirror 7, is provided with collimater 14 below the speculum 7, and the lower section of collimater 14 is provided with close shot Close shot LED lamp cover 11 is additionally provided with LED 17, close shot LED 17；

The imaging optical path includes detector 12, and the detector 12 is located at the side of the speculum 7, in addition to fixation Lens microscope group 21, moving lens microscope group 23 and CCD9, in addition to linear stepping motor A22, line slideway A24, linear stepping electricity Machine B19 and line slideway B18, the linear stepping motor A22 export rotating torque, and driving is fixed on the frame of moving lens microscope group 23 On feed screw nut A25 movement, so as to drive moving lens microscope group 23 to be moved on line slideway A24；The linear stepping electricity Machine B19 exports rotating torque, and driving is fixed on the feed screw nut B10 movements on the fixed frame of lens microscope group 21, so as to drive fixation Lens microscope group 21 is moved on line slideway B (18)；

Also include the anti-hardened structure of wound, the anti-hardened structure of wound includes anti-wound plate 27, and the anti-wound plate 27 is located at whole device Bottom, anti-wound plate 27 top is set is provided with optoelectronic switch 26 in fixed plate 28, the fixed plate 28；

The anti-wound plate 27 is connected with fixed plate 28 by bolt structure,

Specifically, the hardened structure of anti-wound of the present apparatus, any point is contacted with sample in the anti-wound areal extent of plate 27, is surveyed Moving up and down between examination plane and setting-out plane (such as Fig. 3) stops；Optoelectronic switch 26 is fixed by optoelectronic switch support 29 In fixed plate 28, there are four anti-wound plate studs 13 corner on anti-wound plate 27, and screw 2 passes through through the via in fixed plate 28 Pad 30 is connected with the anti-wound plate stud 13 on anti-wound plate 27, and anti-wound plate 27 can be by anti-wound plate stud 13 in fixed plate 28 Via is moved up and down, and because pad 30 is more than the via of fixed plate 28, therefore anti-wound plate 27 is unlikely to fall down, due to anti-wound plate spiral shell Post 13 and the interporal lacuna excessively of fixed plate 28 are larger, and anti-wound plate 27 also can be tilted；Due to the anti-wound plate stud 13 of anti-wound plate 27 In the corner of anti-wound plate 27, and anti-wound plate 27 is fixed with anti-wound plate light barrier 5, and the anti-wound optional position of plate 27 contacts inevitable with sample Cause anti-wound plate 27 to tilt or move up and down, at least one anti-wound plate light barrier 5 in four anti-wound plate light barriers 5 thereon can be made It is moved and blocks the light beam of the opposite face of optoelectronic switch 26, so as to sends between signal pulse test plane and setting-out plane Move up and down and stop.

Whole light path system includes imaging optical path and optical system for testing, two-way optical system in speculum 7 the following is coaxial, It is same point with imaging system central point to ensure X-ray fluorometric investigations point, can preferably realize intuitive and accurate test effect；

The X-fluorescence ray sent by X-ray light pipes 8 from X-fluorescence is by the aperture on speculum 7 and through collimater seat A micropore in 4 micropores of the collimater 14 (lead glass) on 20, gets to test planar sample surface, and Secondary radiation enters In detector, through signal transacting, the composition of sample is detected.The image of test point is reflected by collimater 14 (lead glass) Mirror 7 reflects and by fixed lens microscope group 21, moving lens microscope group 23, by video imaging on CCD9 target surface, in image Heart position is the position of sample measurement point.Linear stepping motor A22 exports rotating torque in Fig. 5, and driving is fixed on movable saturating Feed screw nut A25 movements on the frame of mirror microscope group 23, so that drive moving lens microscope group 23 to be moved on line slideway A24, two The position of optoelectronic switch 26 corresponds to setting-out plane respectively and tests the sharp image of plane,

The present apparatus has two sets of illuminators, as shown in Figure 3 and Figure 4, and the lighting angle of close shot LED 17 is 150 degree, four lamps Illumination region 31 in the overlapping illumination region such as Fig. 4 of pearl, can be by viewing area Uniform Illumination, and close shot LED lamp cover 11 is scattering Plate material, can uniform illumination, no light and shade phenomenon；Distant view LED 3 is a light bar containing three lamp beads, is laid out as shown in Fig. 2 LED Lighting angle be 140 degree, distant view lamp window 30 determines the scope of illumination, and the overlapping region of three directional lightings is such as Fig. 3 Shown in illumination region 31.

Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model Any modifications, equivalent substitutions and improvements made within the spirit and principle of utility model etc., should be included in the utility model Protection domain within.

Claims (5)

1. a kind of X-fluorescence test device of coating, it is characterised in that：Including optical system for testing and imaging optical path, wherein,

The optical system for testing include X-ray light pipes (8), be provided with above the X-ray light pipes (8) X-ray light pipes briquetting (1), Lower section is provided with speculum (7), and is provided with the speculum installation axle (15) for installing speculum (7), in the speculum (7) lower section is provided with below collimater (14), the collimater (14) and is provided with close shot LED (17)；

The imaging optical path includes detector (12), and the detector (12) is located at the side of the speculum (7), in addition to solid Fix-focus lens microscope group (21), moving lens microscope group (23) and CCD (9), in addition to linear stepping motor A (22), line slideway A (24), linear stepping motor B (19) and line slideway B (18), the linear stepping motor A (22) exports rotating torque, driving The feed screw nut A (25) being fixed on moving lens microscope group (23) frame is mobile, so as to drive moving lens microscope group (23) in straight line Guide rail A is moved on (24)；The linear stepping motor B (19) exports rotating torque, and driving is fixed on fixed lens microscope group (21) Feed screw nut B (10) on frame is mobile, so as to drive fixed lens microscope group (21) to be moved on line slideway B (18)；

Optical system for testing and the imaging optical path system is coaxial below speculum；

Also include the anti-hardened structure of wound, the anti-hardened structure of wound includes anti-wound plate (27), and the anti-wound plate (27) is located at whole device Bottom, set above anti-wound plate (27) and be provided with optoelectronic switch (26) on fixed plate (28), the fixed plate (28).

2. a kind of X-fluorescence test device of coating according to claim 1, it is characterised in that：It is additionally provided with for fixing The speculum tabletting (16) of speculum (7).

3. a kind of X-fluorescence test device of coating according to claim 1, it is characterised in that：The close shot LED (17) On be additionally provided with close shot LED lamp cover (11).

4. a kind of X-fluorescence test device of coating according to claim 1, it is characterised in that：It is described it is anti-wound plate (27) with Fixed plate (28) is connected by bolt structure.

5. a kind of X-fluorescence test device of coating according to claim 1, it is characterised in that：The optoelectronic switch (26) It is fixed on by optoelectronic switch support (29) in fixed plate (28).