CN206599605U - The high temperature evaporation stove manufactured for thin-film solar cells - Google Patents
The high temperature evaporation stove manufactured for thin-film solar cells Download PDFInfo
- Publication number
- CN206599605U CN206599605U CN201720167639.8U CN201720167639U CN206599605U CN 206599605 U CN206599605 U CN 206599605U CN 201720167639 U CN201720167639 U CN 201720167639U CN 206599605 U CN206599605 U CN 206599605U
- Authority
- CN
- China
- Prior art keywords
- crucible
- conducting element
- heat
- heat screen
- high temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The high temperature evaporation stove manufactured for thin-film solar cells, including conducting element, hoisting flange, heat screen, crucible, diversion heating device, crucible heater；The heat screen is located at conducting element and crucible periphery, and the conducting element is tubular, hollow structure, and crucible is the tank container with an opening, and conducting element is with crucible by opening in communication, and the side wall of the conducting element is provided with the spray orifice of transmissive material；The diversion heating device is arranged on conducting element periphery, and the diversion heating device sets and is arranged on by the retainer ring with insulating properties between conducting element and heat screen；The crucible heater is arranged on crucible periphery, and the crucible heater is arranged between crucible and heat screen；Heat screen side wall is provided with the passage of correspondence spray orifice, and conducting element and heat screen are assembled and fixed by the hoisting flange.
Description
Technical field
The utility model is related to the high temperature evaporation stove manufactured for thin-film solar cells, and height can not be born by being particularly suitable for use in
The coating process of adiabator.
Background technology
In the preparation technology of copper-indium-galliun-selenium film solar cell light absorbing layer, its evaporation process includes three phases：The
One stage：Underlayer temperature is controlled at 200 DEG C~300 DEG C, the evaporating temperature of gallium is controlled between 900 DEG C~1100 DEG C, and the
One stage equably cooled 35 DEG C~45 DEG C, controlled the evaporating temperature of indium between 800 DEG C~1000 DEG C, and equal in the first stage
Heat up evenly 45 DEG C~55 DEG C, control the evaporating temperature of selenium between 200 DEG C~300 DEG C；Second stage：Stop evaporation indium and
Gallium, improves underlayer temperature between 450 DEG C~600 DEG C, maintains the evaporating temperature of selenium identical with the first stage, the evaporation of control copper
Temperature is between 1300 DEG C~1500 DEG C；Phase III：Stop evaporation copper, maintain underlayer temperature identical with second stage, maintain
The evaporating temperature of selenium is identical with second stage, controls the evaporating temperature of gallium between 900 DEG C~1100 DEG C, and equal in the phase III
Heat up evenly 35 DEG C~45 DEG C, the evaporating temperature of control indium equably cools between 800 DEG C~1000 DEG C, and in the phase III
45 DEG C~55 DEG C；So as to obtain the light absorbing layer of the copper-indium-galliun-selenium film solar cell.
Four kinds of simple substance of CIGS evaporate stage by stage at different temperatures, and the evaporating temperature of copper is relative to the evaporation temperature of selenium
Degree is much higher, reaches more than 1200 degrees Celsius, the evaporating temperature of indium needs to reach more than 1000 degrees Celsius, and the evaporating temperature of gallium reaches
To more than 1100 degrees Celsius, selenium (Se) is evaporated while evaporation CIG, and the crucible of selenium (Se) stove is apart from copper stove or indium gallium stove
It is close, therefore be easily a greater impact, thus selenium evaporation rate is difficult to control to, but also the temperature in process cavity can be caused
It is too high, cause the too high damage of substrate heating temperature.
Utility model content
The purpose of this utility model is to overcome above shortcomings in the prior art, thus provide a kind of body of heater it is small,
The high temperature evaporation stove manufactured for thin-film solar cells of heat-insulated good, high temperature resistant, compact conformation.
The technical scheme in the invention for solving the above technical problem is：The high temperature manufactured for thin-film solar cells
Vapourizing furnace, including conducting element, hoisting flange, heat screen, crucible, diversion heating device, crucible heater；The heat screen, which is located at, leads
Part and crucible periphery are flowed, the conducting element is tubular, hollow structure, and crucible is the tank container with an opening, conducting element and earthenware
Crucible is by opening in communication, and the side wall of the conducting element is provided with the spray orifice of transmissive material；The diversion heating device, which is arranged on, leads
Part periphery is flowed, the diversion heating device sets and is arranged on by the retainer ring with insulating properties between conducting element and heat screen；Institute
State crucible heater and be arranged on crucible periphery, the crucible heater is arranged between crucible and heat screen；It is described heat-insulated
Shield the passage that side wall is provided with correspondence spray orifice, conducting element and heat screen are assembled and fixed by the hoisting flange.
Furtherly, in addition to shower nozzle, the shower nozzle is in broadening formation, and shower nozzle is arranged on correspondence spray orifice in passage and set.
Furtherly, the conducting element is threadedly coupled with crucible, and the sealing surface of the conducting element and crucible is in edge of a knife shape, is led
Flow and seal is provided between part and the sealing surface of crucible, seal is graphite material.
Furtherly, the aperture of the spray orifice is 0.5 to 12mm, and the quantity of the spray orifice is 1 to 50.Technique effect：
In order to adapt to more evaporate effective breadth.
Furtherly, the pore size of each spray orifice differs, the spacing between spray orifice.
Furtherly, the diversion heating device and crucible heater include calandria and diversion heating device electrode, heating
Body connects diversion heating device electrode, and the diversion heating device uses screw connection with conducting element, and the screw is graphite, tantalum, molybdenum
It is any in material.
Furtherly, heat screen includes being arranged on the conducting element heat screen of conducting element periphery, is arranged on the earthenware of crucible periphery
Crucible heat screen, the conducting element heat screen mutually splices with crucible heat screen, if the conducting element heat screen includes dried layer heat shield,
If the heat shield of dried layer is mutually arranged from inside to outside, there is clearance distance between each heat shield.
Furtherly, any using graphite, tantalum, in Mo of the heat screen, crucible or its be mutually combined.
Furtherly, in addition to water cooled pipeline, the water cooled pipeline is arranged on the outermost layer of heat screen, the water cooled pipeline
It is to be welded on the outermost outside of heat screen using stainless steel materials.
Furtherly, the heat shield is cylindrical, and the heat shield includes more than half disk and smaller part disk, more than half disk
Single heat shield is constituted with the split of smaller part disk phase, each layer heat shield its splicing line when setting is staggered in left and right.
The utility model compared with prior art, with advantages below and effect：
1st, the utility model compact overall structure, good heat insulating, and can effectively blocking radiant heat, overall structure assembling side
Just, heat transfer of being tried one's best between thermal insulation layer is small, and evaporation is uniform.
2nd, the utility model applies to the evaporation source stove of various high temperature evaporation equipment, and high temperature can not be born by being particularly suitable for use in
The coating process of material：Such as the copper indium gallium selenium solar cell preparation technology of solar energy industry.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of heat screen described in the utility model.
Fig. 3 is the structural representation of heat shield described in the utility model.
Embodiment
Below in conjunction with the accompanying drawings and the utility model is described in further detail by embodiment, following examples are pair
It is of the present utility model explanation and the utility model is not limited to following examples.
Embodiment 1
Referring to Fig. 1 to Fig. 3, the high temperature evaporation stove that thin-film solar cells is manufactured, including water conservancy diversion are used for described in the present embodiment
Part 1, hoisting flange 2, heat screen 3, crucible 4, diversion heating device 5, crucible heater 6；The heat screen 3 is located at the He of conducting element 1
The periphery of crucible 4, the conducting element 1 is tubular, hollow structure, and crucible 4 is the tank container with an opening, conducting element 1 and crucible
4 by opening in communication, and the side wall of the conducting element 1 is provided with the spray orifice 10 of transmissive material；The diversion heating device 5 is arranged on
The periphery of conducting element 1, the diversion heating device 5 is set is arranged on conducting element 1 and heat screen 3 by the retainer ring 7 with insulating properties
Between；The crucible heater 6 is arranged on the periphery of crucible 4, the crucible heater 6 be arranged on crucible 4 and heat screen 3 it
Between；The side wall of heat screen 3 is provided with the passage of correspondence spray orifice 10, and the hoisting flange 2 assembles conducting element 1 and heat screen 3 solid
It is fixed.
The present embodiment also includes shower nozzle 8, and the shower nozzle 8 is in broadening formation, and shower nozzle 8 is arranged on correspondence spray orifice 10 in passage and set
Put.
Conducting element 1 is threadedly coupled with crucible 4 described in the present embodiment, and the sealing surface of the conducting element 1 and crucible 4 is in the edge of a knife
Seal is provided between the sealing surface of shape, conducting element 1 and crucible 4, seal is graphite material.Connected using engagement thread, and
It is in edge-shaped face that sealing surface, which is made, and increases graphite pads as seal, and it has excellent sealing effectiveness.
The aperture r of spray orifice 10 described in the present embodiment is 0.5 to 12mm, and the quantity of the spray orifice 10 is 1 to 50, each spray orifice
10 aperture r is not of uniform size, the spacing between spray orifice 10.The structure has sputtering operation uniform, is suitable for more steamings
The characteristics of sending out breadth effective.
Diversion heating device 5 described in the present embodiment and crucible heater 6 include calandria and diversion heating device electrode, heating
Body connects diversion heating device electrode, and the diversion heating device 5 and conducting element 1 use screw connection, the screw be graphite, tantalum,
It is any in Mo.Using exotic materials such as tantalum, molybdenums, the characteristics of with brittle failure is difficult.
Heat screen 3 described in the present embodiment includes being arranged on the conducting element heat screen 31 of the periphery of conducting element 1, is arranged on crucible 4
The crucible heat screen 32 of periphery, the conducting element heat screen 31 mutually splices with crucible heat screen 32, the conducting element heat screen 31
If including dried layer heat shield 311, if the heat shield 311 of dried layer is mutually arranged from inside to outside, there is gap between each heat shield 311
Fixed between distance, each heat shield 311 using bolt.The structure has combination assembling simple, the features such as heat-proof quality is excellent.
Heat screen 3, crucible 4 described in the present embodiment can use any or its mutual group in graphite, tantalum, Mo
Close.
The present embodiment also includes water cooled pipeline 9, and the water cooled pipeline 9 is arranged on the outermost layer of heat screen 3, the water cooling tube
Road 9 is to be welded on the outermost outside of heat screen 3 using stainless steel materials.The temperature-controlled of water cooled pipeline 9 is set, using stainless
Steel board is directly fitted and directly contacts high with control accuracy between the setting Water cooling medium of heat screen 3 and heat screen 3, and saves material
The advantages of material.
Heat shield 311 is cylindrical described in the present embodiment, and the heat shield 311 includes more than half disk 3112 and smaller part disk
3111, more than half phase split of disk 3112 and smaller part disk 3111 constitutes single heat shield 311, and each layer heat shield 311 is when setting
Its splicing line is staggered in left and right.The overall manufacturing process of heat screen 3 is structure using assembling, simple and quick etc. with assembling
Feature, integrally-built harmony can be ensured by being staggered.
Above content described in this specification is only to the utility model example explanation.The utility model
Person of ordinary skill in the field can make various modifications or supplement to described specific embodiment or use class
As mode substitute, content without departing from the utility model specification or surmount model defined in the claims
Enclose, protection domain of the present utility model all should be belonged to.
Claims (10)
1. for thin-film solar cells manufacture high temperature evaporation stove, it is characterized in that, including conducting element, hoisting flange, heat screen,
Crucible, diversion heating device, crucible heater；The heat screen is located at conducting element and crucible periphery, and the conducting element is that tubulose is empty
Core structure, crucible is the tank container with an opening, and conducting element passes through opening in communication, the side wall of the conducting element with crucible
Spray orifice provided with transmissive material；The diversion heating device is arranged on conducting element periphery, and the diversion heating device is set by tool
The retainer ring for having insulating properties is arranged between conducting element and heat screen；The crucible heater is arranged on crucible periphery, the earthenware
Crucible heater is arranged between crucible and heat screen；Heat screen side wall is provided with the passage of correspondence spray orifice, the lifting
Conducting element and heat screen are assembled and fixed by flange.
2. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：Also include spray
Head, the shower nozzle is in broadening formation, and shower nozzle is arranged on correspondence spray orifice in passage and set.
3. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：The conducting element
It is threadedly coupled with crucible, the sealing surface of the conducting element and crucible is in edge of a knife shape, is provided between conducting element and the sealing surface of crucible
Seal, seal is graphite material.
4. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：The spray orifice
Aperture is 0.5 to 12mm, and the quantity of the spray orifice is 1 to 50.
5. the high temperature evaporation stove manufactured as claimed in claim 2 for thin-film solar cells, it is characterized in that：The hole of each spray orifice
Footpath is not of uniform size, the spacing between spray orifice.
6. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：The water conservancy diversion adds
Hot device and crucible heater include calandria and diversion heating device electrode, and calandria connection diversion heating device electrode is described to lead
Stream heater uses screw connection with conducting element, and the screw is any in graphite, tantalum, Mo.
7. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：Heat screen includes
Be arranged on conducting element periphery conducting element heat screen, be arranged on crucible periphery crucible heat screen, the conducting element heat screen with
Crucible heat screen mutually splices, if the conducting element heat screen includes dried layer heat shield, if the heat shield of dried layer is mutual from inside to outside
It is arranged, there is clearance distance between each heat shield.
8. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：It is described heat-insulated
Any using graphite, tantalum, in Mo of screen, crucible or its be mutually combined.
9. the high temperature evaporation stove manufactured as claimed in claim 1 for thin-film solar cells, it is characterized in that：Also include water cooling
Pipeline, the water cooled pipeline is arranged on the outermost layer of heat screen, the water cooled pipeline be welded on using stainless steel materials it is heat-insulated
Shield outermost outside.
10. the high temperature evaporation stove manufactured as claimed in claim 7 for thin-film solar cells, it is characterized in that：It is described heat-insulated
Piece is cylindrical, and the heat shield includes more than half disk and smaller part disk, and more than half disk and smaller part disk phase split composition is single
Heat shield, each layer heat shield its splicing line when setting is staggered in left and right.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720167639.8U CN206599605U (en) | 2017-02-24 | 2017-02-24 | The high temperature evaporation stove manufactured for thin-film solar cells |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720167639.8U CN206599605U (en) | 2017-02-24 | 2017-02-24 | The high temperature evaporation stove manufactured for thin-film solar cells |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206599605U true CN206599605U (en) | 2017-10-31 |
Family
ID=60147065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720167639.8U Active CN206599605U (en) | 2017-02-24 | 2017-02-24 | The high temperature evaporation stove manufactured for thin-film solar cells |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206599605U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637091A (en) * | 2017-02-24 | 2017-05-10 | 旭科新能源股份有限公司 | High-temperature evaporation furnace for manufacturing thin film solar cell |
-
2017
- 2017-02-24 CN CN201720167639.8U patent/CN206599605U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637091A (en) * | 2017-02-24 | 2017-05-10 | 旭科新能源股份有限公司 | High-temperature evaporation furnace for manufacturing thin film solar cell |
| CN106637091B (en) * | 2017-02-24 | 2019-08-30 | 旭科新能源股份有限公司 | High temperature evaporation furnace for thin-film solar cells manufacture |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Hao et al. | VO2/TiN plasmonic thermochromic smart coatings for room‐temperature applications | |
| Kawaharamura | Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow | |
| Li et al. | 3D printed high performance silver mesh for transparent glass heaters through liquid sacrificial substrate electric‐field‐driven jet | |
| Wang et al. | Water Skin Effect and Arched Double‐Sided Evaporation for Boosting All‐Weather High Salinity Desalination | |
| JP5766720B2 (en) | Heating system for vapor deposition sources | |
| US9428832B2 (en) | Heat equalizer | |
| Kumari et al. | Optical and structural properties of ZnO thin films prepared by spray pyrolysis for enhanced efficiency perovskite solar cell application | |
| CN104726844A (en) | Method for growing ultra-strong light absorption carbon nano tube coating on titanium alloy substrate | |
| CN109652762A (en) | A kind of preparation method of antimony sulphur selenium alloy film | |
| BR112018014868A2 (en) | ALLOY POWDER AND PREPARATION METHOD | |
| CN206599605U (en) | The high temperature evaporation stove manufactured for thin-film solar cells | |
| CN103866239A (en) | Linear evaporation source device | |
| CN106637091A (en) | High-temperature evaporation furnace for manufacturing thin film solar cell | |
| Gu et al. | Optical, electrical and structural properties of aluminum-doped nano-zinc oxide thin films deposited by magnetron sputtering | |
| CN104962872B (en) | A kind of method of regulation and control amorphous silicon membrane optical band gap | |
| CN203586789U (en) | Self-sustaining type crucible | |
| CN110116208A (en) | Electron beam fuse deposits dynamic liquid cooling apparatus and whole cooling means | |
| Guo et al. | Enhanced Steam Temperature Enabled by a Simple Three‐Tier Solar Evaporation Device | |
| CN102943242A (en) | Radio-frequency ionization selenium source device | |
| CN108286833A (en) | Dark volume absorption-type coating, photothermal conversion component and solar water heater comprising it | |
| WO2016181692A1 (en) | Steam circulation regeneration system | |
| CN202968676U (en) | Linear evaporation source device | |
| El-Denglawey et al. | Dependence of new environmental nano organic semiconductor nickel-(II)-tetraphenyl-21H, 23H-porphyrin films on substrate type for energy storage applications | |
| CN204727990U (en) | Ultrahigh vacuum(HHV) molecular beam epitaxy evaporation unit | |
| CN102231291A (en) | Preparation apparatus and preparation method of coating layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |