CN206595902U - Ion pump power - Google Patents
Ion pump power Download PDFInfo
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- CN206595902U CN206595902U CN201720278043.5U CN201720278043U CN206595902U CN 206595902 U CN206595902 U CN 206595902U CN 201720278043 U CN201720278043 U CN 201720278043U CN 206595902 U CN206595902 U CN 206595902U
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Abstract
The utility model discloses ion pump power, including power input, Buck conversion circuit, push-pull circuit, voltage doubling rectifing circuit and power output end, power input electrically connects the input of Buck conversion circuit；The output end of Buck conversion circuit connects the input of push-pull circuit；The output end of push-pull circuit connects the input of voltage doubling rectifing circuit；The output end connection power output end of voltage doubling rectifing circuit；The ion pump power also includes output current collection feedback circuit, feedback control circuit and isolation drive transformer circuit；The input of output current collection feedback circuit connects the output end of voltage doubling rectifing circuit；The output end of output current collection feedback circuit connects the input of feedback control circuit；The output end of feedback control circuit connects the input of isolation drive transformer circuit；Isolation drive transformer circuit connects Buck conversion circuit.The utility model small volume, lightweight, more economical actual effect while feedback regulation is had concurrently.
Description
Technical field
The utility model is related to ionic pump, and in particular to ion pump power.
Background technology
Sputter ion pump is widely used in leptosomatic airtight vacuum system, such as particle accelerator, synchrotron radiation light source, material
Surface analysis equipment, photoinjectors etc..Ion pump power is sputter ion pump critical component, vacuum system master take out sputtering from
Sub- pump, the final vacuum of its own is usually required that designs high half of the order of magnitude of vacuum to an order of magnitude than device, therefore,
Research and develop 10-10Pa sputter ion pump, output characteristics, weight, volume and the ripple of ion pump power are key factors.
Ion pump power has electric resistance partial pressure type, leakage transformer formula.Electric resistance partial pressure type, its output characteristics is poor, without anti-
Feedback regulation, maximum output voltage changes and changed with input voltage.Leakage transformer formula ion pump power, working stability is repeated
Property is good, but can't be satisfactory in terms of weight, volume and ripple.
Utility model content
In view of the above-mentioned problems, the utility model proposes a kind of small volume, lightweight, the ionic pump electricity with feedback regulation
Source.
The technical solution of the utility model is：A kind of ion pump power, including power input, Buck conversion circuit,
Push-pull circuit, voltage doubling rectifing circuit and power output end, the power input electrically connect the defeated of the Buck conversion circuit
Enter end；The output end of the Buck conversion circuit connects the input of the push-pull circuit；The output end of the push-pull circuit
Connect the input of the voltage doubling rectifing circuit；The output end of the voltage doubling rectifing circuit connects the power output end；Should be from
Sub- pumping source also includes output current collection feedback circuit, the feedback control circuit provided with ± 12V voltage input ends and isolation and driven
Dynamic transformer circuit；The input of the output current collection feedback circuit connects the output end of the voltage doubling rectifing circuit；Institute
The output end for stating output current collection feedback circuit connects the input of the feedback control circuit；The feedback control circuit
Output end connects the input of the isolation drive transformer circuit；The output end connection institute of the isolation drive transformer circuit
State the input of Buck conversion circuit.
It may further be preferable that the Buck conversion circuit includes first that drain electrode is connected with the power input
Metal-oxide-semiconductor；The source electrode and grid of first metal-oxide-semiconductor are connected with the isolation drive transformer circuit；First metal-oxide-semiconductor
Source electrode is also associated with the diode of inductance and ground connection.
It is even furthermore preferable that the transformer lines of the push-pull circuit include two the first main coils in parallel and the
Two main coils, and a corresponding secondary coil；One end of first main coil is connected with the source electrode of the second metal-oxide-semiconductor, the
The other end of one main coil connects the inductance；One end of second main coil is connected with the source electrode of the 3rd metal-oxide-semiconductor, the second master
The other end of coil connects the inductance；The drain electrode of second metal-oxide-semiconductor and the 3rd metal-oxide-semiconductor is grounded；Second metal-oxide-semiconductor and
The grid of 3rd metal-oxide-semiconductor is all connected with the feedback control circuit；The two ends of the secondary coil connect the voltage doubling rectifing circuit
Input.
It is even furthermore preferable that the output current collection feedback circuit includes first input end and connects the secondary coil
The first operational amplifier；The output end of first operational amplifier is telemetering of current output end；First operation amplifier
Second input of device is connected with the output end of the second operational amplifier；The first input end connection of second operational amplifier
There is the output end of the 3rd operational amplifier；Second input end grounding of second operational amplifier；Second operation amplifier
Resistance is parallel between the first input end and output end of device；The first input end of 3rd operational amplifier is connected by resistance
Connect the output end of the voltage doubling rectifing circuit；Second input of the 3rd operational amplifier connects its output end；Described
Be parallel between the first input end of the first input end of one operational amplifier and the 3rd operational amplifier one ground connection
Resistance is bypassed；The output end of 3rd operational amplifier also by a resistance be connected with four-operational amplifier it is first defeated
Enter end；The output end of the four-operational amplifier is voltage telemeering output end；Second input of the four-operational amplifier
End connects its output end.
It is even furthermore preferable that the feedback control circuit includes model UC1823A the first PWM controller, institute
State the input of controller, output end and be connected to the output end of the 5th operational amplifier and model ICL7667 the first drive
Dynamic chip；The first input end of 5th operational amplifier connects the output end of the 3rd operational amplifier；Described 5th
Second input of operational amplifier is connected with the output end of the 6th operational amplifier as differential pressure conditioning；6th fortune
Two inputs for calculating amplifier are voltage-controlled input port；The first input end connection of 5th operational amplifier and output end
Also it is parallel with the first bypass and a bypass for being provided with electric capacity；The electric capacity and resistance of first bypass provided with series connection；It is described
First driving chip connects the grid and source electrode of the Buck conversion circuit by the isolation drive transformer circuit；It is described
Feedback control circuit also includes model UC1825A the second PWM controller；Second PWM controller passes through a model
Drain electrode and the grid of second metal-oxide-semiconductor and the 3rd metal-oxide-semiconductor are connected respectively for ICL7667 the second driving chip.
It is even furthermore preferable that being also in series with input excessively stream between the power input and Buck conversion circuit
Protection circuit, switching on and shutting down control circuit, condition indication circuit and filter circuit.
It is even furthermore preferable that the input overcurrent protection circuit is connected to first resistor including two inputs
The 7th front and rear operational amplifier；The switching on and shutting down control circuit includes modulate circuit, triode, second resistance and the 4th MOS
Pipe；Resistance bypass and capacitive bypass are parallel between the drain and gate of 4th metal-oxide-semiconductor；The input of the modulate circuit
For the switching on and shutting down instruction input port of the ion pump power；The output end of the modulate circuit connects the base stage of the triode；
The grounded emitter of the triode；The two ends of the second resistance connect the colelctor electrode and the described 4th of the triode respectively
The grid of metal-oxide-semiconductor；The condition indication circuit includes the 4th resistance and the 5th resistance of series connection, the 5th resistance eutral grounding；Institute
State the indicator lamp that ground connection is connected between the 4th resistance and the 5th resistance；The filter circuit includes the L-shaped inductance of two series connection
Capacitor filter；The two ends of the filter circuit connect the source electrode and Buck conversion circuit of the 4th metal-oxide-semiconductor respectively；Institute
The 4th resistance is stated to be connected between the source electrode of the 4th metal-oxide-semiconductor and filter circuit；The two ends of the first resistor are connected respectively
The drain electrode of the power input and the 4th metal-oxide-semiconductor；The output end of 7th operational amplifier connects the 2nd PWM controls
Device.
It is even furthermore preferable that the push-pull circuit and voltage doubling rectifing circuit outer layer scribble one layer of casting glue, Ke Yiyou
Effect prevents the influence of the factors such as extraneous salt air corrosion, acid and alkali corrosion, moisture, vibration, is to stop that external influence factor corrodes
First of gate of circuit board, is also to reduce circuit board damage, one of guarantee in extension circuit board life-span.
The beneficial effects of the utility model are：
1st, ion pump power is realized using high frequency switch power principle so that ion pump volume is smaller, weight is lighter.Pass through
Reliability prediction and assessment are so as to ensure that highly reliable, the progress component design of Reducing Rating of power circuit design ensure that component works
Surplus, progress control upon using components ensure that component quality is reliable, realize the highly reliable of power supply, realize sturdy durable.Pass through
Isolation Sampling techniques realize the collection of ion pump power electric current, realize and can detect nA grades of electric currents and nA grades of resolution.To use
Ion pump current characterizes 10-9More than Pa vacuums.The multiple outputs of a power supply are realized, can simultaneously be supplied to multiple same specification ionic pumps
Electricity, reduces use cost, more economical durable.
2nd, output voltage maximum 6KV, is difficult to ensure that insulating requirements, using multistage using the direct boosting mode of conventional transformer
Multiplication of voltage mode, effectively disperses each device electric stress, while transformer secondary output voltage can be reduced, simplifies transformer winding difficult
Degree.
3rd, simple in construction, switch transformer magnetic core utilization rate is high, when push-pull circuit works, two symmetrical power switch pipes
Each only one of which conducting, so conduction loss is small.
4th, overcurrent protection function is realized by current acquisition feedback circuit, effectively avoids transformer bias problem, reduced
Device burns phenomenon, improves reliability.
5th, integrated UC1823A controllers and UC1825A controller output pwm signals are used in feedback control circuit, is had
Do not occur circuit with traditional PWM, make design less using element, be conducive to cost-effective and reduce volume, enhancing power supply
Maintainability.
6th, by overcurrent protection function, reduce loss, lift response speed；Circuit is controlled to control ionic pump by switching on and shutting down
The Qi Heting of power supply, accomplishes the circuit control of timely safety；By the state of condition indication circuit display circuit, to accomplish tight
Timely processing in the case of urgency, improves security performance；The noise produced is reduced by filter circuit, it is ensured that the normal work of system
Make.
7th, condition indication circuit is to power work state, real-time fault detection, to output voltage remote measurement, collection 6KV switches
Machine state, realizes being effectively isolated for failure, reduces fault detect difficulty, improves reliability；Before power supply overall efficiency is ensured
Put, in the first MOS transistor device circuit design, gate pole current-limiting resistance is increased as far as possible, reduce the switching rate of the first metal-oxide-semiconductor,
Switching noise is reduced, ringing caused by stray inductance, parasitic capacitance is effectively suppressed；Designed in ion pump power
Have the filtering of two-stage LC differential modes, inductance uses high magnetic flux magnetic core, and electric capacity uses ceramic condenser, and frequency response characteristic is good, to conduction and
Transmitting has good effect.
8th, the influence of the factors such as extraneous salt air corrosion, acid and alkali corrosion, moisture, vibration can be effectively prevented, is to stop
External influence factor corrodes first of gate of circuit board, is also to reduce circuit board damage, one of guarantor in extension circuit board life-span
Barrier.
Brief description of the drawings
Fig. 1 is the circuit diagram of ion pump power of the present utility model；
Fig. 2 is the amplification circuit diagram of Buck conversion circuit of the present utility model and push-pull circuit bound fraction；
Fig. 3 is the whole structure circuit diagram of voltage doubling rectifing circuit of the present utility model；
Fig. 4 is integrated circuit when switching on and shutting down of the present utility model control circuit and the condition indication circuit to be combined together
Figure；
Fig. 5 is the whole structure circuit diagram of input overcurrent protection circuit of the present utility model；
Fig. 6 is the whole structure circuit diagram of filter circuit of the present utility model.
Reference：1- power inputs, 2- Buck conversion circuits, 3- push-pull circuits, 4- voltage doubling rectifing circuits, 5- electricity
Source output terminal, 6- current acquisition feedback circuits, 7- feedback control circuits, 8- isolation drive transformer circuits, the metal-oxide-semiconductors of 9- first,
The metal-oxide-semiconductors of 10- second, the metal-oxide-semiconductors of 11- the 3rd, the operational amplifiers of 12- first, the operational amplifiers of 13- second, the operation amplifiers of 14- the 3rd
Device, 15- four-operational amplifiers, the PWM controllers of 16- first, the operational amplifiers of 17- the 5th, the driving chips of 18- first, 19-
Six operational amplifiers, the PWM controllers of 20- second, the driving chips of 21- second, 22- input overcurrent protection circuits, 23- switching on and shutting down controls
Circuit processed, 24- filter circuits, the operational amplifiers of 25- the 7th, 26- modulate circuits, 27- triodes, the 4th metal-oxide-semiconductor described in 28-.
Embodiment
The technical solution of the utility model is described in detail below, it should be noted that following is only this practicality
New preferred embodiment, for the person of ordinary skill of the art, design is created not departing from the utility model
Under the premise of, various modifications and improvements can be made, these should belong to protection domain of the present utility model.
As shown in figs. 1 to 6, a kind of ion pump power, including power input 1, Buck conversion circuit 2, push-pull circuit
3rd, voltage doubling rectifing circuit 4 and power output end 5, the power input 1 electrically connect the input of the Buck conversion circuit 2
End；The output end of the Buck conversion circuit 2 connects the input of the push-pull circuit 3；The output end of the push-pull circuit 3
Connect the input of the voltage doubling rectifing circuit 4；The output end of the voltage doubling rectifing circuit 4 connects the power output end 5；Should
Ion pump power also include output current collection feedback circuit 6, the feedback control circuit 7 provided with ± 12V voltage input ends and every
From driving transformer circuit 8；The input of the output current collection feedback circuit 6 connects the defeated of the voltage doubling rectifing circuit 4
Go out end；The output end of the output current collection feedback circuit 6 connects the input of the feedback control circuit；The feedback control
The output end of circuit 7 processed connects the input of the isolation drive transformer circuit 8；The isolation drive transformer circuit 8
Output end connects the input of the Buck conversion circuit 2.
Ion pump power input carries out boosting isolation, most after Buck conversion circuit by push-pull circuit transformer
Reach that ± 6KV is exported after the voltage multiplying rectifier processing being made up of afterwards diode capacitance, ± 6KV is directly used after current-limiting resistance
High-voltage conducting wires are drawn.Output current signal is converted into voltage signal by ion pump power, delivers to output current collection feedback circuit
It is acquired；Acquisition range is 10uA~5mA.Flow through the pressure difference of sampling resistor generation to gather output current by collection, by
The electric current for flowing through internal bleeder resistance is further comprises in this collection electric current, therefore in design, is adjusted by amplifier amplifier
Reason, subtracts this portion of electrical current, reflects accurate output current size with this, reach feedback control with this to adjust the mesh of dutycycle
, by gather output voltage division signal and system control to voltage signal error amount exported to adjust feedback control circuit, by mistake
Poor amplifier by PID compensate network loop in phase and gain, by adjust the ON time of Buck conversion circuit come
Stable output.
Ion pump power is realized using high frequency switch power principle so that ion pump volume is smaller, weight is lighter.By can
It is expected by property and assesses to ensure that the highly reliable of power circuit design, the design of Reducing Rating guarantee component work of progress component are remaining
Amount, progress control upon using components ensure that component quality is reliable, realize the highly reliable of power supply, realize sturdy durable.By every
From the collection that Sampling techniques realize ion pump power electric current, realize and can detect nA grades of electric currents and nA grades of resolution.So as to can with from
Sub- pump electric current characterizes 10-9More than Pa vacuums.The multiple outputs of a power supply are realized, can simultaneously be supplied to multiple same specification ionic pumps
Electricity, reduces use cost, more economical durable.
It may further be preferable that the Buck conversion circuit 2 includes first that drain electrode is connected with the power input 1
Metal-oxide-semiconductor 9；The source electrode and grid of first metal-oxide-semiconductor 9 are connected with the isolation drive transformer circuit 8；First MOS
The source electrode of pipe 9 is also associated with the diode of inductance and ground connection.
Buck conversion circuit is operated in the frequencies of 200KHz ± 10%, and push-pull circuit always works in opening for fixed duty cycle
Ring status, by controlling opening and the turn-off time for Buck conversion circuit converter MOSFET, makes output voltage Vo meet Vo
=Vin × D relation (wherein Vin is input voltage, and D is dutycycle)；Designed using the transformer boost of push-pull circuit, finally
After voltage multiplying rectifier, the purpose of output voltage needed for realizing.Output voltage maximum 6KV, is directly boosted using conventional transformer
Mode is difficult to ensure that insulating requirements, using multistage multiplication of voltage mode, effectively disperses each device electric stress, while transformer can be reduced
Secondary output voltage, simplifies transformer winding difficulty.
It is even furthermore preferable that the push-pull circuit 3 includes two the first main coils and the second main coil in parallel, with
And a corresponding secondary coil；One end of first main coil is connected with the source electrode of the second metal-oxide-semiconductor 10, the first main coil
The other end connects the inductance；One end of second main coil is connected with the source electrode of the 3rd metal-oxide-semiconductor 11, the second main coil it is another
One end connects the inductance；The drain electrode of the metal-oxide-semiconductor 11 of second metal-oxide-semiconductor 10 and the 3rd is grounded；Second metal-oxide-semiconductor 10 and
The grid of three metal-oxide-semiconductors 11 is all connected with the feedback control circuit 7；The two ends of the secondary coil connect the voltage doubling rectifing circuit 4
Input.
Push-pull circuit converter dutycycle is designed with overlapping region (about 200ns), switching tube is operated in zero voltage turn-off
State, effectively reduces stress during pipe shut-off, reduces EMI interference, forces to carry out once in each switch periods
Magnetic reset, it is to avoid the magnetic flux imbalance problem of push-pull circuit.Simple in construction, switch transformer magnetic core utilization rate is high, recommends electricity
When road works, two symmetrical each only one of which conductings of power switch pipe, so conduction loss is small.
It is even furthermore preferable that the output current collection feedback circuit 6 includes first input end and connects the by-pass
First operational amplifier 12 of circle；The output end of first operational amplifier 12 is telemetering of current output end；First fortune
The second input for calculating amplifier 12 is connected with the output end of the second operational amplifier 13；The of second operational amplifier 13
One input is connected with the output end of the 3rd operational amplifier 14；Second input end grounding of second operational amplifier 13；
Resistance is parallel between the first input end and output end of second operational amplifier 13；3rd operational amplifier 14
First input end connects the output end of the voltage doubling rectifing circuit 4 by resistance；The second of 3rd operational amplifier 14 is defeated
Enter end and connect its output end；The first of the first input end of first operational amplifier 12 and the 3rd operational amplifier 14
The resistance bypass of a ground connection is parallel between input；The output end of 3rd operational amplifier 14 also passes through a resistance
It is connected with the first input end of four-operational amplifier 15；The output end of the four-operational amplifier 15 exports for voltage telemeering
End；Second input of the four-operational amplifier 15 connects its output end.
Output current signal is converted into voltage signal by ion pump power, is delivered to output current collection feedback circuit and is adopted
Collection；Acquisition range is 10uA~5mA.Flow through the pressure difference of sampling resistor generation to gather output current by collection, because this is adopted
Colleeting comb further comprises the electric current for flowing through internal bleeder resistance, therefore in design, be nursed one's health by operational amplifier, subtract
This portion of electrical current, reflects accurate output current size with this.Because collection current range is wide, therefore when gathering output current
The high operational amplifier of service precision is nursed one's health.Overcurrent protection function is realized by current acquisition feedback circuit, effectively kept away
Exempt from transformer bias problem, reduce device and burn phenomenon, improve reliability.
It is even furthermore preferable that the feedback control circuit 7 includes model UC1823A the first PWM controller 16,
The input of first PWM controller 16, output end are connected to the output end and model of the 5th operational amplifier 17
ICL7667 the first driving chip 18；The first input end of 5th operational amplifier 17 connects the 3rd operation amplifier
The output end of device 14；Second input of the 5th operational amplifier 17 is connected with to be put as the 6th computing of differential pressure conditioning
The output end of big device 19；Two inputs of the 6th operational amplifier 19 are voltage-controlled input port；5th computing is put
The first input end connection of big device 17 and output end are also parallel with the first bypass and a bypass for being provided with electric capacity；By in the of described first
Electric capacity and resistance of the road provided with series connection；First driving chip 18 connects institute by the isolation drive transformer circuit 8
State the grid and source electrode of Buck conversion circuit 2；The feedback control circuit 7 also the 2nd PWM including model UC1825A is controlled
Device 20 processed；Second PWM controller 20 connects described respectively by a model ICL7667 the second driving chip 21
Drain electrode and the grid of two metal-oxide-semiconductors 10 and the 3rd metal-oxide-semiconductor 11.
Push-pull circuit produces the pwm control signal that two groups of phases differ 180 ° by UC1825A, and control signal is passed through
Push-pull circuit is controlled to switch the turn-on and turn-off of metal-oxide-semiconductor after ICL7667 driving chips.By the amplifier for adjusting UC1825A circuits
Input voltage makes push-pull circuit dutycycle have the overlapping region of 200ns ± 10%.
Buck conversion circuit is made up of UC1823A, by gather output voltage division signal and system control to voltage believe
Number error amount adjusts the output of the first PWM controller, and error amplifier passes through PID and compensates phase and increasing in network building out loop
Benefit, the purpose of regulated output voltage is reached with this.
In order to reduce the noise of on-off circuit, control circuit synchronizes UC1825A and UC1823A concussion frequency,
UC1825A concussion frequency is adjusted to 200Khz ± 10%, synchronizes and sets according to the below figure UC1825A synchronous circuits recommended
Meter, makes the second PWM controller chip UC1823A frequencies of Buck conversion circuit converter synchronous with UC1825A.In feedback control
Integrated UC1823A controllers and UC1825A controller output pwm signals are used in circuit processed, it is different to occur electricity with traditional PWM
Road, makes design less using element, is conducive to cost-effective and reduces volume, strengthens the maintainability of power supply.
Inputted it is even furthermore preferable that being also in series between the power input 1 and Buck conversion circuit 2
Flow protection circuit 22, switching on and shutting down control circuit 23, condition indication circuit and filter circuit 24.
By overcurrent protection function, reduce loss, lift response speed；Circuit is controlled to control ionic pump electricity by switching on and shutting down
The Qi Heting in source, accomplishes the circuit control of timely safety；By the state of condition indication circuit display circuit, to accomplish urgent
In the case of timely processing, improve security performance；The noise produced is reduced by filter circuit, it is ensured that the normal work of system.
It is even furthermore preferable that the input overcurrent protection circuit 22 is connected to the first electricity including two inputs
The 7th operational amplifier 25 before and after resistance；The switching on and shutting down control circuit 23 includes modulate circuit 26, triode 27, second resistance
With the 4th metal-oxide-semiconductor 28；Resistance bypass and capacitive bypass are parallel between the drain and gate of 4th metal-oxide-semiconductor 28 respectively；Institute
The input for stating modulate circuit 26 is the switching on and shutting down instruction input port of the ion pump power；The output end of the modulate circuit 26
Connect the base stage of the triode 27；The grounded emitter of the triode 27；The two ends of the second resistance connect institute respectively
State the colelctor electrode of triode 27 and the grid of the 4th metal-oxide-semiconductor 28；The condition indication circuit includes the 4th resistance of series connection
With the 5th resistance, the 5th resistance eutral grounding；The indicator lamp of ground connection is connected between 4th resistance and the 5th resistance；It is described
Filter circuit 24 includes the L-shaped inductance capacitor filtering circuit of two series connection；The two ends of the filter circuit 24 connect described respectively
The source electrode and Buck conversion circuit 2 of 4th metal-oxide-semiconductor 28；4th resistance be connected to the 4th metal-oxide-semiconductor 28 source electrode and
Between filter circuit；The two ends of the first resistor connect the drain electrode of the metal-oxide-semiconductor 28 of power input 1 and the 4th respectively；Institute
The output end for stating the 7th operational amplifier 25 connects second PWM controller 16.
As shown in Fig. 3~Fig. 6, ion pump power is opened and closed, by switching on and shutting down control circuit control, when switching on and shutting down instruction
For high level, after difference processing, high level is transferred to triode V5 base stage, V5 is turned on.Now 28V inputs pass through
R29 and R35 electric resistance partial pressures, it is -10V or so to make the pressure difference of the 4th V1 source class of metal-oxide-semiconductor, reaches saturation conduction condition；Together should
When switching on and shutting down instruction level is low, V5 cut-offs, now V1 door source class pressure difference is 0V, and the 4th metal-oxide-semiconductor is closed, and realizes that switching on and shutting down are grasped
Make.After start-up command is performed, input gathers 28V input currents to realize overcurrent protection work(by input overcurrent protection circuit
Can, a sampling resistor R28 is concatenated in 28V inputs, overcurrent protection is realized by gathering the pressure difference at R28 resistance two ends, when
When R28 two ends pressure difference reaches design load, the 2nd PMW controllers are connected by OCP ends, the PMW outputs of control UC1825A chips are real
Existing overcurrent protection function.It itself is a larger EMC noise source that the working method of Switching Power Supply, which is determined, therefore in input
EMC filter circuit is designed with, filtered version is filtered using two-stage differential mode, and inductance capacitance value is all in accordance with GJB151A in filter circuit
In requirement to CE102 calculate.Differential mode inductance uses high magnetic flux magnetic core, and inductance value is 30uH, capacitance selection ceramic condenser
And self-healing electric capacity composition, realize filter function.Filtered 28V voltage signals pass through Buck conversion circuit, UC1823A cores
Piece output pwm signal, by controlling opening and the turn-off time for FET, makes output voltage V0 meet V0=Vin × D pass
System's (wherein Vin is input voltage, and D is dutycycle), obtains under the frequencies of 200KHz ± 10%, and voltage is+20V.Push-pull circuit
It is 180 ° of pwm control signals by UC1825A output phases, converts voltages into ± 20V, and pass through ferrite ETD type magnetic cores
Transformer, the circle of the primary side number of turn 10, the secondary number of turn 250 makes ± 20V voltage transformations be exported for ± 500V.The change of voltage doubling rectifing circuit
Depressor vice-side winding different name end is reference, and terminal voltage of the same name is that ± 500V frequencies are 200KHz ± 10%, when voltage is+500V
When, the cut-off of V1 diodes；When voltage is changed into -500V, C1 electric capacity is charged by V1, it is 500V, voltage to make electric capacity both end voltage
When being transformed to+500V again, because C1 both end voltages difference can not be mutated, namely C1 right-hand member voltage is changed into+1KV, and now C1 leads to
Cross V2 to charge to C7, the voltage full of C7 after voltage is+1kV, now completes 1 grade of multiplication of voltage, output voltage is changed into original
2 times.Voltage-multiplying circuit operation principle below is identical with the 1st grade, after 12 cycles, and the electric capacity of voltage-multiplying circuit is all fully charged
Afterwards, output voltage can be made to reach ± 6KV.To make output voltage accurately add current acquisition feedback circuit, mass spectrum controller is delivered to
It is acquired；Acquisition range is 10uA~5mA.Flow through the pressure difference of sampling resistor generation to gather output current by collection, by
The electric current for flowing through internal bleeder resistance is further comprises in this collection electric current, therefore in design, is nursed one's health by amplifier, is subtracted
This portion of electrical current, reflects accurate output current size with this.
Condition indication circuit makes instruction to power work state by V12, and real-time fault detection is distant to output voltage
Survey, gather 6KV on-off states, realize being effectively isolated for failure, reduce fault detect difficulty, improve reliability；Ensureing electricity
On the premise of the overall efficiency of source, in the first MOS transistor device circuit design, gate pole current-limiting resistance is increased as far as possible, the first MOS is reduced
The switching rate of pipe, reduces switching noise, ringing caused by stray inductance, parasitic capacitance is effectively suppressed；From
The filtering of two-stage LC differential modes is designed with sub- pumping source, inductance uses high magnetic flux magnetic core, and electric capacity uses ceramic condenser, and frequency response is special
Property it is good, to conduction and transmitting have good effect.
It is even furthermore preferable that the transformer lines and voltage doubling rectifing circuit outer layer of the push-pull circuit scribble one layer of filling
Sealing.
The influence of the factors such as extraneous salt air corrosion, acid and alkali corrosion, moisture, vibration can be effectively prevented, is to stop outer
Boundary's influence factor corrodes first of gate of circuit board, is also to reduce circuit board damage, one of guarantee in extension circuit board life-span.
The technical solution of the utility model can preferably be realized according to the record of this specification.
Claims (8)
1. a kind of ion pump power, it is characterised in that including power input, Buck conversion circuit, push-pull circuit, times repoussage
Current circuit and power output end, the power input electrically connect the input of the Buck conversion circuit；The buck
The output end of translation circuit connects the input of the push-pull circuit；The output end of the push-pull circuit connects the voltage multiplying rectifier
The input of circuit；The output end of the voltage doubling rectifing circuit connects the power output end；The ion pump power also includes defeated
Go out current acquisition feedback circuit, feedback control circuit and isolation drive transformer circuit provided with ± 12V voltage input ends；It is described
The input of output current collection feedback circuit connects the output end of the voltage doubling rectifing circuit；The output current collection feedback
The output end of circuit connects the input of the feedback control circuit；The output end of the feedback control circuit connects the isolation
The input of driving transformer circuit；The output end of the isolation drive transformer circuit connects the Buck conversion circuit
Input.
2. ion pump power according to claim 1, it is characterised in that the Buck conversion circuit includes drain electrode and institute
State the first connected metal-oxide-semiconductor of power input；The source electrode and grid of first metal-oxide-semiconductor are electric with the isolation drive transformer
Road is connected；The source electrode of first metal-oxide-semiconductor is also associated with the diode of inductance and ground connection.
3. ion pump power according to claim 2, it is characterised in that the transformer lines of the push-pull circuit include two
Individual first main coil and the second main coil in parallel, and a corresponding secondary coil；One end of first main coil connects
The source electrode of the second metal-oxide-semiconductor is connected to, the other end of the first main coil connects the inductance；One end of second main coil is connected with
The source electrode of 3rd metal-oxide-semiconductor, the other end of the second main coil connects the inductance；The drain electrode of second metal-oxide-semiconductor and the 3rd metal-oxide-semiconductor
It is grounded；The grid of second metal-oxide-semiconductor and the 3rd metal-oxide-semiconductor is all connected with the feedback control circuit；The two ends of the secondary coil
Connect the input of the voltage doubling rectifing circuit.
4. ion pump power according to claim 3, it is characterised in that the output current collection feedback circuit includes the
One input connects the first operational amplifier of the secondary coil；The output end of first operational amplifier is that telemetering of current is defeated
Go out end；Second input of first operational amplifier is connected with the output end of the second operational amplifier；Second computing
The first input end of amplifier is connected with the output end of the 3rd operational amplifier；Second input of second operational amplifier
Ground connection；Resistance is parallel between the first input end and output end of second operational amplifier；3rd operational amplifier
First input end the output end of the voltage doubling rectifing circuit is connected by resistance；Second input of the 3rd operational amplifier
End connects its output end；The first input end of the first input end of first operational amplifier and the 3rd operational amplifier
Between be parallel with one ground connection resistance bypass；The output end of 3rd operational amplifier is also connected with by a resistance
The first input end of four-operational amplifier；The output end of the four-operational amplifier is voltage telemeering output end；Described 4th
Second input of operational amplifier connects its output end.
5. ion pump power according to claim 4, it is characterised in that the feedback control circuit includes model
UC1823A the first PWM controller, the input of the controller, output end are connected to the output of the 5th operational amplifier
End and model ICL7667 the first driving chip；First input end connection the 3rd fortune of 5th operational amplifier
Calculate the output end of amplifier；Second input of the 5th operational amplifier is connected with the 6th computing as differential pressure conditioning
The output end of amplifier；Two inputs of the 6th operational amplifier are voltage-controlled input port；5th operation amplifier
The first input end connection of device and output end are also parallel with the first bypass and a bypass for being provided with electric capacity；In first bypass
Electric capacity and resistance provided with series connection；First driving chip connects the buck by the isolation drive transformer circuit
The grid and source electrode of translation circuit；The feedback control circuit also includes model UC1825A the second PWM controller；It is described
Second PWM controller connects second metal-oxide-semiconductor and the 3rd respectively by a model ICL7667 the second driving chip
The drain electrode of metal-oxide-semiconductor and grid.
6. ion pump power according to claim 5, it is characterised in that in the power input and buck converter electricity
Input overcurrent protection circuit, switching on and shutting down control circuit, condition indication circuit and filter circuit are also in series between road.
7. ion pump power according to claim 6, it is characterised in that the input overcurrent protection circuit is defeated including two
Enter the 7th operational amplifier that end is connected to before and after first resistor；The switching on and shutting down control circuit includes modulate circuit, three
Pole pipe, second resistance and the 4th metal-oxide-semiconductor；It is parallel between the drain and gate of 4th metal-oxide-semiconductor by resistance bypass and electric capacity
Road；The input of the modulate circuit is the switching on and shutting down instruction input port of the ion pump power；The output of the modulate circuit
The base stage of the end connection triode；The grounded emitter of the triode；The two ends of the second resistance connect described respectively
The grid of the colelctor electrode of triode and the 4th metal-oxide-semiconductor；The condition indication circuit includes the 4th resistance and the 5th of series connection
Resistance, the 5th resistance eutral grounding；The indicator lamp of ground connection is connected between 4th resistance and the 5th resistance；The filtered electrical
Road includes the L-shaped inductance capacitor filtering circuit of two series connection；The two ends of the filter circuit connect the 4th metal-oxide-semiconductor respectively
Source electrode and Buck conversion circuit；4th resistance is connected between the source electrode of the 4th metal-oxide-semiconductor and filter circuit；It is described
The two ends of first resistor connect the drain electrode of the power input and the 4th metal-oxide-semiconductor respectively；7th operational amplifier it is defeated
Go out end connection second PWM controller.
8. ion pump power according to claim 7, it is characterised in that the transformer lines and multiplication of voltage of the push-pull circuit
Rectification circuit outer layer scribbles one layer of casting glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720278043.5U CN206595902U (en) | 2017-03-21 | 2017-03-21 | Ion pump power |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720278043.5U CN206595902U (en) | 2017-03-21 | 2017-03-21 | Ion pump power |
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| Publication Number | Publication Date |
|---|---|
| CN206595902U true CN206595902U (en) | 2017-10-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720278043.5U Expired - Fee Related CN206595902U (en) | 2017-03-21 | 2017-03-21 | Ion pump power |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109842303A (en) * | 2019-01-18 | 2019-06-04 | 兰州大学 | The compact integrated power supply unit of ion accelerator |
-
2017
- 2017-03-21 CN CN201720278043.5U patent/CN206595902U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109842303A (en) * | 2019-01-18 | 2019-06-04 | 兰州大学 | The compact integrated power supply unit of ion accelerator |
| CN109842303B (en) * | 2019-01-18 | 2020-08-28 | 兰州大学 | Compact integrated power supply device for ion accelerator |
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