CN206594087U - A kind of microelectrode structural elements - Google Patents
A kind of microelectrode structural elements Download PDFInfo
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- CN206594087U CN206594087U CN201720063586.5U CN201720063586U CN206594087U CN 206594087 U CN206594087 U CN 206594087U CN 201720063586 U CN201720063586 U CN 201720063586U CN 206594087 U CN206594087 U CN 206594087U
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Abstract
The utility model discloses a kind of microelectrode structural elements, the microelectrode structural elements are included exposed to substrate (1) surface, at least one pair of electrode (2) that can be directly contacted with solution, and the metal level where electrode (2) extends respectively contact conductor (5), the pad (4) positioned at substrate (1) edge as formed by being covered insulating barrier (3)；Contact conductor (5) is connected with the electrode (2) respectively；The pad (4) of the microelectrode array and the substrate (1) edge is connected.Compared with prior art, the utility model compact, can enter Mobile state, Quantitative Monitoring, and the evaporation process of the different parts of drop is detected simultaneously to drop evaporation process.
Description
Technical field
The utility model is related to micro-fluidic technologies field, more particularly to a kind of microelectrode structural elements.
Background technology
In the prior art, detection this technology master that dynamic process is evaporated for the fine droplet that the utility model is related to
Topic, generally has three kinds of implementation methods, (1) microphotograph method, this method is that fine droplet is clapped in real time by microscope
According to so as to grasp fine droplet evaporation dynamic process, realization detection.This method is applied to the qualitative of the Volume Changes of drop
Analysis, it is relatively difficult to carry out quantitative measurment, and needs the equipment such as microscope, CCD closely to observe.(2) Weighing method, to quilt
The weight of micrometer droplet is measured, and obtains fine droplet evaporation dynamic process indirectly according to weight change.This method is fitted
In than larger drop, it is difficult to detect for the drop less than 1 microlitre of small volume, and this method can not be to drop difference portion
The evaporation rate of position is contrasted.(3) electrochemical method, using the electrochemical reaction produced by electrode and tested fine droplet,
The output current of electrode is measured based on circuit, fine droplet evaporation dynamic process is obtained indirectly according to electric current.This method can
Evaporation rate to different parts carries out dynamic monitoring, it require that chemistry occurs on electrode for specific chemical substance instead
Should, application is limited.
Utility model content
In order to overcome the defect of above-mentioned prior art, a kind of microelectrode structural elements of the present utility model, for certain ring
The fine droplet evaporation process that flat solid surface is attached in border realizes dynamic detection.
The utility model proposes a kind of microelectrode structural elements, the microelectrode structural elements include exposed to the surface of substrate 1,
At least one pair of electrode 2 that can be directly contacted with solution, the metal level where electrode 2 extends respectively to be covered and shape by insulating barrier 3
Into contact conductor 5, the pad 4 positioned at the edge of substrate 1；Contact conductor 5 is connected with the electrode 2 respectively；By the microelectrode
The pad 4 of array and the edge of substrate 1 is connected.
Compared with prior art, senser element compact of the present utility model, can enter action to drop evaporation process
State, Quantitative Monitoring, and detection simultaneously is carried out without the material in drop in electricity to the evaporation process of the different parts of drop
It is extremely upper to chemically react, therefore the utility model can apply to different application scenarios for greater flexibility compared with prior art,
For example, drop cell culture, external environment changes (such as heat exchange, air velocity) and evaporates dynamic process to microlayer model different parts
Study on monitoring etc..
Brief description of the drawings
Fig. 1 is microelectrode structural elements front view；
Fig. 2 is microelectrode structural elements top view；
Fig. 3 is the electrical model schematic diagram that impedance detection microlayer model evaporates measurement；
Fig. 4 is graph of relation of the evaporation process early stage drop mass (volume) between impedance magnitude；
Fig. 5 is to detect the change curve of the electrical impedance amplitude of a frequency in drop evaporation process over time, 5a,
5b, 5c represent the three phases of impedance variations respectively；
Reference：1st, substrate, 2, a pair of electrodes, 3, insulating barrier, 4, pad, 5 contact conductors, 6, fine droplet.
Embodiment
Technical solutions of the utility model are described in further detail with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figure 1 and Figure 2, the array of microelectrode structural elements composition, each microelectrode structural elements include microelectrode structural elements
Including prolonging respectively exposed to the metal level where the surface of substrate 1, at least one pair of electrode 2 that can be directly contacted with solution, electrode 2
Put on display the contact conductor 5 as formed by being covered insulating barrier 3.Contact conductor 5 is by the electrod-array of substrate center and substrate edges
Pad is connected, and the bonding pad area of substrate edges is larger, is not covered with insulating barrier, can electrically be connected with other circuit realirations
Connect.The size minimum of electrode 2 can be 2 microns, and the length and width spacing constituted between each electrode of electrod-array is 2 microns.
When carrying out the detection of fine droplet evaporation dynamic process, fine droplet 6 is instiled and is placed on substrate 1 so that a pair of electrodes 2
In the middle of fine droplet 6, this pair of electrodes is completely covered by center by drop.After energization, in finite concentration scope c forceful electric power solution
In matter (such as KCl, NaCl etc.) small aqueous solution droplets, electrode 2 and the contact portion formation interface electricity on two, 3 surface of fine droplet
Hold C, droplet solution is much smaller than the electrode detection impedance Z of liquid-drop diameter with a pair of areas and spacing equivalent to resistance R, formed
The utility model as shown in Figure 3 is based on the electrical model of impedance detection microlayer model evaporation measurement.
1st, electrical conductivity (ρ) and the linear (k of concentration c0For constant)：
ρ=k0c (1)
Resistance (R) is the derivative of electrical conductivity,L is interelectrode distance (equivalent resistance line length), and S leads to be equivalent
The cross-sectional area of body.Electrolyte quality β=c (t) V (t) wherein initially contained in concentration and drop, c (t), V (t) points
Not Wei a certain moment t of drop concentration, volume, and electrolyte is non-volatile so its mass conservation：
Therefore active component (R) and volume (V) are directly proportional.
2nd, capacitive part.If the shape of two electrodes is identical, area equation, then two interface capacitances are equal, are C,
And the two is series relationship, actual capacitance value is C/2, electric capacityWherein ε is dielectric constant, k electrostatic force Changshu, and d is
Capacitance pole distance between plates, for interfacial electric double layer electric capacity, mainly due to aggregation just (negative) electric charge of electrode surface, attracts solution
In bear (just) ion accordingly at closely electrode surface, due to intermolecular repulsion, ion and electrode surface still have one
It is very small apart from d, so as to form the effect of one " electric capacity ".Therefore d is fixed, and very small.According to the literature, it is situated between
The real part of electric constant and the concentration of electrolyte are inversely proportional, be considered as within the specific limits it is linear, the imaginary part of dielectric constant with it is molten
Liquid concentration is directly proportional, and is actually counted as a part for electrical conductivity, because the relation of electrical conductivity and concentration is already discussed above,
Therefore the real part of dielectric constant need to be only discussed herein.According to the literature, real part of permittivity ε0Approximately it can be represented with following formula：
ε0=ε0w·(1-0.2551c+0.0515c2-0.006889c3)≈ε0w·(1-0.2551c) (5)
Wherein ε0wFor the dielectric constant of pure water.
So as to impedance can the reactance caused by resistance and electric capacity constitute：
Wherein,It is a constant, f is the frequency of electric signal.Formula (7) is electrical impedance in evaporation process
The basic representation of calculating.Therefore impedance Z can be regarded as the function of droplet size, measure impedance, it is possible to reflect drop
Volume Changes.When drop evaporates, the moisture in drop constantly evaporates into air, and droplet size V is constantly reduced, and electrolyte is not
The concentration C that the strong electrolyte of this in drop, therefore drop can be left constantly rises, and impedance is continually changing accordingly.Detect impedance
Decline process can be just monitored to evaporation process.
Specifically, the electrical impedance amplitude under a certain frequency can be divided into three phases during drop evaporates, such as
A, b, c three phases shown in Fig. 5：
First stage, as the β of V (t) ＞ ＞ 0.2551, i.e., during early stage in evaporation,This
When impedance magnitude change with Volume Changes it is linear (5a stages shown in Fig. 5).
Second stage, evaporates the later stage in drop, is substantially unsatisfactory for above-mentioned relation, it should described with formula (7), due to (7)
Imaginary part become closer to 0.2551 β with volume, the change of its value is the multiple of Volume Changes, and this multiple is increasingly
Greatly, the speed specific volume of impedance variations is caused to decline faster (5b stages shown in Fig. 5).
Phase III, in the latter stage of drop evaporation, as liquid evaporation reaches the maxima solubility of electrolyte, electrical conductivity is on the contrary
Decline, now the basis of foregoing derivation has not existed, and formula (7) is invalid.Now also there is the precipitation of electrolyte solid, these can all increase
Impedance is powered up, and when liquid dries up completely, impedance reaches infinity.Therefore the stage that impedance declines can be transformed into an impedance
Zooming stage, this turning point also imply that liquid will evaporate (5c stages shown in Fig. 5).
Claims (2)
1. a kind of microelectrode structural elements, its feature in, microelectrode structural elements include exposed to substrate (1) surface, can with it is molten
At least one pair of electrode (2) that liquid is directly contacted, the metal level where electrode (2) extends respectively to be covered and shape by insulating barrier (3)
Into contact conductor (5), the pad (4) positioned at substrate (1) edge；Contact conductor (5) is connected with the electrode (2) respectively；Will
The pad (4) of the microelectrode array and the substrate (1) edge is connected.
2. microelectrode structural elements as claimed in claim 1, it is characterised in that electrode (2) size and spacing are much smaller than tested
The size of drop.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261452A (en) * | 2019-06-13 | 2019-09-20 | 西安交通大学 | The method of the restructural ultramicroelectrode of morphology controllable is prepared based on field drives |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261452A (en) * | 2019-06-13 | 2019-09-20 | 西安交通大学 | The method of the restructural ultramicroelectrode of morphology controllable is prepared based on field drives |
| CN110261452B (en) * | 2019-06-13 | 2020-03-24 | 西安交通大学 | Method for preparing reconfigurable ultramicroelectrode with controllable morphology based on magnetic field driving |
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