CN206591176U - 一种多腔室间气氛隔离装置 - Google Patents
一种多腔室间气氛隔离装置 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108624858A (zh) * | 2017-03-23 | 2018-10-09 | 北京创昱科技有限公司 | 一种多腔室间气氛隔离装置及方法 |
CN109252144A (zh) * | 2018-12-01 | 2019-01-22 | 安徽方兴光电新材料科技有限公司 | 一种柔性卷绕镀膜设备用杂气清理隔离装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108624858A (zh) * | 2017-03-23 | 2018-10-09 | 北京创昱科技有限公司 | 一种多腔室间气氛隔离装置及方法 |
CN109252144A (zh) * | 2018-12-01 | 2019-01-22 | 安徽方兴光电新材料科技有限公司 | 一种柔性卷绕镀膜设备用杂气清理隔离装置 |
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Address after: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: Beijing Chuangyu Technology Co.,Ltd. Address after: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. |
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Effective date of registration: 20210208 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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