CN206590906U - A kind of polycrystalline silicon reduction furnace cooling device - Google Patents
A kind of polycrystalline silicon reduction furnace cooling device Download PDFInfo
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- CN206590906U CN206590906U CN201720188517.7U CN201720188517U CN206590906U CN 206590906 U CN206590906 U CN 206590906U CN 201720188517 U CN201720188517 U CN 201720188517U CN 206590906 U CN206590906 U CN 206590906U
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- cooling water
- water pipe
- pipe
- cooling
- water tank
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Abstract
The utility model discloses a kind of polycrystalline silicon reduction furnace cooling device.The device includes the first water tank, second water tank, reduce body and chassis of reducing furnace, first water tank is provided with the first cooling water pipe, first cooling water pipe is connected after chassis of reducing furnace with the first water tank, the reduction furnace body is provided with tail gas discharging pipe, second water tank is provided with the second cooling water pipe, it is connected after the second cooling water pipe spiral surrounding tail gas discharging pipe with the second water tank, first cooling water pipe is provided with temperature sensor, second cooling water pipe is provided with temperature sensor, first cooling water pipe is provided with pressure-reducing valve, second cooling water pipe is provided with pressure-reducing valve, the signal receiving chip for wireless connection temperature sensor is provided with the pressure-reducing valve, first water tank and the second water tank are equipped with water pump.The utility model solves the complicated of conventional multi-crystalline silicon reduction furnace cooling device, and operating efficiency is not high, the problem of waste of resource.
Description
Technical field
The utility model is related to the field that cools of polycrystalline silicon reducing furnace, specifically discloses a kind of the cold of polycrystalline silicon reducing furnace
But device.
Background technology
Polycrystalline silicon reducing furnace is the final core product of output in production of polysilicon, is also the pass of decision systems production capacity, energy consumption
Key link.Polycrystalline silicon reducing furnace drop chassis cooling water common at present is made of one with tail gas cooling water, using 60 DEG C of low temperature
Water is together cooled down to chassis and offgas duct, using water at low temperature main cause when chassis due to strength reasons, coolant water temperature
Degree can not be too high, is responsible for that chassis machine hydraulic performance decline, the problems such as chassis is recessed occurs.
Therefore, the design and manufacture of polycrystalline silicon reducing furnace directly influence the quality, yield and production cost of product.With
The influence of global economic crisis, the price continuous decrease of polysilicon, product profit is constantly compressed, market competition increasingly swashs
It is strong, the energy consumption of polysilicon is effectively reduced, product quality is improved, production efficiency is improved, is current production of polysilicon enterprise needs
The problem of solution.For example, disclosed in Chinese patent database a kind of polycrystalline silicon reduction furnace base plate and tail gas cooling system and its
Method, Application No.：CN201410271830.8, application publication number is：CN104016350A, the cooling system is included also
Former furnace hearth plate cooling structure and tail gas cooling structure, method is passed through between the chassis of reducing furnace cooling structure and tail gas cooling structure
Orchid connection；The tail gas cooling structure includes tail gas cooling water inlet, tail gas cooling water outlet pipe and exhaust pipe, the tail
Interlayer sleeve pipe is provided with gas blast pipe, the tail gas cooling water inlet is arranged on the interlayer sleeve pipe of exhaust pipe lower end,
The tail gas cooling water outlet pipe is arranged on exhaust pipe upper end, and is connected with the interlayer sleeve pipe on exhaust pipe.This is
System is unfavorable for improving the quality of product, yield and saves production cost.
Utility model content
According to the deficiencies in the prior art, the utility model provides a kind of reduction furnace diverse location that is directed to and uses different temperature
Cooled down, saved resource, reduce energy consumption reduces cooling device.
To achieve these goals, the technical scheme that a kind of polycrystalline silicon reduction furnace cooling device of the utility model is used
For：
A kind of polycrystalline silicon reduction furnace cooling device, including the first water tank, the second water tank, reduction body and chassis of reducing furnace,
First water tank is provided with the first cooling water pipe, and first cooling water pipe connects after chassis of reducing furnace with the first water tank
Connect, the reduction furnace body is provided with tail gas discharging pipe, second water tank is provided with the second cooling water pipe, second cooling
It is connected after water pipe spiral surrounding tail gas discharging pipe with the second water tank, first cooling water pipe is provided with temperature sensor, described
Temperature sensor is arranged on the port of export of first cooling water pipe around chassis of reducing furnace, and second cooling water pipe is provided with temperature
Sensor, the temperature sensor is arranged on the port of export of the second cooling water pipe spiral surrounding tail gas discharging pipe, and described first is cold
But water pipe is provided with pressure-reducing valve, and the pressure-reducing valve is arranged on the water side of temperature sensor, and second cooling water pipe is provided with
Pressure-reducing valve, the pressure-reducing valve is arranged in the water side of temperature sensor, the pressure-reducing valve and is provided with for wireless connection temperature
The signal receiving chip of sensor, first water tank and the second water tank are equipped with water pump, and the water pump connects the first cooling water
Pipe, the water pump connects the second cooling water pipe.Due to cooling water pipe the need for chassis of reducing furnace and tail gas discharging pipe temperature not
Equally, two water tanks are designed respectively to cool down chassis of reducing furnace with tail gas discharging pipe, water pump accelerating liquid is designed in water tank
Mobility, increase operating efficiency, the second cooling water pipe use spiral surrounding connection tail gas discharging pipe, increase the second cooling water
The contact area of pipe and tail gas discharging pipe, makes tail gas discharging pipe cool rapidly, using temperature sensor and pressure-reducing valve, reduces cold go
Because temperature difference is too big when water pipe works, the hot gas of generation forms air pressure, and pressure-reducing valve is that one kind is adjusted using self-energy
Save the intelligent type valve of control piper pressure.
First cooling water pipe and the second cooling water pipe use iron pipe.The thermal conductivity of iron pipe is relatively good, when iron pipe is made
Cooling water pipe close to chassis of reducing furnace and during tail gas discharging pipe, cold outlet pipe can absorb heat rapidly, accelerate cooling reduction furnace
Chassis and tail gas discharging pipe.
The tail gas discharging pipe is provided with purifier.Reduction furnace body operationally produces tail gas, passes through exhaust emissions
Pipe is discharged, and installing purifier additional can be with cleaning of off-gas, so can be with environmental protection, it is to avoid environmental pollution.
First cooling water pipe is provided with steam accumulator, and the steam accumulator is arranged on entering for the first cooling water pipe
Water end (W.E.), second cooling water pipe is provided with steam accumulator, and the steam accumulator is arranged on the water inlet of the second cooling water pipe
End.Steam, which has, widely to be acted on, such as heating, humidification or as power, driving, steam accumulator the first cooling water pipe and
Steam in second cooling water pipe is collected and kept, and can save the energy, reduces energy consumption, does not cause to waste.
First water tank and the second water tank are equipped with liquid-filled thermometer.The convenient temperature for controlling water tank liquid of liquid-filled thermometer
Degree, it is to avoid go wrong, waste of resource.
The beneficial effects of the utility model are：The difference of position is cooled down for reduction furnace, is entered using different fluid temperatures
Row cooling, adds reduction furnace service life, using circulating cooling water-bound, can not cause to waste with Reusability cooling water,
Economize on resources, improve the operating efficiency of whole device.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Wherein, 1 first water tank, 2 second water tanks, 3 chassis of reducing furnace, 4 reduction furnace bodies, 5 first cooling water pipes, 6 second
Cooling water pipe, 7 tail gas discharging pipes, 8 temperature sensors, 9 pressure-reducing valves, 10 water pumps, 11 purifiers, 12 liquid-filled thermometers, 13 letters
Number receive chip, 14 steam accumulators.
Embodiment
With reference to the accompanying drawings and detailed description, the utility model is further elucidated, it should be understood that these embodiments are only
For illustrating the utility model rather than limiting scope of the present utility model, after the utility model has been read, this area
Modification of the technical staff to the various equivalent form of values of the present utility model falls within the application appended claims limited range.
As shown in figure 1, a kind of polycrystalline silicon reduction furnace cooling device, including the first water tank 1, the second water tank 2, reduction furnace body
4 and chassis of reducing furnace 3, the first water tank 1 is provided with liquid-filled thermometer 12, and the first water tank 1 is provided with the first cooling water pipe 5, first
It is provided with water tank 1 for increasing the water pump 10 of liquid fluidity, water pump 10 connects the first cooling water pipe 5, the first cooling water pipe 5
It is connected after chassis of reducing furnace 3 with the first water tank 1, the first cooling water pipe 5 is provided with temperature sensor 8, and temperature sensor 8 is set
The port of export around chassis of reducing furnace 3 in the first cooling water pipe 5 is put, the first cooling water pipe 5 is provided with pressure-reducing valve 9, and pressure-reducing valve 9 is set
Put the signal receiving chip 13 being provided with the port of export in temperature sensor 8, pressure-reducing valve for receiving signal, the first cooling water
Pipe 5 is provided with steam accumulator 14, and steam accumulator 14 is arranged on the water inlet end of the first cooling water pipe 5, and reduction furnace body 4 is set
There is the purifier 11 being provided with tail gas discharging pipe 7, tail gas discharging pipe 7 for purifying air, the second water tank 2 is provided with second
Cooling water pipe 6, the second water tank 2 is provided with liquid-filled thermometer 12, the second water tank 2 and is provided with for increasing the water of liquid fluidity
Pump 10, water pump 10 is connected after connecting the second cooling water pipe 6, the spiral surrounding tail gas discharging pipe 7 of the second cooling water pipe 6 with the second water tank
2, the second cooling water pipe 6 is provided with temperature sensor 8, and temperature sensor 8 is arranged on the spiral surrounding tail gas of the second cooling water pipe 6 row
The port of export of pipe 7 is put, the second cooling water pipe 6 is provided with the pressure-reducing valve 9 for adjusting pipe outlet pressure, and pressure-reducing valve 9 is arranged on
The signal receiving chip 13 for receiving signal, the second cooling water pipe 6 are provided with the port of export of temperature sensor 8, pressure-reducing valve 9
Steam accumulator 14 is provided with, steam accumulator 14 is arranged on the water inlet end of the second cooling water pipe 6.
During work, the first cooling water pipe 5 and the second cooling water pipe 6 made of iron pipe, the heat absorptivity of iron pipe is good, Ke Yiti
Anticorrosive coat is set up inside the efficiency of high cooling water pipe, but the easy body rust of iron pipe, iron pipe, iron pipe internal rust, reduction furnace sheet is prevented
After the completion of body 4 works, water pump 10 is opened, and by the hydraulic pressure increase of the liquid in the first water tank 1, liquid-filled thermometer 12 shows the first water
The temperature value of liquid in case 1, if the fluid temperature of the first water tank 1 is within the scope of 35~80 DEG C, the first water tank 1 is by 35~80
DEG C cooling water chassis of reducing furnace 3 is cooled down by the first cooling water pipe 5, the temperature after cooling in the first cooling water pipe 5
Increase, air pressure also increases therewith, temperature sensor 8 receives the signal that the temperature in the first cooling water pipe 5 sends pressure-reducing valve 9 to
Chip 13, signal receiving chip 13 is entered data into 9 in pressure-reducing valve, and pressure-reducing valve 9 reduces the air pressure in the first cooling water pipe 5,
Air pressure increase in first cooling water pipe 5, after the mobility of liquid, pressure-reducing valve 9 can be hindered to reduce air pressure, the mobility of liquid
Increase therewith, the steam of the first cooling water pipe 5 is collected by steam accumulator 14, be used as the deposit power of whole device,
One cooling water pipe 5 returns to the first water tank 1 after completing cooling, net in tail gas discharging pipe 7 before carrying out go cold to tail gas discharging pipe 7
Makeup is put the waste gas that 11 filter screen discharges to tail gas discharging pipe 7 and purified, and thus is avoided that environmental pollution, and water pump 10 is by the second water
The hydraulic pressure increase of liquid in case 2, liquid-filled thermometer 12 shows the fluid temperature value of the second water tank 2, the spiral of the second cooling water pipe 6
Cooled down, the second cooling water pipe 6 is cooled using spiral surrounding mode to tail gas discharging pipe 7, increased around tail gas discharging pipe 7
Plus second cooling water pipe 6 and the contact area of tail gas discharging pipe 7, make tail gas discharging pipe 7 cooling, the second cooling water after cooling rapidly
Temperature in pipe 6 increases, and air pressure also increases therewith, and temperature sensor 8 sends the temperature in the second cooling water pipe 6 to pressure-reducing valve
9 signal receiving chip 13, signal receiving chip 13 is entered data into pressure-reducing valve 9, and pressure-reducing valve 9 reduces the second cooling water pipe
Air pressure increase in air pressure in 6, the second cooling water pipe 6, after the mobility of liquid, pressure-reducing valve 9 can be hindered to reduce air pressure, liquid
The mobility of body increases therewith, and the steam of the second cooling water pipe 6 is collected by steam accumulator 14, is used as the storage of whole device
Standby power, the second cooling water pipe 6 returns to the second water tank 2, whole device completion work after completing cooling.
Temperature sensor：Be it is a kind of can will experience sensor of the temperature inversion into usable output signal, herein we select
With non-contact temperature sensor, the measurement upper limit is not limited by temperature-sensing element temperature capability, thus highest observable temperature is provided with
Limitation, available for more than 1800 DEG C high temperature.
Signal receiving chip：Using CMT2210A chips, CMT2210A chips have wireless transmission and wireless receiving function,
It is not only cheap, and low-power consumption.
Pressure-reducing valve：Pressure-reducing valve is the outlet pressure that inlet pressure is reduced to needs by adjusting, and relies on the energy of itself
It is the stable valve that outlet pressure is kept automatically.
Claims (5)
1. a kind of polycrystalline silicon reduction furnace cooling device, including the first water tank, the second water tank, reduction body and chassis of reducing furnace, its
It is characterised by：First water tank is provided with the first cooling water pipe, and first cooling water pipe is after chassis of reducing furnace with the
One water tank is connected, and the reduction furnace body is provided with tail gas discharging pipe, and second water tank is provided with the second cooling water pipe, described
It is connected after second cooling water pipe spiral surrounding tail gas discharging pipe with the second water tank, first cooling water pipe is provided with TEMP
Device, the temperature sensor is arranged on the port of export of first cooling water pipe around chassis of reducing furnace, and second cooling water pipe is set
Temperature sensor is equipped with, the temperature sensor is arranged on the port of export of the second cooling water pipe spiral surrounding tail gas discharging pipe, institute
State the first cooling water pipe and be provided with pressure-reducing valve, the pressure-reducing valve is arranged on the water side of temperature sensor, second cooling water
Pipe is provided with pressure-reducing valve, and the pressure-reducing valve, which is arranged in the water side of temperature sensor, the pressure-reducing valve, to be provided with for wireless
The signal receiving chip of temperature sensor is connected, first water tank and the second water tank are equipped with water pump, the water pump connects the
One cooling water pipe, the water pump connects the second cooling water pipe.
2. a kind of polycrystalline silicon reduction furnace cooling device according to claim 1, it is characterised in that：First cooling water pipe
Iron pipe is used with the second cooling water pipe.
3. a kind of polycrystalline silicon reduction furnace cooling device according to claim 1, it is characterised in that：The tail gas discharging pipe is set
It is equipped with purifier.
4. a kind of polycrystalline silicon reduction furnace cooling device according to claim 1, it is characterised in that：First cooling water pipe
Steam accumulator is provided with, the steam accumulator is arranged on the water inlet end of the first cooling water pipe, and second cooling water pipe is set
Steam accumulator is equipped with, the steam accumulator is arranged on the water inlet end of the second cooling water pipe.
5. a kind of polycrystalline silicon reduction furnace cooling device according to claim 1, it is characterised in that：First water tank and
Two water tanks are equipped with liquid-filled thermometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720188517.7U CN206590906U (en) | 2017-03-01 | 2017-03-01 | A kind of polycrystalline silicon reduction furnace cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720188517.7U CN206590906U (en) | 2017-03-01 | 2017-03-01 | A kind of polycrystalline silicon reduction furnace cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206590906U true CN206590906U (en) | 2017-10-27 |
Family
ID=60127043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720188517.7U Expired - Fee Related CN206590906U (en) | 2017-03-01 | 2017-03-01 | A kind of polycrystalline silicon reduction furnace cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206590906U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
| WO2021013177A1 (en) * | 2019-07-24 | 2021-01-28 | 中国恩菲工程技术有限公司 | System and method for cooling polycrystalline silicon reduction furnace |
-
2017
- 2017-03-01 CN CN201720188517.7U patent/CN206590906U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
| WO2021013177A1 (en) * | 2019-07-24 | 2021-01-28 | 中国恩菲工程技术有限公司 | System and method for cooling polycrystalline silicon reduction furnace |
| CN110282627B (en) * | 2019-07-24 | 2023-09-19 | 中国恩菲工程技术有限公司 | Cooling system and method for polycrystalline silicon reduction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171027 Termination date: 20210301 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |