CN206587608U - A kind of multicomponent gas mixing match device - Google Patents

A kind of multicomponent gas mixing match device Download PDF

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Publication number
CN206587608U
CN206587608U CN201720094713.8U CN201720094713U CN206587608U CN 206587608 U CN206587608 U CN 206587608U CN 201720094713 U CN201720094713 U CN 201720094713U CN 206587608 U CN206587608 U CN 206587608U
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CN
China
Prior art keywords
pressure
gas
casing
premixing tank
branch road
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Expired - Fee Related
Application number
CN201720094713.8U
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Chinese (zh)
Inventor
曹中华
冯宇
何志飞
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Shenzhen Flying Technology Co Ltd
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Shenzhen Flying Technology Co Ltd
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Filing date
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Priority to CN201720094713.8U priority Critical patent/CN206587608U/en
Application granted granted Critical
Publication of CN206587608U publication Critical patent/CN206587608U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of multicomponent gas mixing match device, it includes casing, premixing tank is provided with casing, the output end of premixing tank is communicated with mixed gas output interface, at least two input branch roads are additionally provided with casing, input branch road includes the gas input interface being sequentially communicated by pipeline, filter, pressure-reducing valve, accurate ratio adjusting valve and pneumatic control valve, the output end of pneumatic control valve is by pipeline connection in an input of premixing tank, gas input interface is used to access unstrpped gas, filter is used to filter out the particulate matter and moisture in unstrpped gas, accurate ratio adjusting valve is used for the flow for adjusting unstrpped gas, pneumatic control valve is used to that branch road on or off will to be inputted;Premixing tank is used to mix the unstrpped gas of at least two input branch road outputs.The utility model distributing precision is high, output pressure is stable.

Description

A kind of multicomponent gas mixing match device
Technical field
The utility model is related to gas mixing ratio device, more particularly to a kind of multicomponent gas mixing match device.
Background technology
Mixed gas is using increasing in field of industrial production, and it can meet various technological requirements, particularly in weldering Connect, chemical industry, material, medicine, the application of the field such as scientific experiment it is quite extensive.The demand of mixed gas flow is increasing, to mix Also species is various for the gas of conjunction, and the matching device of mixed gas also grows up therewith.
The current manufacturer of gas proportion mixing device at home, which also compares, to be lacked, and is substantially in production fixed mixing ratio The ordinary purity gas mixer of degree, even if proportion of degree is adjustable type, distributing precision is not also high, and use tubing and Equipment is also all relatively conventional, it is impossible to meet some industries and R&D institution to experimental gas proportion mixing adjustable extent The wide, demand that gas purity is high, simple to operate, control accuracy is high.
Utility model content
The technical problems to be solved in the utility model is, matches somebody with somebody in view of the shortcomings of the prior art there is provided a kind of gas mixing The multicomponent gas mixing match device that, distributing precision wider than the adjustable extent of degree is high, gas purity is good, output pressure is stable.
In order to solve the above technical problems, the utility model is adopted the following technical scheme that.
A kind of multicomponent gas mixing match device, it, which includes, is provided with premixing tank, the premixing tank in casing, the casing Include at least two inputs and an output end, the output end of the premixing tank is communicated with mixed gas output interface, described At least two input branch roads are additionally provided with casing, the input of the premixing tank is corresponded with the input branch road and connected, its In:The input branch road includes the gas input interface being sequentially communicated by pipeline, filter, pressure-reducing valve, accurate ratio and adjusted Save valve and pneumatic control valve, the output end of the pneumatic control valve by pipeline connection in an input of premixing tank, it is described Gas input interface is used to access unstrpped gas, and the filter is used to filter out the particulate matter and moisture in unstrpped gas, described Pressure-reducing valve is used to the pressure of unstrpped gas being reduced to preset value, and the accurate ratio adjusting valve is used for the stream for adjusting unstrpped gas Amount, the pneumatic control valve is used to that branch road on or off will to be inputted;The premixing tank is used at least two input branch roads are defeated The unstrpped gas mixing gone out.
Preferably, gas purity analyzer is also included, the induction end of the gas purity analyzer is located at the premix In tank, the main frame of the gas purity analyzer is on casing.
Preferably, the casing is provided with main control unit, and the input branch road also includes first pressure transmitter, described First pressure transmitter is on the pipeline between pressure-reducing valve and accurate ratio adjusting valve, and the first pressure transmitter is used to feel Answer air pressure and produce electric signal, and by the electric signal transmission to main control unit, so that main control unit obtains the air pressure of input branch road Data.
Preferably, the input branch road also includes first pressure table, and the first pressure table is on casing, and described the One manometric gas access is on the pipeline between pressure-reducing valve and accurate ratio adjusting valve, and the first pressure table is used to adopt Air pressure on collection and display input branch road.
Preferably, second pressure transmitter is also included, the second pressure transmitter is located at premixing tank and mixed gas On pipeline between output interface, the second pressure transmitter is used for induction air pressure and produces electric signal, and by the electric signal Transmit to main control unit, so that main control unit obtains the barometric information of premixing tank output end.
Preferably, second pressure table is also included, the second pressure table is on casing, the gas of the second pressure table Body entrance is on the pipeline between premixing tank and mixed gas output interface, and the second pressure table is used to gathering and showing pre- The air pressure of mixed tank output end.
Preferably, the casing is provided with voice guard, and the voice guard is electrically connected at main control unit, and When the air pressure that the first pressure transmitter and second pressure transmitter are gathered exceedes preset value, the main control unit control sound Sound alarm sends auditory tone cues.
Preferably, the casing is provided with visual alarm, and the visual alarm is electrically connected at main control unit, and When the air pressure that the first pressure transmitter and second pressure transmitter are gathered exceedes preset value, the main control unit controls lamp Light crossing-signal sends light prompt.
Preferably, the casing is provided with power supply indicator, operation button and scram button.
Preferably, the bottom of the casing is provided with roller and adjustable support pin.
In multicomponent gas mixing match device disclosed in the utility model, unstrpped gas passes through efficient filter, by original Expect the particulate matter and moisture removal in gas so that gas purity is more preferable;The pressure of unstrpped gas is down to by pressure-reducing valve again The operating pressure of mixing match device;Unstrpped gas is realized accurate by accurate ratio adjusting valve and pneumatic control valve afterwards The requirement of proportioning, not only makes the adjustable extent of gas proportion mixing degree wider, and distributing precision is higher;Mixed gas dress Enter premixing tank, realized and be pre-mixed using the pressure stability function of premixing tank so that the pressure of output gas is stabilized.
Brief description of the drawings
Fig. 1 is the structural representation of casing.
Fig. 2 is the structural representation of the utility model multicomponent gas mixing match device.
Embodiment
The utility model is described in more detail with reference to the accompanying drawings and examples.
The utility model discloses a kind of multicomponent gas mixing match device, with reference to shown in Fig. 1 and Fig. 2, it includes case Premixing tank 2 is provided with body 1, the casing 1, the premixing tank 2 includes at least two inputs and an output end, the premix The output end of tank 2 is communicated with mixed gas output interface 3, the casing 1 and is additionally provided with least two input branch roads 4, described pre- The input of mixed tank 2 is corresponded with the input branch road 4 and connected, wherein:
The input branch road 4 includes the gas input interface 40 being sequentially communicated by pipeline, filter 41, pressure-reducing valve 42nd, accurate ratio adjusting valve 43 and pneumatic control valve 44, the output end of the pneumatic control valve 44 is by pipeline connection in premix One input of tank 2, the gas input interface 40 is used to access unstrpped gas, and the filter 41 is used to filter out unstripped gas Particulate matter and moisture in body, the pressure-reducing valve 42 are used to the pressure of unstrpped gas being reduced to preset value, the accurate ratio Regulating valve 43 is used for the flow for adjusting unstrpped gas, and the pneumatic control valve 44 is used to that the on or off of branch road 4 will to be inputted;
The premixing tank 2 is used to mix the unstrpped gas that at least two input branch roads 4 are exported.
In above-mentioned multicomponent gas mixing match device, unstrpped gas passes through efficient filter 41, by unstrpped gas Particulate matter and moisture removal so that gas purity is more preferable;The pressure of unstrpped gas is down to mixing match by pressure-reducing valve 42 again The operating pressure of device;Unstrpped gas realizes accurate proportioning by accurate ratio adjusting valve 43 and pneumatic control valve 44 afterwards Requirement, not only make the adjustable extent of gas proportion mixing degree wider, and distributing precision is higher;Mixed gas loads pre- Mixed tank 2, is realized using the pressure stability function of premixing tank and is pre-mixed so that the pressure of output gas is stabilized.As can be seen here, The adjustable extent of the utility model not only gas proportion mixing degree is wide, and distributing precision is high, gas purity is good, output pressure is steady It is fixed.
In the present embodiment, it can also be multiple that input branch road 4, which can be two,.So that binary gas is mixed as an example, two kinds of gas Body loads on the gas input interface 40 of two input branch roads 4 respectively, and two kinds of gases are respectively through filtering, decompression, accurate ratio Example loads premixing tank 2 after setting.In practical application, user can set the defeated of respective numbers according to the difference of unstrpped gas quantity Enter branch road 4, therefore, the utility model is not construed as limiting to the quantity for inputting branch road 4, i.e., on the basis of technical solutions of the utility model Branch road quantity made etc. is adjusted, and should be included within protection domain of the present utility model.
As a kind of preferred embodiment, the present embodiment also includes gas purity analyzer 5, the gas purity analyzer 5 Induction end in the premixing tank 2, the main frame 50 of the gas purity analyzer 5 is on casing 1.Analyzer is from premix Sample gas is extracted in tank, quick gas analysis is done, and according to the control of setting range progress output gas.
Further, the casing 1 is provided with main control unit 51, and the input branch road 4 also includes first pressure pick-up Device 45, the first pressure transmitter 45 is on the pipeline between pressure-reducing valve 42 and accurate ratio adjusting valve 43, and described first Pressure transmitter 45 is used for induction air pressure and produces electric signal, and by the electric signal transmission to main control unit 51, for master control list Member 51 obtains the barometric information of input branch road 4.
In a preferred embodiment, the input branch road 4 also includes first pressure table 46, and the first pressure table 46 is located at On casing 1, the gas access of the first pressure table 46 is located on the pipeline between pressure-reducing valve 42 and accurate ratio adjusting valve 43, The first pressure table 46 is used to gathering and showing the air pressure on input branch road 4.
For the ease of collection air pressure, also include second pressure transmitter 6, the second pressure transmitter 6 is located at premix On pipeline between tank 2 and mixed gas output interface 3, the second pressure transmitter 6 is used for induction air pressure and produces telecommunications Number, and by the electric signal transmission to main control unit 51, so that main control unit 51 obtains the barometric information of the output end of premixing tank 2.This Also there is real-time air pressure display function outside, also include second pressure table 7, the second pressure table 7 is described on casing 1 The gas access of second pressure table 7 is on the pipeline between premixing tank 2 and mixed gas output interface 3, the second pressure Table 7 is used for the air pressure for gathering and showing the output end of premixing tank 2.
For the ease of sending alarm, the casing 1 is provided with voice guard 52, and the voice guard 52 is electrically connected with In main control unit 51, and when the air pressure that the first pressure transmitter 45 and second pressure transmitter 6 are gathered exceedes preset value When, the control of main control unit 51 voice guard 52 sends auditory tone cues.Meanwhile, the casing 1 is provided with visual alarm 53, the visual alarm 53 is electrically connected at main control unit 51, and when the first pressure transmitter 45 and second pressure When the air pressure that transmitter 6 is gathered exceedes preset value, the control of main control unit 51 visual alarm 53 sends light prompt.
On body structure, the casing 1 is provided with power supply indicator 8, operation button 9 and scram button 10.The case The bottom of body 1 is provided with roller 11 and adjustable support pin 12.
Compared to existing technologies, the utility model highest distributing precision reaches ± 0.1% to the utility model;Meanwhile, city Being substantially for being sold on field uses material for red copper or common stainless steel pipes, it is impossible to realize Gao Chun Du≤99.999% Gas proportion mixing, even if unstrpped gas purity reached 99.999% as the material problem of equipment and cause dirt Dye, and device of the present utility model, the pipe material used are that (Bright Annealed Pipe lights are moved back SS316L BA pipes Fire tube, inwall finish Ra≤0.3 μm, it is adaptable to which gas purity is Yaoed Qiu≤99.999%) and SS316L EP and managed ElectroPolished Pipe electropolishing pipes, inwall finish Ra≤0.2 μm, it is adaptable to gas purity Yao Qiu≤ 99.9999%;High-purity gas, etchant gas, the device of inflammable gas employ VCR interface Vacuum Coupling Radius Seal, VCR sealing joint are good, and cleanliness factor is high;The scope of gas proportion mixing is wide, the pressure and flow to unstrpped gas will It is not very harsh to ask, and the pressure of the gas output after mixing match is highly stable;The operation of gas proportion mixing device Simply, it can ensure that operating personnel quickly realize that easily operation is required.
The utility model can be found in following examples in application process:
On body structure, multicomponent gas mixing match device is installed concentratedly in the casing of closing, depending on the demand of user And increasing the surge tank of external gas, box sizes can be adjusted because of different parameters.There is exercisable touch in casing front Screen, operating personnel can be operated accordingly according to the actual needs, and the operation interface of device is simple and directly perceived, is divided into main interface And interface, interface is login interface, warning message interface, Chinese and English interface switching, also can be according to the specific requirement of user Carry out part increase and decrease.Casing front is mounted with analyzer, can real-time tracking match gas proportioning situation, facilitate operating personnel more Plus get information about the situation of technique.Casing front is mounted with after the pressure gauge of the entrance device of two-spot gas and mixing match Pressure gauge, can get information about the pressure condition of gas, and unstripped gas is changed in advance according to corresponding prediction scheme.It is distributed in casing Positive scram button, alarm lamp, alarm buzzer etc., are the corresponding warnings and accident provided for device Fast processor part.
By taking conventional two-spot gas proportion mixing device as an example, unstrpped gas passes through efficient filter, by unstrpped gas In particulate matter and moisture removal;The pressure of unstrpped gas is down to the pressure of mixing match device work by pressure-reducing valve again; It is mounted with that pressure transmitter constantly monitors the pressure of gas on gas pipeline after decompression, and the signal of pressure transmitter passes through PLC system is controlled accordingly, and provides the function of undervoltage warning, and related personnel is pointed out in time, carries out unstrpped gas Change or overhaul;Unstrpped gas by flow controller and high-precision proportional control valve, realizes the requirement accurately matched again;It is mixed The gas of conjunction is sufficiently mixed in premixed device and premixing tank has certain pressure stability function;Analyzer is extracted from premixing tank Sample gas, does quick gas analysis, and according to the control of setting range progress output gas;The mixed gas of premixing tank outlet Pressure transmitter is mounted with pipeline, constantly the output situation of monitoring system, once beyond the permission pressure limit of user, stand Cut off the respective valves of supply.The pressure transmitter of unstrpped gas input port inputs a signal into PLC system, when gas pressure is high In setting pressure, alarm and can not starter, when pressure less than setting pressure, alarm;Flow controller is by setting Fixed flow value, voluntarily adjusts the output flow of gas, and alarm flow transfinites or is short of;Proportional control valve according to point The testing result of analyzer automatically adjusts the output of gas flow;Pneumatic control valve is normally normally open, works as unstripped gas Body pressure superpressure or device output pressure is under-voltage can all switch to normally off, is also directly controlled by scram button, is in addition Operating personnel think occur under abnormal conditions, can press scram button, you can the gas output supply of shearing device;Analyzer is The core instrument of device, its serials control proportioning valve, also assists in the control of flow controller.
In control process, the manually-operated gate of air inlet is opened, gas passes through filter, into pressure-reducing valve, carried according to user Pressure for designing device, the handle of rotating pressure-decreasing valve makes the pressure after decompression reach in defined pressure limit;Adjustment control The output pressure of the source of the gas pressure-reducing valve of valve is in 0.3-0.6MPa;After correct register system, carried out according to actual production demand Corresponding parameter setting;" startup " virtual push button of runnable interface is clicked on, system brings into operation;Open the manual of analyzer sample On valve premixing tank, the pressure-reducing valve on adjustment analyzer sample pipeline makes the pressure after decompression in 0.05-0.15MPa, adjustment analysis The gas flow of suspended body flowmeter on instrument, makes range of flow in 100-400ml/min;Because first time uses or stops for a long time Reused after machine, mixing match device there need to be the mixing match degree in one stable time, this time to be to meet Actual demand, so directly can not directly export mixed gas, closes outlet valve within this time, atmospheric valve is beaten Open;The data of observation analysis instrument, stable after in the range of meeting the requirements, the outlet valve of first device for opening is then shut off emptying Valve;In normal course of operation, if admission pressure is less than the lower limit alarming value or the upper limit alarm value higher than setting of setting The pneumatic control valve that system can be closed in this pipeline, to ensure that the user equipment of device rear end is unaffected, and alarm;Normally In running, if the outlet pressure of device is less than the limit alarming value of setting or the upper limit alarm value higher than setting, system The control valve that can be closed on the pipeline of two-way input gas;In normal course of operation, set if the display data of analyzer is less than Fixed limit alarming value or the upper limit alarm value higher than setting, the control valve that system can be closed on the pipeline of two-way input gas; The parameter setting of flow controller, will be set according to the Shi Jishiyong flow of this pipeline in the Shi Jishiyong flow of user;It is high-precision Proportional control valve is spent, tandem regulation and control are carried out by analyzer and flow controller, also can be according to user's without carrying out parameter setting Voluntarily require, set the opening ratio such as 20-80% of control valve;The operating personnel of user want periodic observation gas proportion mixing to fill Put, running status, it is found that alarm will be handled in time, the particularly alarm of unstrpped gas low pressure must be handled, otherwise as early as possible Device can autostop.
Multicomponent gas mixing match device disclosed in the utility model, it is preferred to use structure of relief pressure valve, is applicable pressure, stream Measure scope big, precision is high, it is ensured that the stability of output pressure and flow;Meanwhile, using the high-precision proportional control valve of import High-precision proportioning is realized with flow controller;Proportional control valve and flow controller can be according to user actual pressure and flow Selected, selectable scope is wide;BA and EP pipelines can guarantee that the gas supply of high-purity is required;The equipment of VCR interfaces is true Protect the low slip of high-pressure gas pipelines;The automatic welding of pipeline can reduce leakage point, and attractive in appearance;Perfect PLC controls system System, it is ensured that the relatively reliable operation of system, and it is simple to operate.
Simply the utility model preferred embodiment described above, is not limited to the utility model, all in this practicality Modification, equivalent substitution or improvement made in new technical scope etc., should be included in the model that the utility model is protected In enclosing.

Claims (10)

1. a kind of multicomponent gas mixing match device, it is characterised in that include and premixing tank, institute are provided with casing, the casing State premixing tank and include at least two inputs and an output end, the output end of the premixing tank is communicated with mixed gas output and connect Mouthful, at least two input branch roads are additionally provided with the casing, the input of the premixing tank is corresponded with the input branch road Connection, wherein:
The input branch road includes the gas input interface being sequentially communicated by pipeline, filter, pressure-reducing valve, accurate ratio and adjusted Save valve and pneumatic control valve, the output end of the pneumatic control valve by pipeline connection in an input of premixing tank, it is described Gas input interface is used to access unstrpped gas, and the filter is used to filter out the particulate matter and moisture in unstrpped gas, described Pressure-reducing valve is used to the pressure of unstrpped gas being reduced to preset value, and the accurate ratio adjusting valve is used for the stream for adjusting unstrpped gas Amount, the pneumatic control valve is used to that branch road on or off will to be inputted;
The premixing tank is used to mix the unstrpped gas of at least two input branch road outputs.
2. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that also include gas purity analysis Instrument, the induction end of the gas purity analyzer is in the premixing tank, and the main frame of the gas purity analyzer is located at case On body.
3. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that the casing is provided with master control list Member, the input branch road also includes first pressure transmitter, and the first pressure transmitter is located at pressure-reducing valve and accurate ratio On pipeline between regulating valve, the first pressure transmitter is used for induction air pressure and produces electric signal, and the electric signal is passed Main control unit is transported to, so that main control unit obtains the barometric information of input branch road.
4. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that the input branch road also includes One pressure gauge, the first pressure table is on casing, and the gas access of the first pressure table is located at pressure-reducing valve and accurate ratio On pipeline between example regulating valve, the first pressure table is used to gathering and showing the air pressure on input branch road.
5. multicomponent gas mixing match device as claimed in claim 3, it is characterised in that also include second pressure pick-up Device, the second pressure transmitter is on the pipeline between premixing tank and mixed gas output interface, and the second pressure becomes Send device to be used for induction air pressure and produce electric signal, and by the electric signal transmission to main control unit, premixed so that main control unit is obtained The barometric information of tank output end.
6. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that also include second pressure table, institute Second pressure table is stated on the casing, the gas access of the second pressure table located at premixing tank and mixed gas output interface it Between pipeline on, the second pressure table is used to gathering and showing the air pressure of premixing tank output end.
7. multicomponent gas mixing match device as claimed in claim 5, it is characterised in that the casing is provided with audible alarm Device, the voice guard is electrically connected at main control unit, and when the first pressure transmitter and second pressure transmitter When the air pressure of collection exceedes preset value, the main control unit control voice guard sends auditory tone cues.
8. multicomponent gas mixing match device as claimed in claim 7, it is characterised in that the casing is provided with light warning Device, the visual alarm is electrically connected at main control unit, and when the first pressure transmitter and second pressure transmitter When the air pressure of collection exceedes preset value, the main control unit control visual alarm sends light prompt.
9. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that the casing is provided with power supply instruction Lamp, operation button and scram button.
10. multicomponent gas mixing match device as claimed in claim 1, it is characterised in that the bottom of the casing is provided with rolling Wheel and adjustable support pin.
CN201720094713.8U 2017-01-24 2017-01-24 A kind of multicomponent gas mixing match device Expired - Fee Related CN206587608U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107913451A (en) * 2017-12-29 2018-04-17 上海德尔格医疗器械有限公司 A kind of gas regulating system and modular air regulating device
CN113813803A (en) * 2021-06-08 2021-12-21 福尼斯(南京)表面工程技术有限公司 High-precision multi-component gas proportioning method for surfacing
CN114963003A (en) * 2021-02-19 2022-08-30 中国科学院微电子研究所 Gas supply system and gas supply method for semiconductor manufacturing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107913451A (en) * 2017-12-29 2018-04-17 上海德尔格医疗器械有限公司 A kind of gas regulating system and modular air regulating device
CN107913451B (en) * 2017-12-29 2023-11-03 上海德尔格医疗器械有限公司 Gas regulating system and modularized gas regulating device
CN114963003A (en) * 2021-02-19 2022-08-30 中国科学院微电子研究所 Gas supply system and gas supply method for semiconductor manufacturing
CN113813803A (en) * 2021-06-08 2021-12-21 福尼斯(南京)表面工程技术有限公司 High-precision multi-component gas proportioning method for surfacing

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Granted publication date: 20171027

Termination date: 20210124