CN206579222U - A kind of AZO high-density rotating targets of plus gallium - Google Patents
A kind of AZO high-density rotating targets of plus gallium Download PDFInfo
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- CN206579222U CN206579222U CN201720016160.4U CN201720016160U CN206579222U CN 206579222 U CN206579222 U CN 206579222U CN 201720016160 U CN201720016160 U CN 201720016160U CN 206579222 U CN206579222 U CN 206579222U
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Abstract
The utility model discloses a kind of AZO high-density rotating targets of plus gallium, including target pipe, indium layer and the rigid core bar set gradually from outside to inside；Wherein, target pipe is the AZO ceramic post sintering rotating cylindrical target pipes that high density adds gallium, and target pipe is bonded on rigid core bar by indium layer casting；The target pipe composition is zinc oxide ZnO, aluminium oxide Al 2O3 and gallium oxide Ga2O3, and its thickness is 5 15mm；The indium layer is pure indium, and the rigid core bar is metal core rod.The utility model is by adding gallium oxide Ga2O3, AZO light transmittance and electric conductivity can be improved, and, it is tied on rigid metal core bar with pure indium casting bonding after machining, obtain the AZOGa rotary target materials that density is not less than 96%, also, by rigid metal core bar, AZOGa rotary target materials performance is stable.
Description
Technical field
The utility model is related to target technical field, more particularly to a kind of plus gallium AZO high-density rotating targets.
Background technology
Traditional AZO targets (zinc oxide ZnO+ aluminium oxide Al 2O3) are now widely used in energy-conservation low emissivity glass (also known as
Low-E glass) and the manufacture of solar film battery in.Thin-film transparent, the conduction being coated with AZO materials are characterized in, and
There is good adhesive force.But with the development of industry, plated film industry proposes higher requirement to material.Plated film industry requirement film
Transmitance is higher, electric conductivity is higher.This just proposes new challenge to the improvement of material.
Show through overtesting, the addition 0.1-10% gallium oxide in AZO (zinc oxide ZnO+ aluminium oxide Al 2O3)
(Ga2O3) AZO light transmittance and electric conductivity can be improved.
Therefore, the prior art is defective, it is necessary to improve.
Utility model content
Technical problem to be solved in the utility model is：A kind of new material AZOGa rotary target material is provided, solved existing
The problem of AZO targets light transmittance and relatively low electrical conductivity.
The technical solution of the utility model is as follows：A kind of AZO high-density rotating targets of plus gallium, including from outside to inside successively
Target pipe, indium layer and the rigid core bar of setting；Wherein, target pipe is the AZO ceramic post sintering rotating cylindrical target pipes that high density adds gallium, target pipe
It is bonded in by indium layer casting on rigid core bar；The target pipe composition is zinc oxide ZnO, aluminium oxide Al 2O3 and gallium oxide
Ga2O3, its thickness is 5-15mm；The indium layer is pure indium, and the rigid core bar is metal core rod.
Applied to above-mentioned technical proposal, in described AZO high-density rotating targets, the rigid core bar is titanium tube or stainless
Steel pipe.
Applied to each above-mentioned technical proposal, in described AZO high-density rotating targets, the main material of target is oxidation
Zinc ZnO and aluminium oxide Al 2O3, the auxiliary material of target is a small amount of gallium oxide Ga2O3 of addition, wherein, gallium oxide Ga2O3 composition
Ratio is 0.1-10%.
Applied to each above-mentioned technical proposal, in described AZO high-density rotating targets, the density of the target pipe is
5.60-5.65g/cm3, also, its relative density is not less than 98%.
Using such scheme, the utility model can improve AZO light transmittance and conduction by adding gallium oxide Ga2O3
Performance, also, be tied to it on rigid metal core bar with pure indium casting bonding after machining, obtain density and be not less than 96%
AZOGa rotary target materials, also, pass through rigid metal core bar, AZOGa rotary target materials performance is stable.
Brief description of the drawings
Fig. 1 is schematic diagram of the present utility model；
Fig. 2 is cross section structure schematic diagram of the present utility model；
Fig. 3 is preparation structure figure of the present utility model.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
A kind of AZO high-density rotating targets of plus gallium are present embodiments provided, in AZO, i.e. zinc oxide ZnO and aluminum oxide
Al2O3, middle addition 0.1-10% gallium oxide Ga2O3, in this way, AZO light transmittance and electric conductivity can be improved.
As illustrated in fig. 1 and 2, this AZO high-density rotatings target include set gradually from outside to inside target pipe 3, indium layer 2 and just
Property core bar 1, target pipe 3 is that high density adds the AZO ceramic post sintering rotating cylindrical target pipes of gallium, target pipe 3 and is bonded in by the casting of indium layer 2
On rigid core bar 1, the composition of target pipe 3 is AZOGa, and density is 5.6-5.65g/cm3, and thickness is 5-15mm, and indium layer 2 is pure indium, just
Property core bar 1 be metal core rod.
As optimum embodiment, the rigid core bar 1 in the present embodiment is titanium tube or stainless steel tube.
The preparation process of the AZO high-density rotating targets of the present embodiment is as follows：
A. AZOGa nano powders are used, AZOGa nano powders include zinc oxide ZnO, aluminium oxide Al 2O3, gallium oxide Ga2O3,
Added water 1-3 times by the weight of nano powder, plus alite paste 0.2-1.5%, mixing is stirred, is spray-dried；Wherein, the oxygen of addition
Change gallium Ga2O3 account for gross weight than 0.1-10%；
B. as shown in figure 3, being suppressed using operated pressing tool 6, the upper plug head 4 of operated pressing tool 6 is opened, loading has been sprayed
Dry AZOGa powder 5, uniform compaction covers upper plug head 4 and tightens two ends after loading, be put into cold isostatic press compacting, press power
100-300MPa, the time is 3-60min, to obtain the shaping green compact of tubular；
C. the green compact formed after the completion of compacting are taken out and carry out sharp processing, places into pressure sintering furnace and is sintered；
D. AZOGa green compact made from step b are put into pressure sintering furnace, sealing locking starts slow heating, while defeated
Enter oxygen, open air bleeding valve, make furnace gas circulation exclusion；
E. when temperature reaches 750-800 DEG C, air bleeding valve is closed, pure oxygen is passed through, and as the raising of temperature steps up pressure
Power, pressure limit is -0.1-1MPa, continues to heat and oxygen, and until temperature reaches 1000-1400 DEG C, control is passed through pure oxygen
Flow, pressure is gradually raised to 0.3-1.0MPa；
F. 1-5h is incubated, furnace pressure is slowly depressured to air, furnace cooling takes out rotary target material to less than 200 DEG C,
It is cooled to after room temperature and is machined.It is tied on rigid metal core bar with pure indium casting bonding after machining, obtained
Obtain the AZOGa rotary target materials that density is not less than 96%.
Preferred embodiment of the present utility model is these are only, the utility model is not limited to, it is all in this practicality
Any modifications, equivalent substitutions and improvements made within new spirit and principle etc., should be included in guarantor of the present utility model
Within the scope of shield.
Claims (3)
1. a kind of AZO high-density rotating targets of plus gallium, it is characterised in that：
Including the target pipe set gradually from outside to inside, indium layer and rigid core bar；
Wherein, target pipe is the AZO ceramic post sintering rotating cylindrical target pipes that high density adds gallium, and target pipe is bonded in rigidity by indium layer casting
On core bar；
The target pipe composition is zinc oxide ZnO, aluminium oxide Al 2O3 and gallium oxide Ga2O3, and its thickness is 5-15mm；
The indium layer is pure indium, and the rigid core bar is metal core rod.
2. AZO high-density rotatings target according to claim 1, it is characterised in that：The rigid core bar is for titanium tube or not
Become rusty steel pipe.
3. AZO high-density rotatings target according to claim 1, it is characterised in that：The density of the target pipe is 5.60-
5.65g/cm3, also, its relative density is not less than 98%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720016160.4U CN206579222U (en) | 2017-01-06 | 2017-01-06 | A kind of AZO high-density rotating targets of plus gallium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720016160.4U CN206579222U (en) | 2017-01-06 | 2017-01-06 | A kind of AZO high-density rotating targets of plus gallium |
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| CN206579222U true CN206579222U (en) | 2017-10-24 |
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| CN201720016160.4U Active CN206579222U (en) | 2017-01-06 | 2017-01-06 | A kind of AZO high-density rotating targets of plus gallium |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111778486A (en) * | 2019-04-04 | 2020-10-16 | 领凡新能源科技(北京)有限公司 | Rotating target material, and binding method and device for rotating target material |
-
2017
- 2017-01-06 CN CN201720016160.4U patent/CN206579222U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111778486A (en) * | 2019-04-04 | 2020-10-16 | 领凡新能源科技(北京)有限公司 | Rotating target material, and binding method and device for rotating target material |
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