CN206573743U - A kind of optical element of integrated collimating microlens array and 2-D optical fibre array - Google Patents
A kind of optical element of integrated collimating microlens array and 2-D optical fibre array Download PDFInfo
- Publication number
- CN206573743U CN206573743U CN201720246886.7U CN201720246886U CN206573743U CN 206573743 U CN206573743 U CN 206573743U CN 201720246886 U CN201720246886 U CN 201720246886U CN 206573743 U CN206573743 U CN 206573743U
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- China
- Prior art keywords
- array
- lock pin
- microlens
- optical
- collimation
- Prior art date
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- Expired - Fee Related
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 51
- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001020 plasma etching Methods 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 abstract description 3
- 239000000835 fiber Substances 0.000 description 16
- 238000005530 etching Methods 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Abstract
The utility model discloses a kind of optical element of integrated collimating microlens array and 2-D optical fibre array, including substrate, substrate side is etched with the lock pin being arranged in array, optical fiber is fitted with lock pin, extension of optical fiber to lock pin termination, optical fiber and lock pin fixing seal, substrate another side is etched with the collimation microlens being arranged in array, the collimation microlens are respectively positioned on lock pin termination, and the focus of each collimation microlens is overlapped with the end face of corresponding lock pin termination respectively；The optical element of the integrated collimating microlens array of the utility model and 2-D optical fibre array, collimating microlens array and 2-D optical fibre array are integrated, it is highly parallel, high accuracy alignment, using when eliminate two array alignment packages the step of, simultaneously also without independent adjustment collimation microlens or optical fiber, installation workload is small.
Description
Technical field
The utility model is related to technical field of optical fiber, and in particular to a kind of integrated optical element, applied to optical switch
Integrated collimating microlens array and 2-D optical fibre array optical element.
Background technology
The technological core that all-optical communication network is realized is All-optical switching machine.At present with the full light of 3D-MEMS designs
Interchanger is widely popularized.Its general design for coming in and going out optical interface is the high-precision 2D fiber array and utilization produced
Collimating microlens array is produced in molding or etching, is then recycled high-precision adjustment instrument by fiber array and is collimated micro-
Lens array general alignment is coupled, so as to obtain transmitting or the receiving light path of collimation.
Because the light gone out from fibre optical transmission dissipates generally according to the taper pattern that the numerical aperture (NA) by optical fiber is determined.
(NA=η sin (θ max), wherein η is refractive index of the fibre optical transmission to medium therein, and θ max are the taper launch moulds
The half-angle of formula.）In order to reduce the divergent beams one that the optical fiber in the loss that fiber array is linked to optical system, array is launched
As when another optical system is coupled to after collimated or refocusing, it is desirable to it is every in microlens array alignment fibre system
One, to ensure 1) just from the accurate known location transmitting in an array of every optical fiber, 2) just from every optical fiber
With essentially identical angular emission（I.e. optical fiber is aligned to be substantially parallel to each other), 3) just from every optical fiber saturating from collimation
Jing Jibenxiangtongjulichu transmittings, 4) every optical fiber has essentially identical numerical aperture.
Current people have manufactured 2D high precision optical fiber arrays, about 2 μm of its spacing precision, the emergent light depth of parallelism
2.5mrad, while also having made 2D collimating microlens arrays, about 2 μm of its spacing precision using molding or etching.It will collimate micro-
Lens array and the encapsulation of fiber array general alignment, play the collimation of light path.But, fiber array and micro collimating lens array are all deposited
In interval error, both will produce error at overall package rear center core, and error range is between 0-4 μm, and the error is caused
Light path coupling loss；Secondly, the focus of each collimation lens can not correspond to corresponding fiber end face simultaneously and can not outgoing
Parallel light path；Again, the light direction of fiber array it is inconsistent also result in collimation after light path can not exiting parallel.These reasons
Carry out great difficulty to beam path alignment strap, so as to cause light loss larger and can not use.
Notification number CN 202676944U disclose the 2-D optical fibre array of collimation lens " a kind of carry ", including multiple are in
The lock pin of array arrangement and the optical fiber being plugged in lock pin, extension of optical fiber to lock pin termination, and optical fiber and lock pin fixing seal, often
A lenticule is packaged with individual lock pin termination.Corresponded by optical fiber and independent lenticule, solve well due to
All there is interval error, focus error, light direction in fiber array and microlens array, but therein micro-
Lens need manual adjustment, and the focus of lenticule is located to the end face of lock pin termination, and workload is big, inefficiency.
Utility model content
In order to there is error after solving prior art fiber array and micro collimating lens array package, light path coupling damage is brought
The problem of consumption, the purpose of this utility model is to provide a kind of interval error and focus error is small, light direction consistent, installment work
The optical element of the small integrated collimating microlens array of amount and 2-D optical fibre array.
To achieve these goals, the utility model is adopted the following technical scheme that：A kind of integrated collimating microlens array and
The optical element of 2-D optical fibre array, it is characterised in that including substrate, substrate side is etched with the lock pin being arranged in array, and inserts
In-core is fitted with optical fiber, extension of optical fiber to lock pin termination, optical fiber and lock pin fixing seal, and substrate another side is etched with to be arranged in array
The collimation microlens of cloth, the collimation microlens are respectively positioned on lock pin termination, the focuses of each collimation microlens respectively with it is right
The end face of lock pin termination is answered to overlap.
It is using such scheme, collimating microlens array and 2-D optical fibre array is integrated on the same substrate, simplify standard
The installation procedure of straight lenticule, reduces workload, improves operating efficiency.
Wherein, the substrate is silicon substrate.
Wherein, the lock pin termination is coated with the first anti-reflection film, and the collimation microlens surface is coated with the second anti-reflection film.
Using such scheme, anti-reflection film, wavelength needed for increase light path are coated with lock pin termination and collimation microlens surface
Transmitance.
Wherein, the lock pin is made using semiconductor lithography and plasma etching industrial.
Wherein, the collimation microlens are formed using semiconductor double-sided exposure fabrication techniques.
Using such scheme, the alignment precision of collimating microlens array and ferrule array is less than 1 μm, and error is small.
Compared with prior art, the beneficial effect that the utility model is realized：The integrated collimating microlens array of the utility model
With the optical element of 2-D optical fibre array, collimating microlens array and 2-D optical fibre array are integrated, it is highly parallel, it is high
Accurate alignment, using when eliminate two array alignment packages the step of, while also without independent adjustment collimation microlens or
Optical fiber, installation workload is small；The integrated collimating microlens array of optical element and 2-D optical fibre array of the present utility model, structure and
Installation process is simple, it is easy to accomplish.
Brief description of the drawings
The utility model is further described below in conjunction with the drawings and specific embodiments：
Fig. 1 is the front view of the optical element of the integrated collimating microlens array of the utility model and 2-D optical fibre array；
Fig. 2 is the rearview of the optical element of the integrated collimating microlens array of the utility model and 2-D optical fibre array；
Fig. 3 is the top view of the optical element of the integrated collimating microlens array of the utility model and 2-D optical fibre array.
Wherein：Substrate 1, lock pin 2, optical fiber 3, collimation microlens 4, the first anti-reflection film 5, the second anti-reflection film 6.
Embodiment
As shown in figure 1, the optical element of a kind of integrated collimating microlens array and 2-D optical fibre array, including silicon substrate 1,
The one side of silicon substrate 1, which is etched with the lock pin 2 being arranged in array, lock pin 2, is fitted with optical fiber 3, and optical fiber 3 extends to the termination of lock pin 2, light
Fibre 3 and the fixing seal of lock pin 2, the termination of lock pin 2 is coated with the first anti-reflection film 5.
As shown in Figure 2,3, the another side of silicon substrate 1 is etched with the collimation microlens 4 being arranged in array, collimation microlens 4
In the termination of lock pin 2, the focus of each collimation microlens 4 is overlapped with the end face of the corresponding termination of lock pin 1 respectively, the table of collimation microlens 4
Face is coated with the second anti-reflection film 6.
The manufacturing process of the utility model optical element is as follows:
S1, collimating microlens array is simultaneously etched using semiconductor double-sided exposure technology in silicon substrate 1；
S2, etches ferrule array in the another side of silicon substrate 1 using semiconductor lithography and plasma etching industrial, utilizes light
Quarter, machine was aligned in high precision, collimation microlens 4 is located at the termination of lock pin 2, the focuses of each collimation microlens 4 respectively with corresponding lock pin
The end face of 2 terminations is overlapped, and the etching depth of ferrule array matches the focal length of collimation microlens 4；
S3, the first anti-reflection film 5 and the second anti-reflection film 6 are plated in the termination of lock pin 2 and the surface of collimation microlens 4 respectively；
S4, the optical fiber 3 of insertion end face coating arrives lock pin 2, glue sealing.
The utility model optical element is deposited when solving accurate fiber array at present and collimating microlens array overall co-ordination
Interval error, light direction it is inconsistent, the problems such as focus error；The utility model optical element is by collimating microlens array
The positive and negative with a piece of silicon substrate is integrated in fiber array, semiconductor double-sided exposure and plasma etching industrial is utilized so that
Lens array and the alignment precision of ferrule array are less than 1 μm, eliminate the alignment error of fiber array and lens array, are inserted during assembling
Enter optical fiber to lock pin, it is not necessary to the regulation after assembling.
Above-mentioned embodiment is exemplary, be in order to preferably make skilled artisans appreciate that this
Patent, it is impossible to be not understood as including this patent the limitation of scope；As long as times made of spirit according to disclosed in this patent
How with change or modification, the scope that this patent includes is each fallen within.
Claims (5)
1. the optical element of a kind of integrated collimating microlens array and 2-D optical fibre array, it is characterised in that including substrate（1）,
Substrate（1）Simultaneously it is etched with the lock pin being arranged in array（2）, lock pin（2）Inside it is fitted with optical fiber（3）, optical fiber（3）Extend to lock pin
（2）Termination, optical fiber（3）With lock pin（2）Fixing seal, substrate（1）Another side is etched with the collimation microlens being arranged in array
（4）, the collimation microlens（4）It is respectively positioned on lock pin（2）Termination, each collimation microlens（4）Focus respectively with it is corresponding
Lock pin（2）The end face of termination is overlapped.
2. the optical element of integrated collimating microlens array and 2-D optical fibre array as claimed in claim 1, it is characterised in that
The substrate（1）For silicon substrate（1）.
3. the optical element of integrated collimating microlens array and 2-D optical fibre array as claimed in claim 1, it is characterised in that
The lock pin（2）Termination is coated with the first anti-reflection film（5）, the collimation microlens（4）Surface is coated with the second anti-reflection film（6）.
4. the optical element of integrated collimating microlens array and 2-D optical fibre array as claimed in claim 1, it is characterised in that
The lock pin（2）It is made using semiconductor lithography and plasma etching industrial.
5. the optical element of integrated collimating microlens array and 2-D optical fibre array as claimed in claim 1, it is characterised in that
The collimation microlens（4）Formed using semiconductor double-sided exposure fabrication techniques.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720246886.7U CN206573743U (en) | 2017-03-14 | 2017-03-14 | A kind of optical element of integrated collimating microlens array and 2-D optical fibre array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720246886.7U CN206573743U (en) | 2017-03-14 | 2017-03-14 | A kind of optical element of integrated collimating microlens array and 2-D optical fibre array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206573743U true CN206573743U (en) | 2017-10-20 |
Family
ID=60054488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720246886.7U Expired - Fee Related CN206573743U (en) | 2017-03-14 | 2017-03-14 | A kind of optical element of integrated collimating microlens array and 2-D optical fibre array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206573743U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387905A (en) * | 2018-11-22 | 2019-02-26 | 中山市美速光电技术有限公司 | A kind of array collimator and its manufacturing method of the micro- spacing of two dimension |
| CN115356795A (en) * | 2022-10-21 | 2022-11-18 | 成都万应微电子有限公司 | Optical switch packaging structure and process method thereof |
-
2017
- 2017-03-14 CN CN201720246886.7U patent/CN206573743U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387905A (en) * | 2018-11-22 | 2019-02-26 | 中山市美速光电技术有限公司 | A kind of array collimator and its manufacturing method of the micro- spacing of two dimension |
| CN115356795A (en) * | 2022-10-21 | 2022-11-18 | 成都万应微电子有限公司 | Optical switch packaging structure and process method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171020 |