CN206558473U - 一种等离子体刻蚀机的压环 - Google Patents
一种等离子体刻蚀机的压环 Download PDFInfo
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- CN206558473U CN206558473U CN201621425397.XU CN201621425397U CN206558473U CN 206558473 U CN206558473 U CN 206558473U CN 201621425397 U CN201621425397 U CN 201621425397U CN 206558473 U CN206558473 U CN 206558473U
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CN201621425397.XU CN206558473U (zh) | 2016-12-23 | 2016-12-23 | 一种等离子体刻蚀机的压环 |
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CN201621425397.XU CN206558473U (zh) | 2016-12-23 | 2016-12-23 | 一种等离子体刻蚀机的压环 |
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CN206558473U true CN206558473U (zh) | 2017-10-13 |
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Effective date of registration: 20180619 Address after: 221300 No. 8 Liaohe West Road, Pizhou Economic Development Zone, Pizhou, Xuzhou, Jiangsu Co-patentee after: Institute of Microelectronics, Chinese Academy of Sciences Patentee after: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. Address before: 221300 No. 8 Liaohe West Road, Pizhou Economic Development Zone, Pizhou, Xuzhou, Jiangsu Patentee before: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 221300 No.8, Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Luwen Instrument Co.,Ltd. Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 221300 No. 8 Liaohe West Road, Pizhou Economic Development Zone, Pizhou, Xuzhou, Jiangsu Patentee before: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |