CN206541042U - It is a kind of that there is the V-groove and array for leading glue function - Google Patents

Abstract

The utility model discloses a kind of V-groove and array for having and leading glue function, the top end surface of the V-groove is provided with the groove combination of " rice " font, and it is diagonally opposed that the groove in the groove combination is distributed in the direction parallel to V-groove, the direction perpendicular to V-groove and groove.V-groove top end surface has " rice " font groove in the utility model, can not only guide the flowing of glue in the direction for being parallel and perpendicular to V-groove, and diagonally opposed, can guide the flowing of glue.

Description

It is a kind of that there is the V-groove and array for leading glue function

Technical field

The utility model is related to a kind of V-groove for having and leading glue function, belongs to the technical field of fiber optic communication.

Background technology

The continuous heating studied with Optoelectronic Integration, supports the optical passive component of multi-channel coupling to be also increasingly subject to Scientific research personnel and businessman attract attention.And the fiber array being developed into using V-groove array, as being coupled with multichannel waveguide device Optimal device, for example, its coupling with array waveguide grating, with semiconductor laser array, semiconductor photodetector array Coupling.Fiber array is optical integrated device and the indispensable coupled apparatus of optical signal channel transmission.

When external light source being introduced integrated waveguide device by optical fiber, to reduce influence of the accidentalia to coupling efficiency, Need to solve the problems, such as fiber orientation, and to improve multichannel waveguide devices, semiconductor laser array, array of photoswitch etc. With the coupling efficiency issues of optical fiber, fiber orientation V-groove is required for.When optical fiber is coupled with waveguide device, optical fiber and waveguide It is the greatest problem in practical work piece to be accurately aimed at.Because the core diameter of single-mode fiber and the size of Waveguide end face are all in micron amount Level, so accurate alignment is highly difficult.If fine registration can be realized, efficient coupling can be achieved.Therefore, design and make Producing quality, V-groove and its array with high-precision fixed bit function will be particularly significant well, the optical fiber array being made using it Row turn into important optical passive component.Fiber array has important application value and wide market prospects, and it can be used for collecting Opened into photoelectron and fiber waveguide device, wavelength-division multiplex and dense wavelength division multiplexing device, array waveguide grating, detector array, light Pass, optoisolator etc., integrated optical device with being of coupled connections for fiber array by realizing the connection with optical fiber transmission network.

Fiber array is to do infrabasal plate using V-groove, and optical fiber one end is peelled off into covering, exposes bare fibre, V-type is put it into In groove, epoxy epoxy glues are coated, smooth cover glass is then cooked into upper substrate, is put in above optical fiber, are compressed, alignment consolidates glue Change, then the end face of infrabasal plate, optical fiber, upper substrate is polished, as fiber array.

Fiber array V-shaped type groove is produced both at home and abroad is mostly divided into two classes.The first kind is using the method being machined, using Buddha's warrior attendant Sand cutter cut out required V-groove on the glass sheet, and glass cost is low, but diamant is worn in cutting process, need not Disconnected reconditioning, the diamant of abrasion also causes V-groove alteration of form, it is impossible to meet required precision；When making the V-groove of multiple-grooved, such as During more than 32 groove, the error constantly accumulated due to equipment is so as to cause precision to reduce, and yield declines, therefore is added using mechanical means The cost that work is more than the V-groove of 32 grooves is very high.The silicon wafer that Equations of The Second Kind is used processes V-type as the method for base material wet etching Groove, the method uses the technology of photoetching, and anisotropic wet etch silicon wafer is not machined caused accumulated error, therefore Precision is not limited by V-groove quantity, using silicon chip anisotropy the characteristics of, corrode the V type groove shapes consistent.It is this The V-groove of wet etching, positioning precision is high, reproducible, is more applicable for low cost, the requirement of mass production, is current The main flow preparation method of fiber orientation V-groove.

The size of the upper substrate of commercial V-groove and fiber array is all than larger, several millimeters of magnitude, V-groove at present Upper surface, the lower surface of cover glass upper substrate be all plane.It is by epoxy glue between V-groove, optical fiber and cover glass It is fixed together, the mobility of epoxy glue is limited, it is generally the case that many regions between three, epoxy glue can not be abundant Ground is flowed into.In the case of larger-size, this situation in actual use, the problem of will not bringing obvious, optical fiber is still Reliablely and stablely it can be fixed in V-groove.But, with being continuously increased for the information traffic, optic communication is moving towards integrated The road of change.Traditional device develops to the direction that volume is smaller, function is more, performance is stronger.Light integrated (OIC) and photoelectricity Subset into (OEIC) be opto-electronic device development inexorable trend.In optic communication, measurement and other association areas, due to fiber waveguide The extensive use of device, the application of fiber array coupled thereto is more and more extensive, and preparation method is also more and more therewith, makes Quality, technology, efficiency and integrated level are also improved constantly.It is less and less in V type grooves, the size of cover glass, it is reduced to 1 milli Rice, even submillimeter magnitude when, the contact area between V-groove, optical fiber and cover glass is substantially reduced, due to epoxy The limited mobility of glue and the drawbacks of can not fully be contacted between the three that brings, fully reveal, so that optical fiber is no longer Reliablely and stablely it is fixed in V-groove.

The top end surface of existing V-groove is all even curface, the size of V grooves is small arrive submillimeter magnitude when, it is former There is smooth V-groove surface to be no longer able to meet reliablely and stablely fixed optical fiber, (optical fiber is tilted so as to produce integrity problem Come, jack-up briquetting etc.).

The content of the invention

In order to solve existing technical problem, the utility model proposes a kind of " rice " font, with guiding epoxy The V-groove that glue fully flows, the contact area between increase V-groove, optical fiber, cover glass, is reliablely and stablely fixed so as to realize The effect of optical fiber.

The technical scheme that the utility model is used is：

A kind of to have the V-groove for leading glue function, the top end surface of the V-groove is provided with the groove group of multiple different directions Close, the groove in groove combination be distributed in the direction parallel to V-groove, the direction perpendicular to V-groove and with it is parallel, vertical Nogata is to intersecting direction.

The top end surface of the V-groove is provided with the groove combination of " rice " font, the groove distribution in the groove combination It is diagonally opposed in the direction parallel to V-groove, the direction perpendicular to V-groove and groove.

" rice " the font groove combination is provided with two groups or more than two in the top end surface of V-groove.

The top end surface of the V-groove further comprises the groove for not being located at " rice " font region.

The groove size is set to below micron dimension or micron dimension.

The channel section of the V-groove top end surface uses rectangle or V-arrangement.

The V-groove top end surface be provided with 2 parallel to V-groove direction groove, 20 perpendicular to V type grooves direction Groove, 2 diagonally opposed grooves, the channel section use 10 microns × 10 microns.

A kind of array, further comprises optical fiber, cover glass upper substrate, and optical fiber is arranged in V-groove, is covered on cover glass Plate is amplexiformed with V-groove top end surface, and the groove of multiple different directions is provided with the gluing of surfaces of the cover glass upper cover plate Combination, the groove in groove combination be distributed in the direction parallel to V-groove, the direction perpendicular to V-groove and with it is parallel, The intersecting direction of vertical direction.

The groove is combined as the groove combination of " rice " font, and the groove in the groove combination is distributed in parallel to V-type It is the direction of groove, diagonally opposed perpendicular to the direction of V-groove and groove.

The groove combination of " rice " font is provided with two groups or more than two in cover glass upper substrate surface.

The utility model proposes a kind of V-groove and array for having and leading glue function, with following features：

1st, the utility model V-groove top end surface has " rice " font groove, is not only being parallel and perpendicular to V type grooves Direction can guide the flowing of glue, and diagonally opposed, can guide the flowing of glue.

2nd, the utility model groove has the fine sizes of micron dimension, and what is utilized is capillary syring principle.

3rd, when the size of the utility model V-groove and array is below millimeter magnitude, this structure more can be reliablely and stablely Fixed optical fiber.

Brief description of the drawings

Fig. 1 is the cross section structure schematic diagram of the fiber array of prior art；

Fig. 2 is the cross section structure schematic diagram of the V-groove of prior art；

Fig. 3 is the cross section structure schematic diagram of the V-groove array of prior art

Fig. 4 is the cross section structure schematic diagram of fiber array of the present utility model；

Fig. 5 is the cross section structure schematic diagram of V-groove of the present utility model；

Fig. 6 is the dimensional structure diagram of V-groove of the present utility model and array " rice " font groove.

Fig. 7 is that the mansion of V-groove of the present utility model and array " rice " font groove regards structural representation.

Wherein：

1-V-groove；2-optical fiber；3-cover glass upper substrate；4-epoxy glue；The top end surface of 5-V-groove；6-glass The lower surface of glass cover plate upper substrate；7-groove；

Embodiment

To of the present utility model there is the V-groove and array of leading glue function to be described in detail with reference to embodiment.

The utility model provide it is a kind of have lead the V-groove of glue function, the top end surface of the V-groove be provided with it is multiple not Equidirectional groove combination, the groove in the groove combination is distributed in the direction parallel to V-groove, the side perpendicular to V-groove The direction intersected to and with parallel, vertical direction

The utility model embodiment specifically provides a kind of V-groove for having and leading glue function, and the top end surface of the V-groove is set It is equipped with the groove combination of " rice " font, the groove in groove combination is distributed in direction parallel to V type grooves, perpendicular to V-type The direction of groove and groove are diagonally opposed.The V-groove and fiber array made of prior art is existing as shown in Fig. 2, Fig. 3 and Fig. 1 There is the top end surface 5 of V-groove and array without groove, be an even curface.The silicon substrate V-groove made using wet etching as Example, introduces explanation.Using monocrystalline silicon piece as raw material substrate, thereon by being lithographically formed V-groove pattern, then in alkaline solution Middle wet etching silicon, due to the Crystals in Symmetry structure of monocrystalline silicon, different crystal faces have different corrosion rates, so that in corrosion region Domain forms the groove of " V " font, finally removes mask, is just successful V-groove.Then the optical fiber for removing coat is put into V-type In groove, epoxy epoxy glues are coated, cover glass upper substrate, solidification are being placed thereon.So V-groove, optical fiber, on cover glass Fixed and be bonded together by epoxy glue between substrate three, be just successful fiber array.Existing this technology has one Drawback, when making fiber array, because the contact area between upper and lower substrate is larger, and the mobility of epoxy epoxy glues It is limited, cause there is more region there is no epoxy glue between upper and lower substrate and optical fiber, when the size of V-groove is less, light Fibre is fixed loosely.As shown in Fig. 5, Fig. 6, Fig. 7, in order to solve this drawback, the utility model is on original smooth V-groove top Surface, has made " rice " font groove, this " rice " font groove, not only in the direction parallel to V-groove, perpendicular to V-groove Direction can guide the flowing of glue, and diagonally opposed, can also guide the flowing of glue.So considerably increase in unit area Contact area between glue and V-groove surface, optical fiber, cover glass upper substrate, ring is greatly helped by capillary syring principle The flowing of oxygen glue." rice " font groove of the present utility model greatly increases the epoxy glue 4 and V-groove surface, light of fixed optical fiber 2 Contact area between fibre 2, cover glass upper substrate 3, reason has two, one is due to the effect of capillary syring, epoxy glue Fully contacted with V-groove surface, optical fiber, cover glass upper substrate and increase fixed-area；The second is depending on fine groove Number and size, because being filled with epoxy glue in groove 7, the surface area of fine groove greatly, is further greatly expanded Contact area.By taking single V-groove as an example, in flat surface, only being parallel and perpendicular to, V-groove direction is fluted and this is practical new In the case of three kinds of " rice " the font groove of type, the increase of effective contact area is illustrated by simple computation.Effective contact area Increase be only embodied in the increase of V-groove top end surface and epoxy glue contact area, therefore only calculate in following calculating this portion Point.The situation of flat surface, it is assumed that 1000 microns of V-groove top end surface length, wide 200 microns, 1 V-groove has two top tables Face, therefore effectively contact area is the square microns of 2 × 1000 × 200,=40 ten thousand.Only have being parallel and perpendicular to V-groove direction The situation of groove, each top end surface has 2 grooves parallel to V-groove direction, has 20 grooves perpendicular to V-groove direction, recessed Slot cross-section is 10 microns × 10 microns, therefore relative to the situation of flat surface, the increase of effective contact area for 2 × (2 × The square micron of 1000 × 10 × 3+20 × 200 × 10 × 3)=360,000, effective area increase by 90%." rice " word of the present utility model The situation of type groove, each top end surface has 2 grooves parallel to V-groove direction, has 20 grooves perpendicular to V-groove direction, Diagonally opposed to have 2 grooves, channel section is 10 microns × 10 microns, therefore relative to the situation of flat surface, effectively contact The increase of area is that 2 × (2 × 1000 × 10 × 3+20 × 200 × 10 × 3+2 × 1020 × 10 × 3)=48.24 ten thousand squares are micro- Rice, effective area increase by 120.6%.Can be seen that " rice " font groove of the present utility model from this result of calculation can increase Plus the contact area of epoxy glue and V-groove, and then increase the Stability and dependability of fixed optical fiber.

As shown in figure 4, fiber array includes optical fiber 2, cover glass upper substrate 3, V-groove 1, optical fiber 2 is arranged at V-groove 1 Interior, cover glass upper cover plate 3 is amplexiformed with V-groove top end surface 5, is provided with the gluing of surfaces 5 of the cover glass upper cover plate Direction parallel to V-groove, perpendicular to the direction of V-groove and diagonally opposed groove 7, the shape of groove 7 in three directions Into " rice " font.The utility model is not limited to be provided with the embodiment of the above, the gluing of surfaces of the cover glass upper cover plate The groove combination of multiple different directions, the groove in groove combination is distributed in direction parallel to V-groove, perpendicular to V-type The direction of groove and the direction intersected with parallel, vertical direction.

Using the utility model scheme, V-groove top end surface is no longer even curface, but with scraggly table This " rice " the font groove in face, can be 1 or any number of, and now " rice " font groove combination is on the top of V-groove End surfaces are provided with two groups or more than two；The section of this " rice " font groove, can be rectangle, V-arrangement, can also be other Arbitrary shape；The size of this " rice " font channel section, can be sub-micron, tens microns or hundreds of microns of amounts Level.In above specific embodiment, it is inherently the capillary syring principle using fine structure to promote the abundant of epoxy glue Flowing.

Technical problem to be solved in the utility model is to use " rice " font groove, its feature in V-groove top end surface That, not only in X and Y-direction, and the flowing of epoxy glue can be guided diagonally opposed, add in unit area glue with it is upper, The contact area of infrabasal plate, the flowing of epoxy glue is greatly helped by capillary syring principle.Use this method, it is only necessary to one Side dispensing, greatly simplifies technique.Be mainly used in carrying out in fiber optic communication field waveguide device and optical fiber coupling, The coupling of array waveguide grating and optical fiber, the coupling of array laser and fiber array, the coupling of detector array and fiber array Close etc..As those skilled in the art it is readily conceivable that a variation, this " rice " font groove can also be produced on glass On the lower surface 6 of glass cover plate upper substrate, same effect can be reached.

Although the utility model has been illustrated in detail in and has described the specific embodiment reference of correlation, the skill of this area Art personnel it should be appreciated that can make each in the form and details in without departing substantially from spirit and scope of the present utility model Plant and change.These changes fall within the protection domain required by claim of the present utility model.

Claims (10)

1. a kind of have the V-groove for leading glue function, it is characterised in that：The top end surface of the V-groove is provided with multiple not Tongfangs To groove combination, the groove in groove combination be distributed in the direction parallel to V-groove, the direction perpendicular to V-groove with And the direction intersected with parallel, vertical direction.

2. it is according to claim 1 a kind of with the V-groove for leading glue function, it is characterised in that：The top table of the V-groove Face is provided with the groove combination of " rice " font, the groove in groove combination be distributed in direction parallel to V-groove, perpendicular to The direction of V-groove and groove are diagonally opposed.

3. it is according to claim 2 a kind of with the V-groove for leading glue function, it is characterised in that：" rice " the font groove The top end surface combined in V-groove is provided with two groups or more than two.

4. it is according to claim 2 a kind of with the V-groove for leading glue function, it is characterised in that：The top table of the V-groove Face further comprises the groove for not being located at " rice " font region.

5. it is a kind of with the V-groove for leading glue function according to claim 1 or claim 2, it is characterised in that：It is described recessed Groove is sized to below micron dimension or micron dimension.

6. it is a kind of with the V-groove for leading glue function according to claim 1 or claim 2, it is characterised in that：The V The channel section of type groove top end surface uses rectangle or V-arrangement.

7. it is according to claim 2 a kind of with the V-groove for leading glue function, it is characterised in that：The V-groove top end surface It is provided with 2 groove, 20 grooves perpendicular to V-groove direction parallel to V-groove direction, 2 diagonally opposed grooves, institute Channel section is stated using 10 microns × 10 microns.

8. a kind of array with the V-groove for leading glue function described in a kind of application claim 1, it is characterised in that：Further wrap Optical fiber, cover glass upper substrate are included, optical fiber is arranged in V-groove, and cover glass upper cover plate is amplexiformed with V-groove top end surface, institute The groove combination of multiple different directions, the groove in the groove combination are provided with the gluing of surfaces for stating cover glass upper cover plate It is distributed in the direction parallel to V-groove, the direction perpendicular to V-groove and the direction intersected with parallel, vertical direction.

9. a kind of array according to claim 8, it is characterised in that：The groove is combined as the groove group of " rice " font Close, it is diagonal that the groove in the groove combination is distributed in the direction parallel to V-groove, the direction perpendicular to V-groove and groove Direction.

10. a kind of array according to claim 9, it is characterised in that：The groove of " rice " font is combined in glass cover Piece upper substrate surface is provided with two groups or more than two.