CN206531807U - For pumping detection heat reflection system without object lens measurement apparatus - Google Patents

For pumping detection heat reflection system without object lens measurement apparatus Download PDF

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Publication number
CN206531807U
CN206531807U CN201621386398.8U CN201621386398U CN206531807U CN 206531807 U CN206531807 U CN 206531807U CN 201621386398 U CN201621386398 U CN 201621386398U CN 206531807 U CN206531807 U CN 206531807U
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China
Prior art keywords
sample
mobile station
linear mobile
linear
pumping
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Expired - Fee Related
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CN201621386398.8U
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Chinese (zh)
Inventor
孙方远
邱东
唐大伟
陈哲
王新伟
杨明
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Institute of Engineering Thermophysics of CAS
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Institute of Engineering Thermophysics of CAS
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Priority to CN201621386398.8U priority Critical patent/CN206531807U/en
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Abstract

The utility model provide it is a kind of for pumping detect heat reflection system without object lens measurement apparatus, including:First linear mobile station;Second linear mobile station;Third linear mobile station;Interposer substrate;And right angle rack;Wherein, the described first and second linear mobile stations form XY configuration mobile stations, realize the movement in horizontal plane by the orthogonal assembling of the interposer substrate;The third linear mobile station is assembled by the way that the right angle rack is orthogonal with the described first and second linear mobile stations, forms three-dimensional mobile platform;The first linear mobile station, the second linear mobile station, third linear mobile station is moved along the X, Y, Z axis direction of the three-dimensional mobile platform respectively.The utility model realizes convenient and is accurately controlled measurement point and focuses on sample, liquid or powder sample and the thermal physical property parameter at interface is facilitated to measure, space is saved, the flexible placement of sample is realized, bit phase delay and absorption loss that transmission optical component can be introduced is effectively eliminated.

Description

For pumping detection heat reflection system without object lens measurement apparatus
Technical field
The utility model is related to ultrashort laser pulse pumping detection technology field, more particularly to a kind of for pumping detection heat Reflecting system without object lens measurement apparatus.
Background technology
Micro-nano structure material is widely used to the fields such as microelectronics, photoelectron, and uses the formation of micro-nano structure material Micro element can operationally produce high heat flow density, and hot stack will directly influence the operating efficiency of micro element and reliable Property;Moreover, micro element is in many different application fields, the treatment of cancer such as based on heat therapy and nano particle, solar energy adds Thermotransport mechanism of heat, colloid and nano-fluid, evaporation, misting cooling, and electrochemistry solid liquid interface etc. also all plays heavy to closing The effect wanted.Solve the above problems extremely urgent, this is accomplished by the thermotransport of the micro-nano structure material to constituting above-mentioned micro element Property carries out accurate characterization, to disclose its thermotransport mechanism.
Existing pumping detection heat reflection system carries out accurate characterization to thin-film material and solid liquid interface thermotransport property, with reality Now to wide temperature range, the nano material inside of many states of matter and interface thermotransport Quality Research.However, being taken out existing It is general that laser is focused using object lens in fortune detection heat reflection system, then get to above sample, but this mode can be produced Add lustre to difference, and limited by focal length, the modes of emplacement of sample is single, measurement liquid and solid liquid interface thermal conductivity are inconvenient.
Utility model content
(1) technical problem to be solved
In view of above-mentioned technical problem, the utility model provides a kind of being surveyed without object lens for pumping detection heat reflection system Device is measured, can be facilitated using three-dimensional mobile platform and be accurately controlled measurement point and focus on sample;Liquid and powder sample Product can make liquid or powder sample using liquid or powder self gravitation in bracket in sample or by way of pressure Product are fully distributed, so that the easily thermal physical property parameter such as the thermal conductivity at measurement sample and interface;It is anti-using off axis paraboloid mirror (OAP) Penetrate mirror, save space, realize the flexible placement of sample, effectively eliminated transmission optical component introducing bit phase delay and Absorption loss.
(2) technical scheme
According to one side of the present utility model, there is provided a kind of being measured without object lens for pumping detection heat reflection system Device, including:First linear mobile station;
Second linear mobile station;
Third linear mobile station;
Interposer substrate;And
Right angle rack;Wherein,
The first and second linear mobile station forms XY configuration mobile stations by the orthogonal assembling of the interposer substrate, real Movement in existing horizontal plane;
The third linear mobile station is assembled by the way that the right angle rack is orthogonal with the described first and second linear mobile stations, Form three-dimensional mobile platform;
The first linear mobile station, the second linear mobile station, third linear mobile station moves flat along the three-dimensional respectively The X, Y, Z axis direction movement of platform.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, in addition to:Sample Interior bracket, is measured for liquid and powder sample.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, in the sample Bracket includes bracket retainer plate and the glass for being coated with metal sensing layer in sample, and the glass for being coated with metal sensing layer includes glass It is provided with through hole in glass and metal sensing layer, the sample in the middle part of bracket retainer plate, the through hole and the metal sensing layer that is coated with Glass collectively forms a concave architecture, the sample for holding liquid or powder.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, in addition to:Sample External support, measures or provides the fixation to bracket in sample for solid sample.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, using the sample Product external support fixes bracket in the sample, wherein, the metal side of the glass for being coated with metal sensing layer of bracket in the sample It is connected by adhesive with bracket retainer plate in the sample, its glass side is positioned over inside the sample external support down, is led to Cross the sample external support to be connected on extension bar, and the third linear mobile station is connected by extension bar.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, in addition to:Off axis Parabolic mirror, immediately below the sample external support, pumping laser and exploring laser light are collinearly launched to the off-axis throwing Parabolic mirror, is focused on the sample after being reflected through the off-axis parabolic mirror, can be with by three-dimensional mobile platform Focus and the relative position of sample are adjusted according to specific sample size.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, it is described it is off-axis throw The off-axis angle of parabolic mirror is 90 °, is more than 90% in 450nm -2 μ m wavelength range internal reflections rate.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, it is described it is off-axis throw Parabolic mirror is installed adaptor, the installation adaptor of non-threaded or off-axis parabolic mirror mounting seat using external screw thread and carried out Install.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, first He Second linear mobile station is respectively along the X of the three-dimensional mobile platform, Y-axis movement to adjust the horizontal position of the sample external support Put, Z axis of the third linear mobile station along the three-dimensional mobile platform is moved to adjust the vertical height of sample external support, Make the diverse location of the metal sensor layer surface of bracket in the sample surfaces or sample that focused spot is located in sample external support, it is real Now to the measurement of diverse location sample thermo-physical property.
It is preferred that, it is of the present utility model for pumping detect heat reflection system without object lens measurement apparatus, the First Line Property mobile station, the second linear mobile station and third linear mobile station have hardened steel linear bearing and dowel, are assembled into the right hand Or left-handed system orthogonal linear three-dimensional mobile platform, its quadrature error is less than 5mrad.
(3) beneficial effect
It can be seen from the above technical proposal that the utility model, which is used for pumping, detects being filled without object lens measurement for heat reflection system Put and at least have the advantages that one of them:
(1) by three-dimensional mobile platform, selection measurement point can be moved in the horizontal plane, to reach that repeatedly measurement improves measurement The purpose of precision, while being focused in vertical direction movement with adjusting light path on sample, realizes conveniently and is accurately controlled measurement Point and focusing sample;
(2) liquid self gravitation can be utilized in bracket in sample for liquid and powder sample or passes through pressure Mode liquid powder sample is fully distributed, be convenient for measuring the thermal physical property parameters such as the thermal conductivity at sample and interface;
(3) Laser Focusing is radiated in sample using off axis paraboloid mirror (OAP) speculum in pumping detection heat reflection system Product surface portion, is separated light path by the off-axis design of off-axis parabolic mirror, can be played saving space, be realized The more flexible placement effect of sample, has effectively eliminated bit phase delay and absorption loss that transmission optical component can be introduced.
Brief description of the drawings
Fig. 1 is that the utility model is used for the structural representation without object lens measurement apparatus that pumping detects heat reflection system.
Fig. 2 is bracket schematic diagram in the utility model sample.
<Description of reference numerals>
The linear mobile stations of 1- first;
The linear mobile stations of 2- second;
3- right angle racks;
4- third linear mobile stations;
5- extension bars;
6- sample external supports;
7- off-axis parabolic mirrors;
Bracket retainer plate in 8- samples;
9- liquid powder samples;
10- metal sensing layers;
11- glass
Embodiment
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with specific embodiment, and Referring to the drawings, the utility model is further described.
It should be noted that in accompanying drawing or specification description, similar or identical part all uses identical figure number.It is attached The implementation for not illustrating or describing in figure, is form known to a person of ordinary skill in the art in art.In addition, though this Text can provide the demonstration of the parameter comprising particular value, it is to be understood that parameter is without being definitely equal to corresponding value, but be able to can connect The error margin received is similar to corresponding value in design constraint.The direction term mentioned in embodiment, for example " on ", " under ", "front", "rear", "left", "right" etc., are only the directions of refer to the attached drawing.Therefore, the direction term used is for illustrating not to use To limit protection domain of the present utility model.
The utility model, without object lens measurement apparatus, passes through off-axis parabolic mirror for pumping detection heat reflection system Realize that the laser detected to pumping in heat reflection system uses different modes, such as horizontal laser light changes 90 degree to the left in horizontal plane Or beat to the right on the sample being disposed vertically or horizontal laser light changes 90 degree in vertical plane and up or down beaten in sample On product, change light path focused radiation and the free degree for measuring more effective utilization space increase sample placement reached in sample surfaces, Measure the expansion of function and scope;The hot physical property ginseng such as the thermal conductivity of liquid, powder etc. and solid liquid interface is realized by sampling device Number measurement;By mobile selection measurement point in three-dimensional mobile platform horizontal plane, to reach that repeatedly measurement improves the mesh of measurement accuracy , vertical direction movement is focused on sample with adjusting light path.
Fig. 1 is that the utility model is used for the structural representation without object lens measurement apparatus that pumping detects heat reflection system.Such as Shown in Fig. 1, the utility model be used for pumping detect heat reflection system without object lens measurement apparatus, including:
First linear mobile station;
Second linear mobile station;
Third linear mobile station;
Interposer substrate;And
Right angle rack;Wherein,
The first and second linear mobile station forms XY configuration mobile stations by the orthogonal assembling of the interposer substrate, real Movement in existing horizontal plane;
The third linear mobile station is assembled by the way that the right angle rack is orthogonal with the described first and second linear mobile stations, Three-dimensional mobile platform is formed, the three dimensions free degree is realized;
The first linear mobile station, the second linear mobile station, third linear mobile station moves flat along the three-dimensional respectively The X, Y, Z axis direction movement of platform.
In order to realize precise motion and long life, the first linear mobile station, the second linear mobile station and the 3rd Linear mobile station has hardened steel linear bearing, and each linear mobile station has accurate dowel, can be assembled into the right hand Or left-handed system orthogonal linear three-dimensional mobile platform.It is preferred that, its quadrature error is less than 5mrad.
The first linear mobile station, the second linear mobile station and third linear mobile station can use thorlabs PT1/M Model mobile station, stroke range is 25.0mm, is indexed as 10 μm.The interposer substrate can use thorlabs PT101 model bases Plate;The right angle rack can use thorlabs PT102 model supports.
Fig. 1 is refer to, the second linear mobile station is connected by the right angle rack with the third linear mobile station, Wherein, the right angle rack is fixed in the described second linear mobile station, and the third linear mobile station is fixed on described On the vertical plane of right angle rack, the XY configurations mobile station is set to be moved on Z axis, i.e. vertical direction.
Further, it is described to detect also including without object lens measurement apparatus for heat reflection system for pumping:
Bracket in sample, for liquid and powder sample measurement there is provided the support to liquid and powder sample And constraint.
Sample external support, for the measurement of solid form sample, there is provided consolidate to solid sample or to bracket in the sample It is fixed;The sample external support can be connected by extension bar with the third linear mobile station.
Suitable position of mounting hole mounting seat adaptor is selected among multiple mounting holes in third linear mobile station, Extension bar support can be fixed on the described 3rd by the base connector using thorlabs UPHA as base connector Above linear mobile station.
The sample external support can be used for fixingInch element, there is provided around linear mobile parallel to first for such as packing ring Platform and the XY axles of the second linear mobile station are not less than ± 4 ° of angular adjustment.Specifically, the sample can by bond or its He is fixed on packing ring mode, and the size dimension of the packing ring is generallyThe packing ring for being fixed with sample is fixed on by snap ring In sample external support, it is installed to by 8-32 (M4) screwInch extension bar screw, is connected with the extension bar.
When carrying out the measurement of solid form sample using the sample external support, described first and second are adjusted linear mobile Platform can adjust the horizontal level of sample external support, and the vertical of sample external support can be adjusted by adjusting the third linear mobile station Highly, the sample surfaces for making focused spot be located in sample external support.
Fig. 2 is bracket schematic diagram in the utility model sample.As shown in Fig. 2 for liquid or the sample of powder, can It is positioned in mode shown in reference picture 2 in the sample in bracket, then bracket in the sample is fixed on the sample external support It is interior.
Bracket includes bracket retainer plate and the glass for being coated with metal sensing layer in sample in the sample.The sample Neto Through hole is provided with the middle of frame retainer plate, the described clear size of opening is less than bracket retainer plate size, the sample Neto in the sample Frame retainer plate can beInch metal pad, namely the clear size of opening are less thanInch, its thickness be 2-5mm, external diameter with Sample external support is matched.The glass for being coated with metal sensing layer includes glass and metal sensing layer, and the glass can be lid glass Piece, size is more than the clear size of opening and is less thanInch, the metal sensing layer can be aluminium film, thickness 50-200nm it Between, it is coated with the metal side of the glass of metal sensing layer and is connected by adhesive with bracket retainer plate in sample, adhesive ensures glass It is fully sealed in glass and sample between bracket retainer plate, its glass side is positioned over inside sample external support down, in the sample The through hole of bracket retainer plate collectively forms a concave architecture with glass, the sample for holding liquid or powder, sample Consumption determined by clear size of opening, in order to embody the advantage that the utility model amount of samples is few, the optional -7mm of diameter 5 circles of through hole Hole.The sample external support with sample is connected on extension bar, and is fixed on above-mentioned chassis adapter by fixed extension bar support On part.
When carrying out liquid and the measurement of powder sample using bracket in the sample, by liquid and powder sample It is placed on inside the sample external support.Focused spot is located at the metal sensor layer surface of bracket in sample, adjustment the described 3rd Linear mobile station can adjust the vertical height of sample external support, and sample can be adjusted by adjusting the first and second linear mobile station The horizontal level of product external support, makes focused spot be located at the difference in sample surfaces or sample in the metal sensor layer surface of bracket Position, realizes the measurement to thermal physical property parameters such as sample diverse location thermal conductivities.
Further, the pumping detection heat reflection system that is used for also includes:Off axis paraboloid mirror (OAP) speculum, is used for Focus on and change light path;The off-axis angle of the off-axis parabolic mirror is 90 °, in 450nm -2 μ m wavelength range internal reflection rates More than 90%, spherical aberration or aberration will not be produced when collimating spot light or focussed collimated light beam.
Off axis paraboloid mirror (OAP) speculum is first surface speculum, and its reflecting surface is the original parabola of composition A part for speculum, each reflecting surface has the colourless poorly focussed collimated light beam of original parabola or collimated broadband point light The ability in source, off axis paraboloid mirror (OAP) speculum is designed to spatially separate focus from light path off axis; And its total reflection design eliminates bit phase delay and the absorption loss that transmission optical component can be introduced.The off axis paraboloid mirror is anti- Mirror surface roughness is penetrated less than 100 angstroms, can be connected by mounting adaptation device with other standards optical component.
The off-axis parabolic mirror, using 90 ° of off-axis parabolic mirrors of Thorlabs MPD029-G01.Off axis The reflector focus of parabolic mirror should be located at sample external support center, can be according to sample by three-dimensional mobile platform The relative position of specific size adjusting focus and sample.When needing to save the space on the right side of horizontal optical path, horizontal laser light is in water Plane changes 90 degree and beaten to the left on the sample being disposed vertically.When needing to save the space on the left of horizontal optical path, horizontal laser light Change 90 degree in horizontal plane to beat to the right on the sample being disposed vertically.In inconvenient vertical or other modes of emplacements of measurement liquid When placing sample and causing the liquid to overflow, horizontal laser light can be changed into 90 degree in vertical plane up beats on sample, simultaneously Also save the space in horizontal plane.Down beat on sample, equally also can in addition, horizontal laser light changes 90 degree in vertical plane The space in horizontal plane is saved, while some other demands can also be realized.
The off-axis parabolic mirror can install adaptor, the installation adaptor of non-threaded, off-axis throwing using external screw thread Parabolic mirror mounting seat etc. is installed.Specific mounting means is as described below:
(1) adaptor is installed using external screw thread and off-axis parabolic mirror is installed:Installing adaptor using external screw thread willInch off-axis parabolic mirror is arranged in 16 millimeters of cage optical adjusting frames, and 4 cage poles pass through the optics Cage pole, is secured in position by adjustment frame by lock screw.Each adjustment frame has 3/16 inch of -100 fine tuning spiral shell of at least three Silk, its adjustable accuracy is 9mrad/rev.The interior hex socket that the screw has 5/64 inch is used for convenient adjust.It is each described The subsidiary one 5/64 inch die nut of optical adjusting frame.The optical adjusting frame can clamp thickness up to 0.15 inch The optical element of (3.8mm).The optical adjusting frame has at least two SM05RR snap rings, for the off axis paraboloid mirror is anti- Mirror is penetrated to be fixed in the optical adjusting frame.
(2) off-axis parabolic mirror is installed using the installation adaptor of non-threaded:Use the installation adaptor of non-threaded WillInch off-axis parabolic mirror is arranged on speculum mounting seat, and speculum mounting seat is consolidated by nylon head set screw It is scheduled in optical adjusting frame spacing hole, 3 1/4 that " -80 adjusters, lockable adjuster, can be real by the foreboard of mobile adjustment frame Adjustment in the range of existing ± 4 °.In order to ensure that adjusting range is symmetrical (i.e. ± 4 °), the front and rear panel spacing of adjustment frame must be respectively 0.120 inch (3.05mm).When simultaneously using three adjusters,Inch optical adjustment frame can be realized and translated in Z-direction The distance of maximum 0.25 inch (6.4mm).
(3) off-axis parabolic mirror is installed using off-axis parabolic mirror mounting seat:Off-axis parabolic mirror is pacified Dress seat is all at a right angle with off-axis parabolic mirror with four 8-32 (M4) screws for being used for installing extension bar.Off axis paraboloid mirror Speculum mounting seat, the distance from center of lens to mounting seat edge is 1/2 inch (12.5mm), off-axis parabolic mirror peace Fill seat andThe connection of inch extension bar etc can standardize the extension bar of fixed optical axis height.
Wherein, inciding the light of the three-dimensional mobile platform includes pumping light and detection light, is respectively used to heat and detects Sample, its corresponding wavelength is respectively 400nm, 800nm, by the off-axis parabolic mirror by the pumping light and detection Light is focused in the sample surfaces in the sample external support or sample in the metal sensor layer surface of bracket.
In summary, the utility model is a kind of allows sample to put for pumping detection heat reflection system without object lens measurement apparatus The selection for putting and measuring sample spot is more flexible, realizes the hot things such as various samples (solid, liquid, solid liquid interface etc.) thermal conductivity Property parameter efficiently and accurately measurement, and eliminate bit phase delay and absorption loss that transmission optical component can be introduced.
It is described above, the embodiment only in the utility model, but protection domain of the present utility model not office It is limited to this, it is any to be familiar with the people of the technology in the technical scope disclosed by the utility model, it will be appreciated that the conversion expected is replaced Change, should all cover within scope of the present utility model, therefore, protection domain of the present utility model should be with claim The scope of protection is defined it should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is institute Belong to form known to a person of ordinary skill in the art in technical field, be not described in detail.In addition, above-mentioned to each element and method Definition is not limited in various concrete structures, shape or the mode mentioned in embodiment, and those of ordinary skill in the art can be to it Simply change or replace, for example:Three-dimensional mobile platform can be using machinery, it would however also be possible to employ automatically controlled, not shadow Ring of the present utility model realize.
Particular embodiments described above, has carried out entering one to the purpose of this utility model, technical scheme and beneficial effect Step is described in detail, be should be understood that and be the foregoing is only specific embodiment of the utility model, is not limited to this Utility model, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvements done etc. all should be wrapped It is contained within protection domain of the present utility model.

Claims (10)

1. it is a kind of for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that including:First is linear mobile Platform;
Second linear mobile station;
Third linear mobile station;
Interposer substrate;And
Right angle rack;Wherein,
The first and second linear mobile station forms XY configuration mobile stations, realizes water by the orthogonal assembling of the interposer substrate Movement in plane;
The third linear mobile station is assembled by the way that the right angle rack is orthogonal with the described first and second linear mobile stations, is formed Three-dimensional mobile platform;
The first linear mobile station, the second linear mobile station, third linear mobile station is respectively along the three-dimensional mobile platform Move in X, Y, Z axis direction.
2. it is according to claim 1 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that also Including:Bracket in sample, is measured for liquid and powder sample.
3. it is according to claim 2 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that institute Stating bracket in sample includes bracket retainer plate and the glass for being coated with metal sensing layer, the glass for being coated with metal sensing layer in sample Glass includes being provided with through hole in glass and metal sensing layer, the sample in the middle part of bracket retainer plate, and the through hole is coated with metal with described The glass of sensing layer collectively forms a concave architecture, the sample for holding liquid or powder.
4. it is according to claim 3 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that also Including:Sample external support, measures or provides the fixation to bracket in sample for solid sample.
5. it is according to claim 4 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that adopt Bracket in the sample is fixed with the sample external support, wherein,
The metal side of the glass of metal sensing layer that is coated with of bracket is consolidated by bracket in adhesive and the sample in the sample Fixed circle is connected, and its glass side is positioned over inside the sample external support down, is connected to by the sample external support on extension bar, And the third linear mobile station is connected by extension bar.
6. it is according to claim 4 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that also Including off-axis parabolic mirror, immediately below the sample external support, pumping laser and exploring laser light are collinearly launched to institute Off-axis parabolic mirror is stated, is focused on after being reflected through the off-axis parabolic mirror on the sample, it is mobile by three-dimensional Platform can adjust focus and the relative position of sample according to specific sample size.
7. it is according to claim 6 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that institute The off-axis angle for stating off-axis parabolic mirror is 90 °, is more than 90% in 450nm -2 μ m wavelength range internal reflections rate.
8. it is according to claim 7 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that institute State off-axis parabolic mirror and adaptor, the installation adaptor of non-threaded or off-axis parabolic mirror peace are installed using external screw thread Dress seat is installed.
9. it is according to claim 6 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that institute The first and second linear mobile stations are stated respectively along the X of the three-dimensional mobile platform, Y-axis movement to adjust the sample external support Horizontal level, Z axis of the third linear mobile station along the three-dimensional mobile platform move to adjust sample external support Vertical height, makes the metal sensor layer surface of bracket in the sample surfaces or sample that focused spot is located in sample external support not Same position, realizes the measurement to diverse location sample thermo-physical property.
10. it is according to claim 1 for pumping detect heat reflection system without object lens measurement apparatus, it is characterised in that The first linear mobile station, the second linear mobile station and third linear mobile station have hardened steel linear bearing and dowel, The right hand or left-handed system orthogonal linear three-dimensional mobile platform are assembled into, its quadrature error is less than 5mrad.
CN201621386398.8U 2016-12-16 2016-12-16 For pumping detection heat reflection system without object lens measurement apparatus Expired - Fee Related CN206531807U (en)

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Application Number Priority Date Filing Date Title
CN201621386398.8U CN206531807U (en) 2016-12-16 2016-12-16 For pumping detection heat reflection system without object lens measurement apparatus

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Application Number Priority Date Filing Date Title
CN201621386398.8U CN206531807U (en) 2016-12-16 2016-12-16 For pumping detection heat reflection system without object lens measurement apparatus

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106501309A (en) * 2016-12-16 2017-03-15 中国科学院工程热物理研究所 For pumping detection heat reflection system without object lens measurement apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106501309A (en) * 2016-12-16 2017-03-15 中国科学院工程热物理研究所 For pumping detection heat reflection system without object lens measurement apparatus
CN106501309B (en) * 2016-12-16 2024-03-26 中国科学院工程热物理研究所 Objective-free measuring device for a pump probe thermal reflection system

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Granted publication date: 20170929

Termination date: 20211216