CN206524970U

CN206524970U - Mems microphone

Info

Publication number: CN206524970U
Application number: CN201720104941.9U
Authority: CN
Inventors: 张金宇
Original assignee: AAC Technologies Pte Ltd
Current assignee: AAC Technologies Pte Ltd
Priority date: 2017-01-24
Filing date: 2017-01-24
Publication date: 2017-09-26
Anticipated expiration: 2027-01-24

Abstract

The utility model discloses a kind of MEMS microphone, it includes the housing provided with receiving space and the MEMS chip being placed in the receiving space, the MEMS chip includes the substrate provided with back of the body chamber and the vibrating diaphragm and backboard that are connected with the substrate, vibrating diaphragm and backboard the formation capacitance structure, the housing is provided with the acoustic aperture being connected with the external world, the first hole connected with the back of the body chamber of MEMS chip, the second hole connected with receiving space, connect the first communicating passage of the acoustic aperture and the first hole and connect the acoustic aperture and second communicating passage in the second hole, the MEMS microphone is additionally provided with the elastic parts for opening or closing second hole being placed in receiving space.Microphone of the present utility model is anti-drop, is hardly damaged.

Description

MEMS microphone

【Technical field】

The utility model is related to a kind of audio unit, relates more specifically to a kind of MEMS microphone.

【Background technology】

With the development of wireless telecommunications, Global Mobile Phone Users are more and more, and requirement of the user to mobile phone is not Only it is satisfied with call, and high-quality communication effect can be provided, the development of especially current Technology of Mobile Multimedia is moved The speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and it is designed It is bad to directly affect speech quality.

And more and better performances the microphone of application is MEMS (Micro-Electro-Mechanical- at present System Microphone) microphone, the MEMS microphone related to the utility model include shell, connect to be formed with casing cover Wiring board, the MEMS chip and asic chip of interior intracavitary of inner chamber are housed, shell or wiring board are provided with acoustic aperture.When product falls When, compressed with ground Contact gas and pour MEMS chip, produced strong gas shock, cause MEMS chip to fail.

Therefore, it is necessary to provide a kind of new MEMS microphone to solve the above problems.

【Utility model content】

For the defect of prior art, the utility model provides a kind of MEMS microphone, and it includes being provided with receiving space Housing and the MEMS chip that is placed in the receiving space, the MEMS chip includes the substrate provided with back of the body chamber and is placed in Vibrating diaphragm and backboard in substrate, the vibrating diaphragm and backboard formation capacitance structure, the housing be provided with the acoustic aperture that be connected with the external world and The first of the first hole, the second hole connected with receiving space, the connection acoustic aperture and the first hole that the back of the body chamber of MEMS chip is connected Communicating passage and the connection acoustic aperture and second communicating passage in the second hole, the MEMS microphone, which is additionally provided with, is placed in collecting sky Between in be used for open or close the elastic parts in second hole.

It is preferred that, the housing includes shell and the wiring board to form receiving space, the MEMS cores is connect with casing cover Piece is placed on the wiring board, and the acoustic aperture, the first hole, the second hole, the first interface channel and the second interface channel are located at The wiring board.

It is preferred that, the acoustic aperture and the first hole are mutually staggered.

It is preferred that, the acoustic aperture and the second hole are mutually staggered.

It is preferred that, the acoustic aperture, the second communicating passage and the alignment of the second hole are set.

It is preferred that, the vibrating diaphragm is than backboard closer to the wiring board.

It is preferred that, the acoustic aperture, the first communicating passage and the first hole form the first path, the acoustic aperture, the second connection Passage and the second hole form alternate path, and the fluid impedance of first path is less than or equal to the fluid resistance of alternate path It is anti-.

It is preferred that, the backboard is than vibrating diaphragm closer to the wiring board.

It is preferred that, the acoustic aperture, the first communicating passage and the first hole form the first path, the acoustic aperture, the second connection Passage and the second hole form alternate path, and the fluid impedance of first path is more than or equal to the fluid resistance of alternate path It is anti-.

It is preferred that, the elastic parts is tabular and is connected with the inner surface of the wiring board.

The beneficial effects of the utility model are：By setting the first path and alternate path so that microphone is running into by force During air-flow, (or approximately equal) equal in magnitude can be formed in the both sides of vibrating diaphragm and pressure in opposite direction, such vibrating diaphragm is just not Can occur high vibration, so as to prevent the rupture of vibrating diaphragm, serve the purpose of protection product.

【Brief description of the drawings】

Fig. 1 is the schematic perspective view of the embodiment 1 of the utility model microphone；

Fig. 2 is sectional views of the Fig. 1 along line A-A；

Fig. 3 is the schematic diagram of the embodiment 1 of the utility model microphone；

Fig. 4 is the sectional view of the embodiment 2 of the utility model microphone.

【Embodiment】

To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this The embodiment of utility model is described in detail, and makes above and other purpose of the present utility model, feature and advantage will Become apparent from.Identical reference indicates identical part in whole accompanying drawings.Not deliberately accompanying drawing drawn to scale, emphasis It is purport of the present utility model is shown.

Embodiment 1

As depicted in figs. 1 and 2, MEMS microphone includes the housing 12 provided with receiving space 10 and is placed in the collecting sky Between MEMS chip 3 in 10, wherein, the housing 12 includes shell 1 and covered with shell 1 to connect the circuit to form receiving space 10 Plate 2, it is preferred that the shell 1 is metal shell.The MEMS chip 3 is placed on the wiring board 2, and the MEMS cores Piece 3 includes the substrate 33 provided with back of the body chamber 34 and the vibrating diaphragm 31 and backboard 32 that are fixedly connected with substrate 83, the vibrating diaphragm 31 and the back of the body The formation capacitance structure 30 of plate 32.

In the lump shown in reference picture 3, the housing 12 is provided with the acoustic aperture 20 being connected with the external world, the back of the body chamber 34 with MEMS chip 3 First hole 21 of connection, the second hole 22 connected with receiving space 10, first connection in the connection hole 21 of acoustic aperture 20 and first Passage 23 and second communicating passage 24 in the connection hole 22 of acoustic aperture 20 and second, in the present embodiment, the acoustic aperture 20, First hole 21, the second hole 22, the first interface channel 23 and the second interface channel 24 are located at the wiring board 2.Wherein, it is described Acoustic aperture 20, the first communicating passage 23 and the first hole 21 form the first path 6, the acoustic aperture 20, the second communicating passage 24 and Second hole 22 forms alternate path 5.In addition, the MEMS microphone, which is additionally provided with, is placed in being opened or closed for beating in receiving space 10 Close the elastic parts 4 in second hole 22.The elastic parts 4 is slab construction and connected with the inner surface of the wiring board 2 Connect.In normal state, the lid of elastic parts 4, which is located on wiring board 2, closes the second hole 22, and sound can cross the first path 6 and enter The back of the body chamber 34 of MEMS chip 3；When product falls or blows, air-flow pours alternate path 5, and elastic parts 4 is under air pressure impact Open, gas enters receiving space 10 by the second hole 22, air pressure before and after vibrating diaphragm 31 is balanced with this, protection vibrating diaphragm 31 is played Effect.

In embodiments, backboard 32 than vibrating diaphragm 31 closer to the wiring board 2, the fluid impedance of first path 6 More than or equal to the fluid impedance of alternate path 5.Now, air-flow enters receiving space 10 by the first path 6 and alternate path 5 Vibrating diaphragm 31 can be moved downward afterwards, and because backboard 32 is located at the lower section of vibrating diaphragm 31, backboard 32 can play spacing and protection to vibrating diaphragm 31 Effect, it is to avoid the amplitude of vibrating diaphragm 31 is excessive.In other embodiments, if vibrating diaphragm than backboard closer to the substrate when, first The fluid impedance of path is less than or equal to the fluid impedance of alternate path.Now, air-flow is entered by the first path and alternate path Entering vibrating diaphragm after receiving space can move upwards, because backboard is located above vibrating diaphragm, and backboard can play spacing and protection to vibrating diaphragm Effect, it is to avoid vibrating diaphragm amplitude is excessive.

In the present embodiment, the hole 21 of acoustic aperture 20 and first is mutually staggered, and the hole 22 of acoustic aperture 20 and second is also mutual mistake Open.

Embodiment 2

As shown in figure 4, being the embodiment 2 of the utility model MEMS microphone, the difference of embodiment 2 and embodiment 1 only exists In：In example 2, the acoustic aperture 20, the second communicating passage 24 and the alignment of the second hole 22 are set.

In other embodiments or acoustic aperture, the first communicating passage and the first hole alignment set, acoustic aperture and second Mutually stagger in hole.The position of opening in the first hole and the second hole, by the design of position of opening, can be counted accurately by needing selection Fluid operator impedance so that air pressure balance before and after vibrating diaphragm, reaches best protection effect.

Many details are elaborated in the above description to fully understand the utility model.But above description Only it is preferred embodiment of the present utility model, the utility model can be come with being much different from other manner described here Implement, therefore the utility model is not limited by specific implementation disclosed above.Any those skilled in the art exist simultaneously Do not depart under technical solutions of the utility model ambit, it is all new to this practicality using the methods and techniques content of the disclosure above Type technical scheme makes many possible variations and modification, or is revised as the equivalent embodiment of equivalent variations.It is every without departing from this The content of utility model technical scheme, any is simply repaiied according to technical spirit of the present utility model to made for any of the above embodiments Change, equivalent variations and modification, in the range of still falling within technical solutions of the utility model protection.

Claims

1. a kind of MEMS microphone, it includes the housing provided with receiving space and the MEMS cores being placed in the receiving space Piece, the MEMS chip includes the substrate provided with back of the body chamber and the vibrating diaphragm and backboard that are connected with the substrate, the vibrating diaphragm and the back of the body Plate shape is into capacitance structure, it is characterised in that the housing is provided with the acoustic aperture being connected with the external world, connected with the back of the body chamber of MEMS chip First hole, the second hole connected with receiving space, the connection acoustic aperture and first communicating passage in the first hole and connection are described Acoustic aperture and second communicating passage in the second hole, the MEMS microphone be additionally provided be placed in receiving space be used for open or close The elastic parts in second hole.

2. MEMS microphone according to claim 1, it is characterised in that the housing includes shell and connect with casing cover The wiring board of receiving space is formed, the MEMS chip is placed on the wiring board, the acoustic aperture, the first hole, the second hole, first Interface channel and the second interface channel are located at the wiring board.

3. MEMS microphone according to claim 2, it is characterised in that the acoustic aperture and the first hole are mutually staggered.

4. MEMS microphone according to claim 2, it is characterised in that the acoustic aperture and the second hole are mutually staggered.

5. MEMS microphone according to claim 2, it is characterised in that the acoustic aperture, the second communicating passage and second Hole alignment is set.

6. MEMS microphone according to claim 2, it is characterised in that the vibrating diaphragm is than backboard closer to the circuit Plate.

7. MEMS microphone according to claim 6, it is characterised in that the acoustic aperture, the first communicating passage and first Hole forms the first path, and the acoustic aperture, the second communicating passage and the second hole form alternate path, the fluid of first path Impedance is less than or equal to the fluid impedance of alternate path.

8. MEMS microphone according to claim 2, it is characterised in that the backboard is than vibrating diaphragm closer to the circuit Plate.

9. MEMS microphone according to claim 8, it is characterised in that the acoustic aperture, the first communicating passage and first Hole forms the first path, and the acoustic aperture, the second communicating passage and the second hole form alternate path, the fluid of first path Impedance is more than or equal to the fluid impedance of alternate path.

10. MEMS microphone according to claim 2, it is characterised in that the elastic parts for tabular and with institute State the inner surface connection of wiring board.