CN206512272U - Planar targets are fixed and clamped device - Google Patents
Planar targets are fixed and clamped device Download PDFInfo
- Publication number
- CN206512272U CN206512272U CN201720239312.7U CN201720239312U CN206512272U CN 206512272 U CN206512272 U CN 206512272U CN 201720239312 U CN201720239312 U CN 201720239312U CN 206512272 U CN206512272 U CN 206512272U
- Authority
- CN
- China
- Prior art keywords
- compressed air
- spring
- fixed
- planar targets
- pressure strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
The utility model is fixed and clamped device there is provided a kind of planar targets, including：Pressing device main body, at least a spring inflatable hold down assembly, at least one installation apparatus of repair parts and the compressed air gas circuit being arranged in pressing device main body；Compressed air valve is provided with pressing device main body and for installing the mounting groove that spring inflatable holds down assembly；Compressed air valve is arranged on the air nozzle hole being connected with compressed air gas circuit, and compressed air gas circuit passes through a tracheae and mounting groove UNICOM；Spring inflatable is held down assembly including pressure strip and spring, and spring one end is fixed on the base of pressure strip, and pressure strip is moved under the promotion of compressed air or spring along mounting groove, realizes installation and the compression of planar targets；Apparatus of repair parts is installed to be fixed in pressing device main body, at the opening of mounting groove, another end in contact with spring.Using the utility model, quickly target can be carried out that compression and dismounting are installed, save the time, reduce cost.
Description
Technical field
The utility model is related to magnetic control sputtering vacuum coating technical field, and more particularly to a kind of planar targets are fixed and clamped dress
Put.
Background technology
In recent years, with the reach of science, the progress of technology, what Surface Science and nano thin-film became is increasingly paid attention to,
Aero-Space are arrived greatly, and small to arrive mobile phone wrist-watch, increasing thin film technique is employed, and obtains the technology of film also continuous
Development and progress, nowadays, magnetron sputtering technique have been widely used, in order to obtain the film of various performances, this technology
Make rapid progress.The key of this technology is that the plating of various material can be carried out on base material by power supply not of the same race
Film, obtains the nano level film of various different materials, so target is the most important thing of this technology.
For plated film manufacturing enterprise, the time is the most important factor of production, and the replacing of target and maintenance are tight
Heavy have impact on production efficiency, so improving the replacing of target and safeguarding that speed is a very crucial link.
Conventional plane target needs pressure strip that target is fixed, and prevents target is moved from causing adverse consequences, but this
It is typically all to be bolted to plant pressing plate, the bolt of pressing plate need to will all be backed out during dismounting target, pressure strip is all unloaded
Target could be taken out after lower.Also need to install all pressing plates when target is installed afterwards, all bolts, which are twisted, could complete target
The replacing of material.Usual this pressure strip needs to securely fix target, so the quantity of screw is more, causes task amount big,
Change target to lose time very much, have a strong impact on manufacturing schedule.
Utility model content
The utility model embodiment is fixed and clamped device there is provided a kind of planar targets, quickly to carry out installation pressure to target
Tight and dismounting, saves the time, reduces cost.
To achieve these goals, the utility model embodiment is fixed and clamped device there is provided a kind of planar targets, and this is put down
The target device that is fixed and clamped in face includes：Pressing device main body, at least a spring inflatable hold down assembly, and at least one installs apparatus of repair parts
And it is arranged on the compressed air gas circuit in the pressing device main body；
It is provided with the pressing device main body for installing the mounting groove that the spring inflatable holds down assembly, and compression
Air valve；The compressed air valve is arranged on the air nozzle hole being connected with the compressed air gas circuit, the compressed air
Gas circuit passes through a tracheae and the mounting groove UNICOM；
The spring inflatable holds down assembly including pressure strip and spring, and the spring one end is fixed on the bottom of the pressure strip
On seat, the pressure strip is moved in mounting groove described in compressed air or the promotion lower edge of spring, realizes the installation of planar targets
And compress；
The installation apparatus of repair parts is fixed in the pressing device main body, at the opening of the mounting groove, with institute
State another end in contact of spring.
In one embodiment, the spring inflatable holds down assembly and also included：Lip-type packing, is set in the pressure strip base
Groove in.
In one embodiment, the number of the compressed air valve is 2, is separately positioned on the pressing device body side
Top.
In one embodiment, the apparatus of repair parts of installing has a limiting section for being used to be oriented to the pressure strip.
In one embodiment, the base of the pressure strip is provided with a stage portion, the opening of the mounting groove provided with projection
Portion, the lug boss coordinates with the stage portion, the pressure strip is carried out spacing.
In one embodiment, the compressed air valve afterbody is provided with screw thread, is threadedly coupled with the air nozzle hole.
In one embodiment, the planar targets device that is fixed and clamped is fixed in target base, when planar targets are installed
Cheng Hou, the pressure strip that the spring inflatable holds down assembly is pressed on planar targets.
In one embodiment, when blasting compressed air by the compressed air valve, compressed air initially enters described
Compressed air gas circuit, then enters the mounting groove by tracheae, overcomes the spring thrust, promotes the pressure strip described in
Mounting groove is moved, installation or replacing state into the planar targets.
In one embodiment, after the installation or replacing of the planar targets, discharged by pressing the compressed air valve
The compressed air, the pressure strip is moved by spring thrust effect along mounting groove so that the pressure strip compresses described
Planar targets.
The planar targets of the utility model embodiment are fixed and clamped device, are compressed using the mode of spring and inflatable instead of normal
The screw pressure strip of rule is compressed, and not only reduces the workload that dismounting pressure strip is brought, and greatly saved the working time.Separately
Outside, the planar targets are fixed and clamped when device works and reduce inside and outside pressure difference, considerably increase service life.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the accompanying drawing used required in description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is fixed and clamped the sectional view one of device for the planar targets of the utility model embodiment；
Fig. 2 is fixed and clamped the top view of device for the planar targets of the utility model embodiment；
Fig. 3 is fixed and clamped device clamping plane target schematic diagram for the planar targets of the utility model embodiment；
Fig. 4 is fixed and clamped the front view of device for the planar targets of the utility model embodiment；
Fig. 5 is fixed and clamped the sectional view two of device for the planar targets of the utility model embodiment；
Fig. 6 for the utility model embodiment planar targets be fixed and clamped device compressed air gas circuit perspective view.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1 is fixed and clamped the sectional view one of device for the planar targets of the utility model embodiment.Fig. 2 is the utility model
The planar targets of embodiment are fixed and clamped the top view of device.As shown in Figures 1 and 2, the planar targets device 1 that is fixed and clamped is wrapped
Include：Pressing device main body 11, at least a spring inflatable hold down assembly 3, at least one installation apparatus of repair parts 4 and are arranged on pressing device
Compressed air gas circuit 2 in main body 11.
Through over mechanical processing in pressing device main body 11, be internally provided with for install spring inflatable hold down assembly 3 peace
Tankage 6, is additionally provided with compressed air valve 5 and the bolt hole for fixing connected all parts.Compressed air gas
Mouth 5 is arranged on the air nozzle hole 9 being connected with the compressed air gas circuit, and compressed air gas circuit 2 passes through a tracheae 21 and mounting groove 6
UNICOM.
In one embodiment, the number of compressed air valve 5 is 2, is separately positioned on the top of the side of pressing device main body 11,
As shown in Figures 2 and 6.Compressed air valve 5 hair afterbody can be provided with screw thread, it is corresponding, can air nozzle hole 9 interior table
Face is provided with screw thread, and compressed air valve 5 is threadedly coupled with air nozzle hole 9.
Spring inflatable holds down assembly and 3 includes pressure strip 31 and spring 33, and spring one end is fixed on the base 34 of pressure strip 31
On, pressure strip 31 can be moved under the promotion of compressed air or spring along mounting groove, realize installation and the compression of planar targets.
Apparatus of repair parts 4 is installed to be fixed in pressing device main body 11, it is another with spring 33 at the opening of mounting groove 6
End thereof contacts, to prop up spring 33.Installing apparatus of repair parts 4 can be fixed in pressing device main body 11 by bolt 41.
In one embodiment, installing apparatus of repair parts 4 has a limiting section 42 for being used to be oriented to pressure strip 31.
Pressing device main body 11, compressed air gas piping 2 and spring inflatable, which hold down assembly, 3 constitutes a sealed gas
Swollen chamber.In one embodiment, in order to improve sealing, spring inflatable hold down assembly on be also provided with lip-type packing 32, lip
Shape sealing ring 32 is set in the groove 36 of the base of pressure strip 31.
The base of pressure strip 31 is provided with a stage portion 35, the opening of mounting groove 6 provided with projection 12, lug boss 12 and platform
Rank portion 35 coordinates, and pressure strip 31 is carried out spacing.
When it is implemented, device 1 is fixed in target base 7 as shown in figure 3, planar targets are fixed and clamped, spring inflatable
The pressure strip held down assembly is pressed on planar targets.In Fig. 3, planar targets be fixed and clamped device 1 number be 2, pass through
Planar targets are fixed and clamped device 1, can be with the two ends of clamping plane target 8.
Fig. 4 is fixed and clamped the front view of device for the planar targets of the utility model embodiment.As shown in figure 4, flat target
The material device 1 that is fixed and clamped can be fixed in target base 7 by bolt 6.
Fig. 5 is fixed and clamped the sectional view two of device for the planar targets of the utility model embodiment, as shown in figure 1, plane
Target be fixed and clamped device 1 state be impaction state, as shown in figure 5, planar targets are fixed and clamped the state of device 1 for unclamp
State.It is empty by blasting compression to the compressed air valve 5 blasted installed in compressed air on air nozzle hole 9 (such as Fig. 6) in Fig. 1
Gas (can use compressor gun gas injection, pressing can discharge gas), and compressed air initially enters compressed air gas circuit 2, so
Entered afterwards by the tracheae 21 connected with compressed air gas circuit 2 in mounting groove 6, sealed mounting groove 6 expands, and overcomes spring 33
Thrust, the path by pressure strip 31 along mounting groove 6 is pushed open, until reaching restraining position, planar targets pressing device 1 is arrived completely
Up to operating position (reaching state as shown in Figure 5), now spring is in compressive state, at this moment can carry out target and change work
Make.After target is installed, compressed air is discharged by pressing compressed air valve 5, pressure strip 31 is by the thrust of spring 33
Extended in mounting groove, spring 33 is tightly against pressure strip 31 so that the clamping plane target 8 of pressure strip 31, planar targets are fixed
Pressing device 1 fixes planar targets 8, as shown in Figure 1.
The planar targets of the utility model embodiment are fixed and clamped device, are compressed using the mode of spring and inflatable instead of normal
The screw pressure strips of rule is compressed, and not only reduces the workload that dismounting pressure strip is brought, and greatly saved the working time (can
So that 10 minutes to 30 minutes even more working times shortened to several seconds).The device in addition, planar targets are fixed and clamped
Inside and outside pressure difference is reduced during work, service life is considerably increased.
Specific embodiment is applied in the utility model to be set forth principle of the present utility model and embodiment, with
The explanation of upper embodiment is only intended to help and understands method of the present utility model and its core concept；Simultaneously for this area
Those skilled in the art, according to thought of the present utility model, will change in specific embodiments and applications, comprehensive
Upper described, this specification content should not be construed as to limitation of the present utility model.
Claims (9)
- The device 1. a kind of planar targets are fixed and clamped, it is characterised in that including：Pressing device main body, at least a spring inflatable pressure Tight component, at least one installation apparatus of repair parts and the compressed air gas circuit being arranged in the pressing device main body；Compressed air valve is provided with the pressing device main body and for installing the peace that the spring inflatable holds down assembly Tankage；The compressed air valve is arranged on the air nozzle hole being connected with the compressed air gas circuit, the compressed air gas circuit Pass through a tracheae and the mounting groove UNICOM；The spring inflatable holds down assembly including pressure strip and spring, and the spring one end is fixed on the base of the pressure strip On, the pressure strip is moved in mounting groove described in compressed air or the promotion lower edge of spring, realize planar targets installation and Compress；The installation apparatus of repair parts is fixed in the pressing device main body, at the opening of the mounting groove, with the bullet Another end in contact of spring.
- The device 2. planar targets according to claim 1 are fixed and clamped, it is characterised in that the spring inflatable holds down assembly Also include：In lip-type packing, the groove for being set in the pressure strip base.
- The device 3. planar targets according to claim 1 are fixed and clamped, it is characterised in that of the compressed air valve Number is 2, is separately positioned on the top of the pressing device body side.
- The device 4. planar targets according to claim 1 are fixed and clamped, it is characterised in that the installation apparatus of repair parts has One limiting section for being oriented to the pressure strip.
- The device 5. planar targets according to claim 1 are fixed and clamped, it is characterised in that set on the base of the pressure strip Have and lug boss is provided with a stage portion, the opening of the mounting groove, the lug boss coordinates with the stage portion, compressed to described Plate carries out spacing.
- The device 6. planar targets according to claim 1 are fixed and clamped, it is characterised in that the compressed air valve afterbody Provided with screw thread, it is threadedly coupled with the air nozzle hole.
- The device 7. planar targets according to claim 1 are fixed and clamped, it is characterised in that the planar targets are fixed and clamped Device is fixed in target base, after planar targets installation, and the pressure strip that the spring inflatable holds down assembly is pressed on On planar targets.
- The device 8. planar targets according to claim 7 are fixed and clamped, it is characterised in that when passing through the compressed air gas When mouth blasts compressed air, compressed air initially enters the compressed air gas circuit, then enters the mounting groove by tracheae, Overcome the spring thrust, promote the pressure strip to be moved along the mounting groove, into the installation or replacing of the planar targets State.
- The device 9. planar targets according to claim 8 are fixed and clamped, it is characterised in that when the installation of the planar targets Or after changing, the compressed air is discharged by pressing the compressed air valve, the pressure strip is made by the spring thrust Moved with along mounting groove so that the pressure strip compresses the planar targets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720239312.7U CN206512272U (en) | 2017-03-13 | 2017-03-13 | Planar targets are fixed and clamped device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720239312.7U CN206512272U (en) | 2017-03-13 | 2017-03-13 | Planar targets are fixed and clamped device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206512272U true CN206512272U (en) | 2017-09-22 |
Family
ID=59870338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720239312.7U Active CN206512272U (en) | 2017-03-13 | 2017-03-13 | Planar targets are fixed and clamped device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206512272U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106676492A (en) * | 2017-03-13 | 2017-05-17 | 大连爱瑞德纳米科技有限公司 | Fixing and compressing device of plane target material |
| CN114990506A (en) * | 2022-06-01 | 2022-09-02 | 苏州德耐纳米科技有限公司 | Magnetron sputtering target convenient to fix |
-
2017
- 2017-03-13 CN CN201720239312.7U patent/CN206512272U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106676492A (en) * | 2017-03-13 | 2017-05-17 | 大连爱瑞德纳米科技有限公司 | Fixing and compressing device of plane target material |
| CN106676492B (en) * | 2017-03-13 | 2019-08-02 | 大连爱瑞德纳米科技有限公司 | Planar targets are fixed and clamped device |
| CN114990506A (en) * | 2022-06-01 | 2022-09-02 | 苏州德耐纳米科技有限公司 | Magnetron sputtering target convenient to fix |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206512272U (en) | Planar targets are fixed and clamped device | |
| CN207729133U (en) | Gas medium pipe flange reveals online processing device | |
| CN106676492B (en) | Planar targets are fixed and clamped device | |
| CN108060410B (en) | Air inlet pipeline protection structure for flat-plate PECVD | |
| CN113611964A (en) | Steel gasket, lithium ion battery and sealed container with sealing function | |
| CN207646284U (en) | A kind of admission line for flat-plate type PECVD protects structure | |
| CN208221882U (en) | For air-tight structure inside detachable air chamber | |
| CN216279752U (en) | Flexible supporting mechanism for slender pipe fitting | |
| CN108277465B (en) | Magnetron sputtering equipment and shielding plate assembly thereof | |
| CN209985093U (en) | Auxiliary device of air compressor with filtering device | |
| CN207478781U (en) | A kind of Wet-type permanent magnet drum type magnetic separator unloads mineral water nozzle | |
| CN217613556U (en) | Ash discharging and pressure relieving device of blast furnace dry method bag-type dust remover | |
| CN208778785U (en) | A kind of explosion-proof valve convenient for fixed disassembly | |
| CN207308231U (en) | A kind of Precise Alloy pipe fueling injection equipment | |
| CN105370911A (en) | Hard-sealing fast ball valve | |
| EP3715498A1 (en) | Plate coating device | |
| CN205978502U (en) | Three eccentric butterfly valves of high pressure | |
| CN209319900U (en) | A kind of mobile phone production and assembly mainboard special tooling | |
| CN216430800U (en) | Self-locking adjusting flange for testing roots pump | |
| CN212564690U (en) | Off-line leak detection device for vacuum pneumatic center line butterfly valve | |
| CN214186039U (en) | Special clamp for screwing dust removal atomizing nozzle | |
| CN208407530U (en) | A kind of gluing tank | |
| CN202507455U (en) | Material injection system of disappear die | |
| CN203962373U (en) | A kind of jointing clip and plunger pump | |
| CN208651082U (en) | A kind of novel oil-proof compressor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 66-1, Section 2, Yinxing Road, Huayuankou Economic Zone, Dalian City, Liaoning Province, 116400 Patentee after: Airade Technology (Dalian) Co.,Ltd. Address before: 116400 A1-142 Office Building of Huayuankou Economic Zone Management Committee, Dalian, Liaoning Patentee before: DALIAN AIRUIDE NANO SCIENCE & TECHNOLOGY CO.,LTD. |