CN206496794U - A kind of high vacuum mass flowmenter - Google Patents
A kind of high vacuum mass flowmenter Download PDFInfo
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- CN206496794U CN206496794U CN201720086835.2U CN201720086835U CN206496794U CN 206496794 U CN206496794 U CN 206496794U CN 201720086835 U CN201720086835 U CN 201720086835U CN 206496794 U CN206496794 U CN 206496794U
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- mass flowmenter
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- case
- high vacuum
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Abstract
The utility model discloses a kind of high vacuum mass flowmenter, including the flowmeter inner tube Jing Guo walkthrough gas disposal and the case outside flowmeter inner tube and Jing Guo walkthrough gas disposal, the vacuum between the flowmeter inner tube and case is at least up to 3.0e 3Pa.Technical purpose of the present utility model is to provide a kind of high vacuum mass flowmenter for deep cooling industry, it is possible to increase its service life and measuring accuracy.
Description
Technical field
The utility model is related to flow measurement technology field, more particularly to a kind of high vacuum mass flowmenter.
Background technology
The heat-insulated of mass flowmenter for being presently used for deep cooling industry is that insulation is filled between measurement pipe and case
Material, and this mass flowmenter for deep cooling industry is used under worst cold case for a long time, the surface of mass flowmenter is easy
Icing, mass flowmenter exterior vibration and sensor self vibration change and can all influence its measurement accuracy, therefore will shadow
Its metering performance is rung, the measurement accuracy of flowmeter is reduced, the accuracy of mass flowmenter is reduced, while the use of mass flowmenter
Life-span is also shorter.
Utility model content
The deficiency existed for above-mentioned mass flowmenter, technical purpose of the present utility model is to provide a kind of for deep cooling
The high vacuum mass flowmenter of industry.
The utility model is achieved through the following technical solutions：
High vacuum mass flowmenter of the present utility model, including measurement pipe Jing Guo walkthrough gas disposal and outside measurement pipe
And the case Jing Guo walkthrough gas disposal, the measurement pipe is with case formation vacuum chamber, the vacuum between the measurement pipe and case
The vacuum of chamber is at least up to 3.0e-3Pa, and one end of the measurement pipe is connected with feed tube, and the other end of the measurement pipe connects
Be connected to drain pipe, described feed tube and drain pipe pass through walkthrough gas disposal, walkthrough gas disposal be by vacuum brazing stove heat,
And material is incubated, reach except vacuum exhaust processing, make gas discharge metal in metal material remaining external.
It is provided with high vacuum mass flowmenter of the present utility model, the vacuum area between the flowmeter inner tube and case
Low temperature adsorbent.
High vacuum mass flowmenter of the present utility model, the low temperature adsorbent is two, is respectively arranged on flowmeter inner tube
Two ends.
High vacuum mass flowmenter of the present utility model, the low temperature adsorbent is located at sintering its interior, the sintering
Filter screen is welded in measurement pipe or case by argon arc welding.
High vacuum mass flowmenter of the present utility model, the case is provided with vacuum sealing device.
High vacuum mass flowmenter of the present utility model, the vacuum sealing device includes valve element, the first sealing ring, vacuum
Protective cover and valve seat, the valve seat are tubular, and valve seat one end is in shroud body, and the inwall of another end opening of valve seat is provided with
The conical surface, the valve element is cylindricality, and the external cylindrical surface of valve element is provided with the groove for being used for installing the first sealing ring, the first sealing ring with
Valve base inner wall formation sealing, valve element outer end is provided with the lug boss with cone match, and the valve seat outside, which is provided with, covers valve seat
Vacuum protection cover.
High vacuum mass flowmenter of the present utility model, provided with so that vacuum protection between the vacuum protection cover and valve seat
Sealed second sealing ring between cover and valve seat.
High vacuum mass flowmenter of the present utility model, the valve seat and the second sealing ring coordinate the external cylindrical surface installed and
Valve seat and the first sealing ring coordinate the roughness for the inner cylinder face installed to be less than or equal to 0.8.
The beneficial effects of the utility model are:
Walkthrough gas disposal is carried out by the case to mass flowmenter and inner tube, and cause flowmeter inner tube and case it
Between vacuum be at least up to 3.0e-3Pa, so as to form high vacuum between flowmeter inner tube and case so that
Vacuum quality flowmeter can be used under deep cooling operating mode for a long time, substantially reduce surface icing degree so that the vibrations of flowmeter
Mode is consistent in use, is further ensured that mass flowmenter performance is more reliable and more stable, is lifted its measurement accuracy,
Also the use outward appearance of mass flowmenter is improved；By increased low temperature adsorbent, the vacuum inside flowmeter is enabled to
Vacuum state maintain more than 10 years, greatly improve service life of the mass flowmenter in deep cooling industry.
Brief description of the drawings
Fig. 1 is the structural representation of high vacuum mass flowmenter；
Fig. 2 is the structural representation of vacuum sealing device.
Marked in figure：1 it is measurement pipe, 2 be case, 3 be low temperature adsorbent, 4 be vacuum sealing device, 41 is valve element, 42
It is the second sealing ring for the first sealing ring, 43,44 be vacuum protection cover, 45 be valve seat, 46 be the conical surface, 47 be lug boss, 48 is
Neck, 49 be bulge loop, 5 be detection coil, 6 be excitation coil, 7 be feed tube, 8 be drain pipe, 9 be fixed block.
Embodiment
The utility model is described in detail below in conjunction with the accompanying drawings.
High vacuum mass flowmenter as shown in Figures 1 and 2, including case 2 and measurement pipe Jing Guo walkthrough gas disposal
1, measurement pipe 1 is two, or one, when being two measurement pipes, two measurement pipes 1 are fixed by fixed block 9, can be played and be subtracted
Shake is acted on, and the " U "-shaped structure of the measurement pipe 1 or triangular structure, triangular structure include equilateral triangle and del knot
Structure, the measurement pipe 1 is sheathed in case 2, and measurement pipe 1 is located at the distance between the center of case 2, i.e. measurement pipe and case
Equal, measurement pipe 1 is connected with cryogenic media, and measurement pipe 1 is arranged on to the middle position of case 2, measurement pipe 1 can be avoided to offset,
So as to the topical hypothermia caused, so that cause local deformation and stress raisers, so that the life-span of vacuum flowmeter is influenceed, and
The heat-insulating heat-preserving material of existing mass flowmenter filling will result in such a phenomenon, so as to greatly reduce mass flowmenter
Life-span and the measurement accuracy of mass flowmenter so that such high-precision retention time of mass flowmenter substantially reduces；It is described to survey
One end of buret 1 is connected with feed tube 7, and the other end of the measurement pipe is connected with drain pipe 8, and feed tube 7 and drain pipe 8 are entered
Row walkthrough gas disposal, so that the cavity between measurement pipe 1 and case 2 keeps high vacuum conditions for a long time；It is described
Case 2 is presented " u "-shaped structure, and the case 2 two ends respectively with the liquid in-out seal of tube, the structure of " u "-shaped enables to survey
Vibrations of the buret 1 in the presence of excitation coil are more linear so that the precision of measurement is more accurate, and the middle part of the case 2 is set
There is vacuum sealing device 4, make to form the vacuum state for being at least 3.0e-3Pa in the case 2, the vacuum formed in case 2
State can also for 4.0e-3Pa, 5.0e-3Pa, 1.0e-4Pa, 2.0e-4Pa, 3.0e-4Pa, 4.0e-4Pa, 5.0e-4Pa,
6.0e-4Pa、7.0e-4Pa、8.0e-4Pa、9.0e-4Pa、1.0e-5Pa、2.0e-5Pa、3.0e-5Pa、4.0e-5Pa、5.0e-
It is connected with measured medium, the inner tube 1 of flowmeter and matches somebody with somebody in 5Pa, 6.0e-5Pa or 7.0e-5Pa, preferably 3.0e-5Pa, measurement pipe 1
Close and the excitation coil 6 for detecting the vibrations of inner tube 1 and the detection coil 6 for detecting the shock conditions of inner tube 1 are installed, then will survey
The data obtained are handled by calculating, so as to measure the quality of fluid.In the fabrication process, internal remaining has gas, gas to metal
Body is present in forms such as compound, residue, bubbles, it is necessary to exclude gas in metal material by heating in vacuum；Walkthrough gas disposal
It is to be incubated by vacuum brazing stove heat, and to material, reaches that, except vacuum exhaust processing, vacuum brazing furnace vavuum pump can reach
Vacuum is 5.0e-3Pa, makes gas discharge metal in metal material remaining external.Detection line is provided with inside mass flowmenter
Circle and excitation coil, can also carry out walkthrough gas disposal so that the vacuum in flowmeter can to detection coil and excitation coil
Kept for the longer time, the accuracy for maintaining it to measure.This vacuum quality flowmeter can be used under deep cooling operating mode for a long time, and
It ensure that its surface does not freeze, keep the stability of its mode of oscillation, it is ensured that its accuracy measured.
One end of the measurement pipe 1 is connected with feed tube 7, and the other end of the measurement pipe is connected with drain pipe 8, it is described enter
Liquid pipe 7 and drain pipe 8 pass through walkthrough gas disposal, so that the vacuum of flowmeter keeps more preferable, the duration is more
It is long.
Low temperature adsorbent 3 is provided with vacuum area between the measurement pipe 1 and case 2, at low temperature low temperature adsorbent
Sensor internal residual air molecules can be adsorbed by sintering filter screen, to improve sensor internal vacuum.
The low temperature adsorbent 3 is two, is respectively arranged on the two ends of measurement pipe 1；The low temperature adsorbent 3 is filtered located at sintering
Net is internal, and the sintering filter screen is welded in measurement pipe 1 or case 2 by argon arc welding, so as to be easily installed cryogenic absorption
Agent 3, and the gas in absorption flow meter can be conducive to.Inwall of the filter screen located at case 2 will be sintered, influence can be avoided to survey
The vibrations of buret 1, to improve the accuracy of measurement.
The vacuum sealing device 4 being provided with by case 2 can be after low temperature adsorbent be installed, can be by cryogenic absorption
Agent is encapsulated in flowmeter, by slightly vacuumizing, the time of contact of reduction low temperature adsorbent and air, it is ensured that after low temperature adsorbent
Continuous vacuum suction performance.
The vacuum sealing device 4 includes valve element 41, the first sealing ring 42, vacuum protection cover 44 and valve seat 45, the valve
Seat 45 is tubular, and the one end of valve seat 45 is on the body of case 2, and the inwall of another end opening of valve seat 45 is provided with the conical surface 46, described
Valve element 41 is cylindricality, and the external cylindrical surface of valve element 41 is provided with the groove for being used for installing the first sealing ring 42, the first sealing ring 42 with
The inwall of valve seat 45 formation sealing, the outer end of valve element 41 is provided with the lug boss 47 coordinated with the conical surface 46, and the outside of valve seat 45 is provided with
The vacuum protection cover 44 that valve seat 45 is covered.
Provided with causing sealed the between vacuum protection cover 44 and valve seat 45 between the vacuum protection cover 44 and valve seat 45
Two sealing rings 43.
The valve seat 45 coordinates the external cylindrical surface installed and valve seat 45 to coordinate with the first sealing ring 42 with the second sealing ring 43
The roughness of the inner cylinder face of installation is less than or equal to 0.8, ensure that installation will not destroy sealing ring so that install more suitable
Profit.
The vacuum protection cover 44 is cylinder type cover, and the inwall of vacuum protection cover 44 is provided with neck 48, the valve seat 45
Outside wall surface is provided with stretches into 2~5mm in neck 48 with the bulge loop 49 that can be clamped in neck 48, the bulge loop 49, can will be very
The empty clamp of protective cover 44 is carried on valve seat 45.
First sealing ring 42 and the second sealing ring 43 are compressed in seal clearance, and the first sealing ring 42 and second close
High vacuum silicone grease is scribbled in seal 43, to improve sealing with installing lubricity.After mounting after low temperature adsorbent, to flowmeter
Slightly vacuumize, by the way that valve element 41 is inserted into valve seat 45, forms sealing, finally cover vacuum protection cover 44.
Therefore, this high vacuum mass flowmenter carries out walkthrough gas disposal by the case to mass flowmenter and inner tube,
And cause the vacuum between measurement pipe and case to be at least up to 3.0e-3Pa, so as to be formed between measurement pipe and case high
Vacuum, so that vacuum quality flowmeter can be used under deep cooling operating mode for a long time, substantially reduces surface icing degree
So that the vibrations mode of flowmeter is consistent in use, being further ensured that mass flowmenter performance is more stablized can
Lean on, lift its measurement accuracy, also improve the use outward appearance of mass flowmenter；By increased low temperature adsorbent, enable to
The vacuum state of vacuum inside flowmeter is maintained more than 10 years, greatly improves use longevity of the mass flowmenter in deep cooling industry
Life.
Claims (10)
1. a kind of high vacuum mass flowmenter, it is characterised in that including the measurement pipe Jing Guo walkthrough gas disposal（1）And located at measurement
Pipe（1）The outer and case Jing Guo walkthrough gas disposal（2）, the measurement pipe（1）With case（2）Form vacuum chamber, the measurement pipe
（1）With case（2）Between the vacuum of vacuum chamber be at least up to 3.0e-3Pa.
2. high vacuum mass flowmenter according to claim 1, it is characterised in that the measurement pipe（1）One end connection
There is feed tube（7）, the other end of the measurement pipe is connected with drain pipe（8）, the feed tube（7）And drain pipe（8）Pass through
Walkthrough gas disposal.
3. high vacuum mass flowmenter according to claim 1 or 2, it is characterised in that the measurement pipe（1）With case
（2）Between vacuum area in be provided with low temperature adsorbent（3）.
4. high vacuum mass flowmenter according to claim 3, it is characterised in that the low temperature adsorbent（3）For two,
It is respectively arranged on measurement pipe（1）Two ends.
5. high vacuum mass flowmenter according to claim 4, it is characterised in that the low temperature adsorbent（3）Located at burning
Its interior is tied, the sintering filter screen is welded on measurement pipe by argon arc welding（1）Or case（2）On.
6. high vacuum mass flowmenter according to claim 1, it is characterised in that the case（2）It is close provided with vacuum
Seal apparatus（4）.
7. high vacuum mass flowmenter according to claim 6, it is characterised in that the vacuum sealing device（4）Including
Valve element（41）, the first sealing ring（42）, vacuum protection cover（44）And valve seat（45）, the valve seat（45）For tubular, valve seat（45）
One end is located at case（2）On body, valve seat（45）Another end opening inwall be provided with the conical surface（46）, the valve element（41）For post
Shape, valve element（41）External cylindrical surface be provided be used for install the first sealing ring（42）Groove, the first sealing ring（42）With valve seat
（45）Inwall formation sealing, valve element（41）Outer end is provided with and the conical surface（46）The lug boss of cooperation（47）, the valve seat（45）Outside
Portion is provided with valve seat（45）The vacuum protection cover covered（44）.
8. high vacuum mass flowmenter according to claim 7, it is characterised in that the vacuum protection cover（44）With valve seat
（45）Between provided with cause vacuum protection cover（44）With valve seat（45）Between sealed second sealing ring（43）.
9. high vacuum mass flowmenter according to claim 8, it is characterised in that the valve seat（45）With the second sealing ring
（43）Coordinate the external cylindrical surface and valve seat installed（45）With the first sealing ring（42）Coordinate the roughness for the inner cylinder face installed small
In or equal to 0.8.
10. high vacuum mass flowmenter according to claim 1, it is characterised in that the measurement pipe（1）With case（2）
Between vacuum be 4.0e-3Pa~5.0e-5Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720086835.2U CN206496794U (en) | 2017-01-23 | 2017-01-23 | A kind of high vacuum mass flowmenter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720086835.2U CN206496794U (en) | 2017-01-23 | 2017-01-23 | A kind of high vacuum mass flowmenter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206496794U true CN206496794U (en) | 2017-09-15 |
Family
ID=59803646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720086835.2U Active CN206496794U (en) | 2017-01-23 | 2017-01-23 | A kind of high vacuum mass flowmenter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206496794U (en) |
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2017
- 2017-01-23 CN CN201720086835.2U patent/CN206496794U/en active Active
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