CN206496068U - A kind of vacuum equipment magnetic fluid valve - Google Patents
A kind of vacuum equipment magnetic fluid valve Download PDFInfo
- Publication number
- CN206496068U CN206496068U CN201720044239.8U CN201720044239U CN206496068U CN 206496068 U CN206496068 U CN 206496068U CN 201720044239 U CN201720044239 U CN 201720044239U CN 206496068 U CN206496068 U CN 206496068U
- Authority
- CN
- China
- Prior art keywords
- valve
- cavity
- valve element
- valve body
- vacuum equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims abstract description 6
- 239000000853 adhesive Substances 0.000 claims abstract description 4
- 238000003780 insertion Methods 0.000 claims abstract description 4
- 230000037431 insertion Effects 0.000 claims abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010839 body fluid Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Abstract
The utility model discloses a kind of vacuum equipment magnetic fluid valve, including valve body and valve element, cavity is set in the valve body, the insertion of described cavity two, the valve element through the cavity to be arranged in valve body, the valve element stage casing sets the drive shaft for driving valve element to move horizontally adhesive, the drive shaft outer layer is cased with metal bellows protection, gap sets seal between the cavity and valve element of the valve body, the symmetrical annular groove in multiple both sides is opened up on the seal, sealing ring is set in the annular groove, the valve cavity rear end is provided for the buffer board that valve core movement mitigates impulse force；The device is with strong points, is used only for special vacuum equipment stove, has prevented leakage accident, and the pollution to environment in water-tight equipment improves product yield.
Description
Technical field
The utility model is related to vacuum equipment valve technology field, specifically a kind of vacuum equipment magnetic fluid valve.
Background technology
Device for sealing magnetic fluid realizes vacuum sealing using magnetic fluid, and its function is to communicate rotational motion to sealing to set
It is standby interior.At present, device for sealing magnetic fluid is used on many back rotation water-tight equipments, such as monocrystaline silicon stove, vacuum heat
The sealing of the equipment such as stove, ion sputtering, obtains good using effect.
But it is due to magnet fluid sealing demand, it is used to used flow valve on many back rotation water-tight equipments
It is required that more increasing, not only sealing will get well, and also there are certain requirements for the control effect of damming of this thick liquid of magnetic fluid,
Otherwise equipment magnetic is influenceed, and then influences product yield.
Utility model content
The purpose of this utility model is that there is provided a kind of vacuum equipment magnetic fluid valve in order to solve defect of the prior art
To solve the above problems.
To achieve these goals, the technical solution of the utility model is as follows：
A kind of vacuum equipment magnetic fluid valve, including valve body and valve element, it is characterised in that cavity, institute are set in the valve body
The insertion of cavity two is stated, the valve element through the cavity to be arranged in valve body, and the valve element stage casing sets driving valve element water
The drive shaft of the dynamic adhesive of translation, the drive shaft outer layer is cased with metal bellows protection, between the cavity and valve element of the valve body
Gap, which sets to open up on seal, the seal, sets sealing ring, institute in the symmetrical annular groove in multiple both sides, the annular groove
The cavity rear end for stating valve body is provided for the buffer board that valve core movement mitigates impulse force.
Compared with prior art, phase beneficial effect is the utility model：The valve arrangement, which is installed on, to be used in equipment, valve element
Opened one's mouth blocking, the changing by valve element self structure state when flowing for MHD flow relative to leak part outside valve body front end
Become, i.e. metal bellows and its interior drive shaft is moved horizontally, adhesive action, promote magnetic fluid proper motion, the device specific aim
By force, used only for special vacuum equipment stove, prevented leakage accident, the pollution to environment in water-tight equipment improves product
Yield.
Brief description of the drawings
Fig. 1 is a kind of structural representation of vacuum equipment magnetic fluid valve of the present utility model.
Embodiment
To make to have a better understanding and awareness to architectural feature of the present utility model and the effect reached, to compared with
Good embodiment and accompanying drawing coordinate detailed description, are described as follows：
As shown in figure 1, a kind of vacuum equipment magnetic fluid valve that the present embodiment is provided, including valve body 16 and valve element 17, institute
State and cavity 15 is set in valve body 16, two insertion of cavity 15, the valve element 17 through the cavity 15 to be arranged at valve body
In 16, the stage casing of valve element 17 sets the drive shaft for driving valve element to move horizontally adhesive, and the drive shaft outer layer is cased with metal wave
Line pipe 13 is protected, and gap sets and opened up on seal 12, the seal 12 between the cavity 15 and valve element 17 of the valve body 16
Sealing ring is set in multiple symmetrical annular grooves 14 in both sides, the annular groove 14, and the rear end of cavity 15 of the valve body 16, which is set, to be used
The buffer board 11 for mitigating impulse force is moved in valve element 17.
The present embodiment, the valve arrangement is installed on using in equipment, and valve element front end is used for magnetic relative to leak part outside valve body
Fluid flow port is blocked, and passes through the change of valve element self structure state, i.e. metal bellows and its interior drive shaft water when flowing
Translation is dynamic, adhesive action, promotes magnetic fluid proper motion, and the device is with strong points, is used only for special vacuum equipment stove, shuts out
Leakage accident absolutely, pollution to environment in water-tight equipment improves product yield.
General principle of the present utility model, principal character and advantage of the present utility model has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification
Simply principle of the present utility model, the utility model also has respectively on the premise of the utility model spirit and scope are not departed from
Changes and improvements are planted, these changes and improvements are both fallen within the range of claimed the utility model.The utility model requirement
Protection domain defined by appended claims and its equivalent.
Claims (1)
1. a kind of vacuum equipment magnetic fluid valve, including valve body（16）And valve element（17）, it is characterised in that：The valve body（16）It is interior
Cavity is set（15）, the cavity（15）Two insertion, the valve element（17）With through the cavity（15）It is arranged at valve body
（16）It is interior, the valve element（17）Stage casing sets the drive shaft for driving valve element to move horizontally adhesive, and the drive shaft outer layer is cased with gold
Belong to bellows（13）Protection, the valve body（16）Cavity（15）With valve element（17）Between gap set seal（12）, it is described
Seal（12）On open up the symmetrical annular groove in multiple both sides（14）, the annular groove（14）Interior setting sealing ring, the valve body
（16）Cavity（15）Rear end is provided for valve element（17）Motion mitigates the buffer board of impulse force（11）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720044239.8U CN206496068U (en) | 2017-01-16 | 2017-01-16 | A kind of vacuum equipment magnetic fluid valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720044239.8U CN206496068U (en) | 2017-01-16 | 2017-01-16 | A kind of vacuum equipment magnetic fluid valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206496068U true CN206496068U (en) | 2017-09-15 |
Family
ID=59803222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720044239.8U Expired - Fee Related CN206496068U (en) | 2017-01-16 | 2017-01-16 | A kind of vacuum equipment magnetic fluid valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206496068U (en) |
-
2017
- 2017-01-16 CN CN201720044239.8U patent/CN206496068U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170915 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |