CN206440317U - A kind of correlation ultrasonic flow meter with small aperture - Google Patents
A kind of correlation ultrasonic flow meter with small aperture Download PDFInfo
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- CN206440317U CN206440317U CN201720098996.3U CN201720098996U CN206440317U CN 206440317 U CN206440317 U CN 206440317U CN 201720098996 U CN201720098996 U CN 201720098996U CN 206440317 U CN206440317 U CN 206440317U
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Abstract
The utility model discloses a kind of small-bore correlation-type ultrasonic flowmeter, including circuit box, pipeline section outer layer, pipeline section internal layer, transducer assemblies, circuit box is arranged on pipeline section outer layer, pipeline section internal layer is processed into for injection moulding integrated molding, its end is formed with transducer mounting seat, transducer assemblies are installed in mounting seat, and two pairs of transducers component is arranged in pairs, and pipeline section internal layer is arranged on inside pipeline section outer layer.The ultrasonic flowmeter that the utility model is provided, ultrasonic wave is launched with receiving using correlation, and energy loss is low, and pipeline section outer layer can use Standard fittings, reduce cost.It is small-sized to solve the problem of installing transducer in pipe with small pipe diameter without step transducer designs, reduce crushing, current are unobstructed, accurate measurement.Pipeline section internal layer is easy to assembly quick, accurate positioning, good seal.Whole cavity is anhydrous, effectively prevents that transducer line is soaked, and the small expansion that the deformation and water to pipeline section internal layer become ice provides extendable room, effectively antifreeze.
Description
Technical field
The utility model belongs to pipeline transmission flow measuring apparatus amount technical field, and in particular to the small-bore ultrasonic wave of correlation
Flowmeter.
Background technology
Ultrasonic flowmeter compared with traditional mechanical flow instrument, electromagnetic flow instrument with measuring accuracy it is high,
Range ratio is bigger, is suitable for the change of the parameters such as detected fluid temperature, pressure, density, to caliber and its pipe level, vertical
The strong adaptability of trend, it is easy to use, it is easy to the advantages of digital management.At present, ultrasonic flowmeter has been widely applied
To field of flow measurement such as municipal heat supply, water utilities, industry, mine, power plants, technology is increasingly mature.
However, for small-bore pipeline, because its pipe diameter is smaller in itself, the length of pipe section given for standard is changed
It is a technical barrier that energy device, which is arranged in the passage of so small caliber, governs ultrasonic flowmeter in small-bore pipeline flow
The application of metering, for example, domestic water field etc..
For ultrasonic flow meter with small aperture, conventional has two kinds, and one kind is reflection type ultrasonic flow meter, such as Chinese
, due to the limitation of itself operation principle, there are shortcomings in the U of the patent CN 201697666 and A of CN 104764499.Ultrasound
Ripple is launched by a transducer, after the reflection that successively have passed through two reflecting plates, is received by another transducer.Ultrasonic wave it is every
Primary event can all have energy loss, and the energy of the Mintrop wave for the plane sound wave that last transducer can be received generally only has transmitted wave
The 14% of Mintrop wave, energy loss is very big.86% ultrasonic wave is all by tube wall diffusing reflection, moreover, the subwave that diffusing reflection is formed
Easily superposition interference forms clutter influence and the reception of interference receive transducer in the back wave of second reflecting surface.Generally change
Can device can to receive the minimum safety value of Mintrop wave be 20mv, in order to ensure this stable signal value, the power of transducer and
It is larger that size generally requires to do, and at present, generally uses transducer emission area for Φ 17mm (after encapsulation).Current reflecting plate
Area is about Φ 8mm, and from the angle of reflection, its area is the bigger the better, but conference blocks water and produces vortex excessively, and influence sound wave is fast
Degree is stable, makes metering inaccurate;Reflecting plate is constantly in current, especially in the hot water, the easy fouling in surface is used for a long time, instead
Penetrate efficiency reduction.Once Mintrop wave signal is less than 20mv, the signal received will be unstable, and metering will be caused not enter normally
OK.To ensure loose joint installation requirements, transducer mounting post is necessarily placed at the externally threaded inner side at pipeline section two ends.So, having
Under the length of pipe section of limit, this just shortens the distance between two transducers, reduces the range ratio of flowmeter.
Another is correlation flowmeter, and there is provided a kind of ultrasonic flow by such as U of Chinese patent CN 201503288
Table transducer, pipeline section is segmental structure, and transducer is arranged in pipeline section to the mode of penetrating.First, the structure of itself is, in fixation
It is relatively large in diameter at the pipeline section of transducer, the diameter in the middle of pipeline section two ends junction and pipeline section is smaller.The pipe of transducer bearing
Segment structure is special, can only use injection molding mode.Secondly, the signal output cable of transducer is located in the top of transducer
The externally threaded inner side of pipeline section, due to the limitation of this body structure, transducer can only be arranged at meter spool piece two ends remotely, ultrasonic wave
Sound path it is shorter, reduce the range ratio of flowmeter.In addition, flowmeter is overall all to use plastic construction, segmentation injection molding is obtained
, then it is bolted connection.Due to using plastic material, it is affected by temperature, the deformation of plastics pipeline section is larger, this certainty
Being accurately positioned for transducer, and then the stability of flow measurement can be influenceed.Meanwhile, the processing that segmental machining is fastened by bolts again
Mode is complicated, dismounts complex procedures.Plastics pipeline section with loose joint when being connected, and screw strength is poor, is easily damaged, and it is not firm to install.
Utility model content
For there is provided a kind of small-bore ultrasound of correlation the problem of ultrasonic flow meter with small aperture is present in the prior art
Low.
A kind of correlation ultrasonic flow meter with small aperture, including pipeline section outer layer, pipeline section internal layer, transducer assemblies, the pipe
Section internal layer end be formed with transducer mounting seat, the transducer assemblies are installed in mounting seat, two pairs of transducers component into
To setting, the pipeline section internal layer is arranged on inside pipeline section outer layer.
The pipeline section internal layer pars intermedia pipeline section diameter is less than two ends.
The pipeline section internal layer includes the internal layer of pipeline section first and the internal layer of pipeline section second that are connected by buckle, the pipeline section the
The non-of one internal layer and the internal layer of pipeline section second snaps connection end radially protrusion forms annular boss edge, the annular boss
Protrusion forms rectangular boss axially inward on edge, and the pipeline section outer layer chambering at two ends processing is obtained and annular boss edge phase
First hole of adaptation, and the first groove being adapted with rectangular boss is opened up on inwall, many places can be set in the rectangular boss,
The internal layer of pipeline section first, which snaps connection end and is provided with fastener, fastener, opens up annular catching groove, the internal layer of pipeline section second
Snapping connection end, to be provided with the annular second outwardly in a radial direction that formed on fastener, the fastener raised, the fastener and
Fastener is connected together, and the second projection is fixed in catching groove.
Also include the first sealing ring, the second sealing ring, the end of the internal layer of pipeline section first and pipeline section second internal layer is opened up
First annular groove, first sealing ring is arranged in first annular groove, and second sealing ring is arranged at catching groove and fastener shape
Into cavity in.
The transducer assemblies are including the transducer being successively set on from inside to outside in mounting seat, sealing gasket, tabletting and prevent
Helmet, the mounting seat includes the mounting hole with pipeline section diameter parallel, the threading hole by mounting hole and ft connection, the installation
Bore ends project radially inwards to form edge protuberance, the axially projecting fastener of formation second, and the head protector includes and second
The second fastener and compressed part that fastener is adapted, head protector are fastened closely by the second fastener and the second fastener, and compressed part enters one
Step compresses tabletting.
The beneficial effects of the utility model:
1. ultrasonic wave is launched with receiving using correlation, when obtaining identical signal reception energy, transducing can be reduced
The emitted energy of device, extends battery.By taking DN20 as an example, the head wave energy that transducer is received is bigger 4 times than reflective,
So transducer dimensions are suitably reduced to Φ 12mm by Φ 17mm.
2. transducer is arranged at the externally threaded underface in pipeline section two ends, closer to pipeline section two-port, its lead-out wire is to pass through
Pipeline section central exit is drawn, and is installed without interference with loose joint, is understood according to time difference formula and reckoning, is increased the range of flowmeter
Than.By taking DN20 as an example, the distance between two transducers, by reflective 60mm, 85mm is arrived in lifting.
3. the cavity between whole tubular body pipeline section outer layer and pipeline section internal layer is anhydrous, metal tube is so effectively solved
Intersegmental part corrodes and scale problems, and metal section interface has the protection of plastics flange, does not also contact water, therefore, this design can
With using copper, stainless steel and outside Standard fittings, for example, coating steel pipe, aluminum pipe etc., can be with the case of proof strength
Substantially reduce cost.
4. it is small-sized without step transducer designs, the problem of can not installing transducer in pipe with small pipe diameter had both been solved, again will not
Increase crushing, optimized by software analysis, current is obtained rectification, reduce turbulent flow, make metering more accurate, by taking DN20 as an example, its
The water flowing area of fixing of energy converter part is 1.3 times of middle necking section area.
5. meter spool piece is simple in construction, it is not necessary to which conventional forging and stamping manufacture, outer layer can be with selection standard tubing, metal tube
There is the protection of plastics flange at segment interface, bulk metal pipe does not contact water.Therefore, this design can use copper, stainless steel with
And outside Standard fittings, for example, coating steel pipe, aluminum pipe etc. in the case of proof strength, can substantially reduce cost.
6. pipeline section endothecium structure is easy to assembly quick, accurate positioning, buckle is firm, outer ring good seal.
7. pipeline section internal layer has headspace with pipeline section outer layer inwall, whole cavity is anhydrous, so effectively prevents transducing
Device line is soaked, can also be effectively freeze proof.Light deformation when ice expansion is enclosed on when i.e. near freezing point, in pipeline section can effectively overcome
Frost demolition pipeline section.
8. pipeline section outer layer manufactures for metal, so, screw thread will not be destroyed by installing loose joint.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model one embodiment;
Fig. 2 is the utility model one embodiment center section structural representation;
Fig. 3 is the utility model one embodiment pipeline section endothecium structure schematic diagram;
Fig. 4 is the utility model embodiment transducer assemblies partial structural diagram.
Embodiment
With reference to the accompanying drawing in the utility model embodiment, the technical solution of the utility model is described further.
A kind of small-bore correlation-type ultrasonic flowmeter, as shown in figure 1, including pipeline section outer layer 1, pipeline section internal layer 2, transducer
Component 3, circuit box 4, the circuit box 4 are arranged on pipeline section outer layer 1, and the pipeline section internal layer 2 is that injection moulding integrated molding processes system
Into its end is formed with transducer mounting seat 23, and the transducer assemblies 3 are installed in mounting seat 23, two pairs of transducers component 3
It is arranged in pairs, the pipeline section outer layer 1 is standard tubing, and two ends are machined with external screw thread, for connecting the pipeline into measurement.The pipe
Section internal layer 2 is arranged in pipeline section outer layer 1.
The selection standard tubing of pipeline section outer layer 1, for example, coating steel pipe, aluminum pipe etc., material cost is relatively low, easy to process, reliably
Property it is high, be wrapped in outside pipeline section internal layer 2, play a part of protection support, prevent the generation influenced by ambient temperature of pipeline section internal layer 2
Deformation, so as to influence measuring accuracy.Transducer assemblies 3 are in pipeline, and ultrasonic wave is launched with receiving, compared to reflection using correlation
Formula ultrasonic flowmeter, ultrasonic wave does not pass through two secondary reflections, and energy does not have reflection loss loss, and transducer can use smaller
Dimensions, its signal can just reach recognizable degree.It, which is obtained, according to DN20 pipeline section experiment tests receives energy ratio reflection
Formula is big 4 times, it is possible to which transducer dimensions are suitably decreased into Φ 12mm by Φ 17mm, so, is connect obtaining identical signal
When receiving energy, the emitted energy of transducer is relatively low, extends battery.
The pars intermedia pipeline section diameter of pipeline section internal layer 2 is less than two ends, as shown in Figure 1,3, in the inwall of pipeline section outer layer 1 and pipeline section
Cavity 6 is formed between 2 outer wall of layer.Reinforcement 208 can be set in the pars intermedia of pipeline section internal layer 2.Under same flow, due to pipeline section
The undergauge of internal layer 2 (identical with present heat supply DN20 flowmeters, to be Φ 14mm), so flow velocity is very fast, the time difference of ultrasonic wave becomes big,
The measurement accuracy scope of flowmeter is improved.
The pipeline section internal layer 2 includes the first internal layer of pipeline section 21 and the second internal layer of pipeline section 22 being connected by buckle, such as schemes
1st, shown in 3, the other end of first internal layer of pipeline section 21 and the second internal layer of pipeline section 22 radially protrudes to form annular boss
Protrusion forms rectangular boss 205, the two ends of pipeline section outer layer 1 axially inward on edge 204, the annular boss edge 204
Reaming processing obtains the first hole 101 being adapted with annular boss edge 204, and is opened up and the phase of rectangular boss 205 on inwall
First groove of adaptation.The first internal layer of pipeline section 21 and the second internal layer of pipeline section 22 will not be moved left and right point by snapping connection firmly
Open, annular boss edge 204 is sticked in the first hole of 1 two ends of pipeline section outer layer 101 respectively, the axial direction of positioning pipeline section internal layer 2
The free degree.Rectangular boss 205 on pipeline section internal layer 2 is fastened in the first groove 102, and positioning pipeline section internal layer 2 is around axial-rotation
The free degree.Many places can be set in the rectangular boss 205, as shown in figure 4, the present embodiment is provided with two.Using what is snapped connection
Mode, convenient and reliable, more simple and convenient than bolt fixed installation, the axial movement and axial-rotation accurate positioning of pipeline section internal layer 2 can
Lean on.
The buckle connecting structure of pipeline section internal layer 2 is, as shown in Fig. 2 the first internal layer of pipeline section 21 snaps connection end and is provided with
Annular catching groove 241 is opened up on fastener 24, fastener 24, the second internal layer of pipeline section 22 snaps connection section and is provided with fastener 25, the fastener
Outwardly in a radial direction on 25 to form annular second projection 251, the fastener 24 and fastener 25 are connected together, and second is raised
251 are fixed in annular catching groove 241.
Ultrasonic flowmeter also includes the first sealing ring 501, the second sealing ring 502, as shown in figure 4, the pipeline section first
The end of internal layer 21 and the second internal layer of pipeline section 22 opens up first annular groove 206, and first sealing ring 501 is arranged at first annular
In groove 206, compressed by the inwall of pipeline section outer layer 1, prevent the water in pipeline from being entered by the gap between the inside and outside layer of pipeline section
In cavity 6.Second sealing ring 502 is arranged in the cavity of annular catching groove and fastener 25 formation, prevent water in pipeline from
The place of snapping connection is entered in cavity 6.
Cavity 6 between whole tubular body pipeline section outer layer 1 and pipeline section internal layer 2 is anhydrous, and the small expansion to ice is carried
For extendable room, pipeline bursting by freezing when temperature is low can be effectively prevented;Due to anhydrous, it is to avoid metal section internal corrosion and fouling
Problem, can be using copper, stainless steel and zinc-plated water gas pipe, aluminum pipe etc..
The transducer assemblies 3 include being successively set on from inside to outside transducer 301 in mounting seat 23, sealing gasket 302,
Tabletting 303 and head protector 31.As shown in figure 4, the mounting seat 23 include with the mounting hole 234 of pipeline section diameter parallel, will install
Hole 234 and the threading hole 233 of ft connection, the connecting line of transducer 301 enter after threading hole 233 is incorporated into cavity 6
Circuit box 4.The end of mounting hole 234 projects radially inwards to form edge protuberance 231, the second fastener of axially projecting formation
232.The head protector 31 includes the second fastener 312 and the compressed part 311 being adapted with the second fastener 232.The external diameter of tabletting 303
Equal to the aperture of mounting hole 234, compressed and be installed in mounting hole 234 by edge protuberance 231, the elastic deformation quilt of sealing gasket 302
Compress, sealing gasket 302 can be made of silica gel material.Head protector 31 is fastened by the second fastener 312 and the second fastener 232
Closely, compressed part 311 further compresses tabletting 303, while 31 1 reaction forces of head protector, whole transducer are given in tabletting 303
It is firm that component 3 tightly installs accurate positioning.The position that transducer assemblies 3 are installed is located at the underface of mouth of pipe screw thread, with existing skill
Art is different, and the distance between two transducer assemblies 3 are larger.Its lead-out wire is drawn by pipeline section central exit, is gone out in the middle of pipeline section
Sealing gasket is provided with mouthful, prevents foreign matter from entering cavity 6.By taking DN20 as an example, the distance between two transducers, from reflective
60mm liftings arrive 85mm, increase to the transducer penetrated to penetrating distance, i.e. sound path.For long by the given pipeline section of standard
Degree, increase transducer between to penetrating apart from significant.
Ultrasonic wave just carries upper rate of flow of fluid V when being propagated in the fluid of flowingIt is averageInformation.Therefore it is super by what is received
The time difference of sound wave can just detect the flow velocity of fluid, so as to be converted into flow.Two transducer assemblies 3 being used in conjunction with each other
Launch ultrasonic wave simultaneously, then receive launched ultrasonic wave, can just be calculated according to the time difference △ t received in pipeline section
Fluid flow in layer 2:
c1=c+VIt is average, the following current velocity of sound
c2=c-VIt is average, the adverse current velocity of sound
t1=L/c1, the following current time
t2=L/c2, the adverse current time
C > > VIt is average
Formulate constant K, order
The minimum value that present when poor chip can calculate time difference △ t is 2.5nS, and L is increased under conditions of △ t are constant
Value can effectively reduce VIt is averageValue, i.e., flowmeter can measure the minimum flow velocity for meeting required precision, when pipe diameter D is certain
When, sectional area S is determined that, T is unit interval (hour), then flow Q1With flow velocity VIt is averageIt is directly proportional, i.e. VIt is averageIt is smaller, during unit
Between flow Q1It is smaller, and range ratio (Q3/Q1) bigger, the minimum measuring accuracy of flowmeter is improved, that is, increases flowmeter
Range ratio.
Wherein:
C, ultrasonic wave is in fluid to be measured medium velocity;
c1, remove journey ultrasonic velocity;
t1, go the journey time;
c2, return ultrasonic speed;
t2, return interval;
Δ t, goes return interval poor;
VIt is average, the tube fluid minimum average B configuration flow velocity that can be measured;
To penetrating distance, i.e. sound path between L, transducer;
S, pipeline section cross section;
Q1, the minimum discharge that flowmeter can be measured;
Q3, flow is commonly used, is definite value to specified caliber.
Transducer 301 eliminates the unnecessary platform that is fixed to be small-sized without step transducer designs, and by transducer
301 surface sizes are reduced into Φ 12mm, solve the problem of can not installing transducer in pipe with small pipe diameter.By taking DN20 as an example, it is fixed
The water flowing area of transducer portion is 1.3 times of middle necking section area, and transducer can not be installed by both having solved in pipe with small pipe diameter
The problem of, crushing will not be increased again, optimized by software analysis, current is obtained rectification, turbulent flow is reduced, make metering more accurate.
Cavity 6 between whole tubular body pipeline section outer layer 1 and pipeline section internal layer 2 is anhydrous, so effectively prevents transducing
Device line is soaked.
It will be appreciated that embodiment of the present utility model while there has been shown and described that, for the common skill of this area
For art personnel, it is possible to understand that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit
A variety of change, modification, replacement and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of small-bore correlation-type ultrasonic flowmeter, it is characterised in that:Including pipeline section outer layer (1), pipeline section internal layer (2), change
Energy device assembly (3), pipeline section internal layer (2) end is formed with transducer mounting seat (23), and the transducer assemblies (3) are installed on
In mounting seat (23), two pairs of transducers component (3) is arranged in pairs, and it is internal that the pipeline section internal layer (2) is arranged on pipeline section outer layer (1).
2. small-bore correlation-type ultrasonic flowmeter as claimed in claim 1, it is characterised in that in the pipeline section internal layer (2)
Between portion's pipeline section diameter be less than two ends.
3. small-bore correlation-type ultrasonic flowmeter as claimed in claim 2, it is characterised in that pipeline section internal layer (2) bag
Include the internal layer of pipeline section first (21) and the internal layer of pipeline section second (22) being connected by buckle, the internal layer of pipeline section first (21) and pipe
Section the second internal layer (22) it is non-snap connection end radially protrusion form annular boss edge (204), the annular boss
Protrusion forms rectangular boss (205) axially inward on edge (204), pipeline section outer layer (1) the chambering at two ends processing obtain with
The first hole (101) that annular boss edge (204) is adapted, and be adapted with rectangular boss (205) is opened up on inwall
Many places can be set in one groove (102), the rectangular boss (205).
4. small-bore correlation-type ultrasonic flowmeter as claimed in claim 3, it is characterised in that the internal layer of pipeline section first (21) blocks
Button connection end, which is provided with fastener (24), fastener (24), opens up annular catching groove (241), and the internal layer of pipeline section second (22) snaps connection end
It is provided with the annular second outwardly in a radial direction that formed on fastener (25), the fastener (25) raised (251), the fastener
(24) it is connected together with fastener (25), second raised (251) are fixed in catching groove (241).
5. small-bore correlation-type ultrasonic flowmeter as claimed in claim 4, it is characterised in that also including the first sealing ring
(501) end of, the second sealing ring (502), the internal layer of pipeline section first (21) and the internal layer of pipeline section second (22) opens up the first ring
Shape groove (206), first sealing ring (501) is arranged in first annular groove (206), and second sealing ring (502) is set
In catching groove (241) and the cavity of fastener (25) formation.
6. small-bore correlation-type ultrasonic flowmeter as claimed in claim 5, it is characterised in that the transducer assemblies (3)
Including the transducer (301) being successively set on from inside to outside in mounting seat (23), sealing gasket (302), tabletting (303) and head protector
(31), the mounting seat (23) is included with the mounting hole (234) of pipeline section diameter parallel, by mounting hole (234) and ft connection
Threading hole (233), mounting hole (234) end projects radially inwards to form edge protuberance (231), axially projecting to be formed
Second fastener (232), the head protector (31) includes the second fastener (312) and the compressed part being adapted with the second fastener (232)
(311), head protector (31) fastens close, the further pressure of compressed part (311) by the second fastener (312) and the second fastener (232)
Press piece (303).
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Cited By (6)
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CN106595785A (en) * | 2017-01-23 | 2017-04-26 | 青岛海威茨仪表有限公司 | Opposite type small-bore ultrasonic flowmeter |
CN108151934A (en) * | 2017-12-26 | 2018-06-12 | 贵州航天凯山石油仪器有限公司 | A kind of load transducer elastomeric components sealing structure |
CN111121895A (en) * | 2020-01-10 | 2020-05-08 | 青岛海威茨仪表有限公司 | Large-caliber ultrasonic flowmeter |
WO2021147189A1 (en) * | 2020-01-21 | 2021-07-29 | 青岛海威茨仪表有限公司 | Ultrasonic flowmeter pipe segment structure having welded threaded joint |
CN113280873A (en) * | 2021-06-17 | 2021-08-20 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment and solution flow monitoring device thereof |
WO2023197457A1 (en) * | 2022-04-14 | 2023-10-19 | 重庆市伟岸测器制造股份有限公司 | Small-flow ultrasonic water meter |
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2017
- 2017-01-23 CN CN201720098996.3U patent/CN206440317U/en not_active Expired - Fee Related
Cited By (9)
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CN106595785A (en) * | 2017-01-23 | 2017-04-26 | 青岛海威茨仪表有限公司 | Opposite type small-bore ultrasonic flowmeter |
WO2018133462A1 (en) * | 2017-01-23 | 2018-07-26 | 李新兴 | Small-diameter ultrasonic flow meter having opposing transducers |
US10948324B2 (en) | 2017-01-23 | 2021-03-16 | Qingdao Hiwits Meter Co., Ltd. | Small-diameter ultrasonic flow meter having opposing transducers |
CN108151934A (en) * | 2017-12-26 | 2018-06-12 | 贵州航天凯山石油仪器有限公司 | A kind of load transducer elastomeric components sealing structure |
CN111121895A (en) * | 2020-01-10 | 2020-05-08 | 青岛海威茨仪表有限公司 | Large-caliber ultrasonic flowmeter |
WO2021139034A1 (en) * | 2020-01-10 | 2021-07-15 | 青岛海威茨仪表有限公司 | Large-diameter ultrasonic flow meter |
WO2021147189A1 (en) * | 2020-01-21 | 2021-07-29 | 青岛海威茨仪表有限公司 | Ultrasonic flowmeter pipe segment structure having welded threaded joint |
CN113280873A (en) * | 2021-06-17 | 2021-08-20 | 北京北方华创微电子装备有限公司 | Semiconductor cleaning equipment and solution flow monitoring device thereof |
WO2023197457A1 (en) * | 2022-04-14 | 2023-10-19 | 重庆市伟岸测器制造股份有限公司 | Small-flow ultrasonic water meter |
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