CN206439552U - A kind of sealing flange with cooling circuit - Google Patents

A kind of sealing flange with cooling circuit Download PDF

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Publication number
CN206439552U
CN206439552U CN201621389991.8U CN201621389991U CN206439552U CN 206439552 U CN206439552 U CN 206439552U CN 201621389991 U CN201621389991 U CN 201621389991U CN 206439552 U CN206439552 U CN 206439552U
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China
Prior art keywords
baffle
sealing flange
side wall
cooling circuit
passage
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特洛伊·乔纳森·贝克
王颖慧
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Gallium Semiconductor Technology (shanghai) Co Ltd
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Gallium Semiconductor Technology (shanghai) Co Ltd
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Abstract

The utility model provides a kind of sealing flange with cooling circuit, and it at least includes:Bottom, side wall, edge, interlayer, water inlet, delivery port, first baffle, second baffle, and third baffle;The bottom, the side wall and the edge are hollow structure, and are sequentially communicated to form hollow cavity;The interlayer is located in the side wall, the hollow cavity is divided into separate upper cavity and lower chamber, and the interlayer is provided with first passage and second channel, the water inlet and the delivery port are located on the outer surface of the side wall, the first baffle and the second baffle are located in the upper cavity, and the third baffle is located in the lower chamber.The utility model forms new cooling circuit by setting up interlayer, multiple baffle plates and outlet pipe;When being cooled down, cooling water can be circulated through the everywhere in sealing flange, in the absence of cooling dead angle, substantially improve cooling effect.

Description

A kind of sealing flange with cooling circuit
Technical field
The utility model is related to flange technical field, more particularly to a kind of sealing flange with cooling circuit.
Background technology
At present, some equipment generally coordinate accessory to carry out the sealing of gas or liquid using sealing flange.For example, hydrogen Compound vapour phase epitaxy (HVPE, Hydride Vapor Phase Epitaxy) equipment, the equipment is that compound growth technique is set It is standby, it is mainly used in high temperature environments by such as H2, the hydride gas such as HCl, make one layer of substrate surface epitaxial growth as GaAs, GaN etc. thick film or crystal.Due to H2, the hydride gas such as HCl be all hazardous gas, it is necessary to by sealing flange fitted seal These hazardous gases are sealed in the quartz ampoule of HVPE equipment by circle, once leakage, will cause serious consequence.However, HVPE is set For due to being chronically in hot environment, sealing ring is easy to be burned, if sealing ring can not be changed in time, can result in danger Gas leakage.Common practice is exactly to carry out cooling down to sealing flange, is made according to temperature conduction principle tight with sealing flange The temperature of the tactile sealing ring of contiguity lowers, so as to extend the service life of sealing ring.
It is the side view of the sealing flange of the prior art with cooling circuit as shown in Figure 1, is illustrated in figure 2 existing The upward view of the sealing flange with cooling circuit in technology, is illustrated in figure 3 the sectional view in A-A directions in Fig. 2, such as Fig. 4 It show the sealing flange of the prior art with cooling circuit circulation of cooling water when being cooled down and moves towards schematic diagram.By Fig. 1~Fig. 4 is visible, and the structure of sealing flange mainly includes bottom 1, side wall 2, edge 3, water inlet 4, delivery port 5 and baffle plate 6, the center of bottom 1 offers a connecting hole 11 for being used to connect exterior components, and baffle plate 6 is located at water inlet 4 and water outlet Between mouthfuls 5, when being cooled down to sealing flange, cooling water (Fig. 4 dot-dashed lines represent cooling water flow through route) is from water inlet The side of 4 approaching side walls 2 of mouth, flows to the opposite side of side wall 2, while being flowed to from the side of bottom 1 another under the stop of baffle plate 6 Side, cooling water is built up full of bottom 1 and gradually to the top of side wall 2, when water level in side wall 2 is higher than delivery port 5, cooling water from Delivery port 5 flows out, so as to realize the circulating cooling of sealing flange.
However, the sealing flange of said structure is when being cooled down, it is easy to cause bottom, side wall or edge formation cooling Dead angle, is particularly away from the place of water inlet and delivery port, and cooling effect will be by extreme influence.For example, due to delivery port 5 Position is on the outer surface of side wall 2, and water level be will flow out more than delivery port 5, therefore cooling water can only be cooled under delivery port 5 The partial sidewall 2 of side, partial sidewall 2 and edge 3 for the top of delivery port 5 can not be cooled down, so as to cause cooling dead The formation at angle, leverages cooling effect.For another example, because the area of bottom 1 is larger and without cooling circuit, it is impossible to make cooling water Circulating cooling is carried out well, and the cooling water newly entered may be flowed directly at nearly delivery port 5 at nearly water inlet 4, and distance The cooling water of water inlet 4 and delivery port 5 remotely has heated up, and exchanges less between the cooling water but and newly entered, so that shape Into cooling dead angle, cooling effect is poor.
Therefore, the cooling circuit in sealing flange how is improved and designed, cooling dead angle is eliminated, improves cooling effect, be Urgent problem to be solved.
The content of the invention
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of with cooling circuit Sealing flange, for solve in the prior art with cooling circuit sealing flange when being cooled down, it is easy to cause bottom, Side wall or edge formation cooling dead angle, the problem of cooling effect is by extreme influence.
In order to achieve the above objects and other related objects, the utility model provides a kind of Sealing Method with cooling circuit Orchid, wherein, the sealing flange with cooling circuit at least includes:Bottom, side wall, edge, interlayer, water inlet, delivery port, First baffle, second baffle and third baffle;
The center of the bottom offers a connecting hole for being used to connect exterior components, the bottom, the side Wall and the edge are hollow structure, and are sequentially communicated to form hollow cavity;
The interlayer is located in the side wall, and the hollow cavity is divided into separate upper cavity and lower chamber, And the interlayer is provided with first passage and second channel, the water inlet and the delivery port are located at the outer surface of the side wall On, and the position of the water inlet and the delivery port is higher than the interlayer;Wherein, the first passage and the second channel The both sides of the sealing flange are located relatively at the water inlet and the delivery port;
The first baffle and the second baffle are located in the upper cavity, and connect the interlayer and the side respectively Wall top, the position of the first baffle is between the water inlet and the delivery port, at the position of the second baffle Between the first passage and the second channel;The third baffle is located in the lower chamber, and connects the interlayer With the bottom bottom, the position of the third baffle is between the first passage and the second channel.
Preferably, the sealing flange with cooling circuit also includes:Outlet pipe, the outlet pipe is arranged on described In cavity, the bottom of the outlet pipe connects the delivery port, and the tip height of the outlet pipe is higher than the bottom at the edge.
Preferably, the top of the outlet pipe has an inclined plane, and the tip height of the inclined plane reaches the side wall Top, the angle between the perpendicular pipeline of inclined plane of the outlet pipe is more than or equal to 60 °.
Preferably, the thickness on the edge top is more than the thickness on the side wall top, the inclined plane bottom of the outlet pipe The height at end is higher than the lower surface on the edge top.
Preferably, the first passage uses pipe design, and the tip height of the first passage is higher than the edge Bottom, the cross section of the first passage is circle, kidney-shaped, square or irregular shape.
Preferably, the tip height of the first passage is higher than the lower surface on the edge top.
Preferably, the top of the first passage has an inclined plane, and the top of the inclined plane connects the side wall Angle between top, the perpendicular pipeline of inclined plane of the first passage is more than or equal to 60 °.
Preferably, the thickness on the edge top is more than the thickness on the side wall top, the inclined plane of the first passage The height of bottom is higher than the lower surface on the edge top.
Preferably, the second channel uses via design or pipe design, and the cross section of the second channel is circle Shape, kidney-shaped, square or irregular shape.
Preferably, the position height that the interlayer is located in the side wall is equal to or higher than the height of the bottom, described A part for third baffle is located in the side wall, and another part is located in the bottom, part in the bottom the The length of three baffle plates is more than 1/4 diameter length of the bottom and less than the diameter length of the bottom.
Preferably, the first baffle and the second baffle are symmetricly set on the both sides in the upper cavity, positioned at institute The third baffle stated in lower chamber is projected in the same of the bottom with the second baffle in the upper cavity Diametrically.
In order to achieve the above objects and other related objects, the utility model provides a kind of Sealing Method with cooling circuit Orchid, wherein, the sealing flange with cooling circuit at least includes:Bottom, side wall, edge, interlayer, water inlet, delivery port, First baffle, and second baffle;
The center of the bottom offers a connecting hole for being used to connect exterior components, the bottom, the side Wall and the edge are hollow structure, and are sequentially communicated to form hollow cavity;
The interlayer is located in the side wall, and the hollow cavity is divided into separate upper cavity and lower chamber, And first passage is offered on the interlayer, the water inlet and the delivery port are located on the outer surface of the side wall, described The position of water inlet is less than the interlayer, and the position of the delivery port is higher than the interlayer;
The first baffle is located in the upper cavity, and connects the interlayer and the side wall top, the second gear Plate is located in the lower chamber, and connects the interlayer and the bottom bottom;Wherein, the first baffle and the second gear Plate be located at the sealing flange the same side, and the water inlet and the delivery port position be in the first baffle and The side of the second baffle, the position of the first passage is in the opposite side of the first baffle and the second baffle.
Preferably, the sealing flange with cooling circuit also includes:Outlet pipe, the outlet pipe is arranged on described In cavity, the bottom of the outlet pipe connects the delivery port, and the tip height of the outlet pipe is higher than the bottom at the edge.
Preferably, the top of the outlet pipe has an inclined plane, and the top of the inclined plane connects the top of the side wall Angle between end, the perpendicular pipeline of inclined plane of the outlet pipe is more than or equal to 60 °.
Preferably, the thickness on the edge top is more than the thickness on the side wall top, the inclined plane bottom of the outlet pipe The height at end is higher than the lower surface on the edge top.
Preferably, the first passage uses pipe design, and the tip height of the first passage is higher than the edge top The lower surface at end, the cross section of the first passage is circle, kidney-shaped, square or irregular shape.
As described above, the sealing flange of the present utility model with cooling circuit, has the advantages that:This practicality is new Type forms new cooling circuit by setting up interlayer, multiple baffle plates and outlet pipe;When being cooled down, cooling water can be followed The everywhere that circulation is crossed in sealing flange, in the absence of cooling dead angle, substantially improves cooling effect.
Brief description of the drawings
Fig. 1 is shown as the side view of the utility model sealing flange of the prior art with cooling circuit.
Fig. 2 is shown as the upward view of the utility model sealing flange of the prior art with cooling circuit.
Fig. 3 is shown as the sectional view in A-A directions in Fig. 2.
Fig. 4 is shown as the utility model sealing flange of the prior art with cooling circuit and cooled down when being cooled down Schematic diagram is moved towards in the circulation of water.
Fig. 5 is shown as the upward view of the sealing flange with cooling circuit of the utility model first embodiment.
Fig. 6 is shown as the sectional view in A-A directions in Fig. 5.
Fig. 7 is shown as the sectional view in B-B directions in Fig. 5.
Fig. 8 is shown as the sectional view in C-C directions in Fig. 5.
The sealing flange with cooling circuit that Fig. 9 is shown as the utility model first embodiment is cold when being cooled down But schematic diagram is moved towards in the circulation of water.
Figure 10 is shown as the upward view of the sealing flange with cooling circuit of the utility model second embodiment.
Figure 11 is shown as the sectional view in A-A directions in Figure 10.
Figure 12 is shown as the sectional view in B-B directions in Figure 10.
Figure 13 is shown as the sectional view in C-C directions in Figure 10.
Figure 14 is shown as the sectional view in D-D directions in Figure 10.
Figure 15 is shown as the sealing flange with cooling circuit of the utility model second embodiment when being cooled down Schematic diagram is moved towards in the circulation of cooling water.
Component label instructions
1 bottom
11 connecting holes
2 side walls
3 edges
4 water inlets
5 delivery ports
6 baffle plates
61 first baffles
62 second baffles
63 third baffles
7 interlayers
71 first passages
72 second channels
8 outlet pipes
Embodiment
Embodiment of the present utility model is illustrated by particular specific embodiment below, those skilled in the art can be by this Content disclosed by specification understands other advantages of the present utility model and effect easily.
Fig. 5 is referred to Figure 15.It should be clear that the appended diagram of this specification depicted structure, ratio, size etc., are only used To coordinate the content disclosed in specification, so that those skilled in the art understands and reads, this practicality is not limited to new The enforceable qualifications of type, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size Adjustment, in the case where not influenceing the utility model effect that can be generated and the purpose that can reach, all should still fall new in this practicality Technology contents disclosed in type are obtained in the range of covering.Meanwhile, in this specification it is cited as " on ", " under ", " left side ", The term on " right side ", " centre " and " one " etc., is merely convenient to understanding for narration, and it is enforceable to be not used to restriction the utility model Scope, being altered or modified for its relativeness is enforceable when being also considered as the utility model under without essence change technology contents Category.
As shown in Fig. 5~Fig. 9, the utility model first embodiment is related to a kind of sealing flange with cooling circuit, It at least includes:Bottom 1, side wall 2, edge 3, interlayer 7, water inlet 4, delivery port 5, first baffle 61, second baffle 62, and Third baffle 63.It should be noted that due to present embodiment primarily directed to sealing flange internal cooling circuit improvement and Design, its outside structure and sealing flange of the prior art as shown in Figure 1 are more or less the same, and Fig. 1 can also be regarded as this reality Apply the side view of the sealing flange with cooling circuit of mode.
Please continue to refer to Fig. 5~Fig. 8, side wall 2 is looped around around bottom 1, and edge 3 is looped around around side wall 2, bottom 1 center offers a connecting hole 11, for connecting exterior components;Bottom 1, side wall 2 and edge 3 are hollow knot Structure, and be sequentially communicated to form hollow cavity.It should be noted that connecting hole 11 runs through the center of bottom 1, and connecting hole 11 Can be screwed hole or the other shapes being adapted with exterior components or the hole of structure.
As shown in Fig. 5, Fig. 7 and Fig. 8, interlayer 7 is located in side wall 2, and hollow cavity is divided into separate upper cavity And first passage 71 and second channel 72 are offered on lower chamber, and interlayer 7, first can be passed through between upper cavity and lower chamber Passage 71 is connected, and can also be connected by second channel 72, and first passage 71 and second channel 72 are projected in the difference of bottom 1 On radius.Water inlet 4 and delivery port 5 are located on the outer surface of side wall 2, and the position of water inlet 4 and delivery port 5 is higher than interlayer 7. Wherein, first passage 71 and second channel 72 are located relatively at the both sides of sealing flange with water inlet 4 and delivery port 5, such as Fig. 5 institutes Show, first passage 71 and second channel 72 are positioned at the left side of sealing flange, and water inlet 4 and delivery port 5 are positioned at the right side of sealing flange Side;In other words, first passage 71 and water inlet pipe 4 are simultaneously positioned at the side of the first plate washer and second baffle, and the He of second channel 72 Delivery port 5 is simultaneously positioned at the first plate washer and the opposite side of the second plate washer.In addition, the position of first passage 71 and second channel 72 can It is full symmetric relative to sealing flange with the position with water inlet 4 and delivery port 5, can also be asymmetric.In the present embodiment, As a preferred scheme, as shown in figure 5, first passage 71 is symmetricly set on the both sides of sealing flange, second with delivery port 5 Passage 72 is symmetricly set on the both sides of sealing flange with water inlet 4.
As shown in Figure 5 and Figure 6, first baffle 61 and second baffle 62 are located in upper cavity, and connect the upper of interlayer 7 respectively Surface and the top at side wall 2 and edge 3, first baffle 61 and second baffle 62 can stop that current pass through completely.Also, the The position of one baffle plate 61 is between water inlet 4 and delivery port 5, and the position of second baffle 62 is logical in first passage 71 and second Between road 72, first baffle 61 and second baffle 62 are located relatively at the both sides of sealing flange, and the position of first baffle 61 can be with The position of second baffle 62 is full symmetric relative to sealing flange, can also be asymmetric.In the present embodiment, as shown in fig. 6, First baffle 61 and second baffle 62 are symmetricly set on the both sides in sealing flange upper cavity, namely both are placed perpendicular to bottom The both sides of the same vertical plane of the diameter of portion 1.
As shown in Figure 5 and Figure 6, third baffle 63 is located in lower chamber, and lower surface and bottom 1 and the side of connection interlayer 7 The bottom of wall 2, the position of third baffle 63 is between first passage 71 and second channel 72.Third gear in lower chamber The projection of plate 63 and the second baffle 62 in the upper cavity can bottom 1 it is same diametrically, can also be in different-diameter On.In the present embodiment, the third baffle 63 in lower chamber is projected in bottom with the second baffle 62 in upper cavity Portion 1 it is same diametrically, namely third baffle 63 and second baffle 62 are placed perpendicular to the same vertical plane of the diameter of bottom 1 The same side.
In addition, the use of interlayer 7 and sealing flange identical material, generally using stainless steel.Interlayer 7 is located at side wall 2 Put down the position that interior position height is equal to or higher than position and the top of bottom 1 that the height of bottom 1, i.e. interlayer 7 are located in side wall 2 Together, or higher than the position on the top of bottom 1.And part third baffle 63 is located in side wall 2, lower surface and the side of interlayer 6 are connected The bottom of wall 2, other parts third baffle 63 is located in bottom 1, is connected between the top of bottom 1 and bottom, and be located at The length of part third baffle 63 in bottom 1 is more than 1/4 diameter length of bottom 1 and less than the diameter length of bottom 1, to protect Demonstrate,proving follow-up cooling water can detour from third baffle 63, it is ensured that cooling water flows through the whole area of bottom 1, and no cooling dead angle is present, tool There is good cooling effect.As shown in fig. 6, in the present embodiment, interlayer 7 is located at position and the top of bottom 1 in side wall 2 Position is concordant, and the length of the part third baffle 63 in bottom 1 extends to connecting hole 11.Further, since sealing flange In high temperature environments, side wall 2 and bottom 1 are easy to deform upon, and in turn result in size dislocation or even are produced around weld seam and are split Line, makes cooling water penetrate into cavity, chamber vivo environment is impacted, the presence of interlayer 7 except play separate hollow cavity with The effect of cooling circuit is formed, the effect of supporting side walls 2 is also acted as, substantially reduces the possibility that side wall 2 is deformed upon.
As shown in figure 8, the sealing flange with cooling circuit of present embodiment also includes:Outlet pipe 8, outlet pipe 8 is set Put in upper cavity, the bottom connection delivery port 5 of outlet pipe 8, the tip height of outlet pipe 8 is higher than the bottom at edge 3.In this reality Apply in mode, outlet pipe 8 can be vertically arranged in upper cavity, can also be obliquely installed.It is used as a preferred scheme, water outlet The top of pipe 8 has an inclined plane, and the tip height of inclined plane reaches the top of side wall 2, the perpendicular pipe of inclined plane of outlet pipe 8 Angle α between road is more than or equal to 60 ° and less than 90 °, preferably α=70 °, 80 ° or 85 °.More excellent, the thickness on the top of edge 3 Degree is more than the thickness on the top of side wall 2, lower surface of the height higher than the top of edge 3 of the inclined plane bottom of outlet pipe 8, and outlet pipe 8 diameter is less than the thickness of side wall 2, it is worth mentioning at this point that, because the height of the inclined plane bottom of outlet pipe 8 is pushed up higher than edge 3 The lower surface at end, ensure that follow-up cooling water is entered in the whole cavity at edge 3, it is ensured that edge 3 is cooled to, no cooling Dead angle is present, and then ensure that the temperature of whole sealing flange is further reduced.
Please continue to refer to Fig. 8, in the present embodiment, first passage 71 use pipe design, i.e. first passage 71 be by The passage that pipeline is constituted, the tip height of first passage 71 is higher than the bottom at edge 3, the cross section of first passage 71 for it is circular, Kidney-shaped, square or irregular shape.As a preferred scheme, the tip height of first passage 71 is higher than the top of edge 3 Lower surface.In addition, the top of first passage 71 can also have an inclined plane, the top of the top connecting side wall 2 of inclined plane, Angle between the perpendicular pipeline of inclined plane of first passage 71 is more than or equal to 60 °, preferably 70 °, 80 ° or 85 °.It is more excellent , the thickness on the top of edge 3 is more than the thickness on the top of side wall 2, and the height of the inclined plane bottom of first passage 71 is pushed up higher than edge 3 The lower surface at end.
In addition, as shown in fig. 7, second channel 72 uses via design or pipe design, in the present embodiment, second Passage 72 uses via design, i.e. second channel 72 to be the through holes being opened on interlayer 7;In addition, the cross section of second channel 72 For circle, kidney-shaped, square or irregular shape.
As shown in Figure 9 (Fig. 9 dot-dashed lines represent cooling water flow through route), it is cold when being cooled down to sealing flange But water enters the side of upper cavity from water inlet 4, and epicoele is gradually accumulated under the stop of first baffle 61 and second baffle 62 In the side of body;When water level in the side of upper cavity is higher than the top of first passage 71, cooling water is from first passage 71 Top enters, bottom outflow, hence into the side of lower chamber, then passes around after third baffle 63 into the another of lower chamber Side, and gradually accumulate in lower chamber;When water level in lower chamber exceedes the height of lower chamber, cooling water is from second channel 72 The opposite side of upper cavity is flow back into, the opposite side of upper cavity is gradually accumulated under the stop of first baffle 61 and second baffle 62 It is interior;Water level in the opposite side of upper cavity higher than the inclined plane of outlet pipe 8 bottom when, cooling water is by outlet pipe 8 from going out The mouth of a river 5 is flowed out, so as to realize the circulating cooling of sealing flange.
It is noted that the shapes and sizes of the cross section of first passage 71 and second channel 72 are according to actually required Cooling water flows through speed and is designed.In the present embodiment, first passage 71 and the cooling water needed for second channel 72 are flowed through Speed is respectively less than the speed that cooling water is flowed into from water inlet 4, while the speed flowed out less than cooling water from delivery port 5;It is used as one The cross section of individual example, first passage 71 and second channel 72 is circle, a diameter of 5mm~20mm, preferably 10mm or 15mm。
The sealing flange with cooling circuit of present embodiment, by interlayer 7 by the hollow cavity inside sealing flange It is divided into upper and lower two independent cavitys, then the passage of about two connections is set on interlayer 7, connects upper and lower cavity, Cooling water circulation between upper and lower cavity by two passages, while being cooling water water conservancy diversion by three baffle plates, finally makes Cooling water is flowed out by outlet pipe.Present embodiment forms new cooling circuit by said structure, simple in construction;Carrying out During cooling, cooling water can be circulated through the everywhere in sealing flange, in the absence of cooling dead angle, be imitated with good cooling Really.
As shown in Figure 10~Figure 15, the utility model second embodiment is related to a kind of Sealing Method with cooling circuit It is blue.Present embodiment is roughly the same with the utility model first embodiment, and difference part is essentially consisted in:Present embodiment only makes With first baffle 61 and second baffle 62, first passage 71 is only set on interlayer 7, water inlet 4 and delivery port 5 are in first baffle 61 With the same side of second baffle 62, water inlet 4 is located at the lower section of interlayer 7.Specifically:
Please continue to refer to Figure 10~Figure 15, the sealing flange with cooling circuit of present embodiment at least includes:Bottom 1, side wall 2, edge 3, interlayer 7, water inlet 4, delivery port 5, first baffle 61, and second baffle 62.Side wall 2 is looped around bottom Around 1, edge 3 is looped around around side wall 2, and the center of bottom 1 offers a connecting hole 11, for connecting outside zero Part;Bottom 1, side wall 2 and edge 3 are hollow structure, and are sequentially communicated to form hollow cavity.
As shown in Figure 10, Figure 12, Figure 13 and Figure 14, interlayer 7 is located in side wall 2, hollow cavity is divided into separate Upper cavity and lower chamber, and first passage 71 is offered on interlayer 7, is connected between upper cavity and lower chamber by first passage 71 It is logical.Water inlet 4 and delivery port 5 are located on the outer surface of side wall 2, and the position of water inlet 4 is less than interlayer 7, and the position of delivery port 5 is high In interlayer 7, water inlet 4 and delivery port 5 can be projected on the different radii of bottom 1, can also be projected in the same half of bottom 1 On footpath, i.e. water inlet 4 and delivery port 5 can be arranged on the different vertical line of side wall 2, can also be arranged on the same of side wall 2 On vertical line.In the present embodiment, water inlet 4 and delivery port 5 are projected on the different radii of bottom 1, i.e., water inlet 4 and go out The mouth of a river 5 is arranged on the different vertical line of side wall 2.
As shown in Figure 10 and Figure 11, first baffle 61 is located in upper cavity, and connection interlayer 7 and the top of side wall 2, second gear Plate 62 is located in lower chamber, and connection interlayer 7 and the bottom of bottom 1.Wherein, first baffle 61 and second baffle 62 are located at Sealing Method Blue the same side, as shown in Figure 10, first baffle 61 and second baffle 62 are respectively positioned on the right side of sealing flange.And the He of water inlet 4 The position of delivery port 5 is in the both sides of first baffle 61 and second baffle 62, i.e. water inlet 4 with the position distribution of first passage 71 The side of first baffle 61 and second baffle 62 is in the position of delivery port 5, the position of first passage 71 is in first gear The opposite side of plate 61 and second baffle 62.Second baffle 62 in lower chamber can with the first baffle 61 in upper cavity Be projected in bottom 1 it is same diametrically, on the different-diameter that bottom 1 can also be projected in.In the present embodiment, under being located at Second baffle 62 in cavity and the first baffle 61 in upper cavity be projected in bottom 1 it is same diametrically.
In addition, the use of interlayer 7 and sealing flange identical material, generally use stainless steel, it is of course also possible to use Other materials.The position height that interlayer 7 is located in side wall 2 is equal to or higher than the height of bottom 1, i.e. interlayer 7 and is located in side wall 2 Position is concordant with the position on the top of bottom 1, or higher than the position on the top of bottom 1.And part second baffle 62 is located at side wall 2 It is interior, the lower surface of interlayer 6 and the bottom of side wall 2 are connected, other parts second baffle 62 is located in bottom 1, is connected to bottom 1 Between top and bottom, to ensure that follow-up cooling water can detour from second baffle 62, it is ensured that cooling water flows through the whole face of bottom 1 Product, no cooling dead angle is present, with good cooling effect.As shown in figure 11, in the present embodiment, interlayer 7 is located at side wall 2 Interior position is concordant with the position on the top of bottom 1, and the length of the part second baffle 62 in bottom 1 is equal to bottom 1 1/2 diameter length.Further, since sealing flange is in high temperature environments, side wall 2 and bottom 1 are easy to deform upon, and in turn result in Size dislocation is even cracked around weld seam, cooling water is penetrated into hollow cavity, chamber vivo environment is impacted, every The presence of layer 7 also acts as the effect of supporting side walls 2, significantly except playing a part of separating hollow cavity to form cooling circuit Reduce the possibility that side wall 2 is deformed upon.
As shown in figure 14, the sealing flange with cooling circuit of present embodiment also includes:Outlet pipe 8, outlet pipe 8 is set Put in upper cavity, the bottom connection delivery port 5 of outlet pipe 8, the tip height of outlet pipe 8 is higher than the bottom at edge 3.In this reality Apply in mode, outlet pipe 8 can be vertically arranged in upper cavity, can also be obliquely installed.It is used as a preferred scheme, water outlet The top of pipe 8 has an inclined plane, and the tip height of inclined plane reaches the top of side wall 2, and the diameter of outlet pipe 8 is less than side wall 2 Angle α between thickness, the perpendicular pipeline of inclined plane of outlet pipe 8 is more than or equal to 60 ° and less than 90 °, preferably α=70 °, 80 ° or 85 °.More excellent, the thickness on the top of edge 3 is more than the thickness on the top of side wall 2, the height of the inclined plane bottom of outlet pipe 8 Degree is higher than the lower surface on the top of edge 3, and it is noted that because the height of the inclined plane bottom of outlet pipe 8 is higher than edge 3 The lower surface on top, and thickness of the diameter less than side wall 2 of outlet pipe 8, ensure that follow-up cooling water enters the whole of edge 3 In individual cavity, it is ensured that edge 3 is cooled to, no cooling dead angle is present, and then ensure that the temperature of whole sealing flange is entered one Step reduction.
As shown in figure 13, in the present embodiment, first passage 71 uses pipe design, i.e. first passage 71 to be by pipeline The passage of composition, the tip height of first passage 71 is higher than the bottom at edge 3, the cross section of first passage 71 is circle, kidney-shaped, Square or irregular shape.As a preferred scheme, the tip height of first passage 71 is higher than the following table on the top of edge 3 Face.In addition, the top of first passage 71 can also have an inclined plane, the tip height of inclined plane reaches the top of side wall 2, the Angle between the perpendicular pipeline of inclined plane of one passage 71 is more than or equal to 60 °, preferably 70 °, 80 ° or 85 °.More excellent, The thickness on the top of edge 3 is more than the thickness on the top of side wall 2, and the height of the inclined plane bottom of first passage 71 is higher than the top of edge 3 Lower surface.
As shown in figure 15 (Figure 15 dot-dashed lines represent cooling water flow through route), when being cooled down to sealing flange, Cooling water enters the side of lower chamber from water inlet 4, bypasses the opposite side for entering lower chamber after second baffle 62, and gradually build up In lower chamber;When water level in lower chamber exceedes the height of lower chamber, cooling water enters from the bottom of first passage 71, top End outflow, the opposite side flowed down hence into the side of upper cavity in the stop of first baffle 61 to upper cavity, and gradually build up In upper cavity;Water level in upper cavity higher than the inclined plane of outlet pipe 8 bottom when, cooling water is by outlet pipe 8 from going out The mouth of a river 5 is flowed out, so as to realize the circulating cooling of sealing flange.
It is noted that the shapes and sizes of the cross section of first passage 71 flow through speed according to actually required cooling water Degree is designed.In the present embodiment, the cooling water needed for first passage 71 flows through speed and is respectively less than cooling water from water inlet 4 The speed of inflow, while the speed flowed out less than cooling water from delivery port 5;It is used as an example, the cross section of first passage 71 For circle, preferably a diameter of 5mm~20mm, 10mm or 15mm.
The sealing flange with cooling circuit of present embodiment, by interlayer 7 by the hollow cavity inside sealing flange It is divided into upper and lower two independent cavitys, then the passage of about one connection is set on interlayer 7, connects upper and lower cavity, Cooling water is circulated by the passage between upper and lower cavity, while being cooling water water conservancy diversion by two baffle plates, finally makes cooling water Flowed out by outlet pipe.Present embodiment forms new cooling circuit by said structure;When being cooled down, cooling water can To be circulated through the everywhere in sealing flange, in the absence of cooling dead angle, with good cooling effect.
In summary, the sealing flange of the present utility model with cooling circuit, has the advantages that:This practicality is new Type forms new cooling circuit by setting up interlayer, multiple baffle plates and outlet pipe, simple in construction;When being cooled down, cooling Water can be circulated through the everywhere in sealing flange, in the absence of cooling dead angle, substantially improve cooling effect.So, this reality Effectively overcome various shortcoming of the prior art with new and had high industrial utilization.
Above-described embodiment only illustrative principle of the present utility model and its effect are new not for this practicality is limited Type.Any person skilled in the art can all be carried out without prejudice under spirit and scope of the present utility model to above-described embodiment Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the essence disclosed in the utility model God and all equivalent modifications completed under technological thought or change, should be covered by claim of the present utility model.

Claims (16)

1. a kind of sealing flange with cooling circuit, it is characterised in that the sealing flange with cooling circuit is at least wrapped Include:Bottom, side wall, edge, interlayer, water inlet, delivery port, first baffle, second baffle and third baffle;
The bottom, the side wall and the edge are hollow structure, and are sequentially communicated to form hollow cavity;
The interlayer is located in the side wall, and the hollow cavity is divided into separate upper cavity and lower chamber, and institute Interlayer is stated provided with first passage and second channel, the water inlet and the delivery port to be located on the outer surface of the side wall, And the position of the water inlet and the delivery port is higher than the interlayer;Wherein, the first passage and the second channel with The water inlet and the delivery port are located relatively at the both sides of the sealing flange;
The first baffle and the second baffle are located in the upper cavity, and connect the interlayer and the side wall top respectively End, the position of the first baffle is between the water inlet and the delivery port, and the position of the second baffle is in institute State between first passage and the second channel;The third baffle is located in the lower chamber, and connects the interlayer and institute Bottom bottom is stated, the position of the third baffle is between the first passage and the second channel.
2. the sealing flange according to claim 1 with cooling circuit, it is characterised in that described with cooling circuit Sealing flange also includes:Outlet pipe, the outlet pipe is arranged in the upper cavity, is gone out described in the bottom connection of the outlet pipe The mouth of a river, the tip height of the outlet pipe is higher than the bottom at the edge.
3. the sealing flange according to claim 2 with cooling circuit, it is characterised in that the top tool of the outlet pipe There is an inclined plane, the tip height of the inclined plane reaches the top of the side wall, and the inclined plane of the outlet pipe is perpendicular Angle between pipeline is more than or equal to 60 °.
4. the sealing flange according to claim 3 with cooling circuit, it is characterised in that the thickness on the edge top More than the thickness on the side wall top, the height of the inclined plane bottom of the outlet pipe is higher than the lower surface on the edge top.
5. the sealing flange according to claim 1 with cooling circuit, it is characterised in that the first passage is using pipe Road is designed, and the tip height of the first passage is higher than the bottom at the edge, and the cross section of the first passage is circular, waist Shape, square or irregular shape.
6. the sealing flange according to claim 5 with cooling circuit, it is characterised in that the top of the first passage Highly it is higher than the lower surface on the edge top.
7. the sealing flange according to claim 5 with cooling circuit, it is characterised in that the top of the first passage With an inclined plane, the top of the inclined plane connects the top of the side wall, and the inclined plane of the first passage is perpendicular Angle between pipeline is more than or equal to 60 °.
8. the sealing flange according to claim 7 with cooling circuit, it is characterised in that the thickness on the edge top More than the thickness on the side wall top, the height of the inclined plane bottom of the first passage is higher than the following table on the edge top Face.
9. the sealing flange according to claim 1 with cooling circuit, it is characterised in that the second channel is using logical Hole is designed or pipe design, and the cross section of the second channel is circle, kidney-shaped, square or irregular shape.
10. the sealing flange with cooling circuit according to any one of claim 1~9, it is characterised in that the interlayer Position height in the side wall is equal to or higher than the height of the bottom, and a part for the third baffle is positioned at described In the wall of side, another part is located in the bottom, and the length of the part third baffle in the bottom is more than the bottom 1/4 diameter length and less than the bottom diameter length.
11. the sealing flange with cooling circuit according to any one of claim 1~9, it is characterised in that described first Baffle plate and the second baffle are symmetricly set on the both sides in the upper cavity, the third baffle in the lower chamber With the second baffle in the upper cavity be projected in the bottom it is same diametrically.
12. a kind of sealing flange with cooling circuit, it is characterised in that the sealing flange with cooling circuit is at least wrapped Include:Bottom, side wall, edge, interlayer, water inlet, delivery port, first baffle, and second baffle;
The bottom, the side wall and the edge are hollow structure, and are sequentially communicated to form hollow cavity;
The interlayer is located in the side wall, and the hollow cavity is divided into separate upper cavity and lower chamber, and institute State and first passage is offered on interlayer, the water inlet and the delivery port are located on the outer surface of the side wall, the water inlet The position of mouth is less than the interlayer, and the position of the delivery port is higher than the interlayer;
The first baffle is located in the upper cavity, and connects the interlayer and the side wall top, the second baffle position In in the lower chamber, and connect the interlayer and the bottom bottom;Wherein, the first baffle and second baffle position The first baffle is in the position of the same side of the sealing flange, and the water inlet and the delivery port and described The side of second baffle, the position of the first passage is in the opposite side of the first baffle and the second baffle.
13. the sealing flange according to claim 12 with cooling circuit, it is characterised in that described that there is cooling circuit Sealing flange also include:Outlet pipe, the outlet pipe is arranged in the upper cavity, and the bottom connection of the outlet pipe is described Delivery port, the tip height of the outlet pipe is higher than the bottom at the edge.
14. the sealing flange according to claim 13 with cooling circuit, it is characterised in that the top of the outlet pipe With an inclined plane, the top of the inclined plane connects the top of the side wall, the perpendicular pipe of inclined plane of the outlet pipe Angle between road is more than or equal to 60 °.
15. the sealing flange according to claim 14 with cooling circuit, it is characterised in that the thickness on the edge top Degree is more than the thickness on the side wall top, following table of the height higher than the edge top of the inclined plane bottom of the outlet pipe Face.
16. the sealing flange according to claim 12 with cooling circuit, it is characterised in that the first passage is used Pipe design, the tip height of the first passage is higher than the lower surface on the edge top, the cross section of the first passage For circle, kidney-shaped, square or irregular shape.
CN201621389991.8U 2016-12-16 2016-12-16 A kind of sealing flange with cooling circuit Active CN206439552U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106678478A (en) * 2016-12-16 2017-05-17 镓特半导体科技(上海)有限公司 Sealing flange with cooling loop

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106678478A (en) * 2016-12-16 2017-05-17 镓特半导体科技(上海)有限公司 Sealing flange with cooling loop

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