CN206428325U - Vacuum chamber observation window - Google Patents
Vacuum chamber observation window Download PDFInfo
- Publication number
- CN206428325U CN206428325U CN201720129943.3U CN201720129943U CN206428325U CN 206428325 U CN206428325 U CN 206428325U CN 201720129943 U CN201720129943 U CN 201720129943U CN 206428325 U CN206428325 U CN 206428325U
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- China
- Prior art keywords
- counterbore
- flange
- observation window
- vacuum chamber
- sealing ring
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Abstract
The utility model discloses a kind of vacuum chamber observation window, it is equipped with including the chamber welded flange with pore and with the chamber welded flange and has the locking flange of peep hole, and window body component, wherein, pore and peep hole coaxial line, pore one end relative with locking flange has the first counterbore, and peep hole one end relative with chamber welded flange has the second counterbore；Window body component includes the sealing ring being located in the first counterbore, and transparent window film；Wherein, the first counterbore is included in transparent window film part, partly includes the second counterbore, and is positioned partially at outside the first counterbore and the second counterbore, forms support, and causes chamber welded flange to leave adjustment gap with locking method your beautiful writings.According to vacuum observation window of the present utility model under conditions of with compared with high sealing performance, with preferable later maintenance.
Description
Technical field
The utility model is related to a kind of vacuum chamber observation window.
Background technology
Vacuum observation window is the sight formed with welding adapter, fast acting flange, CF flanges come sealing-in plane parallel windows
Examine window.Vacuum chamber observation window species is various, according to different using object, divide into for example without magnetic sapphire vacuum observation window, swashs
Light vacuum observation window, according to basic structure, divides into such as recess-type vacuum observation window, lenticular vacuum observation window.This practicality
New involved vacuum chamber observation window is used for MOCVD（Metal-organic Chemical Vapor Deposition, i.e., it is golden
Belong to organic compound chemical gaseous phase deposition, belong to vapor phase epitaxial growth technology）Equipment, is lenticular vacuum observation window.
Routinely, such as Chinese patent literature CN201729873U, the observation window disclosed in it belongs to lenticular vacuum and seen
Window is examined, it directly props up sealing ring in the end counterbore of metal welded flange using sheet glass, then reuses locking flange
Locking, because sheet glass needs to bring into counterbore completely, and is not easy to come off, the deflection designed in advance of sealing ring is good, locks
Tight flange realizes and sheet glass is compressed that the thrust to sealing ring can not be adjusted with metal welded flange by the cooperation of end face,
Sealing property is relatively poor.In addition, with the aging of sealing ring, sealability declines, but locking flange can not adjust thrust.
To improve sealability, the observation window disclosed in Chinese patent literature CN204434724U, using a kind of deeper
Groove structure, light-passing board is installed by push rod in groove, it is ensured that light-passing board can not come off.Its light-passing board need not be with master
Equipment is fixed, and adds the scope of activities of light-passing board.But its activity also implies that sealing problem, in mechanical field, move
Sealed design difficulty is generally all higher than the design difficulty of static seal, and the sealing structure of dynamic sealing is also easier to damage, and changes
Yan Zhi, its structure is relatively complicated, later maintenance relative difficulty.
The content of the invention
Therefore, the purpose of this utility model is to provide one kind under conditions of with compared with high sealing performance, with preferable
The vacuum chamber observation window of later maintenance.
According to embodiment of the present utility model there is provided a kind of vacuum chamber observation window, including the chamber welding with pore
Flange and the locking flange that peep hole is equipped with and had with the chamber welded flange, and window body component, wherein, pore and observation
Hole coaxial line, pore one end relative with locking flange has the first counterbore, peep hole one end relative with chamber welded flange
With the second counterbore；
Window body component includes the sealing ring being located in the first counterbore, and transparent window film；
Wherein, the first counterbore is included in transparent window film part, partly includes second counterbore, and is positioned partially at first and sinks
Outside hole and the second counterbore, support is formed, and causes chamber welded flange to leave adjustment gap with locking method your beautiful writings.
Above-mentioned vacuum chamber observation window, alternatively, the thickness in the adjustment gap for transparent window film thickness 1/5th ~
1/3rd.
Alternatively, an annular gasket is also included in the second counterbore, annular gasket configuration is in the second counterbore bottom hole and thoroughly
Between bright window.
Alternatively, matching somebody with somebody between the annular gasket and the second counterbore hole wall is combined into interference fit.
Alternatively, the sealing ring uses section for circular sealing ring.
Alternatively, it is formed with annular for housing sealing ring in the first counterbore axial component in the bottom hole of the first counterbore
Groove.
Alternatively, the groove depth of annular groove is not more than sealing ring cross sectional radii, and not less than 3/4ths of sealing ring radius.
Alternatively, the internal diameter of peep hole is less than pore internal diameter.
According to embodiment of the present utility model, different from conventional observation window, the ring flange of chamber welded flange and locking
The structure that flange is tightly engaged into, in this configuration, the deformation of sealing ring are engaged by chamber welded flange with locking flange itself
The limitation in face.It is not present between the ring flange and locking flange of embodiment middle chamber welded flange of the present utility model direct
Engagement, but leave adjustment gap, so as to by adjust flange connect bolt group or screw group realize required for
Pretension.When sealing ring aging, can further pretension, and reach required sealing engagement power, can so that comparatively
The service life of hermetic unit is improved, and its adjustment is mainly the adjustment of bolt group or screw group pretightning force, later maintenance is non-
It is often convenient.
Brief description of the drawings
Fig. 1 is the explosive view of vacuum chamber observation window in an embodiment.
Fig. 2 cuts open structural representation for vacuum chamber in an embodiment with the master of observation window installation diagram.
In figure：1. chamber welded flange, 2. sealing rings, 3. quartz glass plates, 4. tetrafluoro packing rings, 5. locking flanges, 6. bullets
Spring packing ring, 7. screws.
Embodiment
Routinely, assembling master of the quartz glass plate 3 on vacuum chamber observation window in vacuum chamber observation window, such as Fig. 1
If the restraining structure produced by being connected using flange, it is heavy that the restraining structure is mainly reflected in that chamber welded flange 1 formed
In hole.
Well known, flange connection is typically all fastener with bolt or screw 7, and for example screw 7 needs certain
Distribution, reliably to be fastened, in addition, also using the spring washer 6 shown in figure, to provide locking.In this regard, belonging to machine
The conventional structure in tool field, will not be repeated here.
As illustrated in fig. 1 and 2, it possesses a pipeline section and a ring flange, wherein ring flange to chamber welded flange 1（It is independent below
Ring flange is designated as, in addition, the locking flange 5 shown in figure is also ring flange, to be distinguish between, the locking independent table of flange is used
Show）One end of pipeline section is welded on, the end is one end that locking flange 5 to that indicated in the drawings is connected.The other end of pipeline section leads to
Often it is welded in the default installation bore of such as vacuum chamber.
It should be appreciated that example is related to the description of ring flange as the aforementioned, its term name is only used between technical characteristic
Differentiation nominally, has specific structure without limiting it.
In general, ring flange is combined closely with locking flange 5, in other words, once design structure is determined, locking method
The axially adjustable amount of orchid 5 and ring flange is 0, and can not be as needed, further pretension is realized, so as to adjust sealing ring 2
Sealability.
Embodiment as illustrated in fig. 1 and 2, the pipeline section inner tube of chamber welded flange 1 and the inner ring formation pore of ring flange, be
The observation passage of observation window, wherein inner round portion is actual yet forms both counter bore structure, for the assembling of window body component.
And for locking flange 5, then its inner ring is peep hole, operating personnel can from locking flange 5 figure in right side to
Spied upon in vacuum chamber.
Routinely, peep hole and pore are coaxial lines, it is to be understood that, coaxial line here is ideal conditions, typically
For, in mechanical field, it is only necessary to ensure that both meet the axiality in technical requirements, belong to assembly precision problem,
This is repeated no more.
Prior art is different from, locking flange 5 also is provided with counterbore, is designated as the second counterbore, the second counterbore is arranged on locking method
Blue 5 one end relative with chamber welded flange 1.
For window body component, its core is the quartz glass plate 3 for example shown in figure, is a kind of transparent window film, simple below
Referred to as eyeglass.
The general structure of eyeglass is planar lens structure, and is typically round planar lens structure, adaptation pore and sight
Examine the borehole structure in hole.
Comparatively, there is the first counterbore to belong to relatively conventional design for pore one end relative with locking flange 5, existing
Have is used to accommodate the sealing structure required for eyeglass, and eyeglass assembling in structure.
In the prior art, ring flange and lock flange 5 corresponding end-faces requirement be brought into close contact, then by such as Fig. 1 with
Screw 7 shown in 2 is fastened, and its object is to improve the reliability of flange connection.But also because this reliability so that
Do not have adjustment space between two ring flanges of flange connection.
Have considering for reliability and adjustment space concurrently, using two counterbores, in other words to the constraint of eyeglass using two ends about
The structure of beam, to improve the reliability of assembling, does not have directly to engage produced dress to offset between ring flange and locking flange 5
With integrity problem, so that, still there is relatively reliable assembling on the whole.
Sealing ring is then still located in the first counterbore, by eyeglass crimp, produces sealing engagement face, the sealing engagement face
Influenceed by the pretightning force of the screw 7 shown in figure.And pretightning force obviously no longer by ring flange and locks the conflict between flange 5, and
With in the stepless changing ability less than maximum pretightning force scope.
Ensured, assembling structure as shown in Figure 2, adjustment gap is left between ring flange and locking flange 5, so that,
The adjustment gap determines the adjustment space of the pretightning force of screw 7, makes the maintainability in its later stage more preferably.
In general, the cross section diameter of sealing ring 2, or the thickness often said, quartz glass plate 3 to that indicated in the drawings is substantially
It is equal, typically using super heated rubber（It is related to the working environment in vacuum chamber, it will not be repeated here）, with certain compression
Than thereby determining that the value in the adjustment gap, it is preferable that sealing ring is 1st/1/5th ~ tri- of lens thickness.
Adjust unsuitable excessive, the excessive adjustment gap in gap so that ring flange and the distance between locking flange 5 are excessive,
And locking flange 5 is belonged to a kind of overhanging state based on shank of screw, it is unfavorable for ensureing the reliability of assembling.
In addition, why using screw, it is that the gap between screw and screw hole is smaller, is conducive to improving flange connection
Reliability.
Relatively, if using bolt, it will be appreciated that bolt is typically realized by attaching nut and fastened, to be conducive to spiral shell
Wearing for bolt, needs to leave gap between bolt and bolt hole, and the gap is under the conditions of for example shaking, easily biasing, and causes
Such as axiality between ring flange and locking flange 5 can not ensure, accordingly, it would be desirable to close between ring flange and locking flange 5
With reference to the reliability for utilizing frictional force realization to assemble.
And in some implementations, in addition it is also necessary to offer type face is engaged, to improve the axiality between ring flange and locking flange 5,
And keep the axiality.
In the embodiment shown in Fig. 1 and Fig. 2, due to not engaged directly between ring flange and locking flange 5, bolt
With screw 7 under this structural condition it is not interchangeable.
Further, in the structure shown in Fig. 1 and Fig. 2, a tetrafluoro packing ring 6 is additionally provided, an annular gasket is constituted,
The annular gasket is configured between the second counterbore bottom hole and eyeglass, to provide the axially adjustable of assembling.
Further, in order to improve matching somebody with somebody with being combined into interference between the reliability of assembling, the counterbore hole wall of tetrafluoro packing ring 6 and second
Close.
Further, in order to improve the reliability of assembling, it is formed with the bottom hole of the first counterbore in the first counterbore axle
To the annular groove for partly housing sealing ring 2.
The cooperation of annular groove and sealing ring 2 also add the area in sealing engagement face, improve sealability.
Further, the groove depth of annular groove is not more than sealing ring cross sectional radii, and not less than sealing ring radius four/
Three, it is to be understood that groove depth is unsuitable excessive, otherwise can influence the compression ratio of sealing ring 2, it was not easy to shallow, and otherwise can influences
The reliability of assembling.
Still consider from the reliability of assembling, the internal diameter of peep hole is less than pore internal diameter, the even internal diameter less than pore,
But due to perspective effect, do not interfere with observation.
Claims (8)
1. a kind of vacuum chamber observation window, including the chamber welded flange with pore and it is equipped with and has with the chamber welded flange
There are the locking flange of peep hole, and window body component, wherein, pore and peep hole coaxial line, it is characterised in that pore and locking
The relative one end of flange has the first counterbore, and peep hole one end relative with chamber welded flange has the second counterbore；
Window body component includes the sealing ring being located in the first counterbore, and transparent window film；
Wherein, the first counterbore is included in transparent window film part, partly includes the second counterbore, and be positioned partially at first counterbore and
Outside second counterbore, support is formed, and causes chamber welded flange to leave adjustment gap with locking method your beautiful writings.
2. vacuum chamber observation window according to claim 1, it is characterised in that the thickness in the adjustment gap is transparency window
//5th ~ tri- of piece thickness.
3. vacuum chamber observation window according to claim 1 or 2, it is characterised in that also include a ring in the second counterbore
Shape pad, the annular gasket is configured between the second counterbore bottom hole and transparent window film.
4. vacuum chamber observation window according to claim 3, it is characterised in that the annular gasket and the second counterbore hole wall
Between with being combined into interference fit.
5. vacuum chamber observation window according to claim 1 or 2, it is characterised in that the sealing ring uses section for circle
The sealing ring of shape.
6. vacuum chamber observation window according to claim 5, it is characterised in that being formed with the bottom hole of the first counterbore is used for
The annular groove of sealing ring is housed in the first counterbore axial component.
7. vacuum chamber observation window according to claim 6, it is characterised in that the groove depth of annular groove is not more than sealing ring and broken
Radius surface, and not less than 3/4ths of sealing ring radius.
8. vacuum chamber observation window according to claim 1 or 2, it is characterised in that the internal diameter of peep hole is less than in pore
Footpath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720129943.3U CN206428325U (en) | 2017-02-14 | 2017-02-14 | Vacuum chamber observation window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720129943.3U CN206428325U (en) | 2017-02-14 | 2017-02-14 | Vacuum chamber observation window |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206428325U true CN206428325U (en) | 2017-08-22 |
Family
ID=59591235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720129943.3U Active CN206428325U (en) | 2017-02-14 | 2017-02-14 | Vacuum chamber observation window |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206428325U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561000A (en) * | 2017-10-18 | 2018-01-09 | 南方电网科学研究院有限责任公司 | A kind of sealing ring ageing test apparatus |
| CN110119011A (en) * | 2018-02-07 | 2019-08-13 | 深圳市创鑫激光股份有限公司 | Laser lens and the laser export head with the laser lens, laser |
| CN113862788A (en) * | 2021-08-31 | 2021-12-31 | 北京北方华创微电子装备有限公司 | Semiconductor device |
| US11670490B2 (en) | 2017-09-29 | 2023-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit fabrication system with adjustable gas injector |
-
2017
- 2017-02-14 CN CN201720129943.3U patent/CN206428325U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11670490B2 (en) | 2017-09-29 | 2023-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit fabrication system with adjustable gas injector |
| CN107561000A (en) * | 2017-10-18 | 2018-01-09 | 南方电网科学研究院有限责任公司 | A kind of sealing ring ageing test apparatus |
| CN107561000B (en) * | 2017-10-18 | 2023-11-17 | 南方电网科学研究院有限责任公司 | Ageing test device for sealing ring |
| CN110119011A (en) * | 2018-02-07 | 2019-08-13 | 深圳市创鑫激光股份有限公司 | Laser lens and the laser export head with the laser lens, laser |
| CN113862788A (en) * | 2021-08-31 | 2021-12-31 | 北京北方华创微电子装备有限公司 | Semiconductor device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 250119 area a, building 13, Sino German Industrial Park, 8 Zidong Avenue, Tianqiao District, Jinan City, Shandong Province Patentee after: Shandong Liguan microelectronics equipment Co., Ltd Address before: 250119 Shandong Province Flyover District of Ji'nan City Shun Hing Sangzi Town Road No. 66 Ji'nan new materials industry science and Technology Park Building 1, 1 floor West Patentee before: JINAN LIGUAN ELECTRONIC TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |