CN206421409U - The sensing unit of capacitance type sensor - Google Patents

Abstract

The utility model provides a kind of sensing unit of capacitance type sensor.The sensing unit of the capacitance type sensor, including：Sensing electrode, for being capacitively coupled to target object；First controlling switch, is connected with the sensing electrode, for controlling whether that transmission pumping signal gives sensing electrode execution sensing operation；With the second controlling switch, it is connected with the sensing electrode, for controlling whether the first reference signal of transmission to the sensing electrode；Wherein, first controlling switch is turned on the second controlling switch timesharing.

Description

The sensing unit of capacitance type sensor

Technical field

The utility model is related to field of sensing technologies, more particularly to a kind of capacitance type sensor sensing unit.

Background technology

With the development of society, increasing electronic equipment is (such as：Mobile phone, tablet personal computer, Wearable, Yi Jizhi The various intelligent artifacts such as energy household) typically one or more sensing devices can be all set.The sensing device includes sensing such as and used The touch sensing device of family touch operation, the biological information sensing device for sensing biological information of human body etc..At present, touch sensing Device, biological information sensing device etc. are more to perform sensing operation using capacitance-type sensing device.

By taking biological information sensing device as an example, generally, the biological information sensing device includes multiple in array arrangement Sensing electrode and the drive circuit that is connected with each sensing electrode.The drive circuit typically hold line by line by driving sensing electrode Row biological information is sensed.

So, when each drive part sensing electrode of the drive circuit performs biological information sensing, remaining sensing electrode On voltage because of situations such as signal interference etc. influence can exist it is inconsistent, therefore to perform biological information sensing sensing electricity The parasitic effects of pole are different and are unknown, and biological information sensing device is of a relatively high to sensing required precision, from without Beneficial to the accurate detection of biological information.

Utility model content

The utility model is intended at least solve one of technical problem present in prior art.Therefore, the utility model is needed A kind of sensing unit of capacitance type sensor is provided.

The utility model provides a kind of sensing unit of capacitance type sensor, including：

Sensing electrode, for being capacitively coupled to target object；

First controlling switch, is connected with the sensing electrode, for controlling whether transmission pumping signal to the sensing electricity Pole performs sensing operation；With

Second controlling switch, is connected with the sensing electrode, for controlling whether the first reference signal of transmission to the sense Survey electrode；

Wherein, first controlling switch is turned on the second controlling switch timesharing.

Alternatively, the sensing unit includes one first controlling switch and one second controlling switch, or, the sensing unit Including 2 first controlling switches being connected in parallel and 2 second controlling switches being connected in parallel.

Alternatively, first controlling switch and second controlling switch are thin film transistor switch.

Alternatively, the capacitance type sensor includes the first scan line, the second scan line, the first data wire and the second number According to line, each thin film transistor (TFT) includes grid, source electrode and drain electrode, wherein, the grid connection first of first controlling switch is scanned Line, the source electrode of first controlling switch connects the first data wire, the drain electrode connection sensing electricity of first controlling switch Pole, the grid of second controlling switch connects the second scan line, and the source electrode of second controlling switch connects the second data wire, The drain electrode of second controlling switch connects the sensing electrode.

Alternatively, the source electrode of first controlling switch is connected with the source electrode of second controlling switch, and passes through one Via is connected with the sensing electrode.

Alternatively, the capacitance type sensor includes insulated substrate, and the sensing electrode is arranged on the insulated substrate, First controlling switch and second controlling switch are arranged in the sensing electrode, sensing electrode covering described the One controlling switch and second controlling switch.

Alternatively, the insulated substrate includes first surface and the second surface relative with first surface, the sensing electricity Pole, first controlling switch and second controlling switch are arranged at the second surface side, and the sensing electrode is used In with contacting or carrying out Capacitance Coupled close to the target object of the first surface.

Alternatively, the insulated substrate is glass substrate, first scan line, the second scan line, the first data wire, the Two data wires, first controlling switch and second controlling switch are arranged at the sensing electrode back to described The side of glass substrate.

Alternatively, the sensing signal that the sensing electrode is sensed further is carried out defeated by first controlling switch Go out, to perform self-capacitance sensing operation.

Alternatively, the sensing unit of the capacitance type sensor is the sensing unit of fingerprint sensor.

Because the sensing unit of capacitance type sensor of the present utility model further comprises the first controlling switch and the second control System switch, first controlling switch is turned on second controlling switch for timesharing, wherein, first controlling switch is used In controlling whether that transmitting pumping signal gives sensing electrode execution sensing operation, second controlling switch is used to control whether transmission First reference signal is to sensing electrode, so as to improve sensing precision.

Brief description of the drawings

Fig. 1 is the electrical block diagram of the embodiment of the utility model biological information sensing device one.

Fig. 2 is the top view of the part-structure of biological information sensing device shown in Fig. 1.

Fig. 3 illustrates for the circuit structure of an embodiment of the data selection circuit of biological information sensing device shown in Fig. 1 Figure.

Fig. 4 is the structural representation of another embodiment of the utility model biological information sensing device.

Fig. 5 is the cut-away section structural representation of biological information sensing device shown in Fig. 4.

Fig. 6 is the use state figure of biological information sensing device shown in Fig. 4.

Fig. 7 is the preparation method flow chart of an embodiment of biometric information sensor shown in Fig. 3.

Fig. 8 is the method flow diagram for making the first controlling switch and the second controlling switch.

Fig. 9 is the part-structure schematic diagram of the another embodiment of the utility model biological information sensing device.

Figure 10 is the top view of another embodiment of the sensing unit of the utility model biological information sensing device.

Figure 11 is the part-structure schematic diagram of the another embodiment of the utility model biological information sensing device.

Figure 12 is the structural representation of an embodiment of the utility model electronic equipment.

Figure 13 is the circuit structure block diagram of an embodiment of electronic equipment shown in Figure 12.

Embodiment

It is understandable to enable above-mentioned purpose of the present utility model, feature and advantage to become apparent, below in conjunction with the accompanying drawings to this The specific embodiment of utility model is described in detail.However, example embodiment can be implemented in a variety of forms, and should not be by It is considered limited to embodiment set forth herein；On the contrary, these embodiments are provided so that the utility model will fully and completely, And the design of example embodiment is comprehensively conveyed into those skilled in the art.It is for convenience or clear, it may exaggerate, save Omit or be schematically illustrated in every layer of thickness and size and the quantity for schematically illustrating related elements shown in accompanying drawing.Separately Outside, the size of element not exclusively reflects that actual size, and the quantity of related elements not exclusively reflect actual quantity.Because accompanying drawing The reason such as of different sizes, in different drawings shown same or similar or related elements quantity there are not consistent feelings Condition.Identical reference represents same or similar structure in figure.So, it is necessary to illustrate, in order that obtaining label has Regular and logicality etc., in some not be the same as Examples, same or similar element or structure employ different accompanying drawings Mark, illustrates that those skilled in the art is can directly or indirectly to judge to learn according to the relevance of technology and related text.

In addition, described feature, structure can be combined in one or more embodiments in any suitable manner. Embodiment of the present utility model is fully understood so as to provide there is provided many details in the following description.However, One of ordinary skill in the art would recognize that, without one or more in the specific detail, or using other structures, constituent element Deng the technical solution of the utility model can also be put into practice.In other cases, it is not shown in detail or describes known features or behaviour Make to avoid fuzzy the utility model.

Further, following term is exemplary, it is not intended that limited in any way.Read the application it Afterwards, it would be recognized by those skilled in the art that the statement of these terms suitable for technology, method, physical component and system (no matter mesh It is preceding whether to know), including those skilled in the art are inferred to or its educible extension after reading the application.

In description of the present utility model, it is to be understood that：" multiple " to include two and two or more, " a plurality of " includes Two and more than two, unless the utility model separately has clearly specific limit." at least two row " are arranged including two row, three, four arrange, The various suitable situations that five row etc. gradually increase.In addition, " first ", " second " that occurs in each element title and signal name It is not to limit the sequencing that element or signal occur Deng word, but is named for convenience of element and signal, it is clear to distinguish Each element and each signal so that description is more succinct.

Need further exist for explanation be：The capacitance-type sensing device that the utility model is provided is applied to biological information and senses dress Put, especially fingerprint sensing device.So, the utility model is not limited to this, the capacitance-type sensing device also applicable other conjunctions The sensing device of suitable type, such as touch sensing device.The biological information sensing device is used to sense the predetermined of target object Biological information.The target object such as the finger for user, or the other parts of user's body, such as palm, toe, ear Deng, or even the object of other suitable types is alternatively, and it is not limited to human body.The predetermined biological information is as fingerprint, slapped Line, ear line etc..

Below, so that capacitance-type sensing device is biological information sensor as an example, each embodiment of the present utility model is entered Row explanation.

Also referring to Fig. 1 and Fig. 2, Fig. 1 is the circuit knot of the embodiment of the utility model biological information sensing device one Structure schematic diagram.Fig. 2 is the top view of the part-structure of biological information sensing device shown in Fig. 1.The biological information sensing device 1 Including multiple sensing electrodes 111 and drive circuit 20.The drive circuit 20 is connected with the multiple sensing electrode 111, uses Biological information sensing is performed in driving the multiple sensing electrode 111.

Generally, capacitive sensing device includes the sensing device of mutual capacitance type and the sensing device of self-capacitance.

Different from the matching relationship of sensing electrode 111 according to drive circuit 20, biological information sensing device 1 can be from electricity The biological information sensing device of the biological information sensing device of appearance formula either mutual capacitance type.

In the biological information sensing device based on mutual capacitance type, the biological information sensing device of the mutual capacitance type can be wrapped Include multiple driving electrodes and multiple sensing electrodes.Mutual capacitance is formed between each driving electrodes and a sensing electrode.In sensing, Drive circuit provides pumping signal to driving electrodes, and receives the sensing signal exported from sensing electrode.When target object connects During the near or touch biological information sensing device, the quantity of electric charge meeting of the mutual capacitance formed between driving electrodes and sensing electrode There is corresponding change, so that, sensing electrode can export corresponding sensing signal to drive circuit, and then obtain associated biomolecule letter Breath.

In the biological information sensing device based on self-capacitance, the biological information sensing device of the self-capacitance includes Multiple sensing electrodes.Each sensing electrode can form electric capacity over the ground.In sensing, drive circuit provides pumping signal to sensing Electrode, and receive the sensing signal exported from sensing electrode.When target object approaches or touches the biological information sensing dress When putting, electric capacity is formed between target object and sensing electrode, causes the change of the quantity of electric charge in sensing electrode, so that, sensing electricity Pole exports corresponding sensing signal to drive circuit, and then obtains relevant biological information.

In the present embodiment, the biological information sensing device 1 is, for example, the sensing device of self-capacitance.

The multiple sensing electrode 111 is arranged in multiple lines and multiple rows mode.So, ground, in other embodiments, institute are changed Stating multiple sensing electrodes 111 can also arrange in Else Rule or non-regular.

For the sensing electrode 111 of same row：Held when the drive circuit 20 provides pumping signal to a sensing electrode 111 There is provided the part or all of sensing electrode that one first reference signal is given in remaining sensing electrode 111 when row biological information is sensed 111.It is preferred that the drive circuit 20, which provides first reference signal, gives remaining whole sensing electrode 111.

Because the drive circuit 20 is providing the pumping signal to the sensing electrode in each row sensing electrode 111 There is provided first reference signal to remainder or whole sensing electrodes 111 when 111, so that, it is applied with first reference 111 pairs of parasitic effects in the sensing electrode 111 for performing biological information sensing of sensing electrode of signal are knowable, so that, institute Knowable parasitic effects can be offset when subsequently to the calculating of biological information by stating drive circuit 20, and then improve the sense of biological information Survey precision.

First reference signal is, for example, constant voltage signal.

Or, the pressure difference between first reference signal and the pumping signal keeps constant, for example, first ginseng Examine that signal is identical with the pumping signal, so as to reduce remaining sensing electrode 111 with performing the sensing electricity of biological information sensing The charge/discharge electricity amount of parasitic capacitance between pole 111, further improves the sensing precision of biological information.

In the present embodiment, the drive circuit 20 drives sensing electrode 111 to perform biological information sensing line by line.So, Ground is changed, in other embodiments, the drive circuit 20 also once can drive multirow sensing electrode 111 to perform life simultaneously Thing information is sensed.

Further, in the present embodiment, for the sensing electrode 111 of same a line：The drive circuit 20 is carried simultaneously Biological information sensing is performed to section senses electrode 111 for the pumping signal, and one second reference signal is provided and is felt to remaining The part or all of sensing electrode 111 surveyed in electrode 111.All sensed to remaining it is preferred that providing second reference signal Electrode 111.

For the sensing electrode 111 of same a line：The drive circuit 20 is believed by successively repeatedly providing the excitation simultaneously Number to section senses electrode 111 perform biological information sensing so that driven a line sensing electrode 111 perform biological information sense Survey.

When the multiple sensing electrode 111 is formed on a chip, using the timesharing driving to a line sensing electrode 111 Mode, so as to reduce the pin number on the chip, in this regard, having related narration below.

So, ground is changed, in other embodiments, the drive circuit 20 can also drive the sensing electrode of a line simultaneously 111 are performed both by biological information sensing.For example, the multiple sensing electrode 111 is formed in display screen.When the multiple sensing When electrode 111 is arranged on chip, the drive circuit is also can be while drive the sensing electrode 111 of a line to be performed both by biological letter Breath sensing.

Further, since the drive circuit 20 is providing the pumping signal to the part sense in each row sensing electrode 111 There is provided the part or all of sensing electrode 111 that second reference signal is given in remaining sensing electrode 111 during survey electrode 111, from And, it is applied with 111 pairs of parasitisms in the sensing electrode 111 for performing biological information sensing of sensing electrode of second reference signal Influence is knowable, so that, the drive circuit 20 can offset knowable parasitic effects when subsequently to the calculating of biological information, And then improve the sensing precision of biological information.

Second reference signal is, for example, constant voltage signal.

Or, the pressure difference between second reference signal and the pumping signal keeps constant, for example, second ginseng Examine that signal is identical with the pumping signal, so as to reduce remaining sensing electrode 111 with performing the sensing electricity of biological information sensing The charge/discharge electricity amount of parasitic capacitance between pole 111, further improves the sensing precision of biological information.

In some embodiments, the biological information sensing device 1 includes multiple sensing units 11.Each sensing Unit 11 includes sensing electrode 111, the first controlling switch 113 and the second controlling switch 115 described in one.First control is opened 113, second controlling switch 115 is closed to be connected with the sensing electrode 111.

The drive circuit 20 includes scan drive circuit 21, sensing drive circuit 22 and reference signal generation circuit 23. The scan drive circuit 21 and 115 points of the first controlling switch 113 and the second controlling switch in the multiple sensing unit 11 Do not connect, for driving the first controlling switch 113 and the timesharing of the second controlling switch 115 conducting in each sensing unit 11.Institute State sensing drive circuit 22 to be connected with sensing electrode 111 by the first controlling switch 113 in each sensing unit 11, for passing through First controlling switch 113 of conducting provides the pumping signal and performs biological information sensing to sensing electrode 111.The reference letter Number generation circuit 23 is connected by the second controlling switch 115 in each sensing unit 11 with the sensing electrode 111, for passing through Second controlling switch 115 of conducting provides first reference signal to sensing electrode 111.

For the sensing electrode 111 of same row：When the scan drive circuit 21 drives first in a sensing unit 11 When controlling switch 113 is turned on, the second controlling switch 115 is ended, the part or all of sensing list in remaining sensing unit 11 is driven First controlling switch 113 of member 11 is ended, the second controlling switch 115 is turned on, and the reference signal generation circuit 23 passes through conducting The second controlling switch 115 provide first reference signal to sensing electrode 111.

The sensing drive circuit 22 provides the pumping signal to sensing electrode by the first controlling switch 113 of conducting 111 perform biological information sensing, and receive the sensing signal exported from sensing electrode 111, to obtain biological information.

Further, drive the first controlling switch 113 of a line sensing unit 11 to turn on when the scan drive circuit 21, When second controlling switch 115 is ended, the sensing drive circuit 22 provides described simultaneously by the first controlling switch 113 of conducting Pumping signal gives section senses electrode 111 to perform biological information sensing, the reference signal generation circuit 23 pass through conducting the One controlling switch 113 provides sense of second reference signal to the part or all of sensing unit 11 in remaining sensing unit 11 Survey electrode 111.

In the present embodiment, the drive circuit 20 can further comprise data selection circuit 24, the data selection Circuit 24 is connected respectively with the sensing drive circuit 22 and the reference signal generation circuit 23.The data selection circuit 24 Further it is connected with the first controlling switch 113 in each sensing unit 11.For each sensing unit 11, selected by the data Circuit 24 selects to export the second reference signal or export the sensing that the reference signal generation circuit 23 is provided The pumping signal that drive circuit 22 is provided is to sensing electrode 111.When the data selection circuit 24 exports the pumping signal During to a sensing electrode 111, sensing signal that the sensing electrode 111 sensed further is exported to the drive circuit 20.

Because the drive circuit 20 is provided with the data selection circuit 24, so as to realize the sensing electricity to each row Pole 111 carries out timesharing and performs biological information sensing.

In one embodiment, the data selection circuit 24 includes multiple data selectors (Multiplexer) 241. Each coupling part sensing unit 11 of data selector 241, and further with the reference signal generation circuit 23 and the sense Drive circuit 22 is surveyed to connect respectively.The multiple data selector 241 is used to select the output pumping signal or described second Reference signal is to sensing electrode 111.Alternatively, each data selector 241 connects at least two row sensing units 11.

The drive circuit 20 once exports the pumping signal to a sensing respectively by each data selector 241 simultaneously Electrode 111 performs biological information sensing, and exports second reference signal respectively to same a line by each data selector 241 Remaining sensing electrode 111 in part or all of sensing electrode 111.

The drive circuit 20 by the first control of each data selector 241 and conducting by successively repeatedly being opened simultaneously Close 113 and export the pumping signal to sensing electrode 111, to have driven a line sensing electrode 111 to perform biological information sensing.

Ground is changed, in other embodiments, the data selection circuit 24 or other suitable circuit knots Structure, it is not limited to multiple data selectors 241 described herein.In addition, when simultaneously the drive circuit 20 provides described sharp When encouraging signal to often capable sensing electrode 111, the data selection circuit 24 may also be omission.

The drive circuit 20 can further comprise control unit 30.Described control unit 30 and the scan drive circuit 21 and the multiple data selector 241 connect respectively, for controlling the scan drive circuit 21 to drive each row sensing unit The conducting sequential of the first controlling switch 113 and the second controlling switch 115 in 11, and by controlling the multiple data to select Device 241 controls to export the pumping signal and sequential of second reference signal to sensing electrode 111.

For example, described control unit 30 controls the scan drive circuit 21 to turn on the first controlling switch 113 line by line, and When controlling the first controlling switch 113 conducting of each row sensing unit 11, the sensing of the part row or whole rows in remaining row is controlled Second controlling switch 115 of unit 11 is turned on.For same sensing unit 11：Described control unit 30 controls the turntable driving The timesharing of circuit 21 turns on the first controlling switch 113 and the second controlling switch 115.

Described control unit 30 controls the timesharing of data selector 241 to export the pumping signal and gives the data choosing Select each sensing unit 11 that device 241 is connected.

In some embodiments, the biological information sensing device 1 for example further comprise multiple scan line group B and Multiple data wire group D.A line sensing unit 11, each biographies sense of data wire group D connections one are connected per scan line group B Unit 11.

Specifically, the first scan line B1 and the second scan line B2 is included per scan line group B.Each data wire group D Including the first data wire D1 and the second data wire D2.

First controlling switch 113 includes coordination electrode G1, the first transmission electrode S11 and the second transmission electrode S12. Second controlling switch 115 includes coordination electrode G2, the first transmission electrode S21 and the second transmission electrode S22.Described first The coordination electrode G1 of the scan line B1 connections scan drive circuit 21 and first controlling switch 113.Second scanning The coordination electrode G2 of the line B2 connections scan drive circuit 21 and second controlling switch 115.The first data wire D1 Connect the first transmission electrode S11 of the controlling switch 113 of data selector 241 and first.The second data wire D2 connections First transmission electrode S21 of the controlling switch 115 of reference signal generation circuit 23 and second.First controlling switch 113 The second transmission electrode S12 connections sensing electrode 111.Second transmission electrode S22 connections of second controlling switch 115 The sensing electrode 111.

The first data wire D1 is used to transmit the pumping signal and second reference signal, second data wire D2 is used to transmit first reference signal, and the scan drive circuit 21 passes through the first scan line B1, the second scan line B2 provides scanning open signal to the first controlling switch 113 and the second controlling switch 115, to control the He of the first controlling switch 113 Second controlling switch 115 is turned on, and scanning pick-off signal is provided to the first control by the first scan line B1, the second scan line B2 System switch 113 and the second controlling switch 115, to control the first controlling switch 113 and the second control to open the cut-off of 115 passes.

The first scan line B1 and the second scan line B2 extend along line direction, arranged along column direction.First number Extend according to line D1 and the second data wire D2 along column direction, arranged along line direction.

In some embodiments, the biological information sensing device 1 for example further comprise the first reference signal line R1, Second reference signal line R2 and sensing signal line L.The first reference signal line R1 connections reference signal generation circuit 23 With the second data wire D2, for transmitting first reference signal.The second reference signal line R2 connections reference signal Generation circuit 23 and the multiple data selector 241, for transmitting second reference signal.The sensing signal line L connects The sensing drive circuit 22 and the multiple data selector 241 are connect, for transmitting the pumping signal to sensing electrode 111 And sensing signal of the transmission from sensing electrode 11 gives sensing drive circuit 22.

The first reference signal line R1, the second reference signal line R2 and sensing signal line L mainly extend along line direction.

Referring to Fig. 3, the circuit structure that Fig. 3 is an embodiment of the data selector 241 shown in the utility model Fig. 1 shows It is intended to.The data selector 241 includes 8 switch elements 243, and each switch element 243 includes a first choice and switchs S1 With one second selecting switch S2.The first choice switch S1 includes coordination electrode G3, the first transmission electrode S31 and second and passed Transmission pole S32.The second selecting switch S2 includes coordination electrode G4, the first transmission electrode S41 and the second transmission electrode S42. Described control unit 30 is connected respectively with the coordination electrode G3 and coordination electrode G4 in each switch element 243.Described first passes Transmission pole S31 is connected with the sensing drive circuit 22.The first transmission electrode S41 and the reference signal generation circuit 23 Connection.The second transmission electrode S32 and the second transmission electrode S42 in each switch element 243 are connected, and are connected to first First transmission electrode S11 of controlling switch 113.

For same switch element 243：Described control unit 30 controls first choice switch S1 and second selections to open Close S2 timesharing conducting, i.e. when first choice switch S1 conductings, the second selecting switch S2 cut-offs, when the second selecting switch S2 is led When logical, first choice switch S1 cut-offs.For same data selector 241：When described control unit 30 controls a switch element When first choice switch S1 conductings in 243, the second selecting switch S2 end, the first choosing in control rest switch unit 243 Select switch S1 cut-offs, the second selecting switch S2 conductings.S1 is switched by the first choice of conducting, the sensing drive circuit 22 is carried The sensing electrode 111 of the sensing unit 11 turned on for the pumping signal to the first controlling switch 113；Pass through the second choosing of conducting Switch S2 is selected, the reference signal generation circuit 23 provides the biography that second reference signal is turned on to the second controlling switch 115 Feel the sensing electrode 111 of unit 11.

In the present embodiment, the quantity of the multiple data selector 241 is, for example, 16, each data selector 241 include 8 switch elements 243.Accordingly, the quantity with the sensing electrode 111 of a line is 128.

It should be noted that in Fig. 1, being limited to the size of accompanying drawing, Fig. 1 only shows that each data selector 241 is distinguished It is connected with two row sensing units 11, if corresponding with the structure of the data selector 241 shown in Fig. 3, Fig. 1 is actually eliminated often The structure that one data selector 241 is also connected with other six row sensing unit 11.In addition, Fig. 4 described later structure and Fig. 1 institutes The structure shown is corresponding, equally eliminates the structure that each data selector 241 is also connected with other six row sensing unit 11, Explain in this together.

Correspondingly, the drive circuit 20 for example exports 16 by 16 data selectors 241 every time and swashed simultaneously Signal correspondence is encouraged to 16 sensing electrodes 111 with a line, and exports 112 the second reference signal correspondences simultaneously to a line 112 sensing electrodes 111.

By the biological information sensing device 1 described in exemplified by fingerprint sensing device, being approached or touched when the finger of user During the sensing electrode 111 of multiple sensing units 11, because ridge, paddy are different from the distance of sensing electrode 111, therefore, ridge, paddy and sense The electric capacity correspondence difference that electrode 111 is formed respectively is surveyed, so that the influence to the quantity of electric charge in sensing electrode 111 is just different, from And the sensing signal that drive circuit 20 can be exported according to sensing electrode 111 can know corresponding finger print information.

The operation principle of the embodiment of biological information sensing device 1 one is as follows.

Described control unit 30 controls the first choice in the switch element 243 in each data selector 241 to switch S1 Conducting, the second selecting switch S2 cut-offs, control the first choice in the rest switch unit 243 in each data selector 241 to open S1 cut-offs are closed, the second selecting switch S2 is turned on, correspondingly, the sensing drive circuit 22 in each data selector 241 by leading Logical first choice switch S1 provides the pumping signal to the first data wire D1, and the reference signal generation circuit 23 passes through The the second selecting switch S2 turned in each data selector 241 is provided in second reference signal to the first data wire D1.It is logical The first choice crossed in each switch element 243 in many secondary controls of described control unit 30, each data selector 241 is opened Close S1 timesharing conducting.

Described control unit 30 controls the scan drive circuit 21 to drive the first controlling switch 113 to turn on line by line, second Controlling switch 115 is ended, and controlling the first controlling switch 113 of each row to turn on respectively, the cut-off of the second controlling switch 115 it is same When, control that the first controlling switch 113 of remaining row is ended, the second controlling switch 115 is turned on, correspondingly, first data wire Pumping signal on D1 is exported to sensing electrode 111 by the first controlling switch 113 of conducting, and is received from sensing electrode The sensing signal of 111 outputs, conducting is passed through to perform the second reference signal on biological information sensing, the first data wire D1 The first controlling switch 113 export to sensing electrode 111, in addition, the reference signal generation circuit 23 pass through conducting second Controlling switch 115 provides first reference signal to sensing electrode 111.

By being performed in each drive part sensing electrode 111 when biological information is sensed, there is provided the first reference signal and the Two reference signals give remaining corresponding sensing electrode 111, come the sensing of the biological information that improves the biological information sensing device further 1 Precision.

Also referring to Fig. 1, Fig. 4 to Fig. 6, Fig. 4 is another embodiment of the utility model biological information sensing device Structural representation.Fig. 5 is the cut-away section structural representation of biological information sensing device shown in Fig. 4.Fig. 6 is raw described in Fig. 4 The use state figure of thing information sensor.The biological information sensing device 1 includes biometric information sensor 2.The biology Information sensor 2 includes insulated substrate 2a, the multiple sensing unit 11, the multiple scan line group B, the multiple data Line-group group D and the first reference signal line R1.It is the multiple sensing unit 11, the multiple scan line group B, described many Individual data line-group group D and the first reference signal line R1 formation is on the insulated substrate 2a.

In the present embodiment, the first controlling switch 113 and the second controlling switch 115 in each sensing unit 11 Such as it is thin film transistor (TFT) (Thin Film Transistor, TFT) switch, the insulated substrate 2a is, for example, glass substrate, So as to make the biometric information sensor 2 using the technique of TFT switch is formed on glass substrate, and then reduce biological letter Cease sensor 2 and include the manufacturing cost of the biometric information sensor 2.When first controlling switch 113, second When controlling switch 115 is thin film transistor switch, coordination electrode G1, G2 is grid, described first transmission electrode S11, S21 For source electrode, described second transmission electrode S12, S22 are drain electrode.

So, the utility model is not intended to limit the insulated substrate 2a for glass substrate, or other suitable types is exhausted Edge substrate, equally, it is that thin film transistor (TFT) is opened that first controlling switch 113 and second controlling switch 115 are not limited yet Close, or other suitable types switch.

The thin film transistor switch is, for example, low temperature polycrystalline silicon (LTPS) thin film transistor switch, indium gallium zinc (IGZO) thin film transistor switch of the suitable type such as thin film transistor switch, amorphous silicon film transistor switch.It is preferred that institute Thin film transistor switch is stated to switch for low-temperature polysilicon film transistor.

The insulated substrate 2a includes first surface A1 and the second surface A2 being oppositely arranged with first surface A1, and described the One surface A 1 is used for the touch for receiving target object or close input, the multiple sensing unit 11, the multiple scanning line-group Group B, the multiple data wire group D and the first reference signal line R1 are arranged on the second surface A2.

The sensing electrode 111 of the multiple sensing unit 11 is compared to first controlling switch 113, second control 113, the multiple scan line group B and the multiple data line-group D groups are switched closer to the second surface A2.

First controlling switch 113, second controlling switch 115, the multiple scan line group B and described many Individual data line-group group D is located at the sensing electrode 111 of the multiple sensing unit 11 back to the side of the insulated substrate 2a.

It is preferred that the sensing electrode 111 of the multiple sensing unit 11 covers first controlling switch 113, described Two controlling switches 115, the multiple scan line group B and the multiple data wire group D.

The biometric information sensor 1 further comprises passivation layer 16, and the passivation layer 16 is arranged on the multiple sensing On unit 11, the multiple scan line group B, the multiple data wire group D and the first reference signal line R1.

The passivation layer 16 is used for the surface for planarizing the biometric information sensor 2, and single to the multiple sensing First 11 grade elements are protected.

Also referring to Fig. 5 and Fig. 7, Fig. 7 is the preparation method flow chart of an embodiment of biometric information sensor 2. The preparation method of the biometric information sensor 2 is as follows.

F1：One insulated substrate 2a is provided；

The insulated substrate 2a is, for example, glass substrate.

F2：The multiple sensing electrode 111 is formed on the insulated substrate 2a；

The sensing electrode 111 is for example made up of metal material.So, ground is changed, the sensing electrode 111, which is alternatively, to be had Other suitable conductive materials are made, for example, the sensing electrode 111 can also be made up of transparent conductive material, it is described transparent Conductive material is, for example, tin indium oxide, indium zinc oxide etc..In addition, the sensing electrode also can be by alloy material systems such as molybdenum lithium molybdenums Into.

F3：In forming the first insulating barrier 12 in the multiple sensing electrode 111；

First insulating barrier 12 is, for example, that the materials such as silica, silicon nitride are made.

F4：In forming the first controlling switch 113 and the second controlling switch 115 on first insulating barrier 12, and in described Formed on first insulating barrier 12 and be through to the through hole H of sensing electrode 111, by the through hole H, the first controlling switch 113 and the Two controlling switches 115 are connected with sensing electrode 111；

The first controlling switch 113 and the second controlling switch 115 of each sensing unit 11 are formed in sensing electrode 111 Side, and be connected respectively by through hole H with sensing electrode 111.

F5：In formation passivation layer 16 in first controlling switch 113 and second controlling switch 115.

The biometric information sensor 2 makes and finished.It should be noted that in above-mentioned preparation method, omitting and being formed The step of the multiple scan line group B, multiple data wire group D and the first reference signal line R1.

Because the manufacture craft of the biometric information sensor 2 formed according to above-mentioned preparation method is simple, without additionally setting again Put a cover sheet or form coat (Coating layers), so as to save manufacturing cost.

So, ground is changed, in other embodiments, the preparation method of the biometric information sensor 2 is alternatively：Institute The first controlling switch 113 and the second controlling switch 115 that each sensing unit 11 is formed on insulated substrate 2a are stated, is opened in the first control The first insulating barrier 12 is formed in the controlling switch 115 of pass 113 and second, and first is through in being formed on first insulating barrier 12 The through hole H of second transmission electrode of controlling switch 113 and the second transmission electrode S22 of the second controlling switch 115, then described First controlling switch 113 and second controlling switch 115 of each sensing unit 11 of connection are formed on first insulating barrier 12 On sensing electrode 111, next, in sensing electrode 111 set cover sheet or formed coat (Coating layers). In this way, also possible.It should be noted that also omit to the multiple scan line group B, multiple data wire groups herein The description of the step of D and the first reference signal line R1.

Continue with refering to Fig. 5, and also referring to Fig. 8, Fig. 8 opens to make the first controlling switch 113 with the second control The method flow diagram of pass 115.It is right so that the first controlling switch 113 and the second controlling switch 115 are amorphous silicon film transistor as an example The manufacture method that the first controlling switch 113 and the second controlling switch 115 are formed during biometric information sensor 2 is made is entered Row is described as follows.

F41：In coordination electrode G1 and the second controlling switch that the first controlling switch 113 is formed on first insulating barrier 12 115 coordination electrode G2；

F42：In forming the second insulating barrier 13 in first insulating barrier 12, coordination electrode G1, G2；

Second insulating barrier 13 is, for example, that the materials such as silica, silicon nitride are made.

F43：In formation active layer 14,15 on second insulating barrier 13；

The active layer 14,15 is amorphous silicon layer.

F44：The sensing electrode 111 is through in being formed on second insulating barrier 13 and first insulating barrier 12 Through hole H；

Realized it should be noted that step F4 and step F5 can merge in same step, so, or it is different at two Formed in step.

F45：Passed in the first transmission electrode S11 that the first controlling switch 113 is formed on second insulating barrier 13 and second Transmission pole S12, the first transmission electrode S21 and the second transmission electrode S22 for forming the second controlling switch 115, and second biography Transmission pole S12 and the second transmission electrode S22 is full of the through hole H, is connected with connecting the sensing electrode 111 respectively.

The first transmission electrode S11 and the second transmission electrode S12 is located at the both sides of the active layer 14, and described first passes Transmission pole S21 and the second transmission electrode S22 is located at the both sides of the active layer 15, so as to form first controlling switch 113 With second controlling switch 115.

In the present embodiment, the second transmission electrode S12 and second controlling switch of first controlling switch 113 115 the second transmission electrode S22 is connected by a through hole H with the sensing electrode 111 respectively.So, in other embodiments, Second transmission electrode S12 of first controlling switch 113 in same sensing unit 11 and second controlling switch 115 Second transmission electrode S22 can be connected by same through hole H with the sensing electrode 111.

In step F5：In second insulating barrier 13, the first transmission electrode S11, active layer 14, the second transmission electrode S12, First transmission electrode S21, active layer 15, form the passivation layer 16 on the second transmission electrode S22.

The first controlling switch 113 and the second controlling switch 115 formed in above-mentioned preparation method is mainly bottom gate type (Bottom-Gate) thin film transistor (TFT), so, the controlling switch 115 of the first controlling switch 113 and second or top gate type (Top-Gate) thin film transistor (TFT), such as low-temperature polysilicon film transistor.

It should be further stated that, the multiple scan line group B, multiple data wire group D, the first reference signal line R1, first controlling switch 113, the last mode such as by via of connection cabling of second controlling switch 115 with Around being formed on the second surface A2 of the insulated substrate 2a connect up (not indicating) be connected, with foregoing drive circuit 20 Or corresponding circuit carries out signal transmission in control chip 3 described later.

Alternatively, the biometric information sensor 2 further comprises the scan drive circuit 21, the choosing of the multiple data Select device 241, the second reference signal line R2 and the sensing signal line L.The scan drive circuit 21, the multiple number According to selector 241, the second reference signal line R2 and the sensing signal line L-shaped into the second of the insulated substrate 2a In surface A 2.

The scan drive circuit 21, the multiple data selector 241, the second reference signal line R2 and described Sensing signal line L is arranged on around the multiple sensing unit 11.

The first choice switch S1 and the second selecting switch S2 of the data selector 241 is for example also thin film transistor (TFT) Switch.The scan drive circuit 21 generally comprises multiple controlling switch (not shown), and the multiple controlling switch is, for example, Thin film transistor switch.Correspondingly, the multiple data selector 241 and the scan drive circuit 21 are in the described first control When switch 113 and second controlling switch 115 formation, formed in the lump by same or analogous manufacture craft, so as to improve The integrated level of biometric information sensor 2, and reduce cost of manufacture.

In some embodiments, the biological information sensing device 1 includes control chip 3, and the control chip 3 includes Described control unit 30, the reference signal generation circuit 23 and the sensing drive circuit 22.That is, foregoing drive circuit A part of circuit formation in 20 is in control chip 3, and a part is formed on biometric information sensor 2, is arranged such, a side The integrated level of biological information sensing device 1 is improved in face, reduces the volume of the biological information sensing device 1, in addition, can also reduce The manufacturing cost of biological information sensing device 1.

Alternatively, the biometric information sensor 2 and the control chip 3 are for example respectively nude film (Die), the control Chip 3 is for example arranged on the insulated substrate 2a by flip technique (Flip-Chip).When the insulated substrate 2a is, for example, During glass substrate, the control chip 3 is for example bound by the mode of glass top chip (Chip On Glass, COG) (Bonding) on the glass substrate.When the insulated substrate 2a is, for example, film substrate, the control chip 3 is for example It is bundled in by the mode of chip-on-film (Chip On Film, COF) on the film substrate.So, the control chip 3 Flip technique described herein can be not limited to using other suitable technique formation on the insulated substrate 2a.

After the control chip 3 is arranged on the insulated substrate 2a of the biometric information sensor, then by the control Coremaking piece 3 is placed in a mold with the biometric information sensor 1, and by being molded (Molding) technique formation packaging body, (figure is not Show) on the biometric information sensor 2 and the control chip 3, so as to be formed as a chip (Chip).The encapsulation style Such as it is made up of epoxide resin material, but is not limited to the epoxide resin material, or other suitable materials.

After the biological information sensing device 1 is formed, the first surface A1 of the insulated substrate 2a is used to receive target Object approaches or touches input, in other words, when user senses biological information using the biological information sensing device 1, institute First surface A1 is stated compared to the second surface A2 more adjacent objects objects.

In other embodiments, the scan drive circuit 21, the data selection circuit 24, described second are with reference to letter Number line R2 and sensing signal line L non-can be also arranged on the insulated substrate 2a.Such as described He of scan drive circuit 21 The data selection circuit 24 may also be arranged in the control chip 3, or, it is arranged in other chip, or, with Circuit mode outside chip exists also possible.

Referring to Fig. 9, structural representations of the Fig. 9 for the another embodiment of the utility model biological information sensing device.Institute State biological information sensing device 1 and further comprise connector 4, the connector 4 is used to connect the control chip 3 and the life Thing information sensor 2.The connector 4 for example, flexible circuit board (Flexible Printed Circuit Board, FPCB).The control chip 3 is for example arranged on the flexible circuit board 4, and passes through the flexible circuit board 4 and the life Thing information sensor 2 is connected.By the flexible circuit board 4, the biometric information sensor 2 and the control chip 3 it Between carry out signal transmission.

In this embodiment, the biometric information sensor 2 and the control chip 3 also can be a chip (Chip), or, the biometric information sensor 2 is nude film, and the control chip 3 is chip, or, the biological information is passed Sensor 2 and the control chip 3 are nude film.

In the respective embodiments described above, when the biometric information sensor 2 is nude film or chip, by setting the data Selection circuit 24 controls timesharing output drive signal to the sensing electrode 111 with a line to correspond to.Because the data select electricity Each data selector 241 on road 24 sets the Single port (not shown) being connected with the sensing drive circuit 22, institute respectively Stating port is used to transmit pumping signal or sensing signal, correspondingly, and each port of correspondence is set on the biometric information sensor 2 One connection pin (not shown), to connect the port and the sensing drive circuit 22.So, it is possible to reduce biological information The quantity of connection pin between sensor 2 and control chip 3.

Ground is changed, in other embodiments, for example, the biometric information sensor 2 or formation are in display screen In or display screen on, and be not integrated into a nude film or a chip.Formed in display screen when the biometric information sensor 2 or When on display screen, the control chip 3 can drive a line sensing electrode 111 to perform biological information sensing simultaneously.

Referring to Fig. 10, structural representations of the Figure 10 for another embodiment of the utility model sensing unit.The sensing Unit 11 includes 2 first controlling switches 113 being connected in parallel and 2 second controlling switches 115 being connected in parallel.

Figure 11 is referred to, Figure 11 is the structural representation of the another embodiment of the utility model biological information sensing device Figure.Respectively by a single data wire L1 connections between the drive circuit 20 and each sensing electrode 111, omit first and control The controlling switch 115 of switch 113 and second.Correspondingly, the drive circuit 20 by exporting corresponding signal to each sensing respectively Electrode 111 is also feasible.

Figure 12 is referred to, Figure 12 is the structural representation of an embodiment of the utility model electronic equipment.The electronics Equipment 9 includes the biological information sensing device 1 described in any of the above-described embodiment.The electronic equipment 9 is, for example, portable electricity Sub- product, household formula electronic product or vehicle electronics product.However, the electronic equipment does not limit to electronics production listed herein Product, can also be the electronic product of other suitable types.The portable electronic product is, for example, mobile terminal, described mobile whole The suitable mobile terminal of end for example, mobile phone, tablet personal computer, notebook computer, Wearable product etc..The household formula electronics production Product are, for example, the suitable household formula electronic product such as intelligent door lock, TV, refrigerator, desktop computer.The vehicle electronics product example Such as it is Vehicular display device, drive recorder, navigator, the suitable vehicle electronics product of car refrigerator.

So that the electronic equipment 9 is mobile phone as an example, the biological information sensing device 1 is for example being arranged on the mobile phone just Any appropriate position such as face, side, the back side, in addition, the biological information sensing device 1 may be configured as exposing the outer of mobile phone Shell, may also be arranged on the inside of mobile phone.In this embodiment, the biological information sensing device 1 is arranged on the front of mobile phone.

The biological information sensed according to the biological information sensing device 1, the electronic equipment 9 for example carries out user Identification authentication, quickly on-line payment, startup application program (APP) etc..

Because the electronic equipment 9 includes the biological information sensing device 1, the sense of the biological information sensing device 1 Survey precision higher, therefore, the better user experience of the electronic equipment 9.

Figure 13 is referred to, Figure 13 is the circuit block diagram of the embodiment of electronic equipment one shown in Figure 11.The electronic equipment 9 Further comprise main control chip 5.The main control chip 5 is connected with the biological information sensing device 1, for believing with the biology Breath sensing device 1 enters row data communication.The main control chip 5 is, for example, one chip or chipset.When main control chip 5 is chip During group, the chipset includes application processor (Application Processor, AP) and power supply chip.In addition, the core Piece group can further comprise storage chip.When main control chip 5 is one chip, the main control chip 5 is, for example, application processing Device.Further, the application processor also can be replaced central processing unit (Central Processing Unit, CPU).

The main control chip 5 includes earth terminal 50, and the earth terminal 50 with connecting equipment, believe by the ground connection on receiving device ground Number, ground signalling is represented in Fig. 9 with GND.The equipment it is also known as systematically, for example, the power supply of electronic equipment 9 is negative Pole, power supply is as being battery.The ground signalling GND is also known as system ground voltage, system earth signal, equipment ground voltage or set Standby earth signal etc..The ground signalling GND is constant voltage, described as the voltage reference of each circuit in electronic equipment 9 Ground signalling GND is, for example, the voltage signals such as 0V (volt), 2V, (- 1) V.Generally, the equipment not earth ground or definitely Greatly.So, may also be the equipment earth ground when electronic equipment 9 is connected by conductor with earth ground.

In foregoing each embodiment, the biological information sensing device 1 can be using a domain as voltage reference. The domain is the domain on the basis of ground signalling GND.The ground signalling GND is used as each circuit in biological information sensing device 1 Voltage reference.

It is the signal to noise ratio for the sensing signal for improving biological information sensing device 1, the utility model it is further proposed that utilizing tune Technical scheme processed improves the technical purpose of signal to noise ratio to reach, the modulation technique scheme is applied to described in the respective embodiments described above Biological information sensing device 1.

For example, reaching that uniform modulation exports the signal to sensing unit 11 by modulating the technical scheme on ground.

Specifically, the drive circuit 20 for example further comprises the first earth terminal 31, the second earth terminal 32, modulation circuit 33 and voltage generation circuit 34.The modulation circuit 33 be connected to first earth terminal 31 and second earth terminal 32 it Between.The modulation circuit 33 is further connected with the voltage generation circuit 34.First earth terminal 31 is connected to equipment Ground.The voltage generation circuit 34 is used to provide a voltage drive signals to the modulation circuit 33.The modulation circuit 33 Corresponded to according to the ground signalling GND of the voltage drive signals and the equipment ground and produce modulated signal MGND to described second Earth terminal 32.The modulated signal MGND is exported to the letter on the sensing unit 11 for drive circuit 20 described in uniform modulation Number, for example, first reference signal, second reference signal, the pumping signal, the scanning open signal and institute State scanning pick-off signal.Wherein, it is modulation ground to load the ground (for example, second earth terminal 32) of the modulated signal MGND.

For example, the pumping signal includes first voltage signal and second voltage signal.The pumping signal is the first electricity The square-wave pulse signal for pressing signal and second voltage signal alternately to change.Wherein, the first voltage signal is less than described second Voltage signal, the first voltage signal is, for example, ground signalling GND.The modulated signal MGND is used to raise second electricity Signal is pressed, to improve the signal to noise ratio of sensing signal.

When the drive circuit 20 is received from the sensing signal that sensing electrode 111 is exported, it is necessary to sensing signal Back-modulation is carried out, to obtain corresponding biological information.

In this embodiment, the biological information sensing device 1 is using two domains as voltage reference.Two domains point The domain 60 on the basis of ground signalling GND and the domain on the basis of modulated signal MGND 70 are not shown as.Wherein, to be grounded letter The earth terminal of the circuit in domain 60 on the basis of number GND with being directly connected to equipment, in the domain on the basis of modulated signal MGND The earth terminal of circuit in 70 is directly connected to modulation ground.Further, for being to modulate the circuit on ground, its reference ground electricity The modulated signal MGND that position is loaded for modulation ground；For being the circuit on ground with equipment, its ground reference is equipment ground institute The ground signalling GND of loading.

In the present embodiment, described control unit 30, the scan drive circuit 21, the data selection circuit 24, The reference signal generation circuit 23 and sensing unit 11 are for example arranged in domain 70.The sensing drive circuit 22 is for example A part is located in domain 60, and a part is located in domain 70.The main control chip 5, the modulation circuit 33, the voltage produce electricity Road 34 is located in domain 60.

So, ground is changed, the present invention does not limit to division of the foregoing circuit in domain 60,70, and manufacturer can be according to actual need Will, for example circuit conditions are different, and correspondence does different adjustment etc..

The biological information sensing device 1 can further comprise that ground wire G, the ground wire G surround the multiple sensing Unit 11 is set, in some embodiments, and the ground wire G is latticed, is located at same layer with the sensing electrode 111, Set respectively around the sensing electrode 111.Ground is changed, the ground wire G is alternatively in the multiple sensing unit 11 Periphery sets a circle etc. also possible.

In addition, when the biological information sensing device 1 be by voltage reference of a domain, the domain be to be grounded letter During domain on the basis of number GND, first reference signal and/or second reference signal are, for example, relatively described ground signalling GND is constant voltage signal.So, when the biological information sensing device 1 be with two domains 60 and 70 be voltage reference When, first reference signal and/or second reference signal are, for example, that relatively described ground signalling GND is the voltage changed Signal, relatively described modulated signal MGND is constant voltage signal.

Further, except above by using the technical scheme for modulating ground, can also use modulation power source end or reference The power supply voltage signal of power supply, carrys out drive circuit 20 described in uniform modulation and exports signal to the multiple sensing unit 11.

It should be further stated that, by setting the controlling switch 115 of the first controlling switch 113 and second, it can subtract The pin that few sensing unit 11 is connected with peripheral circuit (for example, sensing drive circuit 22, reference signal generation circuit 23).

Although embodiment has been described on specific configuration and the sequence of operation here, it should be appreciated that, replace The embodiment in generation can increase, omit or change element, operation etc..Therefore, embodiment disclosed herein is meant to be real Apply example rather than limitation.

Claims (10)

1. a kind of sensing unit of capacitance type sensor, including：

Sensing electrode, for being capacitively coupled to target object；

First controlling switch, is connected with the sensing electrode, for controlling whether that transmission pumping signal is held to the sensing electrode Row sensing operation；With

Second controlling switch, is connected with the sensing electrode, for controlling whether the first reference signal of transmission to the sensing electricity Pole；Wherein, first controlling switch is turned on the second controlling switch timesharing.

2. sensing unit according to claim 1, it is characterised in that：The sensing unit include one first controlling switch and One second controlling switch, or, the sensing unit include 2 first controlling switches being connected in parallel and be connected in parallel 2 second Controlling switch.

3. sensing unit according to claim 1 or 2, it is characterised in that：First controlling switch and second control Switch processed is thin film transistor switch.

4. sensing unit according to claim 3, it is characterised in that：The capacitance type sensor include the first scan line, Second scan line, the first data wire and the second data wire, each thin film transistor (TFT) include grid, source electrode and drain electrode, wherein, it is described The grid of first controlling switch connects the first scan line, and the source electrode of first controlling switch connects the first data wire, and described the The drain electrode of one controlling switch connects the sensing electrode, and the grid of second controlling switch connects the second scan line, and described the The source electrode of two controlling switches connects the second data wire, and the drain electrode of second controlling switch connects the sensing electrode.

5. sensing unit according to claim 4, it is characterised in that：The source electrode of first controlling switch and described second The source electrode of controlling switch is connected, and is connected by a via with the sensing electrode.

6. sensing unit according to claim 4, it is characterised in that：The capacitance type sensor includes insulated substrate, institute State sensing electrode to be arranged on the insulated substrate, first controlling switch and second controlling switch are arranged on the sense Survey on electrode, the sensing electrode covers first controlling switch and second controlling switch.

7. sensing unit according to claim 6, it is characterised in that：The insulated substrate includes first surface and with first The relative second surface in surface, the sensing electrode, first controlling switch and second controlling switch are arranged at institute Second surface side is stated, the sensing electrode is used to contacting or carry out electric capacity coupling close to the target object of the first surface Close.

8. sensing unit according to claim 7, it is characterised in that：The insulated substrate is glass substrate, described first Scan line, the second scan line, the first data wire, the second data wire, first controlling switch and second controlling switch are equal The sensing electrode is arranged on back to the side of the glass substrate.

9. sensing unit according to claim 1, it is characterised in that：The sensing signal that the sensing electrode is sensed enters one Step is exported by first controlling switch, to perform self-capacitance sensing operation.

10. sensing unit according to claim 1, it is characterised in that：The sensing unit of the capacitance type sensor is finger The sensing unit of line sensor.