CN206421161U - Gel developer abnormality monitoring system - Google Patents
Gel developer abnormality monitoring system Download PDFInfo
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- CN206421161U CN206421161U CN201621490072.XU CN201621490072U CN206421161U CN 206421161 U CN206421161 U CN 206421161U CN 201621490072 U CN201621490072 U CN 201621490072U CN 206421161 U CN206421161 U CN 206421161U
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Abstract
A kind of gel developer abnormality monitoring system is disclosed, the monitoring system includes：Sensor, master control set and the suggestion device being sequentially connected, the sensor are used to the exception of condition of work being converted into input signal, and the master control set includes：Transducing signal transfer module；Microprocessor, is connected by the transducing signal transfer module with the sensor, and the input signal reaches the microprocessor by the transducing signal transfer module, and the microprocessor is used to draw output signal according to the input signal；And memory module, for the abnormal information according to the input signal writing task condition, the suggestion device is used to send prompting according to the output signal.According to monitoring system of the present utility model, prompting, the abnormal information for the memory module energy writing task condition that master control set includes can be sent when the condition of work of gel developer is abnormal, so as to be more convenient when equipment sends abnormal prompt to abnormal analysis.
Description
Technical field
The utility model is related to the monitoring field of equipment service condition, is set more particularly, to one kind for even glue developing
Standby monitoring system.
Background technology
In the manufacturing process of wafer, multiple physical units such as transistor, diode, electric capacity, resistance, metal level are
Formed on a mask layer, with reference to generation film and removal specific part, by photo-etching technological process, finally in wafer
The part of upper keeping characteristics figure.General photoetching process to undergo silicon wafer surface cleaning drying, linging, resist coating, soft baking,
Alignment exposure, it is rear dry, development, it is hard dry, etching, the process such as detection.Wherein, need to use in the processes such as resist coating, development
Gel developer.
Gel developer in use, if photoresist state, development liquid status etc. condition of work occur it is abnormal
When, equipment will be unable to normal work, therefore, it can set a set of monitoring system for being used to monitor the condition of work of gel developer
System.
Fig. 1 shows the schematic diagram of the existing monitoring system for gel developer.Multiple sensors 120 pass through signal
Line is connected on gel developer 130, and the suggestion device 140 of alarm effect has been provided with gel developer 130,
Suggestion device 140 can be alarm lamp and buzzer.Multiple sensors 120 correspond to the multiple of the work of gel developer 130
Different operating condition.When above-mentioned condition of work occurs abnormal, suggestion device 140 sends alarm.
In said system, when exception occurs for any one condition of work, it is necessary to operating personnel during equipment generation abnormal alarm
It is which condition of work there occurs exception actively to go inspection.Meanwhile, when technical staff searches abnormal cause, due to not remembering
Corresponding abnormal alarm information is recorded, inconvenience is brought to anomaly analysis.
Therefore, it is desirable to further be optimized to the monitoring system for gel developer.
Utility model content
In view of the above problems, the purpose of this utility model is to provide a kind of gel developer abnormality monitoring system, should
The abnormal information of monitoring system energy writing task condition, facilitates anomaly analysis.
A kind of gel developer abnormality monitoring system is provided according to the utility model, the monitoring system includes：Connect successively
Sensor, master control set and the suggestion device connect, the sensor is used to the exception of condition of work being converted into input signal,
The master control set includes：Transducing signal transfer module；Microprocessor, passes through the transducing signal transfer module and the sensing
Device is connected, and the input signal reaches the microprocessor by the transducing signal transfer module, and the microprocessor is used for
Output signal is drawn according to the input signal；And memory module, for according to the input signal writing task condition
Abnormal information, the suggestion device is used to send prompting according to the output signal.
Preferably, the sensor is multiple, including：Photoresist abnormality detection sensor, developer solution abnormality detection sensing
Device, trimming liquid abnormality detection sensor, leakage abnormality detection sensor, scrap rubber bucket abnormality detection sensor and glue pump are examined extremely
Survey sensor.
Preferably, the transducing signal transfer module is the first photoelectric coupled circuit, and the sensor is not detected by condition of work
Exception, the input signal causes first photoelectric coupled circuit to disconnect；The sensor detects the exception of condition of work, institute
Input signal is stated so that first photoelectric coupled circuit is turned on, the microprocessor draws output signal.
Preferably, the microprocessor is connected by the second photoelectric coupled circuit with the suggestion device signal.
Preferably, the suggestion device is alarm lamp and/or buzzer.
Preferably, the master control set also includes：Real-time clock module, for providing real time clock data.
Preferably, the abnormal information includes：When classification, frequency of abnormity and the exception of abnormal condition of work occur
Between.
Preferably, the master control set also includes：Display module, for showing the abnormal information.
Preferably, the master control set also includes：Key-press module, is connected with the microprocessor signals, for providing people
Machine is interacted, while for terminating the prompting that the suggestion device is sent.
Preferably, the master control set also includes：Serial communication module, the master control set is connected with computer.
According to monitoring system of the present utility model, the condition of work of gel developer can be pointed out abnormal, master control set bag
The abnormal information of the memory module energy writing task condition included, so as to be more convenient to divide exception when equipment sends abnormal prompt
Analysis.
In a preferred embodiment, the sensor is multiple, including：Photoresist abnormality detection sensor, developer solution are different
Normal detection sensor, trimming liquid abnormality detection sensor, leakage abnormality detection sensor, scrap rubber bucket abnormality detection sensor and
Glue pump abnormality detection sensor.When equipment sends abnormal prompt, more accurate can quickly judge it is which condition of work hair
Exception has been given birth to, has facilitated the recovery of equipment.
In a preferred embodiment, the microprocessor is connected by the first photoelectric coupled circuit with the sensor signal, institute
State microprocessor to be connected with the suggestion device signal by the second photoelectric coupled circuit, using the isolation effect of photoelectric coupled circuit, eliminate
Interference of the outer signals to microprocessor.
In a preferred embodiment, master control set also includes real-time clock module, for providing real time clock data.Master control
Device also includes display module, for showing the abnormal information.Abnormal information can include：The class of abnormal condition of work
Not, frequency of abnormity and abnormal time of origin.When a variety of conditions occur extremely, memory module records alarm time of origin one by one
And other abnormal informations, and be shown on display module.By display module query history abnormal information, convenient abnormal system
Product are followed the trail of and Analysis on Abnormal.
Brief description of the drawings
By description referring to the drawings to the utility model embodiment, of the present utility model above-mentioned and other mesh
, feature and advantage will be apparent from, in the accompanying drawings：
Fig. 1 shows the structural representation of the existing monitoring system for gel developer.
Fig. 2 shows the structural representation of the gel developer abnormality monitoring system according to the utility model embodiment.
Fig. 3 shows the inside of the master control set of the gel developer abnormality monitoring system according to the utility model embodiment
Structured flowchart.
Embodiment
The utility model is more fully described hereinafter with reference to accompanying drawing.For the sake of clarity, the various pieces in accompanying drawing do not have
Have drawn to scale.Furthermore, it is possible to not shown some known parts.It describe hereinafter of the present utility model many specific
Details, but just as the skilled person will understand, this can not be realized according to these specific details
Utility model.
Fig. 2 shows the structural representation of the gel developer abnormality monitoring system according to the utility model embodiment.Should
Monitoring system can be used for the condition of work of prompting gel developer abnormal, including the sensor 220 of signal connection, master control successively
Device 210 and suggestion device 240.Sensor 220 is multiple in the present embodiment.In addition, monitoring system can also include calculating
Machine 250, master control set 210 is connected with the signal of computer 250.
Fig. 3 shows the internal structure block diagram of the master control set 210.In the present embodiment, sensor 220 is multiple, including
220a, 220b, 220c, 220d, 220e, 220f, the sensor correspond to a variety of conditions of work respectively, for example, sensor 220a
For photoresist abnormality detection sensor, 220b is developer solution abnormality detection sensor, and 220c is trimming liquid abnormality detection sensor,
220d is leakage abnormality detection sensor, and 220e is scrap rubber bucket abnormality detection sensor, and 220f is glue pump abnormality detection sensor.
Above-mentioned each sensor is converted into input signal according to the exception of each self-corresponding condition of work.The exception of above-mentioned various conditions of work
E.g.：Photoresist deficiency, developer solution deficiency, trimming liquid deficiency, equipment leakage, scrap rubber bucket overfill, glue pump are abnormal, these are only
Example, the selection of condition of work and abnormal scene can be according to being actually needed setting.Pass through a variety of work of multiple sensors correspondence
Condition, when equipment sends abnormal prompt, more accurately can quickly judge which condition of work there occurs exception, conveniently set
Standby recovery.
Master control set 210 includes transducing signal transfer module 213, microprocessor 211 and memory module 212.Microprocessor
Device 211 is connected by transducing signal transfer module 213 with each sensor, and above-mentioned input signal passes through transducing signal transfer module
213 reach microprocessor 211, and the control method of the internal preset microprocessor of microprocessor 211 is drawn according to the input signal
Output signal.Microprocessor 211 can include system clock circuit 219, the clock for providing the system operation of microprocessor 211
Pulse.Memory module 212 is connected with the signal of microprocessor 211, when any sense in above-mentioned each sensor corresponds to work bar
When part is abnormal, memory module 212 is according to the abnormal information of corresponding input signal writing task condition.
Suggestion device 240 be may be mounted on gel developer 230, and master control set 210 is set by connecting even glue developing
It is connected for 230 with the signal of suggestion device 240.Suggestion device can be sent out according to above-mentioned for the output signal that processor 211 is drawn
Go out prompting.Suggestion device 240 can be alarm lamp and/or buzzer, when equipment condition of work is abnormal, can send prompt tone
And/or light alarm lamp.
According to monitoring system of the present utility model, the condition of work of gel developer can be pointed out by suggestion device 240
It is abnormal, the abnormal information for the energy writing task condition of memory module 212 that master control set 210 includes, so as to send exception in equipment
It is more convenient during prompting to abnormal analysis.
Transducing signal transfer module 213 can be photoelectric coupled circuit, i.e., microprocessor 211 by the first photoelectric coupled circuit 213 with
Multiple sensor 220a to 220f signals connect.Using the isolation effect of the first photoelectric coupled circuit 213, outer signals pair can be eliminated
The interference of microprocessor 211.The input signal that sensor 220a to 220f is provided can be switching value, monitoring system according to
The input signal of switching value can be divided into：Normal condition and abnormality.In normal condition, the input signal causes described
One photoelectric coupled circuit 213 disconnects, and now microprocessor 211 does not receive input signal, so that attonity.It is described in abnormality
Input signal causes the first photoelectric coupled circuit 213 to turn on, and microprocessor 211 receives input signal and according to the controlling party of internal preset
Method draws output signal, sends to suggestion device 240, suggestion device 240 is sent abnormal prompt.
Microprocessor 211 can also be connected by the second photoelectric coupled circuit 214 with the signal of suggestion device 240.Utilize the first light
The isolation effect of coupling circuit 214, can eliminate interference of the outer signals to monitoring system.
Master control set 210 can also include real-time clock module 215, for providing real time clock data.Then condition of work
Abnormal information can include：Classification, frequency of abnormity and the abnormal real-time time occurred of abnormal condition of work.
Master control set 210 can also include display module 216, for showing above-mentioned abnormal information.Pass through above-mentioned microprocessor
Device 211, real-time clock module 215 and display module 216 are engaged, and when the product of equipment occurs abnormal, can be inquired about different
The information such as the classification, the time point that often occur, convenient exception product is followed the trail of and Analysis on Abnormal.In addition, for engineering technology people
For member, by checking history abnormal information, it can understand and record each abnormal processing time, when changing liquid of e.g. each chemicals
Between, processing method can be quickly found to same abnormal conditions.
Master control set 210 can also include key-press module 217, be connected with the signal of microprocessor 211, it is used to provide man-machine
Interaction, while for terminating the prompting that the suggestion device 240 is sent.Key-press module 217 is for example including for controlling to show mould
Button, termination prompting button of the page turning of block 216 etc..When condition of work is abnormal, system sends prompting, built in microprocessor 211
Control method can set prompting self-locking, and operating personnel will not only exclude exceptional condition, be supervised after also pressing termination prompting button
Control system just returns to normal condition, and Abnormality remove record now can also be recorded in memory module 212 as abnormal information.
Master control set 210 can also include serial communication module 218, for master control set 210 to be connected with computer.Such as
Fig. 2, the monitoring system of the present embodiment can also include computer 250, and it is connected with the signal of master control set 210.By calculating
Machine 250 develops human-computer interaction interface, can realize the more rich effect of monitoring system.
Microprocessor 211 can be single-chip microcomputer, e.g. STC89C52RC, and memory module 212 is, for example, AT24C08, real
When clock module 215 be, for example, DS1302 chips, display module 216 be, for example, LCD1602 display screens, serial communication module 218
E.g. RS485 interfaces.According to the master control set 210 of above-mentioned type selecting, microprocessor 211 is programmed, master control dress can be achieved
Put the support of the functions such as 210 pairs of monitoring, keystroke handling, abnormal information inquiry, clock setting, alarm.To microprocessor 211
Programming can for example be looked into including main program, keystroke handling program, alarm program, set of time program and abnormal information
Inquiry program etc., wherein according to using scene can by main program enter above-mentioned keystroke handling, alarm, set of time and
In the programs such as abnormal information inquiry, main program is back to after scene terminates.The utility model has a variety of different presentation shapes
Formula, can be not limited to type selecting and the programming of aforesaid way.
In addition, master control set 210 is connected with the signal of computer 250, interactive software is worked out at the end of computer 250,
The function of the more rich monitoring system of energy.For example monitored in real time using inquiry mode the monitoring system be in normal condition or
Abnormality, then such as being counted using spreadsheet and export history abnormal information.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or deposited between operating
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability is included, so that process, method, article or equipment including a series of key elements not only will including those
Element, but also other key elements including being not expressly set out, or also include being this process, method, article or equipment
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Also there is other identical element in process, method, article or equipment including the key element.
According to embodiment of the present utility model as described above, these embodiments do not have all details of detailed descriptionthe,
Also it is only described specific embodiment not limit the utility model.Obviously, as described above, many modifications and change can be made
Change.This specification is chosen and specifically describes these embodiments, be in order to preferably explain principle of the present utility model and it is actual should
With so that skilled artisan can repairing using the utility model and on the basis of the utility model well
Change and use.The utility model is only limited by claims and its four corner and equivalent.
Claims (10)
1. a kind of gel developer abnormality monitoring system, it is characterised in that the monitoring system includes：
Sensor, master control set and the suggestion device being sequentially connected,
The sensor is used to the exception of condition of work being converted into input signal,
The master control set includes：
Transducing signal transfer module；
Microprocessor, is connected by the transducing signal transfer module with the sensor, and the input signal is passed by described
Sense signal transmission module reaches the microprocessor, and the microprocessor is used to draw output signal according to the input signal；
And
Memory module, for the abnormal information according to the input signal writing task condition,
The suggestion device is used to send prompting according to the output signal.
2. gel developer abnormality monitoring system according to claim 1, it is characterised in that the sensor is many
It is individual, including：Photoresist abnormality detection sensor, developer solution abnormality detection sensor, trimming liquid abnormality detection sensor, leakage are different
Normal detection sensor, scrap rubber bucket abnormality detection sensor and glue pump abnormality detection sensor.
3. gel developer abnormality monitoring system according to claim 1, it is characterised in that the transducing signal transmission
Module is the first photoelectric coupled circuit,
The sensor is not detected by the exception of condition of work, and the input signal causes first photoelectric coupled circuit to disconnect；
The sensor detects the exception of condition of work, and the input signal causes first photoelectric coupled circuit to turn on, described
Microprocessor draws output signal.
4. gel developer abnormality monitoring system according to claim 1, it is characterised in that the microprocessor passes through
Second photoelectric coupled circuit is connected with the suggestion device signal.
5. gel developer abnormality monitoring system according to claim 1, it is characterised in that the suggestion device is report
Warning lamp and/or buzzer.
6. gel developer abnormality monitoring system according to claim 1, it is characterised in that the master control set is also wrapped
Include：
Real-time clock module, for providing real time clock data.
7. gel developer abnormality monitoring system according to claim 6, it is characterised in that the abnormal information bag
Include：Classification, frequency of abnormity and the abnormal time of origin of abnormal condition of work.
8. gel developer abnormality monitoring system according to claim 1, it is characterised in that the master control set is also wrapped
Include：
Display module, for showing the abnormal information.
9. gel developer abnormality monitoring system according to claim 1, it is characterised in that the master control set is also wrapped
Include：
Key-press module, is connected with the microprocessor signals, for providing man-machine interaction, while for terminating the suggestion device
The prompting sent.
10. gel developer abnormality monitoring system according to claim 1, it is characterised in that the master control set is also
Including：
Serial communication module, the master control set is connected with computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621490072.XU CN206421161U (en) | 2016-12-30 | 2016-12-30 | Gel developer abnormality monitoring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621490072.XU CN206421161U (en) | 2016-12-30 | 2016-12-30 | Gel developer abnormality monitoring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206421161U true CN206421161U (en) | 2017-08-18 |
Family
ID=59574614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621490072.XU Active CN206421161U (en) | 2016-12-30 | 2016-12-30 | Gel developer abnormality monitoring system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206421161U (en) |
-
2016
- 2016-12-30 CN CN201621490072.XU patent/CN206421161U/en active Active
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