CN206399368U

CN206399368U - A kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope

Info

Publication number: CN206399368U
Application number: CN201621349685.1U
Authority: CN
Inventors: 孙文娟
Original assignee: Individual
Current assignee: Individual
Priority date: 2016-12-09
Filing date: 2016-12-09
Publication date: 2017-08-11
Anticipated expiration: 2026-12-09

Abstract

The utility model provides a kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope, and it includes curved array, and the curved surface is projected as circle on X/Y plane, and the curved surface is sphere or aspherical.Using this technical scheme, standard component can be detected by three-dimensional optical flying-spot microscope, and measurement result is not limited by optical instrument maximum measurement angle, does not also measure the typical error of grid standard component；It is crucial that, this measurement equipment can be by change focus detection system detectio.

Description

A kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope

Technical field

The utility model is related to a kind of standard component of three-dimensional optical flying-spot microscope calibration, more particularly to a kind of for three Tie up the standard component of the XY axis calibrations of optical scanning microscope, its be used for three-dimensional optical flying-spot microscope the amplification of XY axles, it is linear and The calibration of perpendicularity.

Background technology

Optical scanning microscope such as relevant flying-spot microscope, confocal scanning microscope, zoom scan microscope etc. is wide The general detecting instrument applied in fields of measurement.Compared with traditional microscope, trigonometric coordinates machine can not only provide the image of object, The surface geometry pattern of object can also be provided.The scope of these precision instrument general measures is in the scope of millimeter to micron, precision Can be in micron even Nano grade.

The calibration of precision instrument is, by measuring some standard components, to be compared by the parameter with standard component and obtain instrument The measurement error and uncertainty of device.Traditional light microscope, only imaging function, and the surface shape of object can not be measured Looks, it is only necessary to calibrated using lattice array or the figure of rule change.The graphics standard such as interlocked using the black and white of two dimension Part carrys out the imaging of detection optical system, as shown in Figure 1.The characteristics of these calibrating devices is that all pattern images are all flat at one On face.By aberration, determine that the error of detecting system is carried out in the distance between centre of figure position.But these figure marks for interlocking Quasi- part can not meet the demand of the three-dimensional values of trigonometric coordinates machine and optical scanning microscope, and these grid standard components Size is larger, can not reach the accuracy standard of these precision instruments.

Modern optical scanning microscope, the surface topography and roughness of energy detection object, such system is to XY axles Accuracy requirement is higher, and traditional lattice array sample can only meet the demand of the detection of two dimension.To detect precision measuring instrument, In recent years some three-dimensional grids are begun to use in the world as the standard component of detection, these samples are characterized in the grid of height staggeredly Lattice.Have the pattern of height poor, it is possible to use the amplification on the XY axial directions of these standard components detection optical scanning microscope, it is linear and The error of perpendicularity（Amplification, linearity and perpendicularity errors）.This sample making Technique it is uncomplicated, price is also moderate.But be due to this sample at the edge of grid pattern, always have wide-angle（90o or Close to 90o）Discontinuous pattern change, optical instrument, be for example concerned with flying-spot microscope, during this grid is measured, meeting Occur error at the grid edge of wide-angle, influence the result of measurement.And some optical detective technologies, such as become focus detection system It is easy to produce the data point that can not much test in use, loses substantial amounts of data.These occur at grid edge The meeting of geometric center to estimating grid of measurement error and the data lost cause great error, thus can not use.

Utility model content

For above technical problem, the utility model provides the mark of the XY axis calibrations for three-dimensional optical flying-spot microscope Quasi- part, replaces traditional grid staggeredly as calibrating device, utilizes optics instrument using small sphere and aspherical pattern array The limitation of the maximum measurement angle of device, make sample surveys region（Plane domain）And Un-measurable area（The curved surface of wide-angle）Between Form nature segmentation.Can also be using the measurement range being set in z-axis or by setting the numerical value thresholding of z values to filter. Because the projection of this sphere or aspherical pattern on X/Y plane is round, the part measured after measurement is with that can not measure Or the border formed between the region of the data filtered is also centrosymmetric circle；The measurement result also typical case without grid Error；It is crucial that, this measurement standard part can be by change focus detection system detectio.

In this regard, the technical solution of the utility model is：

A kind of standard component of XY axle linear gaugings for three-dimensional optical flying-spot microscope, it includes curved array, described Curved surface is in the circle that is projected as of X/Y plane, and the curved surface is sphere or aspherical.

It is preferred that, the curved surface size in the curved array is identical, and the spacing between the curved surface is identical.

Using this technical scheme, the standard component can be that the array of sphere pattern can also be the array of non-sphere pattern. Sphere or aspherical in the same size in each standard component, is spaced also consistent.Because meeting the visual field of optical system There are sufficient amount of sphere or aspherical pattern in size, the tested area of standard component.

The characteristics of scheme for calculating center is the Central Symmetry using sphere and aspherical pattern, due to optical instrument There is the measurement limitation of maximum measurement angle, therefore when measuring sphere and be aspherical, only a small amount of sphere or aspherical On arriving of can measuring of data, and can survey with immeasurablel area limit clearly, and in relative sphere The heart is symmetrical, thus the border in region can be surveyed according to this, and calculates center of the sphere on X/Y plane, this A little centers can root calibration data compare to obtain the error of optical metrological instrument.

As further improvement of the utility model, the curved array is the array of 5 × 5 array ~ 21 × 21.That is array Often row, each column curved surface quantity be 5 ~ 21.

It is used as further improvement of the utility model, a diameter of 10 ~ 200 microns of the curved surface.

As further improvement of the utility model, the spacing between the curved surface is more than 10 unit pixels.Here Pixel refer to the basic display unit of three-dimensional optical scanning microscope system.Different optical lens, its unit pixel it is big It is small also different..

As further improvement of the utility model, the height of the curved surface is 5 ~ 100 microns.

In general, the XY axis calibrations for three-dimensional optical flying-spot microscope, smoothness to the surface of standard component and The production technology that the geometrically symmetric degree of product requires higher therefore common can not reach such requirement.But, this technology side Case is replaced by using microlens array or similar products, solves this problem.The surface roughness of this kind of product typically exists Nano grade, manufacture craft is very ripe, and cost is not also high.

Compared with prior art, the beneficial effects of the utility model are：

Using the technical solution of the utility model, traditional grid staggeredly is replaced using sphere and aspherical pattern array As calibrating device, the calibration of the amplifying of XY axles, linear and perpendicularity for three-dimensional optical flying-spot microscope, its advantage is sample It can be detected by optical instrument；Importantly, its measurement result is not limited by optical instrument maximum measurement inclination angle, also do not survey Measure the typical error of grid standard component；It is crucial that, this measurement equipment can be by change focus detection system detectio.

Brief description of the drawings

Fig. 1 is the structural representation of the calibration standard of the utility model prior art.

Fig. 2 is a kind of structural representation of the standard component of XY axis calibrations for three-dimensional optical flying-spot microscope of the utility model Figure.

Fig. 3 is a kind of stereochemical structure of the standard component of XY axis calibrations for three-dimensional optical flying-spot microscope of the utility model Schematic diagram.

Fig. 4 is that a kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope of the utility model is swept with change focusing Retouch the picture of microscope photographing.

Fig. 5 is that a kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope of the utility model is with focusing is become Result after the measurement and data processing of system.

Fig. 6 is that a kind of change of the standard component of XY axis calibrations for three-dimensional optical flying-spot microscope of the utility model focuses on survey Error Graph between amount system and reference data.

Embodiment

Below in conjunction with the accompanying drawings, preferably embodiment of the present utility model is described in further detail.

As shown in Fig. 2 ~ 3, a kind of standard component of XY axle linear gaugings for three-dimensional optical flying-spot microscope, it includes ball The size of sphere 2 in face array 1, the spherical array 1 is identical, and the spacing between the sphere 2 is identical, the spherical array 1 For 7 × 5 arrays.The diameter of a circle that the sphere 2 is projected on X/Y plane is 75 microns.Spacing between the sphere 2 is 13 Micron.The height of the sphere 2 is 8.5 microns.

It is punctual in the amplification of XY axles, the linear and perpendicularity correction for carrying out three-dimensional optical flying-spot microscope, using following steps：

（1）Standard component sample is placed on tested platform, standard component sample is aligned with the XY axles of measuring instrument.By standard Part sample adjusts level.

（2）Scanner scanning range and conditioning instrumentation parameter are adjusted, to reach relatively good brightness and contrast, is used The picture for becoming the calibrating device that confocal scanning microscopy is shot is as shown in Figure 4；Calibrating device is measured, with the measurement sum for becoming focusing system It is as shown in Figure 5 according to the result after processing.

（3）Data analysis is carried out, by gained measurement data leveling, by adjusting threshold value, optimizes the edge of data；Pass through number According to border, the center of each characteristic area can be calculated；By the center of gravity position of calculating and the calibration of standard component Position of centre of gravity information compare, so as to obtain the error analysis of system under test (SUT), become the mistake focused between measuring system and reference data Difference figure is as shown in Figure 6.

From Fig. 4 ~ Fig. 6, the XY axis school of three-dimensional optical flying-spot microscope is carried out using the standard component of the present embodiment On time, do not limited by the maximum measurement angle of optical instrument, also do not measure the typical error of grid standard component；And can be by Become focus detection system detectio, effect is fine.

Embodiment described above is better embodiment of the present utility model, and it is new not to limit this practicality with this The specific implementation scope of type, scope of the present utility model includes being not limited to present embodiment, all according to the utility model Shape, the equivalence changes made of structure are in protection domain of the present utility model.

Claims

1. a kind of standard component of XY axis calibrations for three-dimensional optical flying-spot microscope, it is characterised in that：It includes curved array, The curved surface is in the circle that is projected as of X/Y plane, and the curved surface is sphere or aspherical.

2. the standard component of the XY axis calibrations according to claim 1 for three-dimensional optical flying-spot microscope, it is characterised in that： Curved surface size in the curved array is identical, and the spacing between the curved surface is identical.

3. the standard component of the XY axis calibrations according to claim 2 for three-dimensional optical flying-spot microscope, it is characterised in that： The curved array is the array of 5 × 5 array ~ 21 × 21.

4. the standard component of the XY axis calibrations according to claim 3 for three-dimensional optical flying-spot microscope, it is characterised in that： A diameter of 10 ~ 200 microns of the curved surface.

5. the standard component of the XY axis calibrations according to claim 3 for three-dimensional optical flying-spot microscope, it is characterised in that： Spacing between the curved surface is more than 10 unit pixels.

6. the standard component of the XY axis calibrations according to claim 3 for three-dimensional optical flying-spot microscope, it is characterised in that： The height of the curved surface is 5 ~ 100 microns.