CN206368814U - A kind of two-stage air cooling Roots screw vacuum unit - Google Patents
A kind of two-stage air cooling Roots screw vacuum unit Download PDFInfo
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- CN206368814U CN206368814U CN201621055198.4U CN201621055198U CN206368814U CN 206368814 U CN206368814 U CN 206368814U CN 201621055198 U CN201621055198 U CN 201621055198U CN 206368814 U CN206368814 U CN 206368814U
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Abstract
The utility model is related to a kind of two-stage air cooling Roots screw vacuum unit, including the leaf Roots vaccum pump of air cooling three, gas heat-exchanger, screw vacuum pump and muffler, the exhaust outlet I of the leaf Roots vaccum pump of air cooling three is connected with the air inlet II of gas heat-exchanger by bellows, the lateral cooling gas exhaust outlet of two of gas heat-exchanger is respectively communicated with two lateral cooling gas air inlets of the leaf Roots vaccum pump of air cooling three by pipeline, the air inlet III that the exhaust outlet II of gas heat-exchanger passes through pipeline communication screw vacuum pump, the air inlet IV that the exhaust outlet III of screw vacuum pump passes through pipeline communication muffler.The beneficial effects of the utility model are:Quick startup screw pump is realized, variable frequency starting lobe pump, whole unit is big in condition of high vacuum degree lower pumping amount, and efficiency high, whole vacuum-pumping system has oil-free, clean and working service low cost and other advantages.
Description
Technical field
The utility model is related to a kind of two-stage air cooling Roots screw vacuum unit.
Background technology
With the application of vacuum work of the high-tech product such as chemical industry, the solvent recovery of pharmaceutical industry and semiconductor and microelectronic industry
The rapid growth of skill demand, current domestic existing vacuum pump set is still based on water ring pump, lobe pump, pawl pump etc., it is impossible to
Adapt to requirement of such market to solvent recovery and high vacuum oil-free clean environment.Screw pump is used as a kind of dry vacuum pump, tool
There are oil-free, the working characteristics of high vacuum, but the rate of air sucked in required of its single pump is relatively small, the production capacity that can not also meet above-mentioned industry expands
Big demand.Common lobe pump can greatly increase the pumping performance of fore pump under thick middle vacuum environment simultaneously.But it is due to
Its architectural characteristic, common lobe pump can not but start in atmospheric pressure, its be vented can not discharging directly into atmosphere, because of its use occasion
Receive strict limitation, it is necessary to could normal work under the cooperation of fore pump.
Accordingly, it is considered to above-mentioned technical need, it is necessary to design one kind can either reliable recovery technical process associated products, also
There can be the vacuum pump set of clean oil-free and high vacuum feature.
Utility model content
The technical problems to be solved in the utility model is:Based on above mentioned problem, there is provided a kind of two-stage air cooling Roots's screw rod is true
Empty unit.
The utility model solves the technical scheme that its technical problem used:A kind of two-stage air cooling Roots screw vacuum machine
Group, including the leaf Roots vaccum pump of air cooling three, gas heat-exchanger, screw vacuum pump and muffler, the leaf Roots vaccum pump of air cooling three
With an air inlet I, an exhaust outlet I and two lateral cooling gas air inlets, gas heat-exchanger has an air inlet
Mouth II, exhaust outlet II, two lateral a cooling gas exhaust outlets and a sewage draining exit, the exhaust of the leaf Roots vaccum pump of air cooling three
Mouth I is connected with the air inlet II of gas heat-exchanger by bellows, two lateral cooling gas exhausts of gas heat-exchanger
Mouth is respectively communicated with two lateral cooling gas air inlets of the leaf Roots vaccum pump of air cooling three, the row of gas heat-exchanger by pipeline
Gas port II passes through pipeline communication muffler by the air inlet III of pipeline communication screw vacuum pump, the exhaust outlet III of screw vacuum pump
Air inlet IV, the leaf Roots vaccum pump of air cooling three, gas heat-exchanger and screw vacuum pump surface offer to enter with cooling water
Cooling water intake, the cooling water outlet of outlet conduit connection, inside is respectively provided with cooling water pipeline.
Further, the leaf Roots vaccum pump of air cooling three is connected with motor by shaft coupling, and the leaf Roots vaccum pump of air cooling three enters
Pressure transmitter is connected with before gas port.
Further, motor, the leaf Roots vaccum pump of air cooling three, gas heat-exchanger and screw vacuum pump are installed in pedestal
On.
Further, filter is installed before the air inlet I of the leaf Roots vaccum pump of air cooling three.
Further, ball valve is installed on the sewage draining exit of gas heat-exchanger.
Further, screw vacuum pump is provided with before being connected with motor, the air inlet III of screw vacuum pump by shaft coupling
Check-valves and intake air temperature transmitter.
The beneficial effects of the utility model are:Two-stage air cooling Roots's screw vacuum unit uses three leaf air cooling lobe pump conducts
Main pump, and gas heat-exchanger is connected with the exhaust outlet of air cooling lobe pump, fore pump is true using the oil free screw of discharging directly into atmosphere
Empty pump, you can realize that the unit is quick first under atmospheric pressure and start screw pump, then pass through frequency-variable controller variable frequency starting gas
Cold Roots vaccum pump, enables to whole unit to have the very good speed of evacuation, moreover it is possible to discharging directly into atmosphere;Its vacuum constituted
The features such as extract system has oil-free, clean and rate of air sucked in required is big, pumping efficiency is high, can meet a variety of chemical industry and semiconductor microactuator electricity
The application requirement of the occasions such as son;Due to using clearance seal between the three lobe rotor and screw pump rotor of air cooling lobe pump, mutually
Do not contact, therefore whole unit possesses the advantages of smooth running, noise are low, vibration is small;Using air cooling lobe pump as main pump, have
Condition of high vacuum degree lower pumping amount is big, and efficiency high, because screw pump, air cooling lobe pump are oil-free dry vacuum pump, is not produced any
Waste water, waste gas, and exhaust can also be reclaimed in time, therefore unit has operation and maintenance low cost and other advantages, is highly suitable for
The high vacuum field settings of oil-free cleaning in the technical field such as chemical pharmaceutical and semiconductor.
Brief description of the drawings
The utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the pumping performance curve of two-stage air cooling Roots's screw vacuum unit;
Wherein:1. the leaf Roots vaccum pump of air cooling three, 1-1. air inlets I, 1-2. exhaust outlets I, the lateral cooling gas of 1-3. is entered
Gas port, 2. gas heat-exchangers, 2-1. air inlets II, 2-2. exhaust outlets II, the lateral cooling gas exhaust outlets of 2-3., 2-4. blowdowns
Mouthful, 3. screw vacuum pumps, 3-1. air inlets III, 3-2. exhaust outlets III, 4. mufflers, 4-1. air inlets IV, 5. bellowss, 6. is cold
But water water inlet, 7. cooling water outlets, 8. filters, 9. ball valves.
Embodiment
The utility model is further described presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram only to show
Meaning mode illustrates basic structure of the present utility model, therefore it only shows the composition relevant with the utility model.
A kind of two-stage air cooling Roots screw vacuum unit as shown in Figure 1, including the leaf Roots vaccum pump 1 of air cooling three, gas
Heat exchanger 2, screw vacuum pump 3 and muffler 4, the leaf Roots vaccum pump 1 of air cooling three have a 1-1 of air inlet I, an exhaust
I 1-2 and two lateral cooling gas air inlet 1-3 of mouth, gas heat-exchanger 2 has the 2-1 of air inlet II, an exhaust outlet
II 2-2, two lateral cooling gas exhaust outlet 2-3 and a sewage draining exit 2-4, the 1- of exhaust outlet I of the leaf Roots vaccum pump 1 of air cooling three
2 are connected with the 2-1 of air inlet II of gas heat-exchanger 2 by bellows 5, two lateral cooling gas of gas heat-exchanger 2
Exhaust outlet 2-3 is respectively communicated with two lateral cooling gas air inlet 1-3 of the leaf Roots vaccum pump 2 of air cooling three, gas by pipeline
The 2-2 of exhaust outlet II of heat exchanger 2 passes through the 3-1 of air inlet III of pipeline communication screw vacuum pump 3, the exhaust of screw vacuum pump 3
III 3-2 of mouth passes through the 4-1 of air inlet IV of pipeline communication muffler 4, the leaf Roots vaccum pump 1 of air cooling three, gas heat-exchanger 2 and spiral shell
The surface of bar vavuum pump 3 offers the cooling water intake 6 connected with cooling water inlet and outlet pipe lines, cooling water outlet 7, internal
It is respectively provided with cooling water pipeline.
The leaf Roots vaccum pump 1 of air cooling three is connected with motor, the air inlet I of the leaf Roots vaccum pump 1 of air cooling three by shaft coupling
Pressure transmitter is connected with before 1-1.
Motor, the leaf Roots vaccum pump 1 of air cooling three, gas heat-exchanger 2 and screw vacuum pump 3 are installed on pedestal.
Filter 8 and pressure transmitter are installed before the 1-1 of air inlet I of the leaf Roots vaccum pump 1 of air cooling three.
Ball valve 9 is installed on the sewage draining exit 2-4 of gas heat-exchanger 2.
Screw vacuum pump 3 is provided with non-return before being connected with motor, the 3-1 of air inlet III of screw vacuum pump 3 by shaft coupling
Valve and intake air temperature transmitter.
Operation principle is as follows:The air inlet that the exhaust outlet of the leaf Roots vaccum pump of air cooling three passes through bellows and gas heat-exchanger
Mouthful be connected, the high-temperature gas of the leaf Roots vaccum pump of air cooling three discharge in gas heat-exchanger by the cooling water cooling in it, its
Temperature is reduced, and from two lateral cooling gas exhaust outlet discharges of gas heat-exchanger, leaf sieve of air cooling three is imported by pipeline
The lateral cooling gas air inlet of thatch vavuum pump bilateral, due to lateral cooling gas air inlet and the leaf of air cooling three of lobe pump bilateral
The exhaust outlet connection of Roots vaccum pump, cooling gas is mixed with the high-temperature gas of discharge again, and is expelled to gas by circulation
Heat exchanger, therefore the pumping performance of the leaf Roots vaccum pump of air cooling three is not interfered with, while can be to the leaf Roots vaccum pump of air cooling three
The pump housing and rotor cooled down, prevent the exhaust of the leaf Roots vaccum pump of air cooling three produce huge gas compression heat cause the pump housing with
There is the stuck problem of overheat expansion in rotor.
Gas heat-exchanger has an exhaust outlet in afterbody, screw vacuum pump steam inlet is connected to, in screw vacuum pump
Exhaust outlet after be connected to a muffler, muffler can reduce the exhaust noise of air cooling Roots's screw vacuum unit, prevent it
Environment is polluted, gas heat-exchanger bottom has is connected to a ball valve on sewage draining exit, sewage draining exit, for opening and the row of closing
Dirty mouth, sewage draining exit can by inside gas heat-exchanger because the leaf Roots vaccum pump of air cooling three discharges all kinds of condensations brought into of gas
Material and oil vapour discharge, keep clean inside gas heat-exchanger.
Two-stage air cooling Roots's screw vacuum unit uses three leaf air cooling lobe pumps as main pump, and in three leaf air cooling lobe pumps
Exhaust outlet be connected with gas heat-exchanger, fore pump uses the rotors for dry double-screw vacuum pump of discharging directly into atmosphere, you can realize the unit
It is quick first under atmospheric pressure to start screw pump, then by frequency-variable controller variable frequency starting air-cooled roots vacuum pump, it can make
Obtaining whole unit has the very good speed of evacuation, moreover it is possible to discharging directly into atmosphere;Its constitute vacuum-pumping system there is oil-free, it is clean
The features such as net and rate of air sucked in required is big, pumping efficiency is high, can meet the application requirement of the occasions such as a variety of chemical industry and semiconductor microelectronic;
Due to using clearance seal between the three lobe rotor and screw pump rotor of air cooling lobe pump, it is not in contact with each other, therefore whole unit
Possess the advantages of smooth running, noise are low, vibration is small;It is big with condition of high vacuum degree lower pumping amount using air cooling lobe pump as main pump,
Efficiency high, because screw pump, air cooling lobe pump are oil-free dry vacuum pump, does not produce any waste water, waste gas, and can also and
Shi Huishou is vented, therefore unit has operation and maintenance low cost and other advantages, is highly suitable for the skills such as chemical pharmaceutical and semiconductor
The high vacuum field settings of oil-free cleaning in art field.
Pumping performance curve such as Fig. 2 of two-stage air cooling Roots's screw vacuum unit shows, two-stage air cooling Roots's screw vacuum machine
Group has the speed of exhaust high compared with screw vacuum pump under middle high vacuum, starts fast, the features such as taking short.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this utility model technological thought completely.This reality
The content on specification is not limited to new technical scope, it is necessary to its technology is determined according to right
Property scope.
Claims (6)
1. a kind of two-stage air cooling Roots screw vacuum unit, including the leaf Roots vaccum pump (1) of air cooling three, gas heat-exchanger (2),
Screw vacuum pump (3) and muffler (4), it is characterized in that:The leaf Roots vaccum pump (1) of air cooling three have air inlet I (1-1),
One exhaust outlet I (1-2) and two lateral cooling gas air inlets (1-3), gas heat-exchanger (2) have an air inlet II
(2-1), an exhaust outlet II (2-2), two lateral cooling gas exhaust outlets (2-3) and a sewage draining exit (2-4), the leaf of air cooling three
The exhaust outlet I (1-2) of Roots vaccum pump (1) is connected with the air inlet II (2-1) of gas heat-exchanger (2) by bellows (5),
The lateral cooling gas exhaust outlet (2-3) of two of gas heat-exchanger (2) is respectively communicated with the leaf Roots vacuum of air cooling three by pipeline
The lateral cooling gas air inlet (1-3) of two of pump (2), the exhaust outlet II (2-2) of gas heat-exchanger (2) passes through pipeline communication
The air inlet III (3-1) of screw vacuum pump (3), the exhaust outlet III (3-2) of screw vacuum pump (3) passes through pipeline communication muffler
(4) air inlet IV (4-1), the leaf Roots vaccum pump (1) of air cooling three, gas heat-exchanger (2) and screw vacuum pump (3) surface are equal
The cooling water intake (6) connected with cooling water inlet and outlet pipe lines, cooling water outlet (7) are offered, inside is respectively provided with cooling
Water lines.
2. a kind of two-stage air cooling Roots screw vacuum unit according to claim 1, it is characterized in that:The described leaf of air cooling three
Roots vaccum pump (1) is connected with before being connected with motor, the air inlet I (1-1) of the leaf Roots vaccum pump (1) of air cooling three by shaft coupling
Pressure transmitter.
3. a kind of two-stage air cooling Roots screw vacuum unit according to claim 2, it is characterized in that:Described motor, gas
Cold three leaves Roots vaccum pump (1), gas heat-exchanger (2) and screw vacuum pump (3) are installed on pedestal.
4. a kind of two-stage air cooling Roots screw vacuum unit according to claim 1, it is characterized in that:The described leaf of air cooling three
Filter (8) is installed before the air inlet I (1-1) of Roots vaccum pump (1).
5. a kind of two-stage air cooling Roots screw vacuum unit according to claim 1, it is characterized in that:Described air heat is handed over
Ball valve (9) is installed on the sewage draining exit (2-4) of parallel operation (2).
6. a kind of two-stage air cooling Roots screw vacuum unit according to claim 1, it is characterized in that:Described screw vacuum
Pump (3) is connected with before motor, the air inlet III (3-1) of screw vacuum pump (3) by shaft coupling to be provided with check-valves and enters temperature
Spend transmitter.
Priority Applications (1)
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CN201621055198.4U CN206368814U (en) | 2016-09-13 | 2016-09-13 | A kind of two-stage air cooling Roots screw vacuum unit |
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CN201621055198.4U CN206368814U (en) | 2016-09-13 | 2016-09-13 | A kind of two-stage air cooling Roots screw vacuum unit |
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CN206368814U true CN206368814U (en) | 2017-08-01 |
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CN201621055198.4U Active CN206368814U (en) | 2016-09-13 | 2016-09-13 | A kind of two-stage air cooling Roots screw vacuum unit |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109372748A (en) * | 2018-12-05 | 2019-02-22 | 江阴爱尔姆真空设备有限公司 | A kind of vacuum pump set device of screw vacuum and Roots vacuum joint transformation |
CN113374693A (en) * | 2021-07-03 | 2021-09-10 | 浙江珂勒曦动力设备股份有限公司 | Roots screw pump unit control method, system, terminal and storage medium |
-
2016
- 2016-09-13 CN CN201621055198.4U patent/CN206368814U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109372748A (en) * | 2018-12-05 | 2019-02-22 | 江阴爱尔姆真空设备有限公司 | A kind of vacuum pump set device of screw vacuum and Roots vacuum joint transformation |
CN113374693A (en) * | 2021-07-03 | 2021-09-10 | 浙江珂勒曦动力设备股份有限公司 | Roots screw pump unit control method, system, terminal and storage medium |
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