CN206348593U - A kind of LDI automatic dust removing apparatus - Google Patents
A kind of LDI automatic dust removing apparatus Download PDFInfo
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- CN206348593U CN206348593U CN201621485705.8U CN201621485705U CN206348593U CN 206348593 U CN206348593 U CN 206348593U CN 201621485705 U CN201621485705 U CN 201621485705U CN 206348593 U CN206348593 U CN 206348593U
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- dust
- removing apparatus
- integrated pipe
- exposure
- drifting
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Abstract
The utility model provides a kind of LDI automatic dust removing apparatus, including the dust suction subassembly for being arranged on the drifting dust component at exposure head group rear and being arranged in front of exposure head group；The drifting dust component is mainly constituted by drifting dust valve and with the compressed air source that the drifting dust valve is connected；The dust suction subassembly it is main by be fixed on board and the integrated pipe with a venthole and several air admission holes, be connected with the venthole of the integrated pipe industrial dust collector, be arranged in parallel with the integrated pipe and the fix bar being fixedly connected by connecting rod and bottom carry some sweep-up pipes that cleaner head and top pass through the air admission hole of the fix bar and the integrated pipe to connect one to one and constituted.The utility model is simple in construction, reasonable in design, can extend to the dust collecting process of pcb board in exposure process before exposing, and improves the exposure production capacity of LDI equipment, reduces product fraction defective and no material consumption.
Description
Technical field
The utility model is related to semiconductor lithography machine technical field, specifically a kind of LDI automatic dust removing apparatus.
Background technology
Pcb board dedusting is the important procedure before lithographic equipment exposure, it is necessary to which pcb board surface is removed before equipment exposure process
Dirt.If pcb board adsorption there are the particulate matters such as dust, metal fillings, human body scurf, occur that exposure is unintelligible even during exposure
Breakpoint phenomenon.
Pcb board dedusting is the technical barrier of photoetching process, and traditional PCB plate dedusting is manually with binding dust roller on pcb board
Roll around and reach dedusting purpose, this process probably needs 10~20 seconds, and too long, otherwise this process can not shift to an earlier date before exposing
Dust may be adsorbed again before pcb board exposure, therefore can largely effect on operating efficiency, be unfavorable for the raising that pcb board exposes production capacity.
In exposure process, pcb board absorption is all around moved in X, Y both direction in exposure stage, is also had during this and is inhaled again
The possibility of attached dust granule, therefore product fraction defective can be increased.Therefore, pcb board dedusting, while production capacity, reduction fraction defective are improved,
It is problem of the pendulum in face of litho machine.
Utility model content
The purpose of this utility model is to provide a kind of LDI automatic dust removing apparatus, asked with solving the dedusting before pcb board exposure
Topic, so as to improve production capacity, reduction fraction defective.
The technical solution of the utility model is：
A kind of LDI automatic dust removing apparatus, including be arranged on the drifting dust component at exposure head group rear and be arranged on exposure machine
Dust suction subassembly in front of head group；The compressed air source that the drifting dust component is mainly connected by drifting dust valve and with the drifting dust valve
Composition；The dust suction subassembly it is main by be fixed on board and the integrated pipe with a venthole and several air admission holes and
The industrial dust collector of the venthole connection of the integrated pipe, it be arranged in parallel and is fixedly connected by connecting rod with the integrated pipe
Fix bar and bottom carry cleaner head and top connects one to one through the fix bar and the air admission hole of the integrated pipe
Some sweep-up pipes composition.
Described LDI automatic dust removing apparatus, the drifting dust valve is connected with compressed air source by tracheae.
Described LDI automatic dust removing apparatus, the venthole of the integrated pipe is connected with industrial dust collector by vacuum tube.
Described LDI automatic dust removing apparatus, the top of the sweep-up pipe is threadedly coupled with the air admission hole of integrated pipe.
Described LDI automatic dust removing apparatus, the sweep-up pipe is fixed in fix bar by jackscrew.
Described LDI automatic dust removing apparatus, the cleaner head uses silica gel cleaner head.
The beneficial effects of the utility model are：
As shown from the above technical solution, the utility model is simple in construction, reasonable in design, can be by the dust collecting process of pcb board
Extended to before exposing in exposure process, efficiently solve the dust removal problem before pcb board exposure and in exposure process, improve
The exposure production capacity of LDI equipment, reduces product fraction defective and no material consumption.
Brief description of the drawings
Fig. 1 is the side view that the utility model is arranged on board；
Fig. 2 is the 3 D stereo view of dust suction subassembly of the present utility model；
Fig. 3 is the cross section view of dust suction subassembly of the present utility model；
Fig. 4 is the 3 D stereo view that dust suction subassembly of the present utility model is arranged on board.
Embodiment
Below in conjunction with the accompanying drawings the utility model is further illustrated with specific embodiment.
As shown in Figure 1 to 4, a kind of LDI automatic dust removing apparatus, including drifting dust component and dust suction subassembly, drifting dust component peace
Mounted in the rear of exposure head group 04, dust suction subassembly is arranged on the front of exposure head group.Drifting dust modular construction is simple, and one is blown
Dust and gas mouth 11 is connected to the compressed air source of cleaning by tracheae, uses the break-make of solenoid valve control compressed air source.Dust suction group
Part includes integrated pipe 21, sweep-up pipe 22, cleaner head 23, fix bar 24, connecting rod 25, vacuum tube 26 and industrial dust collector 27.Collection
It is fixed on into pipe 21 on board 01, with a venthole and several air admission holes, the venthole of integrated pipe 21 passes through vacuum tube
26 are connected with industrial dust collector 27.Sweep-up pipe 22 has seven, accordingly, and cleaner head 23 also has seven.Cleaner head 23, which is arranged on, inhales
The bottom of dirt pipe 22, the top of sweep-up pipe 22 is corresponded through fix bar 24 with the air admission hole of integrated pipe 21 to be threadedly coupled.Inhale
Dirt pipe 22 is fixed in fix bar 24 by jackscrew.Fix bar 24 be arranged in parallel with integrated pipe 21, solid by two connecting rods 25
Fixed connection.Cleaner head 23 uses silica gel cleaner head.Using the dust suction of industrial dust collector 27, no material consumption.Integrated pipe 21 is directly connected in
On board 01, dust suction subassembly is not moved with the exposure stage of pcb board 03.
Operation principle of the present utility model：
Pcb board 03 is positioned on X-Y shaft platforms 02, and while exposure starts, industrial dust collector 27 starts, X-Y shaft platforms
02 drive pcb board 03 travels forward, and pcb board 03 enters at once after the dust suction subassembly dedusting set against exposure head group 04
Exposure area 05, it is to avoid adsorb dust granule again before exposure.Exposure terminate all the way after, X-Y shaft platforms 02 drive pcb board 03 to
Motion is backed to square one afterwards, and subsequent X-Y shaft platforms 02 drive pcb board 03 to move right, and starts the exposure of the second tunnel.The exposure of second tunnel is opened
Begin, X-Y shaft platforms 02 drive pcb board 03 to travel forward again, and pcb board 03 again passes by dust suction subassembly dedusting, even if the first via
Pcb board 03 adsorbs dust granule again after exposure, and dust suction subassembly also can dedusting again when the second tunnel exposes, it is to avoid in exposure process
Dust pollution.During exposure, the alignment of drifting dust valve 11 exposure area 05 in drifting dust component will be in exposure region
Binding dust on the pcb board 03 in domain 05 is blown afloat, and dust suction subassembly siphons away binding dust, and dust suction subassembly works always, and drifting dust component is exposing
Act, use cooperatively in photoreduction process, it is ensured that exposure area influences the production yield of pcb board 03 without binding dust.
Embodiment described above is only that preferred embodiment of the present utility model is described, not to this practicality
New scope is defined, on the premise of the utility model design spirit is not departed from, and those of ordinary skill in the art are to this
Various modifications and improvement that the technical scheme of utility model is made, all should fall into the guarantor that claims of the present utility model are determined
In the range of shield.
Claims (6)
1. a kind of LDI automatic dust removing apparatus, it is characterised in that：Drifting dust component and setting including being arranged on exposure head group rear
Dust suction subassembly in front of exposure head group；The pressure that the drifting dust component is mainly connected by drifting dust valve and with the drifting dust valve
Contracting air-source is constituted；The dust suction subassembly is main by being fixed on board and having a venthole and the collection of several air admission holes
Cheng Guan, the industrial dust collector being connected with the venthole of the integrated pipe and the integrated pipe be arranged in parallel and solid by connecting rod
Surely the fix bar connected and bottom carry cleaner head and top passes through the air admission hole of the fix bar and the integrated pipe one by one
Some sweep-up pipes composition of correspondence connection.
2. LDI automatic dust removing apparatus according to claim 1, it is characterised in that：The drifting dust valve and compressed air source
Connected by tracheae.
3. LDI automatic dust removing apparatus according to claim 1, it is characterised in that：The venthole of the integrated pipe and industry
Dust catcher is connected by vacuum tube.
4. LDI automatic dust removing apparatus according to claim 1, it is characterised in that：The top of the sweep-up pipe and integrated pipe
Air admission hole threaded connection.
5. LDI automatic dust removing apparatus according to claim 1, it is characterised in that：The sweep-up pipe is fixed on by jackscrew
In fix bar.
6. LDI automatic dust removing apparatus according to claim 1, it is characterised in that：The cleaner head uses silica gel cleaner head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621485705.8U CN206348593U (en) | 2016-12-31 | 2016-12-31 | A kind of LDI automatic dust removing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621485705.8U CN206348593U (en) | 2016-12-31 | 2016-12-31 | A kind of LDI automatic dust removing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206348593U true CN206348593U (en) | 2017-07-21 |
Family
ID=59323138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621485705.8U Active CN206348593U (en) | 2016-12-31 | 2016-12-31 | A kind of LDI automatic dust removing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206348593U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161808A (en) * | 2019-05-09 | 2019-08-23 | 上海华力微电子有限公司 | Grating scale cleaning device and method, litho machine |
| CN114453339A (en) * | 2022-01-25 | 2022-05-10 | 常德市捷芯微电子科技有限公司 | A dust collecting equipment for production of lamp area controller PCB board is used |
-
2016
- 2016-12-31 CN CN201621485705.8U patent/CN206348593U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161808A (en) * | 2019-05-09 | 2019-08-23 | 上海华力微电子有限公司 | Grating scale cleaning device and method, litho machine |
| CN110161808B (en) * | 2019-05-09 | 2022-02-22 | 上海华力微电子有限公司 | Grating scale cleaning device and method and photoetching machine |
| CN114453339A (en) * | 2022-01-25 | 2022-05-10 | 常德市捷芯微电子科技有限公司 | A dust collecting equipment for production of lamp area controller PCB board is used |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee after: Hefei Xinqi microelectronics equipment Co., Ltd Address before: Two, H2 building, No. 2800, Wangjiang Industrial Park, 230088 Wangjiang West Road, hi tech Zone, Anhui, Hefei, 533 Patentee before: HEFEI XINQI MICROELECTRONIC EQUIPMENT CO., LTD. |