CN206331052U - Panel structure and electrostatic damage detection system - Google Patents

Panel structure and electrostatic damage detection system Download PDF

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Publication number
CN206331052U
CN206331052U CN201621330420.7U CN201621330420U CN206331052U CN 206331052 U CN206331052 U CN 206331052U CN 201621330420 U CN201621330420 U CN 201621330420U CN 206331052 U CN206331052 U CN 206331052U
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pattern
discharge
those
impedance
conductor
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彭懿正
张志嘉
刘智维
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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Abstract

The utility model discloses a panel structure and electrostatic destruction detecting system. The panel structure comprises a flexible substrate and an electrostatic detection structure. The static electricity detection structure is positioned on the flexible substrate and comprises a plurality of static electricity detection units. Each static electricity detection unit includes a first conductor and a second conductor. The first conductor includes a plurality of discharge patterns. The second conductor includes a plurality of determination patterns. The discharge patterns and one of the determination patterns define discharge paths. In each static electricity detection cell, the designed impedance of each discharge path is the same as each designed impedance of the remaining discharge paths. The design impedance is a sum of an impedance of at least one of the discharge pattern and the determination pattern and an impedance of a medium between the discharge pattern and the determination pattern. In each static electricity detection unit, the width of the determination pattern is different, or the distance between the determination pattern and the discharge pattern is different. A system for detecting electrostatic discharge damage is also provided.

Description

Panel construction and electrostatic breakdown detecting system
Technical field
The utility model is related to a kind of panel and detecting system, and more particularly to a kind of face for having electrostatic detection structure Hardened structure and electrostatic breakdown detecting system.
Background technology
During panel construction is manufactured, the phenomenon of buildup of static electricity is also easy to produce in board or panel construction.When electric charge is tired Product to after certain amount, just probably due to static discharge (Electrostatic Discharge, ESD) and cause panel construction Interior element wrecks.In general, the electrification ability (triboelectric of flexible base plate (such as polyimide substrate) Capacity) it is 3 times of glass substrate.That is, the element being made on flexible base plate is than being made on glass substrate Element is easier to be destroyed by static discharge.
Existing electrostatic breakdown detection method mainly uses the detection mode of contact.Illustrated with active component array base board Illustrate, after active member completes, the testing cushion of gate wirings and source wiring can be directly contacted with probe (probe), And by a tester table (tester) input test signal, sequentially to carry out electrical detection to each active member, so as to judge each Active member could normal operation, and bad active member is repaired.The above method is except that can not analyze electric stress Outside, electrostatic breakdown must could be detected after element completes, therefore can not be changed immediately for electrostatic breakdown source Kind and control, so as to be difficult to be effectively reduced crash rate.Especially with gate driving circuit substrate (Gate On Array, GOA) the panel construction of technology, its ratio failed by electrostatic discharges is more up to 40%.
Utility model content
The purpose of this utility model is to provide a kind of panel construction, and it helps to analyze electric stress.
A further object of the present utility model is to provide a kind of electrostatic breakdown detecting system, and it helps to reduce crash rate.
For up to above-mentioned purpose, the utility model provides a kind of panel construction, and it includes flexible base plate and electrostatic detection knot Structure.Electrostatic detection structure is located on flexible base plate and including multiple electrostatic detection units.Each electrostatic detection unit is led including first Body and the second conductor.First conductor includes induction electrode and the multiple discharge patterns electrically connected with induction electrode.Second leads Body includes earth electrode and the multiple judgement patterns electrically connected with earth electrode.Discharge pattern is with judging that pattern is located at induced electricity Between pole and earth electrode, and discharge pattern defines discharge path with wherein one judgement pattern respectively.In each electrostatic detection list In member, the design impedance of each discharge path is identical with each design impedance of remaining discharge path.Design impedance be discharge pattern with And the summation of the impedance of the medium between the impedance of at least one of which of judgement pattern and discharge pattern and judgement pattern. In each electrostatic detection unit, judge that the width of pattern is different, or judge the distance between pattern and discharge pattern difference.
Those electrostatic detection units are arranged in array and cover the flexible base plate comprehensively.
The flexible base plate has one week border area of an element region and the adjacent element region, the arrangement of those electrostatic detection units In the Zhou Bianqu and expose the element region.
The medium includes air, at least an at least insulating barrier, a conductor or foregoing at least two combination.
The design impedance is the summation of the impedance and the impedance of the medium of the discharge pattern, and in the respectively electrostatic detection unit In, the width of those discharge patterns is identical, and those judge that the width of pattern is different, and those judge pattern and those discharge patterns The distance between it is identical.
The design impedance is the summation of the impedance and the impedance of the medium of the judgement pattern, and in the respectively electrostatic detection unit In, the width of those discharge patterns and those judgement patterns is identical, and those are judged between patterns and those discharge patterns Distance is different.
The design impedance is the summation of the impedance, the impedance of the judgement pattern and the impedance of the medium of the discharge pattern, And in the respectively electrostatic detection unit, the width of those discharge patterns is different, those judge that the width of pattern is different, and those are sentenced Determine the distance between pattern and those discharge patterns difference.
Respectively the electrostatic detection unit also includes being located at one the 3rd conductor between first conductor and second conductor, and this Three conductors have multiple conductive patterns, and respectively the conductive pattern is located therein on a discharge path, and in the respectively discharge path, should Conductive pattern is located between the discharge pattern and the judgement pattern, wherein the conductive pattern, the discharge pattern and the process decision chart Case is separated each other.
3rd conductor also includes multiple first connecting portions and multiple second connecting portions, respectively the first connecting portion and each The second connecting portion is located therein on a discharge path, and in the respectively discharge path, the first connecting portion connects the electric discharge figure Case and the conductive pattern, the second connecting portion connect the judgement pattern and the conductive pattern.
Respectively the electrostatic detection unit also includes being located at one the 3rd conductor between first conductor and second conductor, and this Three conductors have multiple conductive patterns, and respectively the conductive pattern is located therein on a discharge path, and in the respectively discharge path, should Conductive pattern is located between the discharge pattern and the judgement pattern, and wherein the conductive pattern connects the discharge pattern and the process decision chart Case.
The utility model also provides a kind of electrostatic breakdown detecting system, including:Panel construction, it includes:Flexible base plate;And Electrostatic detection structure, on the flexible base plate and including multiple electrostatic detection units, wherein respectively the electrostatic detection unit includes One first conductor and one second conductor, first conductor include an induction electrode and electrically connected with the induction electrode it is multiple Discharge pattern, second conductor includes an earth electrode and the multiple judgement patterns electrically connected with the earth electrode, and those are put Electrical pattern and those judge that patterns are located between the induction electrode and the earth electrode, and those discharge patterns are respectively with wherein one Judge that pattern defines a discharge path, in the respectively electrostatic detection unit, respectively the one of the discharge path designs impedance and remaining Respectively design impedance of those discharge paths is identical, and the design impedance is the wherein at least of the discharge pattern and the judgement pattern The summation of the impedance of a medium between the impedance of one and the discharge pattern and the judgement pattern, and in the respectively electrostatic detection In unit, those judge that the width of pattern is different, or those judge the distance between pattern and those discharge patterns difference;With And image detection device, detect that those judge the outward appearance of pattern whether by electrostatic breakdown.
Those electrostatic detection units are arranged in array and cover the flexible base plate comprehensively.
The flexible base plate has one week border area of an element region and the adjacent element region, the arrangement of those electrostatic detection units In the Zhou Bianqu and expose the element region.
The medium includes air, at least an at least insulating barrier, a conductor or foregoing at least two combination.
The design impedance is the summation of the impedance and the impedance of the medium of the discharge pattern, and in the respectively electrostatic detection unit In, the width of those discharge patterns is identical, and those judge that the width of pattern is different, and those judge pattern and those discharge patterns The distance between it is identical.
The design impedance is the summation of the impedance and the impedance of the medium of the judgement pattern, and in the respectively electrostatic detection unit In, the width of those discharge patterns and those judgement patterns is identical, and those are judged between patterns and those discharge patterns Distance is different.
The design impedance is the summation of the impedance, the impedance of the judgement pattern and the impedance of the medium of the discharge pattern, And in the respectively electrostatic detection unit, the width of those discharge patterns is different, those judge that the width of pattern is different, and those are sentenced Determine the distance between pattern and those discharge patterns difference.
Respectively the electrostatic detection unit also includes being located at one the 3rd conductor between first conductor and second conductor, and this Three conductors have multiple conductive patterns, and respectively the conductive pattern is located therein on a discharge path, and in the respectively discharge path, should Conductive pattern is located between the discharge pattern and the judgement pattern, wherein the conductive pattern, the discharge pattern and the process decision chart Case is separated each other.
3rd conductor also includes multiple first connecting portions and multiple second connecting portions, respectively the first connecting portion and each The second connecting portion is located therein on a discharge path, and in the respectively discharge path, the first connecting portion connects the electric discharge figure Case and the conductive pattern, the second connecting portion connect the judgement pattern and the conductive pattern.
Respectively the electrostatic detection unit also includes being located at one the 3rd conductor between first conductor and second conductor, and this Three conductors have multiple conductive patterns, and respectively the conductive pattern is located therein on a discharge path, and in the respectively discharge path, should Conductive pattern is located between the discharge pattern and the judgement pattern, and wherein the conductive pattern connects the discharge pattern and the process decision chart Case.
The utility model has the advantage of, a kind of electrostatic breakdown detecting system of the present utility model, it includes above-mentioned face Hardened structure and image detection device.Whether image detection device detection judges the outward appearance of pattern by electrostatic breakdown.
For features described above of the present utility model and advantage can be become apparent, special embodiment below, and coordinate appended Accompanying drawing is described in detail below.
Brief description of the drawings
Figure 1A is a kind of upper schematic diagram of panel construction of first embodiment of the present utility model;
Figure 1B is the first diagrammatic cross-section along Figure 1A Vertical Centre Lines I-I ';
Fig. 2 is the equivalent circuit diagram of electrostatic detection unit in Figure 1A;
Fig. 3 A and Fig. 3 B are the diagrammatic cross-sections of other kind of panel construction of first embodiment of the present utility model;
Fig. 4 is the upper schematic diagram of another panel construction according to first embodiment of the present utility model;
Fig. 5 A to Fig. 5 E are the upper schematic diagrams of other kind of receiving terminal of induction electrode in Figure 1A;
Fig. 6 A to Fig. 6 G are the upper schematic diagrams of other kind of electrostatic detection unit of panel construction in Figure 1A;
Fig. 7 and Fig. 8 are that the upper of the panel construction of second embodiment of the present utility model and 3rd embodiment regards signal respectively Figure;
Fig. 9 is a kind of schematic diagram of electrostatic breakdown detecting system of first embodiment of the present utility model;
Figure 10 and Figure 11 are two kinds of schematic flow sheets of the detection method of Fig. 9 electrostatic breakdown detecting system respectively.
Symbol description
10:Electrostatic breakdown detecting system
12、100、100A、100B、100C、200、300:Panel construction
14:Image detection device
110、110A:Flexible base plate
120:Electrostatic detection structure
A1:Element region
A2:Zhou Bianqu
C1:First conductor
C2:Second conductor
C3:3rd conductor
C11:Induction electrode
C12:Discharge pattern
C21:Earth electrode
C22:Judge pattern
C31:Conductive pattern
C32:First connecting portion
C33:Second connecting portion
D:Distance
E12、E22:End
ESD:Electrostatic
IN:Insulating barrier
IN1:First insulating barrier
IN2:Second insulating barrier
L:Line segment
LA:Broken line
L12、L22:Length
M:Medium
P1、P2、P3、P4:Discharge path
R、RA、RB、RC、RD:Receiving terminal
S1、S2、S3、S4、S5、S6、S7、S8:Step
T:Tip
U、UA、UB、UC、UD、UE、UF、UG:Electrostatic detection unit
W12、W22:Width
X:Orientation
ZH1、ZH2、ZH3、ZH4、ZS1、ZS2、ZS3、ZS4、ZG1、ZG2、ZG3、ZG4:Impedance
I-I’:Hatching line
Embodiment
Figure 1A is a kind of upper schematic diagram of panel construction according to first embodiment of the present utility model.Figure 1B is along figure 1A Vertical Centre Lines I-I ' the first diagrammatic cross-section.Fig. 2 is the equivalent circuit diagram of electrostatic detection unit in Figure 1A.
Figure 1A and Figure 1B is refer to, panel construction 100 includes flexible base plate 110 and electrostatic detection structure 120.Electrostatic is examined Geodesic structure 120 is located on flexible base plate 110 and (Figure 1A schematic indications go out an electrostatic inspection including multiple electrostatic detection unit U Survey unit U).Electrostatic detection unit U is for example arranged in array and covering flexible base plate 110, but is not limited.
Each electrostatic detection unit U includes the first conductor C1 and the second conductor C2.First conductor C1 and the second conductor C2 It can be set on the same layer.For example, the first conductor C1 and the second conductor C2 can be co-located on the table of flexible base plate 110 On face, but it is not limited.
First conductor C1 includes the induction electrode C11 and multiple discharge pattern C12 electrically connected with induction electrode C11.The Two conductor C2 include the earth electrode C21 and multiple judgement pattern C22 electrically connected with earth electrode C21.Induction electrode C11 with Discharge pattern C12 can be located on same layer, and earth electrode C21 is with judging that pattern C22 may be alternatively located on same layer, but not with this It is limited.For example, induction electrode C11 can be located at different from discharge pattern C12 (or earth electrode C21 is with judging pattern C22) On layer, and induction electrode C11 and discharge pattern C12 (or earth electrode C21 with judge pattern C22) can by perforation electrical phase Even.In addition, can be connected together along the electrostatic detection unit U for the orientation X arrangements for judging pattern C22 earth electrode C21, But it is not limited.
Discharge pattern C12 and judgement pattern C22 are located between induction electrode C11 and earth electrode C21, and discharge pattern C12 is identical with the quantity for judging pattern C22, and it is respectively 4 that Figure 1A, which illustrates discharge pattern C12 with judging pattern C22 quantity, but this Embodiment is not limited.It is each to judge that a pattern C22 correspondences wherein discharge pattern C12 is set, to receive from described wherein one Discharge pattern C12 electrostatic ESD.Furthermore, discharge pattern C12 defines electric discharge with wherein one judgement pattern C22 respectively Path, discharge path P1, P2, P3, P4 as shown in Figure 2.
In fig. 2, ZH1、ZH2、ZH3、ZH4It is discharge path P1, discharge path P2, discharge path P3, discharge path P4 respectively Middle discharge pattern C12 impedance;ZS1、ZS2、ZS3、ZS4It is discharge path P1, discharge path P2, discharge path P3, electric discharge road respectively Pattern C22 impedance is judged in the P4 of footpath;ZG1、ZG2、ZG3、ZG4It is discharge path P1, discharge path P2 respectively, discharge path P3, puts It is located at discharge pattern C12 in power path P4 and judges the impedance of the medium M between pattern C22.Medium M is to be located at discharge pattern C12 and the medium for judging transmission electrostatic ESD between pattern C22, it may include air, at least an at least insulating barrier, a conductor Or foregoing at least two combination.In fig. ib, medium M is air, but is not limited.
In each electrostatic detection unit U, the design impedance of each discharge path and each design impedance phase of remaining discharge path Together.The design impedance is the impedance and medium M impedance of discharge pattern C12 and at least one of which for judging pattern C22 Summation.According to different design requirements, design impedance can be discharge pattern C12 impedance with medium M impedance summation, Judge the summation of pattern C22 impedance and medium M impedance or discharge pattern C12 impedance, judge pattern C22 impedance with And the summation of medium M impedance.
Figure 1A electrostatic detection structure 120 is for example designed to observation electric charge damage capability (size of current).Design impedance It is defined as the summation of discharge pattern C12 impedance and medium M impedance.If being illustrated with Fig. 2, (ZH1+ZG1)=(ZH2+ZG2)= (ZH3+ZG3)=(ZH4+ZG4).In the present embodiment, make to design impedance (discharge pattern C12 impedance and medium in each discharge path The summation of M impedance) with each design impedance identical method in remaining discharge path it is, for example, to make discharge pattern C12 width W12 is identical, and makes the distance between judgement pattern C22 and discharge pattern C12 D identical, but is not limited.
By above-mentioned design, in each electrostatic detection unit U, be transferred to each judgement pattern C22 size of current it is identical and Probability is identical.Under the design, judgement can be made by adjusting each width W22 for judging pattern C22 in each electrostatic detection unit U Pattern C22 has different electric charge tolerances, so that by electrostatic ESD strength values.For example, each electrostatic detection can be made Judge that pattern C22 width W22 successively decreases along the orientation X for judging pattern C22 in unit U, but be not limited.Width W22 It is narrower, judge that pattern C22 electric charge tolerance is lower.It is higher than the situation of electric stress in the electric charge tolerance for judging pattern C22 Under, judge that pattern C22 maintains the integrality of its pattern.On the other hand, it is strong less than electrostatic in the electric charge tolerance for judging pattern C22 In the case of degree, judge that pattern C22 can be wounded by electrostatic ESD, and cause to judge the apparent changes of pattern C22.Thus, just may be used By quantize analysis push away electrostatic ESD strength range.
According to different demands, panel construction 100 can further comprise other elements or film layer.In addition, each element and film Quantity, figure and the relative configuration position of layer can change on demand.Illustrate Figure 1A panel knot below by way of Fig. 3 A to Fig. 5 E Other of structure 100 and its interior element implement kenel.Fig. 3 A and Fig. 3 B are other kinds according to first embodiment of the present utility model The diagrammatic cross-section of panel construction.Fig. 4 is the upper depending on showing of another panel construction according to first embodiment of the present utility model It is intended to.Fig. 5 A to Fig. 5 E are the upper schematic diagrams of other kind of receiving terminal of induction electrode in Figure 1A.
Fig. 3 A are refer to, panel construction 100A is similar in appearance to Figure 1B panel construction 100, and wherein identical element is with identical Label is represented, is repeated no more in this.Panel construction 100A and panel construction 100 Main Differences are as described below.Panel construction 100A further comprises insulating barrier IN.Insulating barrier IN for example covers discharge pattern C12, earth electrode C21 and judges pattern C22, and expose induction electrode C11.In addition, between insulating barrier IN is filled up between discharge pattern C12 and judgement pattern C22 Gap.Under this framework, insulating barrier IN of the electrostatic between discharge pattern C12 and judgement pattern C22 on discharge pattern C12 is passed Judgement pattern C22 is handed to, therefore discharge pattern C12 and judges the medium M between pattern C22 as insulating barrier IN, and insulating barrier IN Impedance be medium M impedance.
Fig. 3 B are refer to, panel construction 100B is similar in appearance to Figure 1B panel construction 100, and wherein identical element is with identical Label is represented, is repeated no more in this.Panel construction 100B and panel construction 100 Main Differences are as described below.In panel construction In 100B, the first conductor C1 and the second conductor C2 are set on the different layers.Furthermore, panel construction 100B is further wrapped Include the first insulating barrier IN1 and the second insulating barrier IN2.First insulating barrier IN1 coverings are located at the earth electrode on flexible base plate 110 C21 and judgement pattern C22.Discharge pattern C12 and the second insulating barrier IN2 is configured on the first insulating barrier IN1, and second exhausted Edge layer IN2 exposes discharge pattern C12.Induction electrode C11 is configured on the second insulating barrier IN2 and contact discharge pattern C12. Under this framework, first insulating barrier IN1 of the electrostatic between discharge pattern C12 and judgement pattern C22 on discharge pattern C12 is passed Judgement pattern C22 is handed to, therefore discharge pattern C12 and judges the medium M between pattern C22 as the first insulating barrier IN1, and first Insulating barrier IN1 impedance is medium M impedance.
Supplementary notes, the relation that is stacked with Figure 1B, Fig. 3 A and Fig. 3 B between each film layer is also applied for following its His embodiment, is just repeated no more under.
Fig. 4 is refer to, panel construction 100C is similar in appearance to Figure 1A panel construction 100, and wherein identical element is with identical Label is represented, is repeated no more in this.Panel construction 100C and panel construction 100 Main Differences are as described below.In panel construction In 100C, flexible base plate 110A has element region A1 and adjacent element area A1 Zhou Bianqu A2.Zhou Bianqu A2 are located at element region A1 at least side.Fig. 4 illustrates Zhou Bianqu A2 around element region A1 four sides, but is not limited.According to different demands, member Multiple element, such as active member can be set in part area A1, but is not limited.Electrostatic detection unit U be arranged in Zhou Bianqu A2 and Element region A1 is exposed, but is not limited.In another embodiment, element region A1 may also set up at least one electrostatic detection list First U.
Refer to each induction electrode C11 in Figure 1A, Fig. 5 A to Fig. 5 E, Figure 1A has receiving terminal R.Receiving terminal R for example with Multiple tip Ts radially outward, to attract electrostatic, but receiving terminal R implementation kenel is not limited.As shown in Figure 5A, receive End RA can further have multiple line segment L.Each line segment L is connected with a wherein tip T.As shown in Figure 5 B, receiving terminal RB shape Or it is circular.Or, as shown in Figure 5 C, receiving terminal RC can be the circular combination with multiple tip Ts, and tip T from circle to Outer radiation.Or, as shown in Figure 5 D, receiving terminal RD can be the circular combination with multiple line segment L, and line segment L is outwards put by circle Penetrate.Furthermore, as shown in fig. 5e, receiving terminal RD can be the circular combination with multiple broken line LA, and broken line LA by it is circular radially outward.
The graphic designs of each receiving terminal are also applied for following other embodiments in supplementary notes, Fig. 5 A to Fig. 5 E, Just repeated no more under.
Fig. 6 A to Fig. 6 G are the upper schematic diagrams of other kind of electrostatic detection unit of panel construction in Figure 1A.It refer to figure 6A, electrostatic detection unit UA are similar in appearance to Figure 1A electrostatic detection unit U, and wherein identical element represents with identical label, in This is repeated no more.Electrostatic detection unit UA and electrostatic detection unit U Main Differences are as described below.In electrostatic detection unit U, Discharge pattern C12 is towards the end E12 for judging pattern C22 and judges that pattern C22 towards discharge pattern C12 end E22 divide Not Wei tack, and in electrostatic detection unit UA, discharge pattern C12 is towards the end E12 for judging pattern C22 and judges pattern C22 towards discharge pattern C12 end E22 be respectively tip.
Refer to Fig. 6 B, electrostatic detection unit UB similar in appearance to Fig. 6 A electrostatic detection unit UA, wherein identical element with Identical label is represented, is repeated no more in this.Electrostatic detection unit UB and electrostatic detection unit UA Main Differences are as described below. In electrostatic detection unit UB, judging pattern C22 towards discharge pattern C12 end E22 has that corresponding end E12's is recessed Portion.
Refer to Fig. 6 C, electrostatic detection unit UC similar in appearance to Fig. 6 B electrostatic detection unit UB, wherein identical element with Identical label is represented, is repeated no more in this.Electrostatic detection unit UC and electrostatic detection unit UB Main Differences are as described below. In electrostatic detection unit UC, discharge pattern C12 has half star-shaped protuberance towards the end E12 for judging pattern C22, and sentences Determining pattern C22 towards discharge pattern C12 end E22 has the recess complementary with a half star-shaped protruding tip.
Refer to Fig. 6 D, electrostatic detection unit UD similar in appearance to Fig. 6 B electrostatic detection unit UB, wherein identical element with Identical label is represented, is repeated no more in this.Electrostatic detection unit UD and electrostatic detection unit UB Main Differences are as described below. In electrostatic detection unit UD, discharge pattern C12 judges pattern towards judging pattern C22 end E12 as circular convex C22 towards discharge pattern C12 end E22 have the circular concave complementary with circular convex.
Fig. 6 E are refer to, electrostatic detection unit UE is similar in appearance to Figure 1A electrostatic detection unit U, and wherein identical element is with phase Same label is represented, is repeated no more in this.Electrostatic detection unit UE and electrostatic detection unit U Main Differences are as described below.It is quiet Electro-detection unit UE also includes the 3rd conductor C3 being located between the first conductor C1 and the second conductor C2.3rd conductor C3 has many Individual conductive pattern C31.Each conductive pattern C31 is located therein a discharge path (discharge path P1, discharge path P2, discharge path P3, discharge path P4) on, and in each discharge path, conductive pattern C31 be located at discharge pattern C12 with judge pattern C22 it Between, wherein conductive pattern C31, discharge pattern C12 and judgement pattern C22 are separated each other.Under this framework, if conductive pattern The insulating barrier IN shown in Fig. 3 A is not filled up between C31 and discharge pattern C12 and between conductive pattern C31 and judgement pattern C22 Or the first insulating barrier IN1 shown in Fig. 3 B, then discharge pattern C12 and judge that the medium M between pattern C22 includes conductive pattern C31 and air.On the other hand, if between conductive pattern C31 and discharge pattern C12 and conductive pattern C31 is with judging pattern C22 Between fill up the insulating barrier IN (or first insulating barrier IN1 shown in Fig. 3 B) shown in Fig. 3 A, then discharge pattern C12 with judge pattern Medium M between C22 includes conductive pattern C31 and insulating barrier IN (or first insulating barrier IN1).
Refer to Fig. 6 F, electrostatic detection unit UF similar in appearance to Fig. 6 E electrostatic detection unit UE, wherein identical element with Identical label is represented, is repeated no more in this.Electrostatic detection unit UF and electrostatic detection unit UE Main Differences are as described below. In electrostatic detection unit UF, the 3rd conductor C3 also includes multiple first connecting portion C32 and multiple second connecting portion C33.Respectively First connecting portion C32 and each second connecting portion C33 are located therein a discharge path (discharge path P1, discharge path P2, electric discharge Path P 3, discharge path P4) on, and in each discharge path, first connecting portion C32 connection discharge pattern C12 and conductive pattern C31, second connecting portion C33 connection judge pattern C22 and conductive pattern C31.Under this framework, discharge pattern C12 and process decision chart Medium M between case C22 includes conductive pattern C31, first connecting portion C32 and second connecting portion C33.
Refer to Fig. 6 G, electrostatic detection unit UG similar in appearance to Fig. 6 E electrostatic detection unit UE, wherein identical element with Identical label is represented, is repeated no more in this.Electrostatic detection unit UG and electrostatic detection unit UE Main Differences are as described below. In electrostatic detection unit UG, conductive pattern C31 connection discharge pattern C12 are with judging pattern C22.Under this framework, electric discharge figure Medium M between case C12 and judgement pattern C22 is made up of conductive pattern C31.
The graphic designs of electrostatic detection unit are also applied for other following implementations in supplementary notes, Fig. 6 A to Fig. 6 G Example, is just repeated no more under.
Fig. 7 and Fig. 8 be respectively the panel construction according to second embodiment of the present utility model and 3rd embodiment on regard Schematic diagram.Fig. 7 is refer to, panel construction 200 is similar in appearance to Figure 1A panel construction 100, and wherein identical element is with identical mark Number represent, repeated no more in this.The Main Differences of panel construction 200 and panel construction 100 are as described below.
Fig. 7 electrostatic detection structure 120 is for example designed to observation electrostatic span ability (current potential size).Impedance is designed to determine Justice is the summation of the impedance and medium M impedance that judge pattern C22.If being illustrated with Fig. 2, (ZS1+ZG1)=(ZS2+ZG2)= (ZS3+ZG3)=(ZS4+ZG4)。
In the present embodiment, make to design impedance (judgement pattern C22 impedance and medium M impedance in each discharge path Summation) with each design impedance identical method in remaining discharge path be, for example, fixed discharge pattern C12 width W12 and Under the width W22 framework for judging pattern C22, change and judge the distance between pattern C22 and discharge pattern C12 D, wherein changing Judge that the distance between pattern C22 and discharge pattern C12 D method is, for example, fixed discharge pattern C12 length L12, and change Become the length L22 for judging pattern C22, but be not limited.For example, discharge pattern C12 width W12 and judgement can be made Pattern C22 width W22 is identical, and rows of the pattern C22 length L22 along judgement pattern C22 is judged in each electrostatic detection unit U Column direction X is incremented by, but is not limited.
By above-mentioned design, in each electrostatic detection unit U, the electrostatic on discharge pattern C12 will cross medium M and wound The corresponding difficulty for judging pattern C22 increases with the increase apart from D.In other words, it is bigger apart from D, on discharge pattern C12 Electrostatic higher can just cross medium M and wound corresponding judgement pattern C22.Therefore, by sentencing in each electrostatic detection unit U Determine the distance between pattern C22 and discharge pattern C12 design incremental D, the potential value that will can be accumulated on discharge pattern C12 Change, and can by quantize analysis push away electrostatic ESD strength range.
It refer to Fig. 8, panel construction 300 is similar in appearance to Figure 1A and Fig. 7 panel construction 100,200, wherein identical element Represented, repeated no more in this with identical label.The Main Differences of panel construction 300 and panel construction 100,200 are as described below.
Fig. 8 electrostatic detection structure 120 is for example designed to observe the whole capability of electrostatic breakdown, such as electric charge damage capability (size of current) and electrostatic span ability (current potential size).Design impedance is defined as discharge pattern C12 impedance, judges pattern The summation of C22 impedance and medium M impedance.If being illustrated with Fig. 2, (ZH1+ZG1+ZS1)=(ZH2+ZG2+ZS2)=(ZH3+ZG3+ ZS3)=(ZH4+ZG4+ZS4)。
In the present embodiment, make to design impedance (discharge pattern C12 impedance, the resistance for judging pattern C22 in each discharge path The summation of the anti-impedance with medium M) with each design impedance identical method in remaining discharge path it is, for example, modulation discharge pattern C12 width W12, the width W22 for judging pattern C22 and judgement the distance between pattern C22 and discharge pattern C12 D, wherein The method for changing the distance between judgement pattern C22 and discharge pattern C12 D is, for example, fixed discharge pattern C12 length L12, And change the length L22 for judging pattern C22.For example, discharge pattern C12 width W12 can be made and judge pattern C22's Width W22 successively decreases along the orientation X for judging pattern C22, and pattern C22 length L22 edges are judged in each electrostatic detection unit U Judge that pattern C22 orientation X is incremented by, but be not limited.By above-mentioned design, it will can be accumulated on discharge pattern C12 Electrostatic quantizes, and can by quantize analysis push away electrostatic ESD strength range.
Fig. 9 is a kind of schematic diagram of electrostatic breakdown detecting system according to first embodiment of the present utility model.Figure 10 and Figure 11 is two kinds of schematic flow sheets of the detection method of Fig. 9 electrostatic breakdown detecting system respectively.Fig. 9 and Figure 10 is refer to, it is quiet Electrodisintegration detecting system 10 includes panel construction 12 and image detection device 14.Panel construction 12 can be implemented using any of the above-described The panel construction of example.The detection of image detection device 14 judges whether pattern C22 outward appearance is destroyed by electrostatic ESD.
Furthermore, the detection method of electrostatic breakdown may include following steps.First, panel construction 12 is sent into making Process monitoring board (step S1).Panel construction 12 has multiple electrostatic detection unit U.Electrostatic detection unit U is for example covered with whole Individual panel construction 12, but be not limited.In another embodiment, panel construction 12 can also use Fig. 4 panel construction 100C. By panel construction 12 be sent into manufacture craft monitoring board can simulate and monitor in general manufacturing process, flexible base plate 110 what Place is easily destroyed by electrostatic ESD, subsequently just can according to the position by the electrostatic ESD electrostatic detection unit U destroyed and its Judge pattern C22 analysis electrostatic breakdown sources and electric stress, and the monitoring that can continue, improvement or control electrostatic breakdown source.
After panel construction 12 to be sent into manufacture craft monitoring board, can continue be sent into Image detection by panel construction 12 Device 14 (step S2), such as automatic visual inspection (Automated Optical Inspection, AOI) device, with detect by To the electrostatic ESD positions for judging pattern C22 destroyed and situation.
Then according to the situation that pattern C22 is destroyed by electrostatic ESD is judged, judge whether electrostatic is more than critical setting value (step S3), if not being more than critical setting value, makes default gearing board normal operation (step S4), if more than critical setting Value, then stop default gearing board (step S5).It is described to judge whether electrostatic may include to judge impaired more than critical setting value The physical deformation such as area, shape, the distributing homogeneity of electrode whether to be more than critical setting value.Or, can also It is specific in electrostatic detection unit U to judge that pattern C22 is used as criterion.For example, if sentencing in setting discharge path P3 Determine pattern C22 and represented electrostatic more than critical setting value by electrostatic ESD destructions, once then discharge path P3 or discharge path P4 Judgement pattern C22 in (referring to Fig. 2) is destroyed by electrostatic ESD, just stops default gearing board (step S5).The opposing party Face, if the judgement pattern C22 in discharge path P1 or discharge path P2 (referring to Fig. 2) is destroyed by electrostatic ESD, represents electrostatic It is not more than critical setting value, therefore default gearing board normal operation (step S4) can be made.
Refer to Figure 11, the detection method of Figure 11 electrostatic breakdown similar in appearance to Figure 10 electrostatic breakdown detection method, two The Main Differences of figure are:In the detection method of Figure 11 electrostatic breakdown, after step s 5, board situation can be continued to send To electrostatic breakdown detecting system (step S6).Then, electrostatic breakdown detecting system judges whether that situation releases (step S7).If shape Condition is released, then can make default gearing board normal operation (step S4).If situation is not released, persistently stop default gearing Board (step S8).
In summary, panel construction of the present utility model using the width for judging pattern or judge pattern and discharge pattern it Between distance design, electric stress is quantized.Outward appearance in each electrostatic detection unit is detected by electrostatic breakdown detecting system Impaired judgement pattern, you can analysis electric stress.The analysis that quantizes is carried out by electrostatic breakdown detecting system, just can be instant Improved and controlled for electrostatic breakdown source, so as to be effectively reduced crash rate.

Claims (20)

1. a kind of panel construction, it is characterised in that the panel construction includes:
Flexible base plate;And
Electrostatic detection structure, on the flexible base plate and including multiple electrostatic detection units, wherein the respectively electrostatic detection unit Including the first conductor and the second conductor, first conductor includes induction electrode and multiple putting of being electrically connected with the induction electrode Electrical pattern, second conductor includes earth electrode and the multiple judgement patterns electrically connected with the earth electrode, those electric discharge figures Case and those judgement patterns are located between the induction electrode and the earth electrode, and those discharge patterns judge with wherein one respectively Pattern definition goes out a discharge path, in the respectively electrostatic detection unit, respectively a design impedance of the discharge path with remaining those Respectively design impedance of discharge path is identical, and the design impedance is at least one of which of the discharge pattern and the judgement pattern Impedance and the discharge pattern and the judgement pattern between a medium impedance summation, and in the respectively electrostatic detection unit In, those judge that the width of pattern is different, or those judge the distance between pattern and those discharge patterns difference.
2. panel construction as claimed in claim 1, it is characterised in that those electrostatic detection units are arranged in array and covered comprehensively Cover the flexible base plate.
3. panel construction as claimed in claim 1, it is characterised in that the flexible base plate has element region and the adjacent element The Zhou Bianqu in area, those electrostatic detection units are arranged in the Zhou Bianqu and expose the element region.
4. panel construction as claimed in claim 1, it is characterised in that the medium includes air, at least an insulating barrier, at least one Conductor or foregoing at least two combination.
5. panel construction as claimed in claim 1, it is characterised in that the design impedance is impedance and Jie of the discharge pattern The summation of the impedance of matter, and in the respectively electrostatic detection unit, the width of those discharge patterns is identical, those judge the width of pattern Degree is different, and those judge that pattern is identical with the distance between those discharge patterns.
6. panel construction as claimed in claim 1, it is characterised in that the design impedance is impedance and Jie of the judgement pattern The summation of the impedance of matter, and in the respectively electrostatic detection unit, the width of those discharge patterns and those judgement patterns is identical, And those judge the distance between pattern and those discharge patterns difference.
7. panel construction as claimed in claim 1, it is characterised in that the design impedance is the impedance of the discharge pattern, this sentences Determine the summation of the impedance of pattern and the impedance of the medium, and in the respectively electrostatic detection unit, the width of those discharge patterns Difference, those judge that the width of pattern is different, and those judge the distance between pattern and those discharge patterns difference.
8. panel construction as claimed in claim 1, it is characterised in that respectively the electrostatic detection unit also includes being located at this and first led One the 3rd conductor between body and second conductor, the 3rd conductor has multiple conductive patterns, and respectively the conductive pattern is located at it In on a discharge path, and in the respectively discharge path, the conductive pattern is located between the discharge pattern and the judgement pattern, its In the conductive pattern, the discharge pattern and the judgement pattern separate each other.
9. panel construction as claimed in claim 8, it is characterised in that the 3rd conductor also include multiple first connecting portions and Multiple second connecting portions, the respectively first connecting portion and respectively the second connecting portion is located therein on a discharge path, and respectively should In discharge path, the first connecting portion connects the discharge pattern and the conductive pattern, and the second connecting portion connects the judgement pattern With the conductive pattern.
10. panel construction as claimed in claim 1, it is characterised in that respectively the electrostatic detection unit also include being located at this first The 3rd conductor between conductor and second conductor, the 3rd conductor has multiple conductive patterns, and respectively the conductive pattern is located at it In on a discharge path, and in the respectively discharge path, the conductive pattern is located between the discharge pattern and the judgement pattern, its In the conductive pattern connect the discharge pattern and the judgement pattern.
11. a kind of electrostatic breakdown detecting system, including:
Panel construction, it is characterised in that the panel construction includes:
Flexible base plate;And
Electrostatic detection structure, on the flexible base plate and including multiple electrostatic detection units, wherein the respectively electrostatic detection unit Including the first conductor and the second conductor, first conductor includes induction electrode and multiple putting of being electrically connected with the induction electrode Electrical pattern, second conductor includes an earth electrode and the multiple judgement patterns electrically connected with the earth electrode, those electric discharges Pattern and those judgement patterns are located between the induction electrode and the earth electrode, and those discharge patterns are sentenced with wherein one respectively Determine pattern definition and go out a discharge path, in the respectively electrostatic detection unit, respectively a design impedance of the discharge path should with remaining Respectively design impedance of a little discharge paths is identical, and the design impedance is the discharge pattern and the wherein at least one of the judgement pattern The summation of the impedance of a medium between the impedance of person and the discharge pattern and the judgement pattern, and in the respectively electrostatic detection list In member, those judge that the width of pattern is different, or those judge the distance between pattern and those discharge patterns difference;And
Image detection device, detects that those judge the outward appearance of pattern whether by electrostatic breakdown.
12. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that those electrostatic detection units are arranged in battle array Arrange and cover the flexible base plate comprehensively.
13. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that the flexible base plate have element region and The Zhou Bianqu of the adjacent element region, those electrostatic detection units are arranged in the Zhou Bianqu and expose the element region.
14. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that the medium includes air, at least one exhausted Edge layer, at least a conductor or foregoing at least two combination.
15. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that the design impedance is the discharge pattern The summation of impedance and the impedance of the medium, and in the respectively electrostatic detection unit, the width of those discharge patterns is identical, and those are sentenced The width for determining pattern is different, and those judge that pattern is identical with the distance between those discharge patterns.
16. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that the design impedance is the judgement pattern The summation of impedance and the impedance of the medium, and in the respectively electrostatic detection unit, those discharge patterns and those judgement patterns Width it is identical, and those judge the distance between patterns and those discharge patterns difference.
17. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that the design impedance is the discharge pattern The summation of impedance, the impedance of the judgement pattern and the impedance of the medium, and in the respectively electrostatic detection unit, those electric discharge figures The width of case is different, and those judge that the width of pattern is different, and those judge the distance between pattern and those discharge patterns no Together.
18. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that respectively the electrostatic detection unit also includes position The 3rd conductor between first conductor and second conductor, the 3rd conductor has multiple conductive patterns, respectively the conductive pattern Case is located therein on a discharge path, and in the respectively discharge path, the conductive pattern is located at the discharge pattern and the process decision chart Between case, wherein the conductive pattern, the discharge pattern and the judgement pattern are separated each other.
19. electrostatic breakdown detecting system as claimed in claim 18, it is characterised in that the 3rd conductor also includes multiple first Connecting portion and multiple second connecting portions, the respectively first connecting portion and respectively the second connecting portion is located therein a discharge path On, and in the respectively discharge path, the first connecting portion connects the discharge pattern and the conductive pattern, second connecting portion connection The judgement pattern and the conductive pattern.
20. electrostatic breakdown detecting system as claimed in claim 11, it is characterised in that respectively the electrostatic detection unit also includes position The 3rd conductor between first conductor and second conductor, the 3rd conductor has multiple conductive patterns, respectively the conductive pattern Case is located therein on a discharge path, and in the respectively discharge path, the conductive pattern is located at the discharge pattern and the process decision chart Between case, wherein the conductive pattern connects the discharge pattern and the judgement pattern.
CN201621330420.7U 2016-10-18 2016-12-06 Panel structure and electrostatic damage detection system Active CN206331052U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109975622A (en) * 2017-12-28 2019-07-05 财团法人工业技术研究院 Electrostatic detection device
CN111610383A (en) * 2020-05-28 2020-09-01 厦门天马微电子有限公司 Electrostatic detection device and electrostatic detection system
CN112213995A (en) * 2020-08-20 2021-01-12 格创东智(天津)科技有限公司 Intelligent monitoring method and device for factory equipment
US10901022B2 (en) 2017-12-28 2021-01-26 Industrial Technology Research Institute Electrostatic detecting device
CN112313730A (en) * 2018-06-20 2021-02-02 堺显示器制品株式会社 Display panel and method for manufacturing display panel

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109975622A (en) * 2017-12-28 2019-07-05 财团法人工业技术研究院 Electrostatic detection device
US10901022B2 (en) 2017-12-28 2021-01-26 Industrial Technology Research Institute Electrostatic detecting device
CN109975622B (en) * 2017-12-28 2021-12-31 财团法人工业技术研究院 Electrostatic detecting device
CN112313730A (en) * 2018-06-20 2021-02-02 堺显示器制品株式会社 Display panel and method for manufacturing display panel
CN111610383A (en) * 2020-05-28 2020-09-01 厦门天马微电子有限公司 Electrostatic detection device and electrostatic detection system
CN111610383B (en) * 2020-05-28 2023-02-03 厦门天马微电子有限公司 Electrostatic detection device and electrostatic detection system
CN112213995A (en) * 2020-08-20 2021-01-12 格创东智(天津)科技有限公司 Intelligent monitoring method and device for factory equipment

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