CN206308424U - Electrolytic cell for preparing Nitrogen trifluoride - Google Patents

Electrolytic cell for preparing Nitrogen trifluoride Download PDF

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Publication number
CN206308424U
CN206308424U CN201621484727.2U CN201621484727U CN206308424U CN 206308424 U CN206308424 U CN 206308424U CN 201621484727 U CN201621484727 U CN 201621484727U CN 206308424 U CN206308424 U CN 206308424U
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China
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plate
nitrogen trifluoride
positive plate
electrolytic cell
anode terminal
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CN201621484727.2U
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Chinese (zh)
Inventor
宋学章
李文
赵秀丽
田玲玲
周杰
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Nanda Optoelectronics (Zibo) Co.,Ltd.
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Shandong Feiyuan Technology Co Ltd
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Abstract

The utility model is related to a kind of electrolytic cell, and in particular to a kind of electrolytic cell for preparing Nitrogen trifluoride.The described electrolytic cell for preparing Nitrogen trifluoride, including cell body, groove lid, skirtboard, anodic gas room, cathode gas room, positive plate, minus plate, temperature-reducing coil, anode terminal and cathode terminal, positive plate is bolted on anode terminal, pod apertures are set on positive plate, wherein, pod apertures are multiple, and water conservancy diversion number of perforations is successively decreased near one end of anode terminal from positive plate to the other end;The thickness of the one end of positive plate on anode terminal is thinner than the other end;Pod apertures also are provided with minus plate.The utility model reasonable in design, electrolytic efficiency is high, can solve the problem that the electrochemical corrosion excessive velocities of electrolysis production Nitrogen trifluoride anodic plate, and upper thick and lower thin state is presented after corrosion, wasting problem, reduces the use cost of nickel plate in Nitrogen trifluoride production;Pole plate stable connection, it is difficult for drop-off.

Description

Electrolytic cell for preparing Nitrogen trifluoride
Technical field
The utility model is related to a kind of electrolytic cell, and in particular to a kind of electrolytic cell for preparing Nitrogen trifluoride.
Background technology
NF3Gas is widely used in the fields such as superlaser, semiconductor technology and chemical vapor deposition, is answered with good Use prospect.Its preparation method can be divided into two kinds of chemical synthesis and electrolysis, industrial to use NH more4F-xHF (or add a small amount of KF) it is electrolyte system electrolytic preparation NF3Gas.In Nitrogen trifluoride production, the average current density of anode is larger, and nickel plate is whole Body corrosion is very fast;Current density is presented up-small and down-big state in nickel plate and non-uniform Distribution, so in production process Middle electrochemical corrosion causes anode upper thick and lower thin.From from the aspect of security, anode region Nitrogen trifluoride and cathodic region gas hydrogen Vigorous reaction, positive plate bottom point must be controlled under the scope of 500 ± 2.5mm with a distance from dividing plate, apart from excessive then electricity Pressure is higher, and power consumption is high, apart from too small, then easily string chamber blast.Above reason causes that nickel plate usage cycles are short, and use cost is high.
The use cost of nickel plate is higher in existing domestic Nitrogen trifluoride production, and nickel plate consumption occupies about 15% in cost Cost.Domestic other producers are general by low price return-to-factory after anode nickel plates collection not up to standard after use, increased trifluoro Change the production cost of nitrogen.
In addition, existing electrolytic cell binding post (copper) is located under electrolysis liquid surface with battery lead plate (nickel) weld, the welding position Put perishable, cause battery lead plate to come off, electric current declines, and groove internal short-circuit or detonation are caused under serious conditions.
Utility model content
According to deficiency of the prior art above, the technical problems to be solved in the utility model is:There is provided a kind of for making The electrolytic cell of standby Nitrogen trifluoride, reasonable in design, electrolytic efficiency is high, can solve the problem that electrolysis production Nitrogen trifluoride anodic The electrochemical corrosion excessive velocities of plate, are presented upper thick and lower thin state after corrosion, wasting problem reduces Nitrogen trifluoride production The use cost of middle nickel plate;Pole plate stable connection, it is difficult for drop-off.
Electrolytic cell for preparing Nitrogen trifluoride described in the utility model, including cell body, groove lid, skirtboard, anodic gas Room, cathode gas room, positive plate, minus plate, temperature-reducing coil, anode terminal and cathode terminal, positive plate are solid by bolt It is scheduled on anode terminal, pod apertures is set on positive plate, wherein, pod apertures are multiple, and water conservancy diversion number of perforations is from positive plate near sun Successively decrease to the other end one end of pole binding post;The thickness of the one end of positive plate on anode terminal is thinner than the other end;Negative electrode Pod apertures also are provided with plate.
Positive plate is bolted on anode terminal, and during electrolysis, the position of bolt is higher than liquid level of electrolyte, it is to avoid HF corrodes.
The thickness of the one end of positive plate on anode terminal is thinner than the other end, and the nickel plate for both reducing manufacture positive plate disappears Consumption, improves the effective storage life and utilization rate of nickel plate again.
Water conservancy diversion number of perforations is successively decreased near one end of anode terminal from positive plate to the other end, can improve top nickel plate Current density so that its electrochemical corrosion depletion rate is basically identical with bottom nickel plate, improves electrolytic efficiency.
Wherein:
Described positive plate is nickel plate.
Thickness of the described positive plate near one end of anode terminal is 2mm, and the thickness of the other end is 10mm.
The cross-section structure of described positive plate is multistage stairstepping or trapezoidal.
Described multistage step-like series >=2 grade.
Described minus plate is iron plate.
Pod apertures are multiple on described minus plate, and water conservancy diversion number of perforations is from minus plate near one end of cathode terminal to another Successively decrease one end.
Operation principle is as follows:
Electrolyte shifts to an earlier date liquid is made into batching kettle, is then transferred to electrolytic cell Inner electrolysis with liquid relief tank, and electrolytic cell leads to After electricity, anode produces Nitrogen trifluoride, negative electrode to produce hydrogen.
In sum, the beneficial effects of the utility model are as follows:
The utility model reasonable in design, electrolytic efficiency is high, can solve the problem that electrolysis production Nitrogen trifluoride anodic The electrochemical corrosion excessive velocities of plate, are presented upper thick and lower thin state after corrosion, wasting problem reduces Nitrogen trifluoride production The use cost of middle nickel plate;Pole plate stable connection, it is difficult for drop-off.
Brief description of the drawings
Fig. 1 is device cross-sectional view of the present utility model;
Fig. 2 is that pod apertures set schematic diagram on the utility model positive plate;
Fig. 3 is that pod apertures set schematic diagram on the utility model minus plate;
Fig. 4 is the positive plate cross-sectional view of the utility model embodiment 1;
Fig. 5 is the positive plate cross-sectional view of the utility model embodiment 2;
In figure:1st, cell body;2nd, groove lid;3rd, skirtboard;4th, anodic gas room;5th, cathode gas room;6th, positive plate;7th, negative electrode Plate;8th, temperature-reducing coil;9th, anode terminal;10th, cathode terminal;11st, bolt;12nd, pod apertures.
Specific embodiment
Embodiment of the present utility model is described further below in conjunction with the accompanying drawings:
As shown in figure 1, the described electrolytic cell for preparing Nitrogen trifluoride, including cell body 1, groove lid 2, skirtboard 3, anode gas Body room 4, cathode gas room 5, positive plate 6, minus plate 7, temperature-reducing coil 8, anode terminal 9 and cathode terminal 10, positive plate 6 It is fixed on anode terminal 9 by bolt 11, pod apertures 12 is set on positive plate 6, wherein, pod apertures 12 are multiple, pod apertures 12 numbers successively decrease near one end of anode terminal 9 from positive plate 6 to the other end;Positive plate 6 is close on anode terminal 9 The thickness at end is thinner than the other end;Pod apertures 12 also are provided with minus plate 7.
Positive plate 6 is fixed on anode terminal 9 by bolt 11, and during electrolysis, the position of bolt 11 is higher than electrolyte liquid Face, it is to avoid HF corrodes.
The thickness of the one end of positive plate 6 on anode terminal 9 is thinner than the other end, both reduces the nickel of manufacture positive plate 6 Plate consumption, improves the effective storage life and utilization rate of nickel plate again.
The number of pod apertures 12 successively decreases near one end of anode terminal 9 from positive plate 6 to the other end, can improve top nickel The current density of plate so that its electrochemical corrosion depletion rate is basically identical with bottom nickel plate, improves electrolytic efficiency.
Wherein:
Described positive plate 6 is nickel plate.
Thickness of the described positive plate 6 near one end of anode terminal 9 is 4mm, and the thickness of the other end is 10mm.
The cross-section structure of described positive plate 6 is the curved wedge shape in multistage stairstepping, trapezoidal or surface.
Described multistage step-like series >=2 grade.
Described minus plate 7 is iron plate.
Pod apertures 12 are multiple on described minus plate 7, and the number of pod apertures 12 is from minus plate 7 near cathode terminal 10 Successively decrease to the other end one end.
Electrolyte shifts to an earlier date liquid is made into batching kettle, is then transferred to electrolytic cell Inner electrolysis with liquid relief tank, and electrolytic cell leads to After electricity, anode produces Nitrogen trifluoride, negative electrode to produce hydrogen.
Embodiment 1
Existing nickel plate size is 1200*500*10mm, and quality is 53.4kg.In the present embodiment, nickel plate is divided into 3 sections, Thickness is respectively 10mm, 6mm, 4mm from bottom to top.Individual nickel plate can reduce weight 17.94kg, that is, saved nickel plate consumption 33.6%.When running 40 days in a cell, the corrosion weight loss of nickel plate see the table below under different electrolytic conditions:
Nickel plate loss of weight/kg Electric current 1000A Electric current 1500A Electric current 2000A Security
Existing nickel plate 12 18.1 28.3 There is not detonation
The nickel plate of embodiment 1 11.8 17.4 27.5 There is not detonation
Under identical service condition, the corrosion weight loss of nickel plate is decreased obviously the nickel plate that as seen from the above table prepared by new method, and It is safe and reliable.
Embodiment 2
Existing nickel plate size is 1200*500*10mm, and quality is 53.4kg.In the present embodiment, nickel plate is processed into low side Thickness 10mm, the arc of tip thickness 2mm.Individual nickel plate can loss of weight 21.36kg, that is, saved the 40% of nickel plate consumption. When running 40 days in a cell, the corrosion weight loss of nickel plate see the table below under different electrolytic conditions:
Nickel plate loss of weight/kg Electric current 1000A Electric current 1500A Electric current 2000A Security
Existing nickel plate 11kg 17.5kg 27kg There is not detonation
The nickel plate of embodiment 2 10.9kg 16.9kg 26.2kg There is not detonation
Under identical service condition, the corrosion weight loss of nickel plate is decreased obviously the nickel plate that as seen from the above table prepared by new method, and It is safe and reliable.

Claims (7)

1. a kind of electrolytic cell for preparing Nitrogen trifluoride, including cell body (1), groove lid (2), skirtboard (3), anodic gas room (4), Cathode gas room (5), positive plate (6), minus plate (7), temperature-reducing coil (8), anode terminal (9) and cathode terminal (10), It is characterized in that:Positive plate (6) is fixed on anode terminal (9) by bolt (11), and positive plate sets pod apertures on (6) (12), wherein, pod apertures (12) are multiple, pod apertures (12) number from positive plate (6) near one end of anode terminal (9) to The other end successively decreases;The thickness of the one end of positive plate (6) on anode terminal (9) is thinner than the other end;Minus plate also sets on (7) There are pod apertures (12).
2. the electrolytic cell for preparing Nitrogen trifluoride according to claim 1, it is characterised in that:Described positive plate (6) It is nickel plate.
3. the electrolytic cell for preparing Nitrogen trifluoride according to claim 1, it is characterised in that:Described positive plate (6) Thickness near one end of anode terminal (9) is 2mm, and the thickness of the other end is 10mm.
4. the electrolytic cell for preparing Nitrogen trifluoride according to claim 1, it is characterised in that:Described positive plate (6) Cross-section structure be multistage stairstepping or trapezoidal.
5. the electrolytic cell for preparing Nitrogen trifluoride according to claim 4, it is characterised in that:Described multistage stairstepping Series >=2 grade.
6. the electrolytic cell for preparing Nitrogen trifluoride according to claim 1, it is characterised in that:Described minus plate (7) It is iron plate.
7. the electrolytic cell for preparing Nitrogen trifluoride according to claim 1, it is characterised in that:Described minus plate (7) Upper pod apertures (12) are multiple, and pod apertures (12) number is from minus plate (7) near one end of cathode terminal (10) to the other end Successively decrease.
CN201621484727.2U 2016-12-31 2016-12-31 Electrolytic cell for preparing Nitrogen trifluoride Active CN206308424U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621484727.2U CN206308424U (en) 2016-12-31 2016-12-31 Electrolytic cell for preparing Nitrogen trifluoride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621484727.2U CN206308424U (en) 2016-12-31 2016-12-31 Electrolytic cell for preparing Nitrogen trifluoride

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108557785A (en) * 2018-05-09 2018-09-21 刘成霞 A kind of Nitrogen trifluoride purification devices using antimony molybdenum doping material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108557785A (en) * 2018-05-09 2018-09-21 刘成霞 A kind of Nitrogen trifluoride purification devices using antimony molybdenum doping material

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Effective date of registration: 20190816

Address after: 256300 No. 5, No. 4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province

Patentee after: Shandong Feiyuan Gas Co.,Ltd.

Address before: 256300 Qinghe Industrial Park, Gaoqing County, Shandong, Zibo

Patentee before: SHANDONG FEIYUAN TECHNOLOGY Co.,Ltd.

TR01 Transfer of patent right
CP01 Change in the name or title of a patent holder

Address after: No.5, No.4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province, 256300

Patentee after: Nanda Optoelectronics (Zibo) Co.,Ltd.

Address before: No.5, No.4 Road, Gaoqing Chemical Industrial Park, Gaocheng Town, Gaoqing County, Zibo City, Shandong Province, 256300

Patentee before: Shandong Feiyuan Gas Co.,Ltd.

CP01 Change in the name or title of a patent holder