CN206292531U - Litho machine environmental monitoring system and its long distance control system - Google Patents
Litho machine environmental monitoring system and its long distance control system Download PDFInfo
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- CN206292531U CN206292531U CN201621282435.0U CN201621282435U CN206292531U CN 206292531 U CN206292531 U CN 206292531U CN 201621282435 U CN201621282435 U CN 201621282435U CN 206292531 U CN206292531 U CN 206292531U
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Abstract
The utility model provides a kind of litho machine environmental monitoring system and its long distance control system, belongs to photoetching machine technique field.A kind of litho machine environmental monitoring system disclosed in the utility model, including light source module, focus module, digital micro-mirror module, console module, and signal acquisition module, display module and environment module, wherein, environment module is connected respectively for light source module, focus module, digital micro-mirror module, console module, environment module is connected with signal acquisition module, and signal acquisition module is connected with display module.The ambient parameter of each module of storage is directly gathered by environment module, by signal acquisition module processing environment parameter, it is displayed on display module, be user can intuitively monitoring device running status, realize the running status of dynamic monitoring each part of litho machine in real time, it is ensured that the operation of equipment and on-call maintenance.
Description
Technical field
The utility model is related to photoetching machine technique field, more particularly, to a kind of litho machine environmental monitoring system and its remotely
Monitoring system.
Background technology
Photoetching technique is for printing the technology with characteristic composition on the surface of the substrate.Such substrate can be used to manufacture
Semiconductor platform, various integrated circuits, flat-panel screens (such as liquid crystal display), circuit board, biochip, micromechanics electronics
Chip, photoelectron circuit chip etc..
With continuing to develop for science and technology, direct-write type lithography machine (LDI) progressively puts into printing because of its high-accuracy high-efficiency rate
Circuit-board industry, therefore ensure that the equipment running status of litho machine normally have great importance, the running environment of litho machine is
Directly affect the equipment running status of litho machine.
The running environment requirement of litho machine is relatively stricter, and existing litho machine cannot realize internal operation running environment at present
Monitoring, and, often when equipment goes wrong could discovering device internal operating environment it is abnormal, cause equipment therefore
Barrier, furthermore, it is necessary to inspect periodically facility environment and running status by technical staff, not only wasting manpower and material resources, and cannot be real
When understand equipment internal environment ruuning situation.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of litho machine environmental monitoring system and its remote monitoring system
System.Cannot monitor whether current environment meets the technical problem for reaching equipment operating environment with the litho machine for solving prior art,
The real-time monitoring of equipment running status environment can be realized.
It is in a first aspect, the utility model embodiment provides a kind of litho machine environmental monitoring system including light source module, poly-
Burnt module, digital micro-mirror module, console module, also include：Signal acquisition module, display module, environment module, wherein,
The light source module, focus module, digital micro-mirror module, console module are connected with the environment module respectively,
The environment module is connected with the signal acquisition module, and the signal acquisition module is connected with the display module.
Light source module, focus module, digital micro-mirror module, console module are connected with environment module respectively, environment module
It is connected with signal acquisition module, environment module directly gathers light source module, focus module, digital micro-mirror module, console module
Running environment parameter, and by signal acquisition module processing environment parameter, be then displayed in what is be connected with signal acquisition module
On display module, such that it is able to intuitively monitor the running environment of litho machine modules, realize in real time, intuitively monitor light
The running environment situation of machine equipment is carved, the requirement whether current environment meets equipment operating environment can be got information about.
With reference in a first aspect, the utility model embodiment provide first aspect the first possible implementation method, its
In, the light source module, focus module, digital micro-mirror module, console module pass through Temperature Humidity Sensor and the environment respectively
Module is connected.
Corresponding temperature and humidity sensing is provided with below light source module, focus module, digital micro-mirror module, console module
The humiture parameter of each module can be converted into electric signal and pass to environment module by device, Temperature Humidity Sensor, and environment module will
The humiture parameter for storing and reading passes to signal acquisition module and is pre-processed.
With reference to the first possible implementation method of first aspect, the utility model embodiment provides the of first aspect
Two kinds of possible implementation methods, wherein, the signal acquisition module includes signal conditioner and analog-digital converter, wherein,
The signal conditioner is amplified to the humiture parameter signal that the Temperature Humidity Sensor is gathered, filters tune
Reason, exports analog signal；
The analog signal is converted to data signal by the analog-digital converter.
With reference in a first aspect, the utility model embodiment provide first aspect the third possible implementation method, its
In, also including signal comparison module and alarm module, wherein,
The signal acquisition module is connected with the signal comparison module, the signal comparison module and the alarm mould
Block is connected.
The signal that signal comparison module will can be collected is compared with parameter preset, during beyond preset range value, leads to
Cross connected alarm module and send alarm, remind related personnel's equipment fault, facilitate on-call maintenance, such that it is able to realize
Environment is monitored in real time, the response time is fast, equipment is protected while pointing out associative operation personnel environment abnormal
Shield and alarm.
With reference in a first aspect, the utility model embodiment provide first aspect the 4th kind of possible implementation method, its
In, the litho machine environmental monitoring system also includes gas path module, wherein,
The gas path module is connected with the environment module, and vacuum module is provided with the gas path module, described true
Reciprocal of duty cycle module is used to monitor the vacuum of the gas path module.
Second aspect, the utility model embodiment additionally provides a kind of long distance control system, for remote monitoring litho machine
Environmental monitoring system, including signal receiving module and first aspect and its prison of the litho machine environment described in possible implementation method
Examining system, wherein,
Signal acquisition module in the litho machine environmental monitoring system is communicated to connect with the signal receiving module.
For the state of further real-time monitoring photoetching machine equipment, under special circumstances, such as when personnel leave, if
In standby power-off operation or transportation, facility environment is monitored, present embodiments providing a kind of long distance control system can
To realize remote monitoring litho machine environmental monitoring system, the running environment state of real-time watch device.
With reference to second aspect, the utility model embodiment provides the first possible implementation method of second aspect, its
In, the litho machine environmental monitoring system also includes signal encryption module, wherein,
The signal encryption module is connected with the signal acquisition module.
Signal encryption module is encrypted to the data-signal for gathering, it is ensured that the security of data.
With reference to the first possible implementation method of second aspect, the utility model embodiment provides the of second aspect
Two kinds of possible implementation methods, wherein, the signal receiving module also includes decrypted signal module.
The data deciphering parsing that decrypted signal module will be encrypted.
With reference to second possible implementation method of second aspect, the utility model embodiment provides the of second aspect
Three kinds of possible implementation methods, wherein, the signal encryption module is data encoder, and the decrypted signal module is data solution
Code device.
With reference to second aspect, the utility model embodiment provides the 4th kind of possible implementation method of second aspect, its
In, the signal acquisition module is connected with the signal receiving module by radio communication.
Communication does not need the wiring of optical cable to set, and can effectively evade the trouble that landform is caused, while can
To save the cost of wiring.
The utility model embodiment brings following beneficial effect：
Light source module, focus module, digital micro-mirror module, console module are connected with environment module respectively, environment module with
Signal acquisition module is connected, and environment module directly gathers light source module, focus module, digital micro-mirror module, console module
Running environment parameter, and by signal acquisition module acquisition process ambient parameter, be then displayed in and be connected with signal acquisition module
Display module on, such that it is able to intuitively monitor the running environment of litho machine modules, realize in real time, intuitively monitor
The running environment situation of photoetching machine equipment, while failure can be found in time, saves time, manpower and the cost of maintenance.
Other feature and advantage of the present utility model will illustrate in the following description, also, partly from specification
In become apparent, or understood by implementing the utility model.The purpose of this utility model and other advantages are in explanation
Specifically noted structure is realized and obtained in book, claims and accompanying drawing.
To enable above-mentioned purpose of the present utility model, feature and advantage to become apparent, preferred embodiment cited below particularly, and
Coordinate appended accompanying drawing, be described in detail below.
Brief description of the drawings
In order to illustrate more clearly of the utility model specific embodiment or technical scheme of the prior art, below will be right
The accompanying drawing to be used needed for specific embodiment or description of the prior art is briefly described, it should be apparent that, describe below
In accompanying drawing be some implementation methods of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
The basic structure schematic diagram of the litho machine environmental monitoring system that Fig. 1 is provided by the utility model embodiment；
The structural representation of the signal acquisition module of the litho machine environmental monitoring system that Fig. 2 is provided for the utility model；
Fig. 3 is the structural representation of the litho machine environmental monitoring system that the utility model preferred embodiment 1 is provided；
Fig. 4 is the long distance control system structural representation that the utility model preferred embodiment 2 is provided.
Icon：1- light source modules；2- focus modules；3- digital micro-mirror modules；4- console modules；5- signal acquisition modules；
51- signal conditioners；52- analog-digital converters；6- display modules；7- environment modules；8- signal comparison modules；9- alarm modules；
10- gas path modules；101- vacuum modules；11- signal receiving modules；12- signal encryption modules；13- decrypted signal modules.
Specific embodiment
To make the purpose, technical scheme and advantage of the utility model embodiment clearer, below in conjunction with accompanying drawing to this
The technical scheme of utility model is clearly and completely described, it is clear that described embodiment is that the utility model part is real
Example is applied, rather than whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making
The every other embodiment obtained under the premise of creative work, belongs to the scope of the utility model protection.
Current existing litho machine cannot realize the monitoring of internal operation running environment, and, often when asking occurs in equipment
During topic could discovering device internal operating environment it is abnormal, cause equipment fault, furthermore, it is necessary to be inspected periodically by technical staff
Facility environment and running status, not only wasting manpower and material resources, and cannot in real time understand the situation of the internal environment of equipment.
For ease of understanding the present embodiment, first to a kind of litho machine environmental monitoring system provided by the utility model
System describes in detail.
Fig. 1 is a kind of basic structure schematic diagram of litho machine environmental monitoring system provided by the utility model.
Reference picture 1, the utility model embodiment provides a kind of litho machine environmental monitoring system to include light source module 1, gathers
Burnt module 2, digital micro-mirror module 3, console module 4, also include：Signal acquisition module 5, display module 6 and environment module 7, its
In,
Light source module 1, focus module 2, digital micro-mirror module 3, console module 4 are connected with environment module 7 respectively, environment
Module 7 is connected with signal acquisition module 5, and signal acquisition module 5 is connected with display module 6.It is further, light source module
1st, focus module 2, digital micro-mirror module 3, console module 4 are connected by Temperature Humidity Sensor with environment module 7 respectively.
Light source module 1, digital micro-mirror module 3 shown in figure, focus module 2, console module 4 connect successively according to light path
Connect.
It is further that light source module 1 is laser, the litho machine is laser direct-writing formula litho machine.Preferably, laser
Device is semi-conductor solid laser, and semi-conductor solid laser can be the semiconductor solid-state laser such as ultraviolet light, feux rouges, blue light
Device.Laser is the major part of litho machine, but laser belongs to loss product, and prolonged use can make the energy of laser
Decay slowly, utilization rate reduction, does not reach the degree of laser writing, and then cause the carrying out of pcb board follow-up work.Monitoring swashs
The running status of light device, is easy to the maintenance of laser.Temperature Humidity Sensor is provided with below laser.
Focus module 2 mainly includes that motor, prism wedge are focused on and echelon prism is focused on, and the control of focusing is by motor
Mobile completion focusing operation, the running environment state of focus module 2 is judged by monitoring the moving displacement of motor, in motor
Lower section be provided with Temperature Humidity Sensor.
Digital micro-mirror module 3 (Digital Micromirror Device, abbreviation DMD module), including DMD control panels and
DMD camera lenses, DMD modules are mainly DMD control plate analysis PCB data control DMD camera lens upsets, the reflection of laser are realized, in number
The lower section of word micro-mirror module 3 is provided with Temperature Humidity Sensor.
Used as the article carrying platform for preventing exposed substrate, the circuit ambient of monitoring platform module 4 is extremely important to console module 4
's.Temperature Humidity Sensor is provided with over and under in console module 4, with the running environment of comprehensive monitoring console module 4.
The selection of the sensor is chosen according to actually used condition.It should be noted that sensor is used as one
The instrument for perceiving things physical change is planted, using more and more extensively, its order of accuarcy for perceiving physical message will directly affect phase
Answer the resolution of system.And with the continuous progress of science and technology, the working mechanism of sensor becomes complicated, sensor pattern is various
It is various, therefore sensor from different accuracy also may result in the difference of metering system, reasonable selection sensor can make measurement
Precision and stability are improved, and the selection principle of sensor is as follows in the present embodiment：
By monitoring to picture and the selected sensor of monitoring of environmental：According to specific monitoring object and working sensor environment, choosing
Select the satisfactory sensor of operation principle.
Sensitivity：According to field requirement, under the premise of measurement range permission, selection sensitivity is higher.
Response time：In the range of measurement frequency, sensor is well positioned to meet collecting device requirement, reduces to greatest extent
Time delay.
Reliability：The electric parameter of sensor meets regulation and requires.
The linearity：Characterize the important parameter of the work range of sensor, typically under the premise of precision, sensitivity is met, choosing
Select the larger sensor of work range.
It is further that signal acquisition module 5 includes signal conditioner 51 and analog-digital converter 52, as shown in Fig. 2 its
In, signal conditioner 51 is connected with analog-digital converter 52.
Signal conditioner 51 is amplified to the humiture parameter signal that Temperature Humidity Sensor is gathered, filters conditioning, output
Analog signal, signal conditioner 51 is amplified to the signal of sensor collection measurement, filter etc. and to nurse one's health after, become the mould of standard
Intend signal, and analog signal is passed into connected analog-digital converter 52.
Analog-digital converter 52 converts analog signals into data signal.
Analog-digital converter 52 is A/D converter, and it is the electronics unit of data signal to typically refer to one by analog-signal transitions
Part.Because data signal does not have practical significance in itself, a relative size is merely representative of, therefore any one analog-digital converter is all
Need a reference analog quantity as the standard of conversion, relatively common normative reference is maximum convertible signal magnitude, and
The digital quantity of output then represents size of the input signal relative to reference signal.
Display module 6 provides visualization human-computer interaction interface, and user can intuitively monitor the parameter information of above-mentioned module,
It is convenient directly perceived.It is further that display module 6 is LCDs, it is preferred that display module 6 is touching liquid-crystal display screen,
Contact action can be carried out, it is also possible to handover module interface, check information.
Environment module 7 is used to monitoring the running environment of each module, environment module 7 respectively with light source module 1, focus module 2,
Digital micro-mirror module 3, console module 4 are connected.It is further, it is light source module 1, focus module 2, digital micro-mirror module 3, flat
Platform module 4 is connected by Temperature Humidity Sensor with environment module 7 respectively, 7 pairs of parameters from each sensor of environment module
It is read out respectively and is stored, can simultaneously overcomes multiple sensor disturbances to cause what transmission data were unstable or malfunctioned to ask
Topic.It is further that environment module 7 is singlechip chip, signal can be read out, stored, processed and transmitted.Preferably
It is that environment module 7 is lpc2138 singlechip chips.
Light source module 1, focus module 2, digital micro-mirror module 3, the lower section of console module 4 are provided with corresponding humiture
The humiture parameter of above-mentioned each module can be converted into electric signal and pass to environment module 7, ring by sensor, Temperature Humidity Sensor
Border module 7 is read out storage to electric signal, and environment module 7 will be stored and the humiture parameter that reads passes to signal acquisition
Module 5 is pre-processed, and the signal conditioner 51 of signal acquisition module 5 is amplified to humiture parameter signal, filters conditioning,
Output analog signal；Above-mentioned analog signal is converted to data signal by analog-digital converter 52, passes to display module 6, shows mould
Block 6 is shown, so as to realize in real time, intuitively monitoring the running environment of each module.
Furthermore, it is necessary to illustrate, the litho machine environmental monitoring system can also include power module.
Power module provides electric power support, light source module 1, focus module 2, digital micro-mirror for litho machine environmental monitoring system
Module 3, console module 4, signal acquisition module 5, display module 6, environment module 7 are connected with power module respectively；
Power module provides electric power support as whole litho machine environmental monitoring system, it is preferred that power module is super
Large-capacity battery, can store electricity, in case of emergency, there is provided non-firm power supports litho machine environmental monitoring system fortune
Turn.
Operating voltage and electric current when power module is mainly responsible for detecting that whole machine runs, it is ensured that equipment is in normal power
Scope.Power module lower section is provided with sensor, is further, and sensor includes current sensor and voltage sensor.
Embodiment 1：
Fig. 3 is the structural representation of the litho machine environmental monitoring system that the utility model preferred embodiment 1 is provided；
As shown in figure 3, the utility model embodiment provide a kind of litho machine environmental monitoring system include light source module 1,
Focus module 2, digital micro-mirror module 3, console module 4, signal acquisition module 5 and display module 6.
It is further that the litho machine environmental monitoring system also includes：Signal comparison module 8 and alarm module 9, wherein,
Signal acquisition module 5 is connected with signal comparison module 8, and signal comparison module 8 is connected with alarm module 9.
The signal that signal comparison module 8 will can be collected is compared with parameter preset, during beyond preset range value, leads to
Cross connected alarm module 9 and send alarm, remind the operation error of related personnel's equipment, break down, convenient dimension in time
Repair.Be further, signal comparison module 8 be signal comparator, alarm module 9 include voice device, voice device be loudspeaker,
One kind of loudspeaker or its combination.
Preferably, the litho machine environmental monitoring system also includes gas path module 10, wherein,
Gas path module 10 is connected with environment module 7, and vacuum module 101, vacuum mould are provided with gas path module 10
Block 101 is used to monitor the vacuum signal parameter of the gas path module 10, is further, and vacuum module 101 is vacuum pressure
Force snesor.
The vacuum signal parameter of the gas path module 10 that vacuum module 101 will be measured passes to environment module 7, environment mould
Block 7 is read out storage, and the vacuum signal parameter environment module 7 for storing and read will be stored and read by environment module 7
Vacuum signal parameter pass to signal acquisition module 5 and pre-processed, the signal conditioner 51 pairs of signal acquisition module 5 is true
Cycle signal parameter is amplified, filters conditioning, exports analog signal；Above-mentioned analog signal is converted to number by analog-digital converter 52
Word signal, passes to display module 6, and display module 6 is shown, thus realize in real time, intuitively monitor photoetching machine equipment gas
The vacuum running environment of road module 10.
Embodiment 2：
As shown in figure 4, the utility model embodiment additionally provides a kind of long distance control system, including signal receiving module 11
And the litho machine environmental monitoring system in embodiment 1, the signal acquisition module 5 in litho machine environmental monitoring system connects with signal
Module 11 is received to communicate to connect.
It is further that signal acquisition module 5 passes through wireless communication connection with signal receiving module 11, it is preferred that letter
Number acquisition module 5 is connected with signal receiving module 11 by radio communication satellite.
Fed back by satellite, when under the suspension of litho machine environmental monitoring system or powering-off state, satellite feedback data is remained to
Real-time monitoring litho machine environmental monitoring system state.
It is further that litho machine environmental monitoring system also includes signal encryption module 12, wherein,
Signal encryption module 12 is connected with signal acquisition module 5.
The data-signal of signal acquisition module 5 is carried out data encryption treatment by signal encryption module 12, it is ensured that data-signal
Stabilization, safe transmission.Preferably, signal encryption module 12 is data encoder.
It is further that signal receiving module 11 also includes decrypted signal module 13.
The data-signal that decrypted signal module 13 will be received carries out decoding parsing, is reduced into original data-signal, supplies
User refers to, and realizes remote monitoring.Preferably, signal deciphering module 13 is data decoder.
It should be noted that signal receiving module 11 can be industrial computer, or mobile unit, such as hand
Machine, panel computer, notebook computer etc..
The long distance control system that the utility model embodiment is provided, the litho machine environmental monitoring system provided with above-described embodiment
System has identical technical characteristic, so can also solve identical technical problem, reaches identical technique effect.Additionally can be with
Realize the running status of remote monitoring litho machine environmental monitoring system.
It is apparent to those skilled in the art that, for convenience and simplicity of description, the system of foregoing description
With the specific work process of module, the corresponding process in preceding method embodiment is may be referred to, will not be repeated here.
In addition, in the description of the utility model embodiment, unless otherwise clearly defined and limited, term " installation ",
" being connected ", " being connected " should be interpreted broadly, for example, it may be connected to a fixed, or be detachably connected, or one
It is connected body；Can be mechanically coupled to connect, or be electrically connected to connect；Can be joined directly together to connect, it is also possible to by centre
Medium is indirectly connected to connect, and can be two connections of element internal.For the ordinary skill in the art, can be specific
Situation understands concrete meaning of the above-mentioned term in the utility model.
It is term " " center ", " on ", D score, "left", "right", " perpendicular, it is necessary to explanation in description of the present utility model
Directly ", the orientation or position relationship of the instruction such as " level ", " interior ", " outward " are, based on orientation shown in the drawings or position relationship, to be only
Described with simplified for the ease of description the utility model, must had rather than the module or element for indicating or implying meaning specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.Additionally, term " the
One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that indicating or implying relative importance.
Finally it should be noted that：Embodiment described above, specific embodiment only of the present utility model is used to illustrate this
The technical scheme of utility model, rather than its limitations, protection domain of the present utility model is not limited thereto, although with reference to foregoing
Embodiment has been described in detail to the utility model, it will be understood by those within the art that：It is any to be familiar with this skill
In the technical scope that the utility model is disclosed, it still can be to the skill described in previous embodiment for the technical staff in art field
Art scheme is modified or can readily occur in change, or carries out equivalent to which part technical characteristic；And these modifications,
Change is replaced, and does not make the spirit and model of essence disengaging the utility model embodiment technical scheme of appropriate technical solution
Enclose, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model described should be wanted with right
The protection domain asked is defined.
Claims (10)
1. a kind of litho machine environmental monitoring system, it is characterised in that including light source module, focus module, digital micro-mirror module, flat
Platform module, also includes：Signal acquisition module, display module and environment module, wherein,
The light source module, focus module, digital micro-mirror module, console module are connected with the environment module respectively, described
Environment module is connected with the signal acquisition module, and the signal acquisition module is connected with the display module.
2. litho machine environmental monitoring system according to claim 1, it is characterised in that the light source module, focus module,
Digital micro-mirror module, console module are connected by Temperature Humidity Sensor with the environment module respectively.
3. litho machine environmental monitoring system according to claim 2, it is characterised in that the signal acquisition module includes letter
Number conditioner and analog-digital converter, wherein,
The signal conditioner is amplified to the humiture parameter signal that the Temperature Humidity Sensor is gathered, filters conditioning, defeated
Go out analog signal；
The analog signal is converted to data signal by the analog-digital converter.
4. litho machine environmental monitoring system according to claim 1, it is characterised in that also including signal comparison module and report
Alert module, wherein,
The signal acquisition module is connected with the signal comparison module, the signal comparison module and the alarm module phase
Connection.
5. litho machine environmental monitoring system according to claim 1, it is characterised in that also including gas path module, wherein,
The gas path module is connected with the environment module, and vacuum module, the vacuum are provided with the gas path module
Module is used to monitor the vacuum of the gas path module.
6. a kind of long distance control system, for remote monitoring litho machine environmental monitoring system, it is characterised in that received including signal
Module and the litho machine environmental monitoring system as described in claim any one of 1-5, wherein,
Signal acquisition module in the litho machine environmental monitoring system is communicated to connect with the signal receiving module.
7. long distance control system according to claim 6, it is characterised in that the litho machine environmental monitoring system also includes
Signal encryption module, wherein,
The signal encryption module is connected with the signal acquisition module.
8. long distance control system according to claim 7, it is characterised in that the signal receiving module also includes signal solution
Close module.
9. long distance control system according to claim 8, it is characterised in that the signal encryption module is data encoding
Device, the decrypted signal module is data decoder.
10. long distance control system according to claim 6, it is characterised in that the signal acquisition module and the signal
Receiver module is connected by radio communication.
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| CN201621282435.0U CN206292531U (en) | 2016-11-25 | 2016-11-25 | Litho machine environmental monitoring system and its long distance control system |
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| CN201621282435.0U CN206292531U (en) | 2016-11-25 | 2016-11-25 | Litho machine environmental monitoring system and its long distance control system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110572783A (en) * | 2019-08-26 | 2019-12-13 | 浙江德塔森特数据技术有限公司 | Remote safety monitoring management system and method based on short message |
| CN113252109A (en) * | 2021-05-31 | 2021-08-13 | 安徽国芯智能装备有限公司 | Environment monitoring system of photoetching equipment |
| CN113406864A (en) * | 2021-05-24 | 2021-09-17 | 上海顺灏新材料科技股份有限公司 | Integrated monitoring system and monitoring method for peripheral equipment of photoetching machine |
-
2016
- 2016-11-25 CN CN201621282435.0U patent/CN206292531U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110572783A (en) * | 2019-08-26 | 2019-12-13 | 浙江德塔森特数据技术有限公司 | Remote safety monitoring management system and method based on short message |
| CN110572783B (en) * | 2019-08-26 | 2021-12-21 | 浙江德塔森特数据技术有限公司 | Remote safety monitoring management system and method based on short message |
| CN113406864A (en) * | 2021-05-24 | 2021-09-17 | 上海顺灏新材料科技股份有限公司 | Integrated monitoring system and monitoring method for peripheral equipment of photoetching machine |
| CN113406864B (en) * | 2021-05-24 | 2022-10-28 | 上海顺灏新材料科技股份有限公司 | Integrated monitoring system and monitoring method for peripheral equipment of photoetching machine |
| CN113252109A (en) * | 2021-05-31 | 2021-08-13 | 安徽国芯智能装备有限公司 | Environment monitoring system of photoetching equipment |
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