CN206257272U - For the sealing structure of vacuum chamber - Google Patents
For the sealing structure of vacuum chamber Download PDFInfo
- Publication number
- CN206257272U CN206257272U CN201621183734.9U CN201621183734U CN206257272U CN 206257272 U CN206257272 U CN 206257272U CN 201621183734 U CN201621183734 U CN 201621183734U CN 206257272 U CN206257272 U CN 206257272U
- Authority
- CN
- China
- Prior art keywords
- seal
- sealing
- boss
- vacuum chamber
- sealing area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 105
- 239000004411 aluminium Substances 0.000 claims description 24
- 229910052782 aluminium Inorganic materials 0.000 claims description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 24
- 238000009434 installation Methods 0.000 abstract description 6
- 238000003754 machining Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Abstract
A kind of sealing structure for vacuum chamber, including：First seal, first seal is outwardly to be formed with first boss, and first boss is formed with primary sealing area；Second seal, second seal is outwardly to be formed with second boss, and second boss is formed with secondary sealing area, and secondary sealing area is relative with primary sealing area, and second boss has been recessed locating slot from secondary sealing area；Along the sealing ring that locating slot is set；And the connector of connection first seal and second seal, connector is used to making primary sealing area and secondary sealing area extrude sealing ring being tightly connected being formed.The sealing structure for vacuum chamber given by the utility model, because first seal and second seal are respectively formed with first boss and second boss, reduce machining amount, the sealing structure is required in the absence of cooperation, processing is simple, easy for installation, in addition, secondary sealing area has been recessed locating slot, while solving the orientation problem of sealing ring.
Description
Technical field
The application is related to a kind of sealing structure, more particularly to a kind of sealing structure for vacuum chamber.
Background technology
The sealing structure of large-scale vacuum chamber is usually L-type sealing and flat seal as shown in figure 5, being sealed for L-type,
Although its lower sealing is provided with step-like raised 5, it is easy to sealing ring to position, there is strict cooperation requirement in upper-lower seal face, greatly
It is big to increased processing and installation difficulty.For flat seal, as shown in fig. 6, two sealing surfaces of its docking are plane, although
Processing sealing surface is convenient, but the location difficulty of sealing ring 3, frequently result in sealing ring 3 when flange is docked and offset, cause installation difficulty
Greatly.
Utility model content
The utility model provides a kind of sealing structure for vacuum chamber, it is intended to while solving existing sealing structure
The orientation problem of sealing ring and processing, installation difficulty.
A kind of sealing structure for vacuum chamber, including：
First seal, the first seal is outwardly to be formed with first boss, and the first boss is formed with
One sealing surface；
Second seal, the second seal is outwardly to be formed with second boss, and the second boss is formed with
Two sealing surfaces, the secondary sealing area is relative with the primary sealing area, and the second boss is from the secondary sealing area indent
It is formed with locating slot；
Along the sealing ring that the locating slot is set；
And the connector of the connection first seal and the second seal, the connector is for making described first
Sealing surface and the secondary sealing area are extruded the sealing ring to be tightly connected with formation.
The described sealing structure for vacuum chamber, wherein, the sealing ring is aluminium wire.
The described sealing structure for vacuum chamber, it is characterised in that the diameter range of the aluminium wire is 3mm~5mm.
The described sealing structure for vacuum chamber, it is characterised in that a diameter of 4mm of the aluminium wire.
The described sealing structure for vacuum chamber, it is characterised in that the connector is bolt.
The sealing structure for vacuum chamber given by the utility model, due to first seal and second seal point
First boss and second boss are not formed with, machining amount is reduced, and, in the absence of requirement is coordinated, processing is more for the sealing structure
Simply, it is easy for installation, in addition, secondary sealing area has been recessed locating slot, while solving the orientation problem of sealing ring.
Brief description of the drawings
Fig. 1 be the utility model embodiment in, schematic perspective view；
Fig. 2 be the utility model embodiment in, the explosive view of vacuum chamber；
Fig. 3 be the utility model embodiment in, the profile of vacuum chamber；
Fig. 4 is enlarged drawing at A in Fig. 3；
Fig. 5 is the structural representation of L-type sealing in the prior art；
Fig. 6 is the structural representation of flat seal in the prior art.
Specific embodiment
The application is described in further detail below by specific embodiment combination accompanying drawing.
The sealing structure for vacuum chamber given by the present embodiment as shown in Fig. 1 and Fig. 4, including first seal 1,
Second seal 2, sealing ring 3 and connector 4.First seal 1 is outwardly to be formed with first boss 11, the shape of first boss 11
Into there is primary sealing area 111.Second seal 2 is outwardly to be formed with second boss 21, and it is close that second boss 21 is formed with second
Front cover 211, secondary sealing area 211 is relative with primary sealing area 111, and second boss 21 has been recessed from secondary sealing area 211
Locating slot 212.Sealing ring 3 is set along shown locating slot 212.Connector 4 connects first seal 1 and second seal 2, connection
Part 4 is tightly connected for making primary sealing area 111 and secondary sealing area 211 extrude sealing ring 3 with formation.
Specifically, as shown in Figure 1, Figure 2 and Figure 3, the first seal 1 of the present embodiment is case lid, and second seal 2 is case
Body, first seal 1 covers the openend for being located at second seal 2, and first seal 1 is collectively forming one with second seal 2
Vacuum chamber, vacuumizing to be formed by molecular pump can meet vacuum≤1 × 10-4The vacuum chamber of Pa.Wherein, casing and case
The material of lid can use 304 stainless steels or carbon steel.
Certainly, first seal 1 is not limited to case lid, and second seal 2 is not limited to casing.May also be first seal 1 close
Envelope is connected on case lid, and second seal 2 is sealedly connected on casing, or, first seal 1 is sealedly connected on casing,
Second seal 2 is connected on case lid, can integrally form vacuum chamber.
It is radiation environment (such as gamma-rays), sealing structure requirement radiation hardness, it is impossible to use the materials such as fluorubber in working environment
Material sealing, then sealing ring 3 uses metal sealing.Further, sealing ring 3 is aluminium wire.In this way, sealing ring 3 uses aluminium wire more
It is economical and practical, it is cost-effective.Certainly, sealing ring 3 is not limited to aluminium wire, can also be other materials, such as indium silk or spun gold, but
It is that compared with indium silk and spun gold, being sealed with aluminium wire can substantially reduce cost.
Specifically, aluminium wire of the present utility model be fine aluminium silk, be heat-treated 350 DEG C anneal 1 hour, make aluminium wire soften so as to
It is more easily deformed under extruding and primary sealing area 111 and the gluing, sealing of secondary sealing area 211.The diameter range of aluminium wire be 3mm~
5mm.In this way, aluminium wire can preferably be deformed fitting into sealing shape with primary sealing area 111 and secondary sealing area 211
State.
It is preferred that a diameter of 4mm of aluminium wire.In this way, the sealing effectiveness of Ф 4mm aluminium wires is preferable and more cost-effective.This
The aluminium wire of embodiment is fine aluminium silk, is annealed 1 hour for 350 DEG C through Overheating Treatment, aluminium wire is softened to be easier to become under extrusion
Shape and primary sealing area 111 and the gluing, sealing of secondary sealing area 211.
Further, connector 4 is bolt.In this way, simple structure, easy to operate.Wherein, first seal 1 is around
The interval of one boss 11 offers multiple through holes, and second seal 2 offers multiple and the first sealing around the interval of second boss 21
The screwed hole that through hole on part 1 is correspondingly arranged, bolt passes through through hole to connect first seal 1 and second seal 2.Due to
The structure design of one boss 11 and second boss 21, problem of being forged a knife caused by screwed hole when can avoid finishing.
Specifically, during vacuum sealing, first aluminium wire is arranged in second seal 2 along locating slot 212, fastens first close
Sealing 1, tightens bolt so that primary sealing area 111 is extruded with secondary sealing area 211 in face of aluminium wire, and aluminium wire deforms simultaneously
Sealing state is fitted into primary sealing area 111 and secondary sealing area 211, in vacuum, bolt is constantly tightened,
Simultaneously in the presence of atmospheric pressure, aluminium wire is further deformed, pasted completely with primary sealing area 111 and secondary sealing area 211
Close until formation cold welding, realizes vacuum sealing.
The sealing structure for vacuum chamber given by the utility model, due to first seal 1 and second seal 2
First boss 11 and second boss 21 are respectively formed with, machining amount is reduced, the sealing structure is required in the absence of cooperation, plus
Work is simpler, easy for installation, in addition, secondary sealing area 211 has been recessed locating slot 212, while solving sealing ring 3
Orientation problem.
Above content is to combine the further description that specific embodiment is made to the application, it is impossible to assert this Shen
Specific implementation please is confined to these explanations.For the application person of an ordinary skill in the technical field, do not taking off
On the premise of conceiving from the present application, some simple deduction or replace can also be made.
Claims (5)
1. a kind of sealing structure for vacuum chamber, it is characterised in that including：
First seal, the first seal is outwardly to be formed with first boss, and it is close that the first boss is formed with first
Front cover；
Second seal, the second seal is outwardly to be formed with second boss, and it is close that the second boss is formed with second
Front cover, the secondary sealing area is relative with the primary sealing area, and the second boss is recessed from the secondary sealing area
There is locating slot；
Along the sealing ring that the locating slot is set；And the connector of the connection first seal and the second seal, institute
Connector is stated to connect to form sealing for making the primary sealing area and the secondary sealing area extrude the sealing ring
Connect.
2. the sealing structure of vacuum chamber is used for as claimed in claim 1, it is characterised in that the sealing ring is aluminium wire.
3. the as claimed in claim 2 sealing structure for being used for vacuum chamber, it is characterised in that the diameter range of the aluminium wire is
3mm~5mm.
4. the sealing structure of vacuum chamber is used for as claimed in claim 3, it is characterised in that a diameter of 4mm of the aluminium wire.
5. the sealing structure of vacuum chamber is used for as claimed in claim 1, it is characterised in that the connector is bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621183734.9U CN206257272U (en) | 2016-11-03 | 2016-11-03 | For the sealing structure of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621183734.9U CN206257272U (en) | 2016-11-03 | 2016-11-03 | For the sealing structure of vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206257272U true CN206257272U (en) | 2017-06-16 |
Family
ID=59024312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621183734.9U Expired - Fee Related CN206257272U (en) | 2016-11-03 | 2016-11-03 | For the sealing structure of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206257272U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109666971A (en) * | 2017-10-16 | 2019-04-23 | 北京北方华创微电子装备有限公司 | Growth furnace |
| CN110869653A (en) * | 2017-07-06 | 2020-03-06 | 安珀动力能源公司 | Grease channel for reducing gas permeation into vacuum chamber |
-
2016
- 2016-11-03 CN CN201621183734.9U patent/CN206257272U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110869653A (en) * | 2017-07-06 | 2020-03-06 | 安珀动力能源公司 | Grease channel for reducing gas permeation into vacuum chamber |
| CN109666971A (en) * | 2017-10-16 | 2019-04-23 | 北京北方华创微电子装备有限公司 | Growth furnace |
| CN109666971B (en) * | 2017-10-16 | 2020-11-10 | 北京北方华创微电子装备有限公司 | Growth furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170616 Termination date: 20181103 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |