CN206219657U - A kind of special purpose device that vapor is provided for vacuum coating equipment - Google Patents
A kind of special purpose device that vapor is provided for vacuum coating equipment Download PDFInfo
- Publication number
- CN206219657U CN206219657U CN201621352363.2U CN201621352363U CN206219657U CN 206219657 U CN206219657 U CN 206219657U CN 201621352363 U CN201621352363 U CN 201621352363U CN 206219657 U CN206219657 U CN 206219657U
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- China
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- metal
- metal tube
- cover
- sealing ring
- vapor
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Abstract
A kind of special purpose device that vapor is provided for vacuum coating equipment, including metal can, sealing ring, cover, the first vacuum valve, the second vacuum valve, water supply hose and pumping metal tube；Characterized in that, being provided with cornice above the metal can, bolt hole is provided with cornice, inside is provided with inner chamber, and the side of the metal can is provided with the first metal tube and the second metal tube；The sealing ring is placed between cover and cornice；Through hole is provided with the cover side, bolt by metal can, sealing ring together with cover string, bolt sleeve is screwed on bolt by bolt hole, circular hole and through hole, metal can, sealing ring and cover can be fixed into an entirety；One end of first vacuum valve is connected with one end of water supply hose, and the other end is connected with one end of the first metal tube, and the other end of the first metal tube is welded on the side of metal can；One end of second vacuum valve is connected with one end of pumping metal tube, and the other end is connected with one end of the second metal tube, and the other end of the second metal tube is welded on metal can.The utility model is simple to operate, safely controllable for vacuum chamber provides vapor, energy-conservation and environmental protection.
Description
Technical field
The utility model belongs to vapor generation technique field, and in particular to a kind of for vacuum coating equipment provides vapor
Special purpose device.
Background technology
Blood coagulation is the subject matter existed with the biological apparatus of contacting blood and artificial organs surface, improves anticoagulant property pair
It is most important in the development and application of this kind of biomaterial.The blood compatibility on inorganic thin film material surface is structural with material
Can, particularly surface characteristic has close association, therefore, the relation between material surface structural behaviour and anticoagulant property is investigated,
Interface interaction behavior between solution material surface and blood, discloses anticoagulation surface modification mechanism, explore material treatment processes and
Method, for regulating and controlling and preparing the development with excellent blood compatibility medicine equipment and biomaterial there is important theory to refer to
Lead and practical application meaning.
Since studying thin film of titanium oxide, numerous achievements in research show, at present, the oxidation with preferable anticoagulation function
Titanium film, its satisfaction can not reach clinical needs.And Su Hongbin uses first principle density functional theory to rutile
Phase TiO2Surface small molecule absorption H2O carries out theoretical modeling and calculating, and research shows TiO2Oxygen defect surface H2O is with Dissociative
Based on, Lacking oxygen is adsorption site.H2O absorption does not change surface N-type semiconductor structure, relevant with the hydroxyl that surface produces.Gold
Red stone phase TiO2Oxygen defect surface and H2The electronic band structure formed after the absorption of O may prevent the electric charge of protein to
Material is shifted and causes conformation change, is conducive to the raising of blood compatibility.Therefore, proposing to thin film of titanium oxide to carry out high temperature true
Steam treatment under empty condition is reaching target.
In order to realize carrying out vapor surface treatment to thin film of titanium oxide under elevated temperature in vacuo, there is provided one kind is vacuum
Coating machine provides the special purpose device of vapor.
Utility model content
The utility model embodiment purpose under elevated temperature in vacuo to inorganic oxide titanium film it is intended that carry out vapor
Treatment provides atmospheric condition, to improve the physical property of thin-film material surface, and then improves the blood compatibility on its surface.
The utility model embodiment is achieved in that a kind of special purpose device that vapor is provided for vacuum coating equipment, bag
Include metal can, sealing ring, cover, the first vacuum valve, the second vacuum valve, water supply hose and pumping metal tube；Characterized in that, institute
State and cornice is provided with above metal can, bolt hole is provided with cornice, inside is provided with inner chamber, and the side of the metal can is set
There are the first metal tube and the second metal tube；The sealing ring is placed between cover and cornice；It is provided with the cover side logical
Hole, bolt by bolt hole, circular hole and through hole by metal can, sealing ring together with cover string, bolt sleeve is revolved on bolt
Tightly, metal can, sealing ring and cover can be fixed into an entirety；One end of first vacuum valve and one end of water supply hose
Connection, the other end is connected with one end of the first metal tube, and the other end of the first metal tube is welded on metal can, water supply hose
The internal upper inner chamber with metal can turns on；One end of second vacuum valve with pumping metal tube one end be connected, the other end and
One end connection of the second metal tube, the other end of the second metal tube is welded on metal can, is evacuated inside and the metal of metal tube
The upper inner chamber conducting of tank.
The metal can and cover are made using stainless steel；The sealing ring is made using flexible high-temperature resistant material.
Using technical solutions of the utility model, have the advantages that：
1）The utility model reaches 1 × 10 in ultrahigh vacuum degree-3Pa and it is following when, do not contain air in the vapor of generation
And other impurities composition, it is ensured that the purity of vapor；
2）The utility model can guarantee that it is consistent with the vacuum in vacuum coating equipment vacuum chamber, for vapor is provided
Sufficient air pressure conditions；
3）Cover can be opened, and be easy to user to clean metal can inside impurity；
4）The utility model is simple to operate, safely controllable for vacuum chamber provides vapor, energy-conservation and environmental protection.
Brief description of the drawings
Fig. 1 is the stereogram of the utility model embodiment；
Fig. 2 is the structural representation of the utility model embodiment；
In figure：10-metal can, 11-cornice, 12-inner chamber, the 13-the first metal tube, the 14-the second metal tube, 20-
It is sealing ring, 21-circular hole, 30-cover, 31-through hole, 32-bolt, 33-nut, the 40-the first vacuum valve, 50-the second true
Empty valve, 60-water supply hose, 70-pumping metal tube.
Specific embodiment
In order that the purpose of this utility model, technical scheme and advantage become more apparent, with reference to embodiments, to this
Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only used to explain that this practicality is new
Type, is not used to limit the utility model.
Below in conjunction with the accompanying drawings and specific embodiment is further described to application principle of the present utility model.
As shown in Fig. 1-Fig. 2, the utility model embodiment is achieved in that a kind of for vacuum coating equipment provides water steaming
The steam raising plant of gas, including metal can 10, sealing ring 20, cover 30, the first vacuum valve 40, the second vacuum valve 50, water inlet
Flexible pipe 60 and pumping metal tube 70；Characterized in that, being provided with cornice 11 above the metal can 10, it is provided with cornice 11
Bolt hole 12, inside is provided with inner chamber 15, and the side of the metal can 10 is provided with the first metal tube 13 and the second metal tube 14；Institute
Sealing ring 20 is stated to be placed between cover 30 and cornice 11；Through hole 31 is provided with the side of the cover 30, bolt 32 passes through bolt
Hole 12, circular hole 21 and through hole 31, metal can 10, sealing ring 20 are gone here and there with cover 30 together with, bolt 32 is enclosed within bolt 32
Screw, metal can 10, sealing ring 20 and cover 30 can be fixed into an entirety；One end of first vacuum valve 40 and water inlet
One end connection of flexible pipe 60, the other end is connected with one end of the first metal tube 13, and the other end of the first metal tube 13 is welded on gold
Belong to the side of tank 10；The inside of water supply hose 60 turns on the inner chamber 15 of metal can 10；One end of second vacuum valve 50 with
One end connection of metal tube 70 is evacuated, the other end is connected with one end of the second metal tube 14, the other end weldering of the second metal tube 14
The side of metal can 10 is connected on, the inside for being evacuated metal tube 70 turns on the inner chamber 15 of metal can 10.
The sealing ring 20 matches with cornice 11；The metal can 10 and cover 30 are made using stainless steel；It is described
Sealing ring 20 is made using flexible high-temperature resistant material.
The utility model is used for as follows the step of vacuum coating equipment provides vapor：
1）Pumping metal tube 70 is attached with the vacuum chamber of the vacuum coating equipment not being operated also, by water supply hose
60 are connected with the container equipped with redistilled water；
2）The first vacuum valve 40 and the second vacuum valve 50 are closed, vacuum coating equipment is evacuated to 1 × 10-3Pa；
3）The second vacuum valve 50 is opened, vacuum declines, continues to vacuumize coating machine vacuum to 1 × 10-3Pa；
4）The second vacuum valve 50 is closed, now the vacuum in metal can 10 is consistent with the vacuum chamber of vacuum coating equipment；
5）The first vacuum valve 40 is slowly opened, the air and redistilled water in water supply hose 60 suck micro metal naturally
Tank 10 is interior and is evaporated to vapor；
6）Close the first vacuum valve 40, open the second vacuum valve 50, take out the vacuum of high-temperature vacuum room to 1 × 10-3Pa, this
When, the utility model provides vapor for vacuum coating equipment；
7）Repeat the above steps, can repeatedly for vacuum coating equipment provides vapor.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all at this
Any modification, equivalent and improvement for being made within the principle of utility model etc., should be included in protection of the present utility model
Within the scope of.
Claims (4)
1. a kind of steam raising plant that vapor is provided for vacuum coating equipment, including metal can（10）, sealing ring（20）, cover
（30）, the first vacuum valve（40）, the second vacuum valve（50）, water supply hose（60）With pumping metal tube（70）；Characterized in that, institute
State metal can（10）Above be provided with cornice（11）, cornice（11）On be provided with bolt hole（12）, inside is provided with inner chamber（15）,
The metal can（10）Side be provided with the first metal tube（13）With the second metal tube（14）；The sealing ring（20）It is placed on
Cover（30）With cornice（11）Between；The cover（30）Through hole is provided with side（31）, bolt（32）By bolt hole（12）、
Circular hole（21）And through hole（31）, by metal can（10）, sealing ring（20）And cover（30）String blending bolt together（32）It is enclosed within
Bolt（32）On screw, can be by metal can（10）, sealing ring（20）And cover（30）It is fixed into an entirety；First vacuum
Valve（40）One end and water supply hose（60）One end connection, the other end and the first metal tube（13）One end connection, the first gold medal
Category pipe（13）The other end be welded on metal can（10）Side；Water supply hose（60）Inside and metal can（10）Inner chamber
（15）Conducting；Second vacuum valve（50）One end with pumping metal tube（70）One end connection, the other end and the second metal
Pipe（14）One end connection, the second metal tube（14）The other end be welded on metal can（10）Side, be evacuated metal tube（70）
Inside and metal can（10）Inner chamber（15）Conducting.
2. a kind of steam raising plant that vapor is provided for vacuum coating equipment according to claim 1, it is characterised in that
The sealing ring（20）With cornice（11）Match.
3. a kind of steam raising plant that vapor is provided for vacuum coating equipment according to claim 1, it is characterised in that
The metal can（10）And cover（30）Made using metal.
4. a kind of steam raising plant that vapor is provided for vacuum coating equipment according to claim 1, it is characterised in that
The sealing ring（20）Made using flexible high-temperature resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621352363.2U CN206219657U (en) | 2016-12-11 | 2016-12-11 | A kind of special purpose device that vapor is provided for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621352363.2U CN206219657U (en) | 2016-12-11 | 2016-12-11 | A kind of special purpose device that vapor is provided for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206219657U true CN206219657U (en) | 2017-06-06 |
Family
ID=58785054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621352363.2U Expired - Fee Related CN206219657U (en) | 2016-12-11 | 2016-12-11 | A kind of special purpose device that vapor is provided for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206219657U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435517A (en) * | 2016-12-11 | 2017-02-22 | 重庆工业职业技术学院 | Device special for providing water vapor for vacuum coating machine and usage method thereof |
-
2016
- 2016-12-11 CN CN201621352363.2U patent/CN206219657U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435517A (en) * | 2016-12-11 | 2017-02-22 | 重庆工业职业技术学院 | Device special for providing water vapor for vacuum coating machine and usage method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170606 Termination date: 20171211 |