CN206211865U - Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas - Google Patents

Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas Download PDF

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CN206211865U
CN206211865U CN201621355532.8U CN201621355532U CN206211865U CN 206211865 U CN206211865 U CN 206211865U CN 201621355532 U CN201621355532 U CN 201621355532U CN 206211865 U CN206211865 U CN 206211865U
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circuit
triode
power supply
diode
transformer
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CN201621355532.8U
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李裔红
邓友
赖芒
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Chengdu Jinchuangli Science & Technology Co Ltd
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Chengdu Jinchuangli Science & Technology Co Ltd
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Abstract

The utility model proposes the high-power high voltage power supply that a kind of dielectric barrier discharge plasma processes organic exhaust gas, including main circuit part and Comprehensive Control part, it is characterized in that, the main circuit part includes power supply input circuit, rectified three-phase circuit, DC chopped-wave voltage-regulating circuit, IGBT full bridge inverters, high-frequency step-up transformer and power output circuit, and the comprehensive control section point includes DSP control system and touch-screen;Main circuit part is connected by DC chopped-wave voltage-regulating circuit and IGBT full bridge inverters with DSP control system in integrated control circuit, and power output circuit is connected by sample circuit with DSP control system.Purpose is, for the lower-powered problem of high voltage power supply in the prior art, the utility model provides a kind of high frequency, high pressure, high-power, and the high-power high voltage power supply that the strong dielectric barrier discharge plasma of general-purpose capability processes organic exhaust gas is carried to load-strap.

Description

Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas
Technical field
The utility model is related to a kind of power supply, and in particular to a kind of dielectric barrier discharge plasma treatment organic exhaust gas High-power high voltage power supply.
Background technology
High voltage power supply, also known as high pressure generator, generally refer to power supply of the output voltage more than five kilovolts, general high voltage The output voltage of power supply is up to tens of thousands of volts, even as high as hundreds of thousands volt or higher.
High voltage power supply purposes is a lot, mainly includes X-ray machine high voltage power supply, laser high voltage power supply, spectrum analysis high-tension electricity Source, nondestructive inspection high voltage power supply, semiconductor manufacturing facility high voltage power supply, Capillary Electrophoresis high voltage power supply, Non-Destructive Testing high-tension electricity Source, the particle injection high voltage power supply in semiconductor technology, PVD high voltage power supply, nano-photoetching high voltage power supply is used for Ion beam depositing, ion beam assisted depositing, electron beam evaporation, electron beam welding, ion gun, DC magnetron reactive sputtering, glass/ Fabric plated film, glow discharge, the test of microwave treatment high-voltage capacitance, CRT monitor test, high-tension cable fault test, TWT are surveyed Examination, H-POT tests.Particle accelerator, free-electron laser, neutron source, convolution acceleration source device, capacitor and inductor pulse generation net Network, Marx high-voltage pulse generators, capacitor charger.Heating using microwave, radio frequency amplification, nanometer technology application, electrostatic technique application, The high voltage power supply product of electrospun nanofibers, nuclear instrument high voltage power supply etc..
It is the optoelectronic device of basic functional principle, such as low temperature plasma, corona that high voltagehigh frequency electric discharge produces high energy electron The equipment such as dedusting, electrostatic oil removing are required to use high voltage power supply, and processing organic exhaust gas using dielectric barrier discharge plasma needs Discharged under voltage and frequency higher, up to more than 50000V, frequency is up to more than 40KHz for voltage.It is existing can phase therewith The power matched somebody with somebody is small, often below 2KW, and it is not strong enough that the band to loading carries versatility.
The content of the invention
The purpose of this utility model is:For the lower-powered problem of above-mentioned high voltage power supply, the utility model provides one It is kind of high frequency, high pressure, high-power, the big of the strong dielectric barrier discharge plasma treatment organic exhaust gas of general-purpose capability is carried to load-strap Power high voltage power supply.
The technical solution adopted in the utility model is as follows:
Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas, including main circuit part and synthesis Control section, the main circuit part includes that power supply input circuit, rectified three-phase circuit, DC chopped-wave voltage-regulating circuit, IGBT are complete Bridge inverter circuit, high-frequency step-up transformer and power output circuit, the comprehensive control section point include DSP control system and touch Screen;
The main circuit part is by DC chopped-wave voltage-regulating circuit and IGBT full bridge inverters and integrated control circuit DSP control system is connected, and power output circuit is connected by sample circuit with DSP control system.
Further, in the main circuit, power supply input circuit is by rectified three-phase circuit and tributary voltage regulation circuit of chopping Connection, DC chopped-wave voltage-regulating circuit is connected with IGBT full bridge inverters, IGBT full bridge inverters and high-frequency step-up transformer Connection, high-frequency step-up transformer is connected with power output circuit.
Further, in the Comprehensive Control part, in DSP control system, including the control of dsp controller, DC chopped-wave Circuit and PWM pulse-width adjustments and protection circuit;Dsp controller controls circuit to be cut with direct current in main circuit part by DC chopped-wave Ripple regulating circuit is connected, and dsp controller is connected by PWM pulse-width adjustments and protection circuit with IGBT full bridge inverters in main circuit Connect, sample circuit is connected by Phototube Coupling with dsp controller.
Further, in the main circuit part, switch S1, switch S2 and switch S3 one end are connected with three phase mains, open Close the S1 other ends to be connected with diode D1 positive poles and diode D4 negative poles, switch the S2 other ends and diode D2 positive poles and diode D5 negative poles are connected, and the switch S3 other ends are connected with diode D3 positive poles and diode D6 negative poles, diode D1 negative poles, diode D2 Negative pole and diode D3 negative poles are connected with triode Q5 colelctor electrodes, and diode D4 positive poles, diode D5 positive poles and diode D6 are just Pole is connected with triode Q2 emitter stages, and electric capacity C1 one end is connected with triode Q5 colelctor electrodes, and electric capacity C2 one end is sent out with triode Q2 Emitter-base bandgap grading is connected, and the electric capacity C1 other ends and the electric capacity C2 other ends are connected, and diode D7 negative poles are connected with triode Q5 colelctor electrodes, two poles Pipe D7 positive poles are connected with triode Q5 emitter stages, and triode Q5 base stages are cut with direct current in the DSP control system of integrated control circuit Ripple control circuit connection, triode Q5 emitter stages are connected with triode Q1 colelctor electrodes, electric capacity C3 one end and triode Q1 colelctor electrodes Connection, the electric capacity C3 other ends are connected with electric capacity C4 one end, and the electric capacity C4 other ends are connected with triode Q2 emitter stages, triode Q1 collection Electrode is connected with triode Q3 colelctor electrodes, and triode Q2 emitter stages are connected with triode Q4 emitter stages, triode Q1 emitter stages and Triode Q2 colelctor electrodes are connected with electric capacity C5 one end, triode Q3 emitter stages and triode Q4 colelctor electrodes and transformer T1 interfaces 2 Connection, the electric capacity C5 other ends are connected with inductance L1 one end, and the inductance L1 other ends are connected with transformer T1 interfaces 1, and transformer T1 connects Mouth 3 is connected with transformer T2 interfaces 1, and transformer T1 interfaces 4 are connected with transformer T2 interfaces 2, the interface 3 and interface of transformer T2 4 export external as power supply.
In sum, by adopting the above-described technical solution, the beneficial effects of the utility model are:
1. inversion driving frequency is 1kHz-40kHz, can adjust driving frequency by different loads and characteristic, significantly Improve adaptability of the power supply to different loads.
2. in H.V. step up transformer part, using two-stage step-up method;On the one hand the previous stage transformer that can degrade is exhausted Edge stress levels, can also reduce the volume of rear stage transformer.
3. previous stage transformer is placed in rack, and rear stage transformer is placed in oil tank of transformer, can effectively solve transformation The not enough shortcoming of the insulativity of device winding department, while reducing the volume of oil tank of transformer.
4. up to more than 50000V, power reaches 30kw to voltage, can effectively solve the problems, such as that separate unit power is not enough.Overcome Separate unit power is too small, it is necessary to the shortcoming of multi-machine parallel connection during treatment big flow organic exhaust gas.Increased the stability of system.
Brief description of the drawings
Fig. 1 is the utility model circuit structure diagram;
Fig. 2 is main circuit partial circuit diagram;
Fig. 3 is Comprehensive Control part-structure figure.
Specific embodiment
All features disclosed in this specification, in addition to mutually exclusive feature and/or step, can be with any Mode is combined.
The utility model is elaborated with reference to Fig. 1, Fig. 2, Fig. 3.
As shown in figure 1, be the structural representation of circuit, wherein mainly including two parts:Inverter main circuit part, Comprehensive Control part.
Inverter main circuit includes that power supply input circuit, rectified three-phase circuit, DC chopped-wave voltage-regulating, IGBT full-bridges are inverse Change, high-frequency step-up transformer, power output circuit.
Comprehensive Control part is made up of touch-screen and DSP control system;Sample circuit 7 includes current sampling circuit and voltage Sample circuit;Sampled signal returns feed-in inverter by isolation circuit, DSP, PWM pulse-width adjustment and protection circuit.Frequency range 1kHz~40kHz, IGBT full-bridge inverting duty cycle adjustment scope are 5%-45%, there is high permeability magnetic core and pulse-width adjustment, ripple Shape does not distort, and efficiency is up to 90%.
In major loop three-phase alternating-current supply be sequentially connected with rectified three-phase circuit, DC chopped-wave voltage-regulating, IGBT full-bridge inverters, High-frequency step-up transformer, output circuit.Insulated gate bipolar transistor IGBT is used as inverter power switching device and DC chopped-wave Device.
Power supply core cell is digital micro-chip processor, DC voltage sample circuit, output current sample circuit Output end through Phototube Coupling be input into AD conversion module, the computing module of digital micro-chip processor respectively with current regulating module, work( Rate adjustment module is connected, and communication module is connected with display operating panel signal, and the given module of power is through power conditioning module, electric current Adjustment module, PWM output modules are connected with inverse changing driving circuit input, and I/O control modules are connected with external connecting function module.It is special Point is output voltage, electric current continuously adjustabe, and can use constant pressure and constant current operation mode.
Compared with existing control device, dielectric barrier discharge plasma treatment organic exhaust gas described in the utility model High-power high voltage power supply has the following advantages that:
1. inversion driving frequency is 1kHz-40kHz, can adjust driving frequency by different loads and characteristic, significantly Improve adaptability of the power supply to different loads.
2. in H.V. step up transformer part, using two-stage step-up method;On the one hand the previous stage transformer that can degrade is exhausted Edge stress levels, can also reduce the volume of rear stage transformer.
3. previous stage transformer is placed in rack, and rear stage transformer is placed in oil tank of transformer, can effectively solve transformation The not enough shortcoming of the insulativity of device winding department, while reducing the volume of oil tank of transformer.
4. up to more than 50000V, power reaches 30kw to voltage, can effectively solve the problems, such as that separate unit power is not enough.Overcome Separate unit power is too small, it is necessary to the shortcoming of multi-machine parallel connection during treatment big flow organic exhaust gas.Increased the stability of system.

Claims (4)

1. dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas, including main circuit part and comprehensive control Part processed, it is characterised in that the main circuit part includes power supply input circuit, rectified three-phase circuit, DC chopped-wave voltage-regulating electricity Road, IGBT full bridge inverters, high-frequency step-up transformer and power output circuit, the comprehensive control section point include DSP controls System and touch-screen;
Controlled with DSP in integrated control circuit by DC chopped-wave voltage-regulating circuit and IGBT full bridge inverters the main circuit part System connection processed, power output circuit is connected by sample circuit with DSP control system.
2. dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas according to claim 1, and it is special Levy and be, in the main circuit, power supply input circuit is connected by rectified three-phase circuit with tributary voltage regulation circuit of chopping, and direct current is cut Ripple regulating circuit is connected with IGBT full bridge inverters, and IGBT full bridge inverters are connected with high-frequency step-up transformer, high frequency liter Pressure transformer is connected with power output circuit.
3. dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas according to claim 1, and it is special Levy and be, in the Comprehensive Control part, in DSP control system, including dsp controller, DC chopped-wave control circuit and PWM arteries and veins Width adjustment and protection circuit;Dsp controller controls circuit with DC chopped-wave voltage-regulating circuit in main circuit part by DC chopped-wave Connection, dsp controller is connected by PWM pulse-width adjustments and protection circuit with IGBT full bridge inverters in main circuit, sampling electricity Road is connected by Phototube Coupling with dsp controller.
4. dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas according to claim 1, and it is special Levy and be, in the main circuit part, switch S1, switch S2 and switch S3 one end are connected with three phase mains, switch the S1 other ends It is connected with diode D1 positive poles and diode D4 negative poles, the switch S2 other ends connect with diode D2 positive poles and diode D5 negative poles Connect, the switch S3 other ends are connected with diode D3 positive poles and diode D6 negative poles, diode D1 negative poles, diode D2 negative poles and two Pole pipe D3 negative poles are connected with triode Q5 colelctor electrodes, diode D4 positive poles, diode D5 positive poles and diode D6 positive poles and three poles Pipe Q2 emitter stages are connected, and electric capacity C1 one end is connected with triode Q5 colelctor electrodes, and electric capacity C2 one end is connected with triode Q2 emitter stages, The electric capacity C1 other ends and the electric capacity C2 other ends are connected, and diode D7 negative poles are connected with triode Q5 colelctor electrodes, diode D7 positive poles It is connected with triode Q5 emitter stages, triode Q5 base stages are electric with DC chopped-wave control in the DSP control system of integrated control circuit Road connects, and triode Q5 emitter stages are connected with triode Q1 colelctor electrodes, and electric capacity C3 one end is connected with triode Q1 colelctor electrodes, electric capacity The C3 other ends are connected with electric capacity C4 one end, and the electric capacity C4 other ends are connected with triode Q2 emitter stages, triode Q1 colelctor electrodes and three Pole pipe Q3 colelctor electrodes are connected, and triode Q2 emitter stages are connected with triode Q4 emitter stages, triode Q1 emitter stages and triode Q2 Colelctor electrode is connected with electric capacity C5 one end, and triode Q3 emitter stages and triode Q4 colelctor electrodes are connected with transformer T1 interfaces 2, electric capacity The C5 other ends are connected with inductance L1 one end, and the inductance L1 other ends are connected with transformer T1 interfaces 1, transformer T1 interfaces 3 and transformation Device T2 interfaces 1 are connected, and transformer T1 interfaces 4 are connected with transformer T2 interfaces 2, and the interface 3 and interface 4 of transformer T2 are used as power supply Output is external.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108336909A (en) * 2018-01-30 2018-07-27 安徽省金屹电源科技有限公司 A kind of vacuum DC glow cleaning power supply
CN108459541A (en) * 2018-02-26 2018-08-28 中国地质大学(武汉) A kind of DBD high-frequency and high-voltage power supplies system
CN108649811A (en) * 2018-06-04 2018-10-12 彭希南 100000 volts of high direct voltage generating means
CN109202250A (en) * 2018-11-23 2019-01-15 合肥国声电子通信有限责任公司 A kind of Intelligent welding control system and method
CN109802577A (en) * 2019-02-27 2019-05-24 延边中谷领创电力科技有限公司 Plasma electric source device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108336909A (en) * 2018-01-30 2018-07-27 安徽省金屹电源科技有限公司 A kind of vacuum DC glow cleaning power supply
CN108459541A (en) * 2018-02-26 2018-08-28 中国地质大学(武汉) A kind of DBD high-frequency and high-voltage power supplies system
CN108649811A (en) * 2018-06-04 2018-10-12 彭希南 100000 volts of high direct voltage generating means
CN109202250A (en) * 2018-11-23 2019-01-15 合肥国声电子通信有限责任公司 A kind of Intelligent welding control system and method
CN109802577A (en) * 2019-02-27 2019-05-24 延边中谷领创电力科技有限公司 Plasma electric source device

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