CN206193061U - Four probe test appearance - Google Patents

Abstract

The utility model provides a four probe test appearance, including the base, fixedly connected with montant on the base, but the cover has swivelling joint arm and first sleeve on the montant, first sleeve passes through the fixed screw to be fixed on the montant, first sleeve is located but the below of swivelling joint arm, and both hug closely, but the swivelling joint arm with the montant rotates to be connected, the on -line screen storage device comprises a base, the probe electricity is connected with the display. A four probe test appearance, but through setting up with montant swivelling joint's second sleeve and rather than integrated into one piece's swivelling joint arm to but locate to set up first hinge with probe connection at the swivelling joint arm, can make four probe freedom adjustment directions of probe, towards the test people, improve work efficiency all the time.

Description

A kind of four-point probe

Technical field

The utility model belongs to monocrystalline silicon production testing equipment field, more particularly, to a kind of four-point probe.

Background technology

Four-point probe is for testing the survey of monocrystalline section and epidermis resistivity in semiconductor monocrystal production process Test instrument, but there is certain inconvenience in actual use, the section of monocrystalline silicon generally requires test center's point, R/2 with And each 4 points of the position in three, edge totally nine test points, as shown in figure 1, and the connection of the connection probe of four probes that currently uses Arm is fixed.

Conventional method of testing be by moved on base monocrystalline section to change test point, but with single crystal diameter Increase, the weight of monocrystalline can gradually increase, so that gas mixes the most frequently used shearing length 270mm of monocrystalline as an example, table 1 be correspondingly-sized One section of weight of monocrystalline.

The 270mm gas of table 1 mixes monocrystalline length weight:

With the increase of monocrystalline weight, monocrystalline section is not only increasingly difficult to movement, and eight cun of monocrystalline has reached 22.8kg, is being moved It is careless slightly during dynamic, easily cause accident.

The content of the invention

In view of this, the utility model is directed to a kind of four-point probe, to solve to be detected in monocrystalline silicon production Cheng Zhong, with the increase of monocrystalline weight, monocrystalline section is not only increasingly difficult to movement, and careless slightly in moving process, easily The problem for causing the accident.

To reach above-mentioned purpose, what the technical solution of the utility model was realized in：

A kind of four-point probe, including base, montant is fixedly connected with the base；It is cased with revolving on the montant Turn linking arm and the first sleeve, first sleeve is fixed on the montant by fixed screw；First sleeve is located at The lower section for being rotatably connected arm, and both are close to；The arm that is rotatably connected is connected with montant rotation, described to revolve Turn linking arm end has probe by the first gemel connection；The probe is electrically connected with display.

There is fixed screw to be fixed on montant in the first sleeve, both played the work for limiting and being rotatably connected arm vertical position With playing a part of to lift to be rotatably connected arm again.

Further, the montant surface is mechanical polishing face.

Further, the arm that is rotatably connected rotates the connection montant by second sleeve；The second sleeve with The arm that is rotatably connected is integrally formed；The second sleeve external diameter is more than first sleeve diameter.

Further, the arm that is rotatably connected includes the first linking arm and the second linking arm；The first linking arm set Rotated on the montant and with montant by the second sleeve and be connected；First linking arm is with the second sleeve integrally Shaping；The second sleeve is located at the top of first sleeve, and both are close to；The first linking arm end passes through second Popped one's head in by described in the first gemel connection second linking arm described in gemel connection, the second linking arm end.

Further, the first connection arm lengths are more than the described second connection arm lengths.

Further, first linking arm and the second linking arm bottom be and plane-parallel.

Further, the montant is located at the side of the base upper surface, and both are fixedly connected.

Further, the montant top is provided with a baffle plate；The baffle plate with diameter greater than the second sleeve internal diameter.Gear The setting of plate, can prevent the arm that is rotatably connected integrally formed with second sleeve from deviating from from montant upper end.

Further, the fixed screw is located at first cartridges sides.

Relative to prior art, a kind of four-point probe described in the utility model has the advantage that：

A kind of four-point probe described in the utility model, by the second sleeve that is rotatably connected with montant of setting and It is integrally formed with second sleeve to be rotatably connected arm, and be rotatably connected in the middle of the first linking arm of arm and the second linking arm Second hinge is set, can rotate freely probe flexible, detect any point on monocrystalline section, thus no longer need by when Carve mobile monocrystalline to change test point, reduce unnecessary work, increased security；By set connection probe first Hinge, can make four free adjustment directions of probe of probe, all the time towards tester, improve operating efficiency.

Brief description of the drawings

The accompanying drawing for constituting a part of the present utility model is used for providing being further understood to of the present utility model, and this practicality is new The schematic description and description of type is used to explain the utility model, does not constitute to improper restriction of the present utility model. In accompanying drawing：

Fig. 1 is monocrystalline silicon section test point position rough schematic in the prior art；

Fig. 2 is a kind of simple signal of four-point probe detection monocrystalline silicon section described in the utility model embodiment Figure.

Description of reference numerals：

1- bases；2- montants；The sleeves of 3- first；4- fixed screws；The hinges of 5- first；6- pops one's head in；7- displays；8- second Sleeve；The linking arms of 9- first；The linking arms of 10- second；The hinges of 11- second；12- baffle plates；13- monocrystalline section.

Specific embodiment

It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the utility model can To be mutually combined.

In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, The orientation or position relationship of the instruction such as "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outward " are Based on orientation shown in the drawings or position relationship, it is for only for ease of description the utility model and simplifies description, rather than instruction Or imply that the device or element of meaning with specific orientation, with specific azimuth configuration and operation, therefore must not be understood that It is to limitation of the present utility model.Additionally, term " first ", " second " etc. are only used for describing purpose, and it is not intended that indicating Or imply relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, " first ", " second " etc. are defined Feature can express or implicitly include one or more this feature.In description of the present utility model, unless separately It is described, " multiple " is meant that two or more.

, it is necessary to explanation, unless otherwise clearly defined and limited, term " is pacified in description of the present utility model Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or integratedly Connection；Can mechanically connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, Can be two connections of element internal.For the ordinary skill in the art, can be by concrete condition understanding State concrete meaning of the term in the utility model.

Describe the utility model in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

As shown in Fig. 2 a kind of four-point probe, including base 1, montant 2 is fixedly connected with the base 1；It is described It is cased with being rotatably connected arm and the first sleeve 3 on montant 2, first sleeve 3 is fixed on the montant 2 by fixed screw 4 On；First sleeve 3 is located at the lower section for being rotatably connected arm, and both are close to；It is described be rotatably connected arm with it is described Montant 2 rotates connection, and the arm end that is rotatably connected is connected with probe 6 by the first hinge 5；The probe 6 is electrically connected with Display 7.

The surface of the montant 2 is mechanical polishing face.

The arm that is rotatably connected rotates the connection montant 2 by second sleeve 8；The second sleeve 8 with it is described can Rotation link arm is integrally formed；The external diameter of the second sleeve 8 is more than the internal diameter of the first sleeve 3.

The arm that is rotatably connected includes the first linking arm 9 and the second linking arm 10；First linking arm 9 is enclosed within described Rotated on montant 2 and with montant 2 by the second sleeve 8 and be connected；First linking arm 9 and the one of the second sleeve 8 Shaping；The second sleeve 8 is located at the top of first sleeve 3, and both are close to；The end of first linking arm 9 passes through Second hinge 11 connects second linking arm 10, and the end of the second linking arm 10 connects the probe by the first hinge 5 6。

The length of first linking arm 9 is more than the length of the second linking arm 10, and the length of second linking arm is 100mm。

First linking arm 9 and the bottom of the second linking arm 10 are and plane-parallel.

The montant 2 is located at the side of the upper surface of the base 1, and both are fixedly connected.

The top of the montant 2 is provided with a baffle plate 12；The baffle plate 12 with diameter greater than the internal diameter of the second sleeve 8.

The fixed screw 4 is located at the side of the first sleeve 3.

The course of work of the present embodiment is：

When using, monocrystalline to be detected section 13 is placed on the base 1, described the is adjusted by the fixed screw 4 One sleeve 3, and then adjust the height of first linking arm 9 to optimum detection highly, can by rotating first linking arm 9 Point in single-crystal surface width range is detected；Because the linking arm 10 of first linking arm 9 and second is closed by second Page 11 is connected, then by adjusting the position of second linking arm 9, be capable of achieving the inspection put in the range of single-crystal surface different length Survey；In whole work process, 6 positions of the probe can be adjusted by first hinge 5, it is ensured that it is all the time towards tester.

Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all at this Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc. should be included in the utility model Protection domain within.

Claims (9)

1. a kind of four-point probe, it is characterised in that：Including base (1), montant (2) is fixedly connected with the base (1)； It is cased with being rotatably connected arm and the first sleeve (3) on the montant (2), first sleeve (3) is fixed by fixed screw (4) On the montant (2)；First sleeve (3) is positioned at the lower section for being rotatably connected arm, and both are close to；It is described to revolve Turn linking arm to be connected with the montant (2) rotation, the arm end that is rotatably connected is connected with probe by the first hinge (5) (6)；The probe (6) is electrically connected with display (7).

2. a kind of four-point probe according to claim 1, it is characterised in that：Thrown for machinery on montant (2) surface Smooth surface.

3. a kind of four-point probe according to claim 1, it is characterised in that：The arm that is rotatably connected is by second Sleeve (8) rotates the connection montant (2)；The second sleeve (8) is integrally formed with the arm that is rotatably connected；Described second Sleeve (8) external diameter is more than the first sleeve (3) internal diameter.

4. a kind of four-point probe according to claim 3, it is characterised in that：The arm that is rotatably connected includes first Linking arm (9) and the second linking arm (10)；First linking arm (9) is enclosed within the montant (2) and by described second set Cylinder (8) is rotated with montant (2) and is connected；First linking arm (9) is integrally formed with the second sleeve (8)；Described second set Cylinder (8) is positioned at the top of first sleeve (3), and both are close to；First linking arm (9) end passes through the second hinge (11) second linking arm (10) is connected, the second linking arm (10) end connects the probe by the first hinge (5) (6)。

5. a kind of four-point probe according to claim 4, it is characterised in that：First linking arm (9) length is big In the second linking arm (10) length.

6. a kind of four-point probe according to claim 4 or 5, it is characterised in that：First linking arm (9) and institute State the second linking arm (10) bottom and plane-parallel.

7. a kind of four-point probe according to claim 1, it is characterised in that：The montant (2) is positioned at the base (1) side of upper surface, and both are fixedly connected.

8. a kind of four-point probe according to claim 3 or 4, it is characterised in that：Montant (2) top is provided with one Baffle plate (12)；The baffle plate (12) with diameter greater than the second sleeve (8) internal diameter.

9. a kind of four-point probe according to claim 1, it is characterised in that：The fixed screw (4) is positioned at described First sleeve (3) side.