CN206192105U - A fritting furnace for photovoltaic solar cell silicon chip - Google Patents
A fritting furnace for photovoltaic solar cell silicon chip Download PDFInfo
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- CN206192105U CN206192105U CN201621101010.5U CN201621101010U CN206192105U CN 206192105 U CN206192105 U CN 206192105U CN 201621101010 U CN201621101010 U CN 201621101010U CN 206192105 U CN206192105 U CN 206192105U
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- unit
- sintering
- sealing cover
- metal sealing
- heat
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a fritting furnace for photovoltaic solar cell silicon chip, during a work process, the furnace body includes five at least independent sintering units, every sintering unit all includes the same last unit and lower unit, arranges closing about the upper and lower unit, and the transmission network chain is arranged in the space between the unit from top to bottom, every unit includes casing, heat preservation, metal seal cover and breathable cotton layer respectively, and the breathable cotton layer lid closes and covers at metal seal for form an air chamber between metal seal cover and the heat preservation, be equipped with a heat insulating strip between every two adjacent sintering units, keep apart two adjacent sintering units. The utility model discloses simple structure divides whole wind channel into a plurality of independent regions, and every regional independent accuse temperature can realize the respectively accurate control of regional upper and lower, left and right temperature, through the porous structure among the breathable cotton layer, can make the temperature that gets into in the air chamber even, make things convenient for the adjustment of technology temperature more.
Description
Technical field
The utility model belongs to the Preparation equipment field of solar battery sheet, and in particular to a kind of silicon wafer sintering stove, especially
It is related to a kind of sintering furnace for photovoltaic solar cell silicon chip.
Background technology
In the production technology of current crystal silicon solar energy battery silicon chip, the drying of slurry and sintering are mainly by infrared
The mode of fluorescent tube carries out intensification heating.
Existing sintering furnace includes housing, body of heater and the transmission network chain being located in the middle of body of heater, and housing is enclosed in body of heater
Outside, wherein, body of heater is made up of upper furnace body and lower furnace body, and infrared lamp, existing sintering furnace are equipped with upper furnace body and lower furnace body
In upper furnace body and lower furnace body in the temperature difference it is small, it is impossible to the independent temperature in each several part of precise control body of heater upper and lower, left and right,
The temperature difference between each several part of body of heater upper and lower, left and right cannot exactly be pulled open.However, in processing, the technological requirement of silicon chip
Very strict, the front surface coated of silicon chip of solar cell has a silver paste, and backside coating is by aluminium paste, and the fusing point of silver paste and aluminium paste is not
Together, the silver paste and aluminium paste in processing technology requirement solar silicon wafers synchronously realize drying sintering, and are able to ensure that silicon chip burns soon
And rapid cooling.Existing sintering furnace temperature control is coarse, is easily caused string temperature in body of heater, it is impossible to according to technological requirement precise control stove
The temperature of body each several part.
In consideration of it, proposing that a kind of sintering furnace for photovoltaic solar cell silicon chip is the problem to be studied of this institute.
The content of the invention
The utility model purpose is to provide a kind of sintering furnace for photovoltaic solar cell silicon chip, mainly solves existing
Sintering furnace temperature control is coarse, it is impossible to heated according in the temperature and sintering furnace of technological requirement precise control body of heater each several part
The problems such as non-uniform temperature etc..
To reach above-mentioned purpose, the technical solution adopted in the utility model is：One kind is used for photovoltaic solar cell silicon chip
Sintering furnace, including body of heater and the transmission network chain that is located in the middle of body of heater；
The body of heater includes at least five independent sintering units gone up along its length, at least five independent sintering
Unit is sequentially connected in series the air channel for being spliced to form a connection；In at least five described independent sintering units, at least the first two
It is baking zone, at least rear three is sintering zone, and the length of the sintering unit in each baking zone is all higher than the sintering in sintering zone
The length of unit；
Wherein, each sintering unit includes unit and lower unit in structure, shape, size identical, and upper unit is located at
Top, lower unit is located at lower section, and lower unit is fixed with respect to ground, and upper unit can be opened with respect to lower unit, and the upper unit is with
The upper and lower pairing arrangement of unit, the transmission network chain is located in the space between upper unit and lower unit；
The upper unit from top to bottom includes upper shell, upper heat-insulation layer, upper metal sealing cover and upper ventilative cotton layer respectively,
Upper metal sealing cover is a cover body structure with opening, and the upper heat-insulation layer is enclosed in metal sealing cover surrounding and one end on this
Portion, the upper ventilative cotton layer is covered on the opening of upper metal sealing cover so that upper shape between metal sealing cover and upper heat-insulation layer
Into a upper chamber；The enterprising gas port of a corresponding matching is offered in the upper shell, upper heat-insulation layer and upper metal sealing cover,
So that extraneous gas can enter upper chamber from air inlet；
The lower unit includes lower house, lower heat-insulation layer, lower metal sealing cover and lower ventilative cotton layer respectively from the bottom to top,
Lower metal sealing cover is a cover body structure with opening, and the lower heat-insulation layer is enclosed in the lower metal sealing cover surrounding and one end
Portion, the lower ventilative cotton layer is covered on the opening of lower metal sealing cover so that shape between lower metal sealing cover and lower heat-insulation layer
Into a lower chamber；The lower air inlet of a corresponding matching is offered in the lower house, lower heat-insulation layer and lower metal sealing cover,
So that extraneous gas can enter lower chamber from lower air inlet；
The upper unit and lower unit pairing are spliced to form an independent sintering unit, per between two neighboring sintering unit
Be provided with a heat insulating strip, the heat insulating strip be located at it is two neighboring sintering unit between heat-insulation layer in, by it is two neighboring sintering unit every
Leave；
Some upper heating tubes are equipped with each inside unit, some upper heating tubes along upper element length direction successively between
Every arrangement, and between upper chamber and air channel；Some lower heating tubes are equipped with inside each lower unit, some lower heating tubes
Along lower unit length direction successively arranged for interval, and between upper air duct and lower chamber；Upper heating tube in each sintering zone
Spacing distance is respectively less than the spacing distance of upper heating tube in baking zone, and the spacing distance for corresponding to lower heating tube in each sintering zone is equal
Less than the spacing distance of lower heating tube in baking zone.
Relevant content in above-mentioned technical proposal is explained as follows：
1st, in such scheme, a thermocouple is respectively provided with each upper chamber and lower chamber, for real-time detection air chamber
In temperature.
2nd, in such scheme, the body of heater also includes a cooling unit, and cooling unit splices in sintering zone away from baking zone
One end.
3rd, in such scheme, hot driving mouthful is offered on the cooling unit, water-cooled condensation is provided with inside cooling unit
Pipe, for quickly being cooled down to the silicon chip after sintering.
4th, in such scheme, cooling fan is additionally provided with the cooling unit, for the hot gas in cooling unit is quick
Outside discharge cooling unit.
5th, in such scheme, arrival end and the port of export positioned at sintering zone in the body of heater positioned at baking zone are equipped with
One waste discharge structure, the waste discharge structure includes exhaust emission tube road, and blower fan is provided with the exhaust emission tube road.
Utility model works principle is：The utility model is divided into multiple independent sintering units by by sintering furnace,
Each self-forming gas in each sintering unit so that regional upper and lower, left and right can be formed needed for processing technology
The temperature difference, by the independent temperature control in each region, realizes the precise control of temperature in sintering furnace.In addition, each sintering unit is equal
Including unit and lower unit in structure, shape, size identical, the upper unit and the upper and lower pairing of lower unit are arranged, each list
Unit includes housing, heat-insulation layer, metal sealing cover and ventilative cotton layer respectively, and metal sealing cover is a cover body knot with opening
Structure, heat-insulation layer is enclosed in the metal sealing cover surrounding and one end, and ventilative cotton layer is covered on the opening of metal sealing cover so that
Air chamber is formed between metal sealing cover and heat-insulation layer, is set by special air chamber, ensure that temperature in sintering furnace.The course of work
In, the gas outside body of heater enters lower chamber from lower air inlet simultaneously, then is infiltrated through in air channel from lower chamber, also from enterprising gas port
Into upper chamber, then infiltrated through in air channel from upper chamber, set by the loose structure of cotton layer of breathing freely so that enter in air channel
Gas temperature is uniform, is conducive to the processing of silicon chip.
In sintering process, the first step, slurry first carries out drying drying, burn off organic solvent and binding agent to silicon chip, then,
When temperature reaches 660 degrees Celsius, aluminium/silicon starts to be molten into liquid phase, then when temperature reaches 700 degrees Celsius, the aluminium of melting
Start reciprocally to transmit with silicon to form the liquid that Al/Si dissolves each other, when 825 degrees Celsius of the highest temperature is reached, the liquid that Al/Si dissolves each other
The surface of chip is intactly covered in, when cooled, temperature is down to 700 degrees Celsius, and silicon atom is rapidly moved back to wafer surface, mixes
Miscellaneous Al atoms form the backside reflection of P+ structures, and when temperature cooling is controlled less than 550 degrees Celsius, carrying on the back alsifilm can be converted into
Al-Si eutectic structures.
And sintering furnace of the prior art is coarse due to temperature control, it is impossible to meet above required precision temperature strip high
Part.
Because above-mentioned technical proposal is used, the utility model has following advantages compared with prior art：
Whole air channel, is divided into multiple isolated areas by the 1st, the utility model simple structure, each region independence temperature control, energy
The precise control of each region upper and lower, left and right temperature is enough realized, it is positive and negative 1 degree to control temperature.
2nd, the special setting of each air chamber of the utility model, by the loose structure in cotton layer of breathing freely, enables to enter
Temperature in air chamber is uniform, and the ventilative cotton layer in each air chamber is moulding by the ceramic fibre material of various resistance to 1400 celsius temperatures
Assembling is formed so that each warm area possesses independent hot-air system and adjacent two warm area can set temperature more than 200 degrees Celsius
Extreme difference, more facilitates the adjustment of technological temperature.
3rd, side type waste discharge structure, it is ensured that vaporous, the cigarette shape solvent that is produced in drying sintering process, binding agent and organic
The timely discharge of solvent.
Brief description of the drawings
Accompanying drawing 1 is the generalized section of body of heater length direction in sintering furnace in the present embodiment；
Accompanying drawing 2 is the generalized section of the sintering unit containing air chamber in the present embodiment；
Accompanying drawing 3 is the cross-sectional view at body of heater passage in the present embodiment；
Accompanying drawing 4 is the stereogram of the body of heater of sintering furnace in the present embodiment；
Accompanying drawing 5 is the first explosive view for placing an order of sintering unit in the present embodiment.
In the figures above：1st, body of heater；10th, housing；11st, baking zone；12nd, sintering zone；13rd, cooling unit；130th, condenser pipe；
131st, hot driving mouthful；2nd, network chain；3rd, waste discharge structure；30th, waste discharge mouth；
4th, unit is sintered；40th, thermocouple；41st, air inlet pipe；42nd, heat-insulation layer；43rd, ventilative cotton layer；44th, air chamber；45th, metal
Seal closure；46th, heating tube；5th, body of heater passage；50th, heat insulating strip；6th, silicon chip.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to the utility model：
Embodiment：A kind of sintering furnace for photovoltaic solar cell silicon chip
Referring to accompanying drawing 1-5, including body of heater 1 and the transmission network chain 2 that is located in the middle of body of heater 1.
Wherein, the body of heater 1 includes the seven independent sintering units 4 and two neighboring sintering unit gone up along its length
Body of heater passage 5 between 4, this seven independent sintering units 4 are sequentially connected in series the air channel for being spliced to form a connection；Described seven
In individual independent sintering unit 4, first three is baking zone 11, and four is sintering zone 12, the sintering list in each baking zone 11 afterwards
The length of unit 4 is all higher than the length of the sintering unit 4 in sintering zone 12.
Wherein, each sintering unit 4 includes unit and lower unit in structure, shape, size identical, and upper unit is located at
Top, lower unit is located at lower section, and lower unit is fixed with respect to ground, and upper unit can be opened with respect to lower unit, and the upper unit is with
The upper and lower pairing arrangement of unit, the transmission network chain 2 is located in the space between upper unit and lower unit.
The upper unit from top to bottom includes upper shell 10, upper heat-insulation layer 42, upper metal sealing cover 45 and upper respectively
Gas cotton layer 43, in the present embodiment, the upper ventilative cotton layer 43 assembles to be formed using ceramic fibre material attribute, upper metal sealing cover
45 is a cover body structure with opening, and the upper heat-insulation layer 42 is enclosed in the surrounding of metal sealing cover 45 and one end on this, institute
State ventilative cotton layer 43 to cover on the opening of upper metal sealing cover 45 so that between upper metal sealing cover 45 and upper heat-insulation layer 42
Form a upper chamber 44；A corresponding matching is offered in the upper shell 10, upper heat-insulation layer 42 and upper metal sealing cover 45
Enterprising gas port, an enterprising tracheae 41 is equipped with enterprising gas port so that extraneous gas can from air inlet enter upper chamber 44.
Be same as unit, the lower unit include respectively from the bottom to top lower house, lower heat-insulation layer, lower metal sealing cover with
And lower ventilative cotton layer, lower metal sealing cover is a cover body structure with opening, and it is close that the lower heat-insulation layer is enclosed in the lower metal
Sealing cover surrounding and one end, the lower ventilative cotton layer are covered on the opening of lower metal sealing cover so that lower metal sealing cover and
A lower chamber is formed between lower heat-insulation layer；A correspondence is offered in the lower house, lower heat-insulation layer and lower metal sealing cover
The lower air inlet for coordinating, is equipped with a lower inlet duct so that extraneous gas can enter lower gas from lower air inlet in lower air inlet
Room.
The upper unit and lower unit pairing are spliced to form an independent sintering unit 4, per it is two neighboring sintering unit 4 it
Between be provided with a heat insulating strip 50, the heat insulating strip 50 be located at it is two neighboring sintering unit 4 between heat-insulation layer 42 in, by two neighboring burning
Statement of account unit 4 keeps apart.
Some upper heating tubes 46 are equipped with each inside unit, some upper heating tubes 46 along upper element length direction according to
Minor tick arrangement, and between upper chamber 44 and air channel；Some lower heating tubes are equipped with inside each lower unit, under this is some
Heating tube along lower unit length direction successively arranged for interval, and between upper air duct and lower chamber.
In the course of work, the gas outside body of heater 1 enters lower chamber from lower air inlet simultaneously, then permeates inlet air from lower chamber
In road, also enter upper chamber 44 from enterprising gas port, then from upper chamber 44 infiltrate through air channel, by the loose structure of cotton layer of breathing freely
Set so that the gas temperature entered in air channel is uniform, is conducive to the processing of silicon chip 6.
For the temperature in real-time detection each air chamber, a thermocouple is respectively provided with each upper chamber and lower chamber
40。
Referring to accompanying drawing 1, the body of heater 1 also includes a cooling unit 13, and cooling unit 13 splices in sintering zone 12 away from baking
The one end in dry area 11.Hot driving mouthful 131 is offered on the cooling unit 13, water-cooled condenser pipe is provided with inside cooling unit 13
130, for quickly being cooled down to the silicon chip 6 after sintering.Cooling fan is additionally provided with the cooling unit 13（Do not marked in figure
Go out）, for the hot gas in cooling unit 13 quickly to be discharged outside cooling unit 13.
Arrival end and the port of export positioned at sintering zone 12 in the body of heater 1 positioned at baking zone 11 are equipped with a waste discharge knot
Structure 3, the waste discharge structure includes exhaust emission tube road, and there is waste discharge mouth 30 to be in communication with the outside in exhaust emission tube road, waste gas discharge
Blower fan is provided with pipeline（Not shown in figure）.
For above-described embodiment, the present embodiment is explained further and issuable change is described as follows：
1st, in above-described embodiment, the body of heater 1 includes the seven independent sintering units 4 and adjacent two gone up along its length
Body of heater passage 5 between individual sintering unit, in fact, the body of heater 1 includes five or six or eight going up along its length
Individual and more than eight independent sintering units 4 are feasible, are not limited only to five sintering units 4 in the present embodiment.
2nd, in above-described embodiment, water-cooled condenser pipe 130 is provided with inside the cooling unit 13, in fact, described is cold
But unit 13 can also be using other such as alcohol formula condenser pipe（Not shown in figure）Etc. cooling structure, be not limited only to the present embodiment
In cooling structure.
Above-described embodiment only to illustrate technology design of the present utility model and feature, technique is familiar with its object is to allow
Personage will appreciate that content of the present utility model and implement according to this, protection domain of the present utility model can not be limited with this.
All equivalent change or modifications made according to the utility model Spirit Essence, should all cover protection domain of the present utility model it
It is interior.
Claims (6)
1. a kind of sintering furnace for photovoltaic solar cell silicon chip, including body of heater and the transmission network being located in the middle of body of heater
Chain；
It is characterized in that：The body of heater includes at least five independent sintering units gone up along its length, and this is at least five only
Vertical sintering unit is sequentially connected in series the air channel for being spliced to form a connection；In at least five described independent sintering units, extremely
Few the first two is baking zone, and at least rear three is sintering zone, and the length of the sintering unit in each baking zone is all higher than sintering zone
In sintering unit length；
Wherein, each sintering unit includes unit and lower unit in structure, shape, size identical, and upper unit is above,
Lower unit is located at lower section, and lower unit is fixed with respect to ground, and upper unit can be opened with respect to lower unit, on the upper unit and lower unit
Lower pairing arrangement, the transmission network chain is located in the space between upper unit and lower unit；
The upper unit from top to bottom includes upper shell, upper heat-insulation layer, upper metal sealing cover and upper ventilative cotton layer, upper gold respectively
Category seal closure is a cover body structure with opening, and the upper heat-insulation layer is enclosed in metal sealing cover surrounding and one end on this,
The upper ventilative cotton layer is covered on the opening of upper metal sealing cover so that upper to form one between metal sealing cover and upper heat-insulation layer
Upper chamber；The enterprising gas port of a corresponding matching is offered in the upper shell, upper heat-insulation layer and upper metal sealing cover, so that
Extraneous gas can enter upper chamber from air inlet；
The lower unit includes lower house, lower heat-insulation layer, lower metal sealing cover and lower ventilative cotton layer, lower gold respectively from the bottom to top
Category seal closure is a cover body structure with opening, and the lower heat-insulation layer is enclosed in the lower metal sealing cover surrounding and one end,
The lower ventilative cotton layer is covered on the opening of lower metal sealing cover so that form one between lower metal sealing cover and lower heat-insulation layer
Lower chamber；The lower air inlet of a corresponding matching is offered in the lower house, lower heat-insulation layer and lower metal sealing cover, so that
Extraneous gas can enter lower chamber from lower air inlet；
The upper unit and lower unit pairing are spliced to form an independent sintering unit, are provided with per between two neighboring sintering unit
One heat insulating strip, the heat insulating strip is located in the heat-insulation layer between two neighboring sintering unit, and two neighboring sintering cell isolation is opened；
Some upper heating tubes are equipped with each inside unit, some upper heating tubes are spaced cloth successively along upper element length direction
Put, and between upper chamber and air channel；Some lower heating tubes are equipped with inside each lower unit, some lower heating tubes are under
Element length direction arranged for interval successively, and between upper air duct and lower chamber；The interval of upper heating tube in each sintering zone
The spacing distance of upper heating tube in distance respectively less than baking zone, the spacing distance for corresponding to lower heating tube in each sintering zone is respectively less than
The spacing distance of lower heating tube in baking zone.
2. the sintering furnace for photovoltaic solar cell silicon chip according to claim 1, it is characterised in that：Each upper chamber
With a thermocouple is respectively provided with lower chamber, for the temperature in real-time detection air chamber.
3. the sintering furnace for photovoltaic solar cell silicon chip according to claim 1, it is characterised in that：The body of heater is also
Including a cooling unit, cooling unit splices one end away from baking zone in sintering zone.
4. the sintering furnace for photovoltaic solar cell silicon chip according to claim 3, it is characterised in that：The cooling is single
Hot driving mouthful is offered in unit, water-cooled condenser pipe is provided with inside cooling unit, for carrying out fast quickly cooling to the silicon chip after sintering
But.
5. the sintering furnace for photovoltaic solar cell silicon chip according to claim 4, it is characterised in that：The cooling is single
Cooling fan is additionally provided with unit, for the hot gas in cooling unit quickly to be discharged outside cooling unit.
6. the sintering furnace for photovoltaic solar cell silicon chip according to claim 1, it is characterised in that：In the body of heater
Arrival end positioned at baking zone and the port of export positioned at sintering zone are equipped with a waste discharge structure, and the waste discharge structure is arranged including waste gas
Go out pipeline, blower fan is provided with the exhaust emission tube road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621101010.5U CN206192105U (en) | 2016-10-07 | 2016-10-07 | A fritting furnace for photovoltaic solar cell silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621101010.5U CN206192105U (en) | 2016-10-07 | 2016-10-07 | A fritting furnace for photovoltaic solar cell silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206192105U true CN206192105U (en) | 2017-05-24 |
Family
ID=58730682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621101010.5U Withdrawn - After Issue CN206192105U (en) | 2016-10-07 | 2016-10-07 | A fritting furnace for photovoltaic solar cell silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206192105U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106288772A (en) * | 2016-10-07 | 2017-01-04 | 苏州南北深科智能科技有限公司 | A kind of sintering furnace for photovoltaic solar cell silicon chip |
| CN109065669A (en) * | 2018-08-06 | 2018-12-21 | 浙江晶科能源有限公司 | A kind of anti-light equipment that declines of double-side cell |
| CN109506458A (en) * | 2018-12-13 | 2019-03-22 | 福州启瀚新能源有限公司 | Energy circulation sintering furnace and LiFePO4 process units |
-
2016
- 2016-10-07 CN CN201621101010.5U patent/CN206192105U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106288772A (en) * | 2016-10-07 | 2017-01-04 | 苏州南北深科智能科技有限公司 | A kind of sintering furnace for photovoltaic solar cell silicon chip |
| CN106288772B (en) * | 2016-10-07 | 2019-08-20 | 苏州南北深科智能科技有限公司 | A kind of sintering furnace for photovoltaic solar cell silicon wafer |
| CN109065669A (en) * | 2018-08-06 | 2018-12-21 | 浙江晶科能源有限公司 | A kind of anti-light equipment that declines of double-side cell |
| CN109065669B (en) * | 2018-08-06 | 2024-02-20 | 浙江晶科能源有限公司 | Double-sided battery light attenuation resisting equipment |
| CN109506458A (en) * | 2018-12-13 | 2019-03-22 | 福州启瀚新能源有限公司 | Energy circulation sintering furnace and LiFePO4 process units |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170524 Effective date of abandoning: 20190820 |
|
| AV01 | Patent right actively abandoned |