CN206168107U - Automatic deashing dust removal tank of single crystal growing furnace - Google Patents

Automatic deashing dust removal tank of single crystal growing furnace Download PDF

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Publication number
CN206168107U
CN206168107U CN201621195519.0U CN201621195519U CN206168107U CN 206168107 U CN206168107 U CN 206168107U CN 201621195519 U CN201621195519 U CN 201621195519U CN 206168107 U CN206168107 U CN 206168107U
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CN
China
Prior art keywords
brush
filter core
single crystal
crystal growing
growing furnace
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201621195519.0U
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Chinese (zh)
Inventor
侯继伟
卫建华
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Hangzhou Hongsheng Intelligent Technology Co Ltd
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Hangzhou Hongsheng Intelligent Technology Co Ltd
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Priority to CN201621195519.0U priority Critical patent/CN206168107U/en
Application granted granted Critical
Publication of CN206168107U publication Critical patent/CN206168107U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

The utility model provides an automatic deashing dust removal tank of single crystal growing furnace, including the main jar of body, set up main jar of internal filter core, relatively filter core pivoted brush rack, set up on brush rack the brush of butt filter core outer wall all the time, the brush have a plurality of can with the clearance face of filter core outer wall butt, brush and brush rack rotate is connected and the brush relative brush rack rotate a plurality of clearance faces of in -process respectively with filter core outer wall butt, can realize automatic deashing, improvement production efficiency.

Description

Single crystal growing furnace automatic ash removing dedusting tank
Technical field
The utility model is related to single crystal growing furnace, more particularly to single crystal growing furnace automatic ash removing dedusting tank.
Background technology
Single crystal growing furnace is one kind in inert gas(Based on nitrogen)In environment, with graphite heater by polycrystalline materials such as polysilicons Fusing, the equipment for producing dislocation-free monocrystalline with vertical pulling method.Meeting of the current single crystal growing furnace when nitrogen is passed through during crystal pulling, in stove Produce dust.In order to ensure vacuum in single crystal growing furnace, access vavuum pump is needed ceaselessly to vacuumize, the tail gas of generation accesses mist of oil point Enter in air after device filtration.In vavuum pump vacuum, a large amount of dust can be directly sucked in vacuum in furnace gas In pump, dust mixes with the lubricating oil in vavuum pump, causes vavuum pump lubrication failure, if oil change is not in time, can lead Vavuum pump is caused to damage, but oil change is frequently, and crystal pulling cost, and serious waste of resources are not only increased significantly.
Current settling mode is one dust removal and filtration tank of connection between vacuum pump body and single crystal growing furnace.In dust removal and filtration tank Containing filter core, gas can filter a large amount of dust by filter core.But while dust can be attached on filter core, filter core can quickly blocked, Monocrystalline furnace pressure is caused drastically to raise, so as to affect production.Therefore, workman understands the normal manual unlocking filtration stoves of Jing, takes out filter core, Cleaning is attached to the dust on filter core.This process needs artificial operation, and taking affects operating efficiency.
Utility model content
The purpose of this utility model is to provide a kind of single crystal growing furnace automatic ash removing dedusting tank, is capable of achieving automatic ash removing, improves life Produce efficiency.
Above-mentioned technical purpose of the present utility model technical scheme is that:A kind of single crystal growing furnace is automatically clear Grey dedusting tank, including main tank body, be arranged in main tank body filter core, can relative to filter core rotate brush holder, be arranged on brush holder Brush that is upper and abutting filter core outer wall all the time, the brush has multiple cleaning faces that can be abutted with filter core outer wall, the brush Connection is rotated with brush holder and brush multiple cleaning faces in relative brush holder rotation process abut respectively with filter core outer wall.
This programme is rotated by brush holder relative to filter core, so that the brush on brush holder is rotated relative to filter core, So as to the dust on filter core be cleared up;Simultaneously brush has multiple cleaning faces, brush relative to brush holder rotate when, brush Each cleaning face abuts respectively cleaning filter core outer wall with filter core outer wall, can so extend the service life of single brush, reduces Brush replacing construction.
Further, the brush is rotated and is socketed on brush holder, the mistake that the brush is rotated in brush holder relative to filter core Filter core outer wall is abutted in journey and relative brush holder rotates.
This mode causes brush to rotate relative to brush holder by the frictional force of brush and filter core outer wall, so that brush Multiple cleaning faces can abut with brush holder, and the degree of wear in each cleaning face is basically identical, relative to the brush that can not be rotated Speech(Single cleaning face), the brush wear of which is shared to each cleaning face, therefore the service life of brush is longer, changes frequency Rate is lower.
Further, the actuator for driving brush to rotate is fixed with the brush holder, the brush is only in actuator Can rotate with respect to brush holder under driving.
This mode brush holder relative to filter core rotate when, brush does not rotate, one of cleaning face of brush and filter Outer core is abutted, and when the cleaning surface wear is serious, actuator drives brush to rotate so that new cleaning face is supported with filter core outer wall Connect, the whole service life of such brush extends, the replacement frequency of brush is reduced.
Further, the brush arranges multiple, and each described brush individually connects an actuator.
Thus, the driving of brush is more stable, do not interfere with each other.
Further, the brush arranges multiple, and the actuator arranges one, and all brushes are joined by STATEMENT OF FEDERALLY SPONSORED It is dynamic to rotate.
So actuator only needs to arrange one, and structure is simpler.
Further, intake interface and outlet interface are offered on the main tank body, the main tank body is fixedly arranged above band The first motor that electric brush frame is rotated.
This programme is rotated using the first motor belt motor electric brush frame, filter core realizes relative with filter core turn of brush holder by the way of fixing Dynamic purpose;Can certainly be fixed using brush holder, the mode that filter core is rotated.
Further, the main tank body top has upper lid, and support column is provided with the main tank wall, support is driven Drive mechanism one that post is circumferentially rotated, the drive mechanism two that support column moves up and down, the upper lid is driven to be connected simultaneously with support column Linkage.
So when needing to clear up main tank interior, drive mechanism two drives support column to move upwards, on Upwards main tank body is opened in motion to lid with support column linkage, rear drive mechanism one drive support column to rotate, so as to drive upper lid to turn Move away from main tank body.
Further, the drive mechanism one includes that the first gear being solidly set on support column engages biography with first gear Dynamic second gear, the second motor of driving second gear rotation.
Support column is driven to rotate by gear-driven mode, simple structure, stable transmission.
Further, the drive mechanism two is the cylinder being fixed on main tank body.
Air cylinder driven lifting is stable.
Further, also including gas tank, the gas tank is connected with escaping pipe and the gas outlet of escaping pipe connects with filter core.
When single crystal growing furnace automatic ash removing dedusting tank quits work, gas tank is ventilated powder in further cleaning filter core toward in filter core Dirt.
In sum, the utility model has the advantages that:1)Gentle is once cleared up to filter core by brush Secondary cleaning of the tank to filter core ensures the cleaning of filter core;2)By being designed on brush to rotate relative to brush holder, extend brush Service life;3) lid can be driven by drive mechanism one, drive mechanism two and be opened on, convenient that main tank interior is carried out clearly Reason.
Description of the drawings
Fig. 1 is the structural representation of embodiment 1;
Fig. 2 is the sectional view of embodiment 1;
Fig. 3 is the cooperation schematic diagram of filter core and brush in embodiment 1;
Fig. 4 is the cooperation schematic diagram of filter core and brush in embodiment 2.
Reference:1st, main tank body;11st, upper lid;12nd, intake interface;13rd, outlet interface;14th, mounting seat;15th, dust goes out Mouthful;2nd, filter core;3rd, brush holder;31st, fixing axle;4th, brush;41st, face is cleared up;5th, the first motor;6th, gas tank;61st, escaping pipe;7、 Support column;71st, column body;72nd, lower prop;721st, Y shaped bracket;722nd, link;81st, cylinder;82nd, the second motor;83rd, the first tooth Wheel;84th, second gear;91st, rotating shaft;92nd, actuator;93rd, STATEMENT OF FEDERALLY SPONSORED.
Specific embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
This specific embodiment is only that it is not to restriction of the present utility model, ability to explanation of the present utility model Field technique personnel can make as needed the modification without creative contribution after this specification is read to the present embodiment, but As long as all being protected by Patent Law in right of the present utility model.
Embodiment 1:A kind of single crystal growing furnace automatic ash removing dedusting tank, such as Fig. 1-2, including main tank body 1, be arranged in main tank body 1 Filter core 2, can relative to filter core 2 rotate brush holder 3, be arranged on brush holder 3 and all the time abutting the outer wall of filter core 2 brush 4.
If Fig. 2, filter core 2 are in barrel-shaped, it is fixed in main tank and positioned at the underface of upper lid 11, the outer wall of filter core 2 and main tank The inwall interval setting of body 1;The closed at both ends of filter core 2, on the wall of side filter opening is evenly equipped with.Such as Fig. 1, main tank body 1 offers air inlet connecting Mouth 12 and outlet interface 13, outlet interface 13 is connected with the lower end of filter core 2.The bottom of main tank body 1 is additionally provided with dust outlet 15, When equipment works, dust outlet 15 is closed.
Such as Fig. 2, main tank body 1 is fixedly arranged above lid 11, the first motor 5 be fixed on lid 11 and the first motor 5 it is defeated Shaft is connected by shaft coupling with brush holder 3, so that brush holder 3 rotates under the drive of the first motor 5.
Such as Fig. 3, brush holder 3 has been evenly distributed three fixing axles 31, has been socketed with sleeve-shaped in each fixing axle 31 Brush 4, brush 4 can be relatively fixed axle 31 and circumferentially rotate;The brush 4 has multiple cleanings that can be abutted with the outer wall of filter core 2 Face 41, each cleaning face 41 is in turn connected to form a complete periphery in the present embodiment, and the cleaning face 41 of brush 4 is supported all the time The lateral wall of connection filter element 2.
If Fig. 1-2 is in order to strengthen cleaning effect, a gas tank 6 is also provided with the present embodiment, the outlet of gas tank 6 is connected with out Tracheae 61, the main tank body 1 of the hermetically passing of escaping pipe 61 is connected with filter core 2.
Such as Fig. 1, clear up inside 11 pairs of main tank bodies 1 of upper lid for convenience of opening, on the outer wall of main tank body 1 installation is fixed Seat 14, support column 7 inserts mounting seat 14 and can be mounted opposite seat 14 and circumferentially rotates.Support column 7 is divided into column body in the present embodiment 71 and lower prop 72, lower prop 72 is rotated with mounting seat 14 with insertion mounting seat 14 and is connected, and column body 71 passes through cylinder 81 with Cylinder 72 connects, and 90 degree of the upper end of column body 71 is bent to form a Y shaped bracket 721, be fixed with Y shaped bracket 721 link 722 with Link 722 on upper lid 11 connects.The second motor 82 is fixed in mounting seat 14, on the output shaft of the second motor 82 the first tooth is fixed Wheel 83, fixedly sleeved second gear 84 is engaged with first gear 83 on lower prop 72, and by the second motor 82 7 turns of support column is driven It is dynamic.
When use, intake interface 12 connects single crystal growing furnace, and outlet interface 13 is connected with vavuum pump, when single crystal growing furnace works, In order to keep vacuum in single crystal growing furnace, vavuum pump to start working, now furnace gas enters main tank body 1 from intake interface 12, passes through After filter core 2 from outlet interface 13 out, subsequently into vavuum pump.Automatic ash removing dedusting tank inner filter core 2 can slowly during this Dust is accumulated.At this moment the first motor 5 drives brush holder 3 to rotate, and brush 4 links with brush holder 3 and rotated relative to filter core 2, right The lateral wall of filter core 2 is cleared up, simultaneously because the frictional force existed between brush 4 and filter core 2, brush 4 is relatively fixed simultaneously There is rotation in axle 31.After a shutdown, the gas in gas tank 6 makees discontinuous air blowing to the inner surface of filter core 2, further clears up filter core Dust in 2.
When needing to clearing up inside opening 11 pairs of main tank bodies 1 of upper lid, cylinder 81 drives column body 71 to rise so as to band Dynamic upper lid 11 drives and drives support column 7 to rotate away from main tank body 1, afterwards the second motor 82, so as to drive upper lid 11 to be pivoted away from The opening of the upper end of main tank body 1.
Embodiment 2:A kind of single crystal growing furnace automatic ash removing dedusting tank, such as Fig. 2 as different from Example 1, is inserted on brush holder 3 Three rotating shafts 91 are connected to, rotating shaft 91 can be rotated relative to brush holder 3, and brush 4 is fixedly sleeved in rotating shaft 91, rotating shaft 91 is by driving The drive shaft 91 of part 92, actuator 92 selects the 3rd motor being fixed on brush holder 3, the 3rd motor to arrange one in the present embodiment Individual and its output shaft is connected with one of rotating shaft 91 by shaft coupling.Three rotating shafts 91 are interlocked with the rotation by STATEMENT OF FEDERALLY SPONSORED 93, this In embodiment, STATEMENT OF FEDERALLY SPONSORED 93 selects to be chape that chape is abutted with three rotating shafts 91 simultaneously.
Its main working process is same as Example 1, therefore repeats no more.It should be noted that brush 4 works in equipment When do not rotate relative to brush holder 3, only after one of 41 serious wear of cleaning face, the 3rd motor can just drive brush Son 4 is rotated relative to brush machine so that new cleaning face 41 abuts the outer wall of filter core 2.
Embodiment 3:A kind of single crystal growing furnace automatic ash removing dedusting tank, as different from Example 2, the 3rd motor arranges three, Each rotating shaft 91 connects the 3rd motor.

Claims (10)

1. a kind of single crystal growing furnace automatic ash removing dedusting tank, it is characterised in that:Including main tank body (1), the filter being arranged in main tank body (1) Core (2), can relative to filter core (2) rotate brush holder (3), be arranged on brush holder (3) and all the time abutting filter core (2) outer wall brush Sub (4), the brush (4) is with multiple cleaning faces (41) that can be abutted with filter core (2) outer wall, the brush (4) and brush holder (3) rotate connection and brush (4) in relative brush holder (3) rotation process multiple cleaning faces (41) respectively with filter core (2) outer wall Abut.
2. single crystal growing furnace automatic ash removing dedusting tank according to claim 1, is characterized in that:The brush (4) rotates and is socketed in On brush holder (3), the brush (4) abuts filter core (2) outer wall and phase during brush holder (3) is rotated relative to filter core (2) Brush holder (3) is rotated.
3. single crystal growing furnace automatic ash removing dedusting tank according to claim 1, is characterized in that:It is fixed with the brush holder (3) The actuator (92) for driving brush (4) to rotate, the brush (4) can relative brush holder (3) only under the driving of actuator (92) Rotate.
4. single crystal growing furnace automatic ash removing dedusting tank according to claim 3, is characterized in that:The brush (4) arranges multiple, often The individual brush (4) individually connects an actuator (92).
5. single crystal growing furnace automatic ash removing dedusting tank according to claim 3, is characterized in that:The brush (4) arranges multiple, institute State actuator (92) and arrange one, all brushes (4) are interlocked with the rotation by STATEMENT OF FEDERALLY SPONSORED (93).
6. single crystal growing furnace automatic ash removing dedusting tank according to claim 1, is characterized in that:Offer on the main tank body (1) Intake interface (12) and outlet interface (13), the main tank body (1) is fixedly arranged above the first motor for driving brush holder (3) to rotate (5)。
7. single crystal growing furnace automatic ash removing dedusting tank according to claim 1, is characterized in that:Main tank body (1) top has Upper lid (11), is provided with support column (7), drives support column (7) drive mechanism that circumferentially rotates on main tank body (1) outer wall First, the drive mechanism two for driving support column (7) to move up and down, the upper lid (11) is connected linkage with support column (7).
8. single crystal growing furnace automatic ash removing dedusting tank according to claim 7, is characterized in that:The drive mechanism one includes solid set The second gear (84) of first gear (83) and first gear (83) engaged transmission on support column (7), driving second gear (84) the second motor (82) for rotating.
9. single crystal growing furnace automatic ash removing dedusting tank according to claim 7, is characterized in that:The drive mechanism two is to be fixed on Cylinder (81) on main tank body (1).
10. single crystal growing furnace automatic ash removing dedusting tank according to claim 1, is characterized in that:Also include gas tank (6), the gas Tank (6) is connected with escaping pipe (61) and the gas outlet of escaping pipe (61) connects with filter core (2).
CN201621195519.0U 2016-11-03 2016-11-03 Automatic deashing dust removal tank of single crystal growing furnace Expired - Fee Related CN206168107U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621195519.0U CN206168107U (en) 2016-11-03 2016-11-03 Automatic deashing dust removal tank of single crystal growing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621195519.0U CN206168107U (en) 2016-11-03 2016-11-03 Automatic deashing dust removal tank of single crystal growing furnace

Publications (1)

Publication Number Publication Date
CN206168107U true CN206168107U (en) 2017-05-17

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107322825A (en) * 2017-08-09 2017-11-07 新乡市时瑞公路养护技术有限公司 Filter core deashing device on groover
CN107338715A (en) * 2017-08-09 2017-11-10 新乡市时瑞公路养护技术有限公司 Dustless slotting crack sealing machine
CN107335339A (en) * 2017-07-25 2017-11-10 珠海格力电器股份有限公司 Filter element cleaning structure and water purifier filter element with same
CN107433084B (en) * 2017-08-21 2018-06-05 河南鑫安利安全科技股份有限公司 A kind of dust recycles absorption tower
CN108325280A (en) * 2018-04-13 2018-07-27 王春立 Industrial waste gas processing ceramic filter pipe device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107335339A (en) * 2017-07-25 2017-11-10 珠海格力电器股份有限公司 Filter element cleaning structure and water purifier filter element with same
CN107322825A (en) * 2017-08-09 2017-11-07 新乡市时瑞公路养护技术有限公司 Filter core deashing device on groover
CN107338715A (en) * 2017-08-09 2017-11-10 新乡市时瑞公路养护技术有限公司 Dustless slotting crack sealing machine
CN107433084B (en) * 2017-08-21 2018-06-05 河南鑫安利安全科技股份有限公司 A kind of dust recycles absorption tower
CN108325280A (en) * 2018-04-13 2018-07-27 王春立 Industrial waste gas processing ceramic filter pipe device
CN108325280B (en) * 2018-04-13 2019-04-09 山东康源环保科技有限公司 Industrial waste gas processing ceramic filter pipe device

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170517

Termination date: 20211103

CF01 Termination of patent right due to non-payment of annual fee