CN206146748U - Integrated circuit follow -up counterpoint pressure measurement device - Google Patents
Integrated circuit follow -up counterpoint pressure measurement device Download PDFInfo
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- CN206146748U CN206146748U CN201621121216.4U CN201621121216U CN206146748U CN 206146748 U CN206146748 U CN 206146748U CN 201621121216 U CN201621121216 U CN 201621121216U CN 206146748 U CN206146748 U CN 206146748U
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Abstract
The utility model relates to an integrated circuit tests the field, and the purpose provides an integrated circuit follow -up counterpoint pressure measurement device. An integrated circuit follow -up counterpoint pressure measurement device, includes: at least one upper end is equipped with the diaphragm cylinder of cylinder head, integrated circuit follow -up counterpoint pressure measurement device still include: with the keysets that cylinder head upper end is connected, the following mechanism of number and one -to -one the same with the diaphragm cylinder number, following mechanism includes: the connecting plate of being connected with the diaphragm cylinder lower extreme, with the horizontal following mechanism that the connecting plate lower extreme is connected, the high temperature resistant pressure measurement subassembly that is equipped with the heater and is connected with horizontal following mechanism lower extreme. This integrated circuit follow -up counterpoint pressure measurement device counterpoints with the integrated circuit seat and makes things convenient for efficiency of software testing higher, the balanced measuring accuracy that improves of integrated circuit pressurized when just testing, extrusion cushioning effect when the diaphragm cylinder makes integrated circuit follow -up counterpoint pressure measurement device go into the position with integrated circuit pressure measurement seat.
Description
Technical field
This utility model is related to integrated circuit testing field, especially a kind of servo-actuated para-position pressure tester of integrated circuit.
Background technology
Integrated circuit is to ensure that there are enough strength and stiffness to need to carry out stress test；Traditional integrated circuit pressure
It is relatively low to there is pressure tester and IC socket para-position difficulty testing efficiency in test, and integrated circuit is pressurized unbalanced during because testing
Reduce the deficiency of measuring accuracy；Therefore, design a kind of pressure tester facilitates testing efficiency higher with IC socket para-position, and surveys
The servo-actuated pressure tester of the pressurized balanced integrated circuit pressure tester for improving measuring accuracy of integrated circuit, becomes urgently to be resolved hurrily during examination
Problem.
Utility model content
The purpose of this utility model is to overcome current integrated circuit stress test to there is pressure tester with integrated electricity
Road seat para-position difficulty testing efficiency is relatively low, and because of the integrated circuit pressurized unbalanced deficiency for reducing measuring accuracy during test, there is provided
A kind of pressure tester facilitates testing efficiency higher with IC socket para-position, and pressurized balanced raising of integrated circuit is tested when testing
The servo-actuated para-position pressure tester of the integrated circuit of precision.
Concrete technical scheme of the present utility model is：
A kind of servo-actuated para-position pressure tester of integrated circuit, including：At least one upper end is provided with the diaphragm cylinder of cylinder head；Institute
The servo-actuated para-position pressure tester of integrated circuit stated also includes：The pinboard being connected with cylinder head upper end, number and diaphragm cylinder
Several identical and one-to-one followers；Follower includes：The connecting plate being connected with diaphragm cylinder lower end, under connecting plate
The horizontal follower of end connection, the high temperature resistant manometric module for being provided with heater and being connected with horizontal follower lower end.It is integrated
When the servo-actuated para-position pressure tester of circuit is used, the pinboard of the servo-actuated para-position pressure tester of integrated circuit is connected with pressure measuring machine, will
Integrated circuit pressure measurement seating is in integrated circuit pressure measurement seat lower section；Compressed air makes the thin film of cylinder raise up into diaphragm cylinder
Jack-up cylinder head；The servo-actuated para-position pressure tester of pressure measuring machine drive integrated circult is moved downward, when the servo-actuated para-position pressure measurement of integrated circuit
With during integrated circuit pressure measurement seat misalignment, horizontal follower makes movable head drive high temperature resistant manometric module with respect to connecting plate to device
Make level to be servo-actuated, the servo-actuated para-position pressure tester of integrated circuit is aligned with integrated circuit pressure measurement seat and realize that para-position enters position and surveyed
Pressure.The servo-actuated para-position pressure tester of the integrated circuit facilitates testing efficiency higher with IC socket para-position, and integrated electricity when testing
The pressurized balanced raising measuring accuracy in road；Diaphragm cylinder makes the servo-actuated para-position pressure tester of integrated circuit enter position with integrated circuit pressure measurement seat
When extrude cushioning effect.
Preferably, described horizontal follower includes：It is provided with several appearances being distributed along the circumference of cylinder head
The movable head in hole, number and accommodating hole number identical follow-on subassembly are put, accommodating hole includes：It is upper with the insertion of movable head upper end
Hole, the lower opening with the insertion of movable head lower end, two ends respectively with upper hole and the mesopore of lower opening insertion；Mesopore with diameter greater than upper Kong Zhi
Footpath and less than lower bore dia；Follow-on subassembly includes：In mesopore and the upper baffle ring that matches with median pore diameter of external diameter, it is arranged in
In baffle ring and lower end is provided with the sleeve of the lower baffle ring in lower opening, and several are located between upper baffle ring and lower baffle ring and along sleeve
The servo-actuated ball of circle distribution, screw rod passes through sleeve and upper hole and the servo-actuated connecting bolt being threadedly coupled with connecting plate；Sleeve
Internal diameter of the diameter less than upper baffle ring；The external diameter of lower baffle ring is less than lower bore dia；It is provided between connecting plate lower end and movable head upper end
Space.Horizontal follower is simple and compact for structure, and the servo-actuated effect of level and precision are preferable.
Preferably, described horizontal follower also includes：Several reset assemblies；Movable head upper end be provided with number with
Reset assembly number identical lower counterbore and the spring eye located at lower counterbore bottom surface；Connecting plate lower end is provided with number with lower counterbore
Identical and relative one by one with the lower counterbore upper counterbore of number；Reset assembly includes：In spring eye and upper end is provided with external diameter and bullet
The fore-set of the back-up ring of spring bore dia matching, in spring eye and is sheathed on the stage clip outside fore-set, in lower counterbore and external diameter
With the holding set of lower counterbore diameter matches, positioned at keep in set and diameter with keep covering the reset ball that matches of internal diameter, positioned at upper
In counterbore and the reset post that matches with upper counter bore hole diameters of external diameter；Reset post lower end is provided with the cone shaped countersink for pushing down reset ball；Pressure
Back-up ring lower end and spring eye bottom surface are pushed down respectively in the two ends of spring.Reset assembly is simple and compact for structure and better reduction.
Preferably, described high temperature resistant manometric module includes：Heat insulation tie-plate on the downside of movable head, positioned at heat insulating mattress
Pressure measurement plate on the downside of plate, several fixing screws, number is identical with fixing screws number and one-to-one corresponding is set in fixing screws
Screw rod outside heat insulation loop；Pressure measurement plate is provided with that number is identical with fixing screws number and big end is located at the stairstepping of pressure measurement plate lower end
Through hole, it is identical with stairstepping through hole number and go up through hole correspondingly that the lower end of heat insulation tie-plate is provided with number；Outside heat insulation loop
Diameter of the footpath less than the big end of stairstepping through hole；The external diameter of the screw rod of fixing screws is respectively smaller than the end diameter of stairstepping through hole
With upper through-hole diameter；Heat insulation loop is corresponded in the big end of stairstepping through hole, and the screw rod of fixing screws is logical through stairstepping
The small end in hole and upper through hole are threadedly coupled with movable head；Heater is the heating rod being connected with pressure measurement plate.High temperature resistant manometric module
Beneficial to carrying out room temperature and high temperature pressure measurement to integrated circuit.
Preferably, described high temperature resistant manometric module also includes：The temperature sensor being connected with pressure measurement plate respectively and temperature
Degree electric fuse.Temperature sensor and Thermal Cutoffs improve pressure measurement precision and safety.
Preferably, described pressure measurement plate lower end is provided with pressure-measuring head；Pressure-measuring head lower end is provided with two location holes.Location hole is just
In the fastening screw being provided with integrated circuit pressure measurement seat to access position.
Compared with prior art, the beneficial effects of the utility model are：The servo-actuated para-position pressure tester of the integrated circuit and collection
Integrated circuit pressurized balanced raising measuring accuracy when facilitating testing efficiency higher into circuit seat para-position, and testing.Horizontal follower
Structure is simple and compact for structure, and the servo-actuated effect of level and precision are preferable.Reset assembly is simple and compact for structure and better reduction.High temperature resistant
Manometric module is beneficial to carry out integrated circuit room temperature and high temperature pressure measurement.Temperature sensor and Thermal Cutoffs improve pressure measurement precision and
Safety.Location hole is easy to the fastening screw being provided with integrated circuit pressure measurement seat to access position.
Description of the drawings
Fig. 1 is a kind of structural representation of the present utility model.
In figure：Cylinder head 1, diaphragm cylinder 2, pinboard 3, connecting plate 4, movable head 5, upper hole 6, lower opening 7, mesopore 8, upper gear
Ring 9, lower baffle ring 10, sleeve 11, servo-actuated ball 12, servo-actuated connecting bolt 13, space 14, lower counterbore 15, spring eye 16, upper counterbore
17th, back-up ring 18, fore-set 19, stage clip 20, holding set 21, reset ball 22, reset post 23, cone shaped countersink 24, bulge loop 25, heat insulating mattress
Plate 26, pressure measurement plate 27, fixing screws 28, heat insulation loop 29, stairstepping through hole 30, upper through hole 31, heating rod 32, temperature sensor
33rd, Thermal Cutoffs 34, pressure-measuring head 35, location hole 36.
Specific embodiment
It is shown below in conjunction with the accompanying drawings that this utility model is described further.
As shown in Figure 1：A kind of servo-actuated para-position pressure tester of integrated circuit, including：Two upper ends are provided with the thin of cylinder head 1
Film cylinder 2, the pinboard 3 with the upper end mode connects for screw of cylinder head 1, number it is identical with the number of diaphragm cylinder 2 and it is one-to-one with
Motivation structure；Follower includes：With the connecting plate 4 of the lower end mode connects for screw of diaphragm cylinder 2, the level being connected with the lower end of connecting plate 4
Follower, the high temperature resistant manometric module for being provided with heater and being connected with horizontal follower lower end.The upper surface of pinboard 3 and company
The depth of parallelism≤the 0.05mm of the lower surface of fishplate bar 4.
In the present embodiment：
Described horizontal follower includes：It is provided with the servo-actuated of the accommodating hole that three circumferences along cylinder head 1 are distributed
Plate 5, number and accommodating hole number identical follow-on subassembly, accommodating hole includes：With the upper hole 6 of the upper end insertion of movable head 5, it is and servo-actuated
The lower opening 7 of the lower end insertion of plate 5, two ends respectively with upper hole 6 and the mesopore 8 of the insertion of lower opening 7；Mesopore 8 with diameter greater than the diameter of upper hole 6
And less than the diameter of lower opening 7；Follow-on subassembly includes：In mesopore 8 and the upper baffle ring 9 that coordinates of external diameter and the diametric clearance of mesopore 8, wear
In upper baffle ring 9 and lower end is provided with the sleeve 11 of the lower baffle ring 10 in lower opening 7, six are located at upper baffle ring 9 and lower baffle ring
Between 10 and along the servo-actuated ball 12 of the circle distribution of sleeve 11, screw rod passes through sleeve 11 and upper hole 6 and is threadedly coupled with connecting plate 4
Servo-actuated connecting bolt 13；Internal diameter of the diameter of sleeve 11 less than upper baffle ring 9；The external diameter of lower baffle ring 10 is less than the diameter of lower opening 7；Even
Space 14 is provided between the lower end of fishplate bar 4 and the upper end of movable head 5.The height in space 14 is 0.05 mm to 0.08mm.
Described horizontal follower also includes：Three reset assemblies；The upper end of movable head 5 is provided with number with reset assembly
Count identical lower counterbore 15 and located at the spring eye 16 of the bottom surface of lower counterbore 15；The lower end of connecting plate 4 is provided with number and lower counterbore 15
Identical and relative one by one with the lower counterbore 15 upper counterbore 17 of number；Reset assembly includes：In spring eye 16 and upper end is provided with outer
The fore-set 19 of the back-up ring 18 that footpath and the diametric clearance of spring eye 16 coordinate, in spring eye 16 and the stage clip that is sheathed on outside fore-set 19
20, in lower counterbore 15 and the holding set 21 that coordinates of external diameter and the diametric clearance of lower counterbore 15, positioned at keeping in set 21 and diameter
With the reset ball 22 for keeping 21 internal diameter gaps of set to coordinate, in upper counterbore 17 and external diameter and the diameter interference fit of upper counterbore 17
Reset post 23；The lower end of reset post 23 is provided with the cone shaped countersink 24 for pushing down reset ball 22；Gear is pushed down respectively in the two ends of stage clip 20
Enclose 18 lower ends and the bottom surface of spring eye 16.
The lower end of the described outer gusset of sleeve 11 be provided with positioned at the inner side of servo-actuated ball 12 and with the company of being integrally formed of lower baffle ring 10
The bulge loop 25 for connecing.
Described high temperature resistant manometric module includes：Positioned at the heat insulation tie-plate 26 of the downside of movable head 5, under heat insulation tie-plate 26
The pressure measurement plate 27 of side, four fixing screws 28, number is identical with fixing screws 28, number and corresponds and is set in fixed spiral shell
Nail 28, screw rod outside heat insulation loop 29；Pressure measurement plate 27 is provided with that number is identical with fixing screws 28, number and big end is located at pressure measurement plate
The stairstepping through hole 30 of 27 lower ends, it is identical with the number of stairstepping through hole 30 and correspond that the lower end of heat insulation tie-plate 26 is provided with number
Upper through hole 31；Diameter of the external diameter of heat insulation loop 29 less than the big end of stairstepping through hole 30；Fixing screws 28, screw rod external diameter
It is respectively smaller than the end diameter and the diameter of upper through hole 31 of stairstepping through hole 30；Heat insulation loop 29 is corresponded and is located at stairstepping through hole 30
Big end in, fixing screws 28, screw rod through stairstepping through hole 30 small end and upper through hole 31 be threadedly coupled with movable head 5；
Heater is the heating rod 32 being threadedly coupled with pressure measurement plate 27.
Described high temperature resistant manometric module also includes：Temperature sensor 33 with the mode connects for screw of pressure measurement plate 27 and temperature respectively
Electric fuse 34.
The described lower end of pressure measurement plate 27 is provided with pressure-measuring head 35；The lower end of pressure-measuring head 35 is provided with two location holes 36.
The servo-actuated alignment method of the servo-actuated para-position pressure tester of integrated circuit,（1）By the servo-actuated para-position pressure tester of integrated circuit
Pinboard 3 be connected with pressure measuring machine, the integrated circuit pressure measurement seat of number and the number identical fastening screw of location hole 36 will be provided with
The lower section of the servo-actuated para-position pressure tester of integrated circuit is placed in, the upper end of fastening screw has taper guide section；（2）Compressed air is entered
Entering diaphragm cylinder 2 makes the thin film of cylinder raise up jack-up cylinder head 1；（3）The servo-actuated para-position pressure measurement of pressure measuring machine drive integrated circult
Device is moved downward, and fastening screw corresponds insertion location hole 36 and positions, when fastening screw and the position misalignment of location hole 36
When, because horizontal follower has follow-on subassembly, under the mating reaction of taper guide section and location hole 36, the band of movable head 5
Dynamic high temperature resistant manometric module is made level and is servo-actuated with respect to connecting plate 4, and movable head 5 drives reset ball 22 to overcome the resistance of stage clip 20 to make water
Flat servo-actuated, fastening screw insertion location hole 36 realizes para-position；（ 4）Diaphragm cylinder 2 is deflated, and the thin film of diaphragm cylinder 2 resets, and surveys
Press carries out pressure measurement by the servo-actuated para-position pressure tester of integrated circuit to integrated circuit；（5）After completing pressure measurement, pressure measuring machine drives collection
Move upwards into the servo-actuated para-position pressure tester of circuit, under the effect of the reset force of stage clip 20, Jing fore-sets 19 promote reset ball 22 to
The center of cone shaped countersink 24 resets, and Jing reset posts 23 drive movable head 5 to reset.
The beneficial effects of the utility model are：The servo-actuated para-position pressure tester of the integrated circuit is convenient with IC socket para-position
Testing efficiency is higher, and integrated circuit pressurized balanced raising measuring accuracy when testing.Horizontal follower is simple and compact for structure, water
Flat servo-actuated effect and precision are preferable.Reset assembly is simple and compact for structure and better reduction.The lower end of the outer gusset of sleeve is provided with position
The bulge loop being connected in servo-actuated ball inner side and with lower baffle ring, beneficial to the internal diameter for doing big upper baffle ring, increases the water of horizontal follower
Translation momentum.High temperature resistant manometric module is beneficial to carry out integrated circuit room temperature and high temperature pressure measurement.Temperature sensor and Temperature protection
Silk improves pressure measurement precision and safety.Location hole is easy to the fastening screw being provided with integrated circuit pressure measurement seat to access position.
It is apparent to one skilled in the art that this utility model can change into various ways, and such change is not
Think to depart from scope of the present utility model.All such technical staff to the field obviously change, and will include
Within the scope of present claims.
Claims (6)
1. a kind of integrated circuit is servo-actuated para-position pressure tester, including：At least one upper end is provided with the diaphragm cylinder of cylinder head；It is special
Levying is, the servo-actuated para-position pressure tester of described integrated circuit also includes：The pinboard being connected with cylinder head upper end, number and thin film
Cylinder number is identical and one-to-one follower；Follower includes：The connecting plate being connected with diaphragm cylinder lower end, with company
The horizontal follower of fishplate bar lower end connection, the high temperature resistant pressure measurement group for being provided with heater and being connected with horizontal follower lower end
Part.
2. the servo-actuated para-position pressure tester of integrated circuit according to claim 1, is characterized in that：Described horizontal follower
Including：It is provided with the movable head of several accommodating holes being distributed along the circumference of cylinder head, number and accommodating hole number identical
Follow-on subassembly, accommodating hole includes：With the upper hole of movable head upper end insertion, the lower opening with the insertion of movable head lower end, two ends respectively with
Upper hole and the mesopore of lower opening insertion；Mesopore with diameter greater than upper bore dia and less than lower bore dia；Follow-on subassembly includes：In being located at
In hole and the upper baffle ring that matches with median pore diameter of external diameter, it is arranged in upper baffle ring and lower end is provided with lower baffle ring in lower opening
Sleeve, several are located between upper baffle ring and lower baffle ring and along the servo-actuated ball of its circumference distribution, screw rod is through sleeve and upper
Hole and the servo-actuated connecting bolt being threadedly coupled with connecting plate；Internal diameter of the diameter of sleeve less than upper baffle ring；The external diameter of lower baffle ring is little
In lower bore dia；Space is provided between connecting plate lower end and movable head upper end.
3. the servo-actuated para-position pressure tester of integrated circuit according to claim 2, is characterized in that：Described horizontal follower
Also include：Several reset assemblies；Movable head upper end is provided with number with reset assembly number identical lower counterbore and located at sinking
The spring eye in bottom hole face；Connecting plate lower end is provided with identical with lower counterbore number and relative one by one with the lower counterbore upper counterbore of number；
Reset assembly includes：In spring eye and upper end is provided with the fore-set of the back-up ring of external diameter and spring eye diameter matches, positioned at spring
In hole and be sheathed on the stage clip outside fore-set, in lower counterbore and external diameter and lower counterbore diameter matches holding set, positioned at holding
In set and diameter and the set reset ball that matches of internal diameter is kept, in upper counterbore and the reset that matches with upper counter bore hole diameters of external diameter
Post；Reset post lower end is provided with the cone shaped countersink for pushing down reset ball；Back-up ring lower end and spring eye bottom are pushed down respectively in the two ends of stage clip
Face.
4. the servo-actuated para-position pressure tester of integrated circuit according to Claims 2 or 3, is characterized in that：Described high temperature resistant is surveyed
Pressure component includes：Heat insulation tie-plate on the downside of movable head, the pressure measurement plate on the downside of heat insulation tie-plate, several fixing screws,
Number is identical with fixing screws number and corresponds and is set in heat insulation loop outside the screw rod of fixing screws；Pressure measurement plate is provided with number
Identical with fixing screws number and big end is located at the stairstepping through hole of pressure measurement plate lower end, and the lower end of heat insulation tie-plate is provided with number and rank
Trapezoidal hole number is identical and goes up through hole correspondingly；Diameter of the external diameter of heat insulation loop less than the big end of stairstepping through hole；Gu
The external diameter for determining the screw rod of screw is respectively smaller than the end diameter and upper through-hole diameter of stairstepping through hole；Heat insulation loop is corresponded and is located at
In the big end of stairstepping through hole, the screw rod of fixing screws connects through the small end and upper through hole of stairstepping through hole with movable head screw thread
Connect；Heater is the heating rod being connected with pressure measurement plate.
5. the servo-actuated para-position pressure tester of integrated circuit according to claim 4, is characterized in that：Described high temperature resistant pressure measurement group
Part also includes：The temperature sensor being connected with pressure measurement plate respectively and Thermal Cutoffs.
6. the servo-actuated para-position pressure tester of integrated circuit according to claim 4, is characterized in that：Described pressure measurement plate lower end sets
There is pressure-measuring head；Pressure-measuring head lower end is provided with several location holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621121216.4U CN206146748U (en) | 2016-10-13 | 2016-10-13 | Integrated circuit follow -up counterpoint pressure measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621121216.4U CN206146748U (en) | 2016-10-13 | 2016-10-13 | Integrated circuit follow -up counterpoint pressure measurement device |
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| Publication Number | Publication Date |
|---|---|
| CN206146748U true CN206146748U (en) | 2017-05-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621121216.4U Active CN206146748U (en) | 2016-10-13 | 2016-10-13 | Integrated circuit follow -up counterpoint pressure measurement device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107036887A (en) * | 2016-10-13 | 2017-08-11 | 杭州长川科技股份有限公司 | The servo-actuated contraposition pressure tester of integrated circuit and servo-actuated alignment method |
-
2016
- 2016-10-13 CN CN201621121216.4U patent/CN206146748U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107036887A (en) * | 2016-10-13 | 2017-08-11 | 杭州长川科技股份有限公司 | The servo-actuated contraposition pressure tester of integrated circuit and servo-actuated alignment method |
| CN107036887B (en) * | 2016-10-13 | 2019-04-30 | 杭州长川科技股份有限公司 | The servo-actuated contraposition pressure measuring unit of integrated circuit and servo-actuated alignment method |
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