CN206132451U - Silane tail gas sampling device - Google Patents
Silane tail gas sampling device Download PDFInfo
- Publication number
- CN206132451U CN206132451U CN201621122489.0U CN201621122489U CN206132451U CN 206132451 U CN206132451 U CN 206132451U CN 201621122489 U CN201621122489 U CN 201621122489U CN 206132451 U CN206132451 U CN 206132451U
- Authority
- CN
- China
- Prior art keywords
- silane
- sample steel
- valve
- steel cylinder
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 56
- 238000005070 sampling Methods 0.000 title claims abstract description 33
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 52
- 239000010959 steel Substances 0.000 claims abstract description 52
- 239000001257 hydrogen Substances 0.000 claims abstract description 30
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 30
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000003513 alkali Substances 0.000 claims abstract description 15
- 230000008676 import Effects 0.000 claims description 30
- 230000000740 bleeding effect Effects 0.000 claims description 17
- 238000010521 absorption reaction Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 abstract description 27
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000000354 decomposition reaction Methods 0.000 abstract description 2
- 238000002485 combustion reaction Methods 0.000 abstract 2
- 238000010408 sweeping Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- XLVKXZZJSTWDJY-UHFFFAOYSA-N [SiH4].[Si] Chemical compound [SiH4].[Si] XLVKXZZJSTWDJY-UHFFFAOYSA-N 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a silane tail gas sampling device, it includes that tail gas sampling channel (1), silane tail gas go out lancet type valve (2), hydrogen pipe says that needle type valve (3), sample steel bottle admission valve (4), sample steel bottle discharge valve (5), bypass needle type valve (6), hydrogen pipe way (7), sample steel bottle (8) and alkali lye absorb bucket (9). The utility model discloses an advantage: silane tail gas sampling device fully considers silane tail gas characteristics to the gaseous nature of meeting air combustion, decomposition of silane, increases all the way hydrogen as the sweeping gas body when device design for the pipeline replacement of taking a sample around the sample, avoided tail gas in silane meet air combustion, guarantee safe sample, the demonstrator is simple in structure, convenient in operation and low in manufacture cost.
Description
Technical field：
This utility model is related to a kind of sampler, more particularly to a kind of silane exhaust sampling device.
Background technology：
Recent years is constantly expanded production due to domestic and international large polycrystalline silicon manufacturing enterprise, makes polysilicon by past sudden huge profits rank
Section enters the competitive stage of quality and cost, and silane thermal decomposition process produces polysilicon because its decomposition temperature is low, energy consumption is low, low cost, nothing
The features such as pollution, cause the concern of increasing production of polysilicon enterprise and be successfully applied, it is whether external
The ripe development case of big production of polysilicon producer or at present country's silane thermal decomposition process production polysilicon progressively develop become
Gesture, these all show that silane thermal decomposition process is the Main way that following polysilicon industrial technology is lifted and developed.
Silane gas are either decomposed in a fluidized bed reactor reaction, in the thin silicon grain superficial growth being previously charged into
Polycrysalline silcon, or there are pyrolysis in CVD stoves, decompose deposition in silicon wicking surface and finally grow into polycrystalline silicon rod,
The actual transformation efficiency of silane is subjected to the impact of reaction temperature and pressure and other parameters control.Silane contents is big in silane tail gas
It is little, transformation efficiency of the silane in fluid bed and CVD stoves is directly reflected, it is the important evidence of technique adjustment, therefore, measure silicon
Silane contents are significant in alkane tail gas.But silane gas have the characteristic met air burning, decompose, in sampling process,
Silane meets air burning in silane tail gas, so as to hydrogen in the silane tail gas that ignites, it is easy to security incident occurs, at present, does not also have
It is exclusively used in the sampler of silane tail gas.
Utility model content：
In to avoid sampling process, silane meets air burning in silane tail gas, causes security incident, mesh of the present utility model
Be that a kind of safe and reliable silane exhaust sampling device is provided.
The purpose of this utility model is implemented by following technical scheme：1st, silane exhaust sampling device, it is characterised in that its bag
Include exhaust sampling pipeline (1), silane offgas outlet needle valve (2), Hydrogen Line needle valve (3), sample steel cylinder intake valve (4),
Sample steel cylinder air bleeding valve (5), bypass needle valve (6), Hydrogen Line (7), sample steel cylinder (8) and alkali liquor absorption bucket (9)；Tail gas takes
The outlet of sample pipeline (1) is connected with the import of silane offgas outlet needle valve (2), the outlet of silane offgas outlet needle valve (2)
The import of outlet, the import of sample steel cylinder intake valve (4) and bypass needle valve (6) respectively with Hydrogen Line needle valve (3) is led to
Piping connects, and the import of Hydrogen Line needle valve (3) is connected with the outlet of Hydrogen Line (7) by pipeline, and sample steel cylinder enters
The outlet of air valve (4) is connected with the import of sample steel cylinder (8) by pipeline, outlet and the sample steel cylinder aerofluxuss of sample steel cylinder (8)
The import connection of valve (5), the outlet of sample steel cylinder air bleeding valve (5) is connected by pipeline with the import of alkali liquor absorption bucket (9), is bypassed
The outlet of needle valve (6) is connected with the import of alkali liquor absorption bucket (9) by pipeline.
Further, the import of sample steel cylinder intake valve (4) be connected silane offgas outlet needle valve (2) and sample steel cylinder enters
The outlet of air valve (4) pipeline is threaded connection.
Further, the outlet of sample steel cylinder air bleeding valve (5) be connected sample steel cylinder air bleeding valve (5) and alkali liquor absorption bucket (9)
The import of pipeline is threaded connection.
Advantage of the present utility model：Silane exhaust sampling device takes into full account silane tail gas feature, meets for silane gas
Air burning, decompose property, when device design increase all the way hydrogen as purge gas, for sampling line before and after sampling
Displacement, it is to avoid silane meets air burning in tail gas, it is ensured that safety sampling；This utility model simple structure, easy to operate, manufacture
Low cost.
Description of the drawings：
Fig. 1 is silane exhaust sampling schematic device.
Exhaust sampling pipeline (1), silane offgas outlet needle valve (2), Hydrogen Line needle valve (3), sample steel cylinder air inlet
Valve (4), sample steel cylinder air bleeding valve (5), bypass needle valve (6), Hydrogen Line (7), sample steel cylinder (8) and alkali liquor absorption bucket (9).
Specific embodiment：
As shown in figure 1,1, silane exhaust sampling device, it is characterised in that it includes exhaust sampling pipeline (1), silane tail
Gas outlet needle valve (2), Hydrogen Line needle valve (3), sample steel cylinder intake valve (4), sample steel cylinder air bleeding valve (5), bypass pin
Type valve (6), Hydrogen Line (7), sample steel cylinder (8) and alkali liquor absorption bucket (9)；The outlet of exhaust sampling pipeline (1) and silane tail
The import connection of gas outlet needle valve (2), the outlet of silane offgas outlet needle valve (2) respectively with Hydrogen Line needle valve (3)
Outlet, the import of sample steel cylinder intake valve (4) and bypass needle valve (6) import by pipeline connect, Hydrogen Line needle-like
The import of valve (3) is connected with the outlet of Hydrogen Line (7) by pipeline, outlet and the sample steel cylinder of sample steel cylinder intake valve (4)
(8) import is connected by pipeline, and the outlet of sample steel cylinder (8) is connected with the import of sample steel cylinder air bleeding valve (5), sample steel cylinder
The outlet of air bleeding valve (5) is connected with the import of alkali liquor absorption bucket (9) by pipeline, and the outlet and alkali liquor for bypassing needle valve (6) is inhaled
The import for receiving bucket (9) is connected by pipeline.The import of sample steel cylinder intake valve (4) be connected silane offgas outlet needle valve (2)
It is threaded connection with the outlet of sample steel cylinder intake valve (4) pipeline.The outlet of sample steel cylinder air bleeding valve (5) be connected sample steel
The import of bottle air bleeding valve (5) and alkali liquor absorption bucket (9) pipeline is threaded connection.
Using silane exhaust sampling device, sampling concrete operation step is：
1. silane offgas outlet needle valve (2) is closed, sample steel cylinder intake valve (4) and sample steel cylinder air bleeding valve (5) is opened,
Bypass needle valve (6) is opened, Hydrogen Line needle valve (3) is opened, is sufficiently displaced from sample steel cylinder (8) and sampling line with hydrogen
Air and leak test；
2. after hydrogen exchange is finished, bypass needle valve (6) is closed, closes Hydrogen Line needle valve (3), open silane tail gas
Outlet needle valve (2), with silane tail gas the hydrogen in sample steel cylinder (8) and sampling line, unnecessary silane tail gas are sufficiently displaced from
Empty Jing after alkali liquor absorption bucket (9) reaction；
3. after silane tail gas is replaced, sample steel cylinder air bleeding valve (5) is closed, sampling balance 5min～10min closes sample
Product steel cylinder intake valve (4), close silane offgas outlet needle valve (2)；
4. Hydrogen Line needle valve (3) is opened, bypass needle valve (6) is opened, is sufficiently displaced from sampling line with hydrogen
Silane tail gas；Bypass needle valve (6) is purged for the pipeline after sampling.
5. Hydrogen Line needle valve (3) is closed, sample steel cylinder (8) is unloaded, sampling is completed.
Claims (3)
1. silane exhaust sampling device, it is characterised in that it includes exhaust sampling pipeline (1), silane offgas outlet needle valve
(2), Hydrogen Line needle valve (3), sample steel cylinder intake valve (4), sample steel cylinder air bleeding valve (5), bypass needle valve (6), hydrogen
Pipeline (7), sample steel cylinder (8) and alkali liquor absorption bucket (9)；The outlet of exhaust sampling pipeline (1) and silane offgas outlet needle valve
(2) import connection, the outlet of silane offgas outlet needle valve (2) outlet, sample steel respectively with Hydrogen Line needle valve (3)
Bottle intake valve (4) import and bypass needle valve (6) import by pipeline connect, the import of Hydrogen Line needle valve (3) with
The outlet of Hydrogen Line (7) is connected by pipeline, and outlet and the import of sample steel cylinder (8) of sample steel cylinder intake valve (4) pass through
Pipeline connects, the outlet of sample steel cylinder (8) is connected with the import of sample steel cylinder air bleeding valve (5), and sample steel cylinder air bleeding valve (5) go out
Mouth is connected with the import of alkali liquor absorption bucket (9) by pipeline, bypasses the outlet of needle valve (6) and the import of alkali liquor absorption bucket (9)
Connected by pipeline.
2. silane exhaust sampling device according to claim 1, it is characterised in that the import of sample steel cylinder intake valve (4)
It is threaded connection with the outlet for being connected silane offgas outlet needle valve (2) and sample steel cylinder intake valve (4) pipeline.
3. silane exhaust sampling device according to claim 1 and 2, it is characterised in that sample steel cylinder air bleeding valve (5) go out
Mouth is threaded connection with the import for being connected sample steel cylinder air bleeding valve (5) and alkali liquor absorption bucket (9) pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122489.0U CN206132451U (en) | 2016-10-14 | 2016-10-14 | Silane tail gas sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122489.0U CN206132451U (en) | 2016-10-14 | 2016-10-14 | Silane tail gas sampling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206132451U true CN206132451U (en) | 2017-04-26 |
Family
ID=58573365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621122489.0U Expired - Fee Related CN206132451U (en) | 2016-10-14 | 2016-10-14 | Silane tail gas sampling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206132451U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106568854A (en) * | 2016-10-14 | 2017-04-19 | 内蒙古神舟硅业有限责任公司 | Method and apparatus for detecting content of silane in polysilicon tail gas |
| CN114062056A (en) * | 2021-10-09 | 2022-02-18 | 中核核电运行管理有限公司 | Sampling device suitable for negative pressure and malleation gas pipeline |
-
2016
- 2016-10-14 CN CN201621122489.0U patent/CN206132451U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106568854A (en) * | 2016-10-14 | 2017-04-19 | 内蒙古神舟硅业有限责任公司 | Method and apparatus for detecting content of silane in polysilicon tail gas |
| CN106568854B (en) * | 2016-10-14 | 2019-05-21 | 内蒙古神舟硅业有限责任公司 | The measuring method and device of silane contents in a kind of polysilicon tail gas |
| CN114062056A (en) * | 2021-10-09 | 2022-02-18 | 中核核电运行管理有限公司 | Sampling device suitable for negative pressure and malleation gas pipeline |
| CN114062056B (en) * | 2021-10-09 | 2024-03-19 | 中核核电运行管理有限公司 | Sampling device suitable for negative pressure and positive pressure gas pipeline |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170426 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |