CN206126317U - Device is got to mask plate holder - Google Patents
Device is got to mask plate holder Download PDFInfo
- Publication number
- CN206126317U CN206126317U CN201621125745.1U CN201621125745U CN206126317U CN 206126317 U CN206126317 U CN 206126317U CN 201621125745 U CN201621125745 U CN 201621125745U CN 206126317 U CN206126317 U CN 206126317U
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- mask plate
- gripping portion
- adsorption section
- absorption panel
- getting
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Abstract
The utility model discloses a device is got to mask plate holder belongs to and shows technical field. This device is got to mask plate holder includes: the first clamp portion of getting, second clamp portion of getting and absorption portion, this first clamp portion of getting is relative with this second clamp portion of getting to be set up for fix the mask plate between this first clamp portion of getting and this second clamp portion of getting, placing at this mask plate and getting a last time at this first clamp, this absorption portion can be close to the one side contact of this first clamp portion of getting with this mask plate to adsorb this mask plate, consequently can improve the mask plate and place the stability of getting a last time at first clamp, make this mask plate take place to remove when avoiding the second clamp portion of getting to compress tightly the mask plate, and then can avoid the mask plate pressing from both sides the extra fold of getting the in -process and producing, guaranteed the stretching effect of mask plate. The utility model is used for press from both sides and get the mask plate.
Description
Technical field
This utility model is related to display technology field, more particularly to a kind of mask plate clamp device.
Background technology
Fine metal mask plate (English：Fine Metal Mask；Referred to as：FMM) it is Organic Light Emitting Diode (English：
Organic Light-Emitting Diode；Referred to as：OLED) in display device manufacture process, send out for the evaporation on substrate
The component of photosphere.Before being deposited with to substrate by the FMM, need to first pass through multiple mask plate clamp devices and grip this respectively
The two ends of FMM, then stretch to the FMM so that the mask pattern on FMM keeps one with figure to be deposited on substrate
Cause.
In correlation technique, with reference to Fig. 1, each mask plate clamp device can include the first gripping portion A for being oppositely arranged and
Second gripping portion B.When FMM is gripped using the plurality of mask plate clamp device, first the FMM can be placed on into each gripping dress
On the end face of the first gripping portion A for putting, then make the second gripping portion B of the plurality of mask plate clamp device simultaneously close and compress
The FMM away from the first gripping portion A one side so that the FMM is fixed between two gripping portions, to carry out to the FMM
Stretching.
But, during the mask plate clamp device in using correlation technique is gripped to FMM, cover to the plurality of
The synchronicity requirement in the second gripping portion of lamina membranacea clamp device is higher, if the second gripping portion of certain mask plate clamp device shifts to an earlier date
It is pressed on FMM, then the FMM may be made to be moved, and then cause FMM during gripping to produce extra fold, after impact
Continuous drawing effect.
Utility model content
Mask plate clamp device in order to solve correlation technique may be so that mask plate be moved when mask plate is gripped
Problem that is dynamic and producing extra fold, this utility model provides a kind of mask plate clamp device.
The mask plate clamp device includes：First gripping portion, the second gripping portion and adsorption section；
The first gripping portion and the second gripping portion are oppositely arranged, for mask plate to be fixed on into first gripping
Between portion and the second gripping portion；
When the mask plate is placed in the first gripping portion, the adsorption section can be with the mask plate near institute
The one side contact in the first gripping portion is stated, and adsorbs the mask plate.
Optionally, the adsorption section is arranged on the side in the first gripping portion, and adsorption plane and the institute of the adsorption section
The end face for stating the first gripping portion is generally aligned in the same plane.
Optionally, the adsorption section is arranged on the first gripping portion near the side of the mask plate.
Optionally, the adsorption section is arranged on the end face in the first gripping portion.
Optionally, the adsorption section includes absorption panel and vacuumizing assembly；
Multiple through holes through the absorption panel are provided with the absorption panel；
The vacuumizing assembly is connected by trachea with the plurality of through hole, when the absorption panel connects with the mask plate
When tactile, the vacuumizing assembly can be by the plurality of through hole, to the space between the absorption panel and the mask plate
Carry out evacuation.
Optionally, the air inlet array arrangement of the plurality of through hole is on the adsorption plane of the absorption panel.
Optionally, at least two through holes share a gas outlet in the plurality of through hole, and the gas outlet is and the gas
The opening of pipe connection.
Optionally, it is provided with layer of silica gel on the adsorption plane of the absorption panel.
Optionally, the adsorption section includes support component, vacuumizing assembly and multiple vacuum slots；
The plurality of vacuum slot is inserted in the support component, and each described vacuum slot and the evacuation group
Part is connected.
Optionally, the adsorption section is electric magnet.
The beneficial effect brought of technical scheme that this utility model is provided is：
This utility model embodiment provides a kind of mask plate clamp device, except the first folder in the mask plate clamp device
Portion and the second gripping portion are taken, also including adsorption section, when mask plate is placed in the first gripping portion, the adsorption section can adsorb to be covered
Lamina membranacea, such that it is able to improve stability when mask plate is placed in the first gripping portion, it is to avoid the second gripping portion compresses mask plate
When make the mask plate be moved, and then the extra fold that mask plate produces during gripping can be avoided, it is ensured that mask
The drawing effect of plate, and then ensure that the evaporation effect of display device.
Description of the drawings
Technical scheme in order to be illustrated more clearly that this utility model embodiment, below will be to needed for embodiment description
The accompanying drawing to be used is briefly described, it should be apparent that, drawings in the following description are only some realities of the present utility model
Example is applied, for those of ordinary skill in the art, on the premise of not paying creative work, can be with according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is a kind of structural representation of mask plate clamp device in correlation technique；
Fig. 2 is a kind of structural representation of mask plate clamp device that this utility model embodiment is provided；
Fig. 3 is the structural representation of another kind of mask plate clamp device that this utility model embodiment is provided；
Fig. 4 is the structural representation of another mask plate clamp device that this utility model embodiment is provided；
Fig. 5 is the structural representation of another mask plate clamp device that this utility model embodiment is provided；
Fig. 6 is a kind of top view of absorption panel that this utility model embodiment is provided；
Fig. 7 is sectional view of the absorption panel shown in Fig. 6 in AA directions；
Fig. 8 is the structural representation of another mask plate clamp device that this utility model embodiment is provided；
Fig. 9 is the structural representation of another mask plate clamp device that this utility model embodiment is provided.
Specific embodiment
It is new to this practicality below in conjunction with accompanying drawing to make the purpose of this utility model, technical scheme and advantage clearer
Type embodiment is described in further detail.
Fig. 2 is a kind of structural representation of mask plate clamp device that this utility model embodiment is provided, as shown in Fig. 2
The mask plate clamp device can include：
First gripping portion 10, the second gripping portion 20 and adsorption section 30.
The first gripping portion 10 and the second gripping portion 20 are oppositely arranged, for mask plate 00 to be fixed on into first gripping
Between portion 10 and the second gripping portion 20.
When the mask plate 00 is placed in the first gripping portion 10, the adsorption section 30 close with the mask plate 00 can be somebody's turn to do
The one side contact in the first gripping portion 10, and adsorb the mask plate 00.
In sum, this utility model embodiment provides a kind of mask plate clamp device, in the mask plate clamp device
Also include adsorption section, when mask plate is placed in the first gripping portion, the adsorption section can adsorb mask plate, improve mask plate
Stability when being placed in the first gripping portion, it is to avoid the second gripping portion makes the mask plate be moved when compressing mask plate, enters
And the extra fold that mask plate produces during gripping can be avoided, it is ensured that the drawing effect of mask plate, and then ensure that
The evaporation effect of display device.
It should be noted that the mask plate clamp device that this utility model embodiment is provided is mainly used in gripping fine metal
Mask plate.
Optionally, as shown in Figures 2 and 3, the adsorption section 30 can be arranged on the side in the first gripping portion 10, and the suction
The adsorption plane in attached portion 30 is generally aligned in the same plane with the end face in the first gripping portion 10.For example in Fig. 2, adsorption section 30 is arranged on first
The left side in first gripping portion 10 in the side of mask plate 00, i.e. Fig. 2 of gripping portion 10；Or, as shown in figure 3, adsorption section 30
Side of the first gripping portion 10 away from mask plate, the i.e. right side in the first gripping portion 10 in Fig. 3 can also be arranged on.
Preferably, with reference to Fig. 2, the adsorption section 30 can be arranged on the first gripping portion 10 near the one of the mask plate 00
Side；So that when the second gripping portion 20 is pressed on the end of mask plate 00, the adsorption section 30 can have to the mask plate
What is imitated pre-fixes, it is to avoid the poor impact caused to the mask plate of the second gripping portion synchronicity in each clamp device.
On the other hand, as shown in figure 4, the adsorption section 30 can also be arranged on the end face in the first gripping portion 10.That is to say,
When mask plate is placed, directly the mask plate can be placed on the end face of the adsorption section 30 (i.e. adsorption plane).
In a kind of optional implementation of this utility model, as shown in figure 5, the adsorption section can include absorption panel
301 and vacuumizing assembly 302.
Wherein, multiple through hole a through the absorption panel 301 are provided with the absorption panel 301；The vacuumizing assembly
302 are connected by trachea b with the plurality of through hole a, when the absorption panel 301 is contacted with the mask plate, the vacuumizing assembly 302
Evacuation can be carried out, so as to this be covered to the space between the absorption panel 301 and the mask plate by the plurality of through hole a
Lamina membranacea adsorbs on the absorption panel 301.
Fig. 6 is a kind of top view of absorption panel that this utility model embodiment is provided, from fig. 6 it can be seen that this is more
The air inlet of individual through hole a can be with array arrangement on the adsorption plane of the absorption panel 301, to ensure the suction suffered by the mask plate
Attached power is equally distributed.
Fig. 7 is sectional view of the absorption panel shown in Fig. 6 in AA directions, it can be seen from figure 7 that in the plurality of through hole a
At least two through holes can share a gas outlet, and the gas outlet is the opening being connected with the trachea.Because each gas outlet needs
To be connected with vacuumizing assembly by a trachea, therefore allow multiple through holes to share a gas outlet and reduce institute in adsorption section
The quantity of the trachea that need to be used, reduces the cost and volume of the mask plate clamp device.
Optionally, layer of silica gel can be provided with the adsorption plane of the absorption panel 301, i.e., the adsorption plane can be by silica gel material
Material is made, and because silica gel has certain elasticity, can strengthen the effect of vac sorb.
Used as another kind of optional implementation of this utility model, with reference to Fig. 8, the adsorption section can also include support component
303rd, vacuumizing assembly 302 and multiple vacuum slots 304.The plurality of vacuum slot 304 is inserted in the support component 303, and
Each vacuum slot 304 is connected with the vacuumizing assembly 302.Example, as shown in figure 8, the plurality of vacuum slot 304 can be
Array arrangement in the support component 303, to ensure that mask plate being capable of uniform stressed.Also, each vacuum slot 304 can pass through
Trachea b is connected with vacuumizing assembly 302, the vacuumizing assembly 302 can by trachea b to vacuum slot 304 and mask plate it
Between space carry out evacuation.
Another optional implementation as this utility model, the adsorption section in the mask plate clamp device can also be
Electric magnet, the electric magnet has in the energized state magnetic, can adsorb fine metal mask plate；Magnetic during the electric magnet power-off
Disappear, the absorption affinity to the fine metal mask plate can be released.
By taking the mask plate clamp device shown in Fig. 5 as an example, the mask plate clamp device for implementing to provide to this utility model
Using method is illustrated.With reference to Fig. 9, in actual applications, two can be symmetrical arranged in the both sides of mask plate 00 to be gripped
Group mask plate clamp device.Before gripping mask plate, can first to the flatness of the first gripping portion (not shown in Fig. 9) end face
It is adjusted.Specifically, as shown in figure 5, one end that the first gripping portion 10 is used to carry mask plate is provided with detachable part
101, can by adjust in the lower surface place mat tinfoil of the detachable part 101 upper surface of detachable part 101 (i.e. this first
The end face in gripping portion 10) flatness so that this first gripping end surface flatness be maintained within ± 10 microns.Additionally,
It can also be seen that one end that the second gripping portion 20 is used to compress mask plate is also equipped with detachable part 201 from Fig. 5, therefore
Can adjust detachable in the flatness of the end face of the second gripping portion 20, and two gripping portions by the detachable part 201
Portion can be connected respectively by connector with the main body in gripping portion.
The two ends of mask plate 00 can be individually positioned in each clamp device on the end face in the first gripping portion afterwards so that
The side contacts of adsorption section 30 and the mask plate 00 near the first gripping portion 10.Then using vacuumizing assembly 302 to adsorption plane
Air between plate 301 and mask plate carries out evacuation, and (vacuumizing assembly in each mask plate clamp device is uniformly controlled, can
To reach good synchronicity), so as on the absorption panel by mask plate absorption in each clamp device.By adsorption section 30
After mask plate 00 is pre-fixed, you can make the second gripping portion 20 of the plurality of clamp device in the driving of motor or pneumatic means
Under, synchronously decline and be pressed on the upper surface (i.e. away from the one side in the first gripping portion) of the mask plate 00.Due to the mask plate 00
Front end pass through vac sorb and fix, basic tight between the adsorption plane of mask plate 00 and absorption panel, so second
During gripping portion 20 declines compression, the impact to mask plate 00 reduces a lot, and the mask plate can be avoided to be moved.The
After two gripping portions 20 compress completely, you can make vacuumizing assembly discharge vacuum, now absorption affinity solution of the adsorption section to the mask plate
Remove, complete gripping operation.
It should be noted that in this utility model embodiment, the adsorption section can by connector (such as bolt) with
The first gripping portion is detachably connected.Or, the adsorption section can with the relatively independent setting in the first gripping portion, the now suction
Attached portion can be supported by support platform or support member, as long as ensureing adsorption plane and the first gripping portion of the adsorption section
End face is generally aligned in the same plane.This utility model embodiment to the annexation between the adsorption section and the first gripping portion not
Limit.
In sum, this utility model embodiment provides a kind of mask plate clamp device, in the mask plate clamp device
Also include adsorption section, when mask plate is placed in the first gripping portion, the adsorption section can adsorb mask plate, improve mask plate
Stability when being placed in the first gripping portion, it is to avoid the second gripping portion makes the mask plate be moved when compressing mask plate, enters
And the extra fold that mask plate produces during gripping can be avoided, it is ensured that the drawing effect of mask plate, and then ensure that
The evaporation effect of display device.
Preferred embodiment of the present utility model is the foregoing is only, it is all in this practicality not to limit this utility model
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (10)
1. a kind of mask plate clamp device, it is characterised in that described device includes：
First gripping portion, the second gripping portion and adsorption section；
The first gripping portion and the second gripping portion are oppositely arranged, for by mask plate be fixed on the first gripping portion and
Between the second gripping portion；
When the mask plate is placed in the first gripping portion, the adsorption section can be with the mask plate near described
The one side contact in one gripping portion, and adsorb the mask plate.
2. device according to claim 1, it is characterised in that
The adsorption section is arranged on the side in the first gripping portion, and the adsorption plane of the adsorption section and the first gripping portion
End face be generally aligned in the same plane.
3. device according to claim 2, it is characterised in that
The adsorption section is arranged on the first gripping portion near the side of the mask plate.
4. device according to claim 1, it is characterised in that
The adsorption section is arranged on the end face in the first gripping portion.
5. according to the arbitrary described device of Claims 1-4, it is characterised in that the adsorption section includes absorption panel and takes out true
Empty component；
Multiple through holes through the absorption panel are provided with the absorption panel；
The vacuumizing assembly is connected by trachea with the plurality of through hole, when the absorption panel is contacted with the mask plate
When, the vacuumizing assembly can be entered by the plurality of through hole to the space between the absorption panel and the mask plate
Row evacuation.
6. device according to claim 5, it is characterised in that
The air inlet array arrangement of the plurality of through hole is on the adsorption plane of the absorption panel.
7. device according to claim 5, it is characterised in that
At least two through holes share a gas outlet in the plurality of through hole, and the gas outlet is and opening that the trachea is connected
Mouthful.
8. device according to claim 5, it is characterised in that
Layer of silica gel is provided with the adsorption plane of the absorption panel.
9. according to the arbitrary described device of Claims 1-4, it is characterised in that the adsorption section includes support component, evacuation
Component and multiple vacuum slots；
The plurality of vacuum slot is inserted in the support component, and each described vacuum slot connects with the vacuumizing assembly
It is logical.
10. according to the arbitrary described device of Claims 1-4, it is characterised in that
The adsorption section is electric magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621125745.1U CN206126317U (en) | 2016-10-14 | 2016-10-14 | Device is got to mask plate holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621125745.1U CN206126317U (en) | 2016-10-14 | 2016-10-14 | Device is got to mask plate holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206126317U true CN206126317U (en) | 2017-04-26 |
Family
ID=58574192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621125745.1U Active CN206126317U (en) | 2016-10-14 | 2016-10-14 | Device is got to mask plate holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206126317U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018223782A1 (en) * | 2017-06-09 | 2018-12-13 | 京东方科技集团股份有限公司 | Tensioning device, pedestal, clamp and method for clamping mask |
-
2016
- 2016-10-14 CN CN201621125745.1U patent/CN206126317U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018223782A1 (en) * | 2017-06-09 | 2018-12-13 | 京东方科技集团股份有限公司 | Tensioning device, pedestal, clamp and method for clamping mask |
| US11535925B2 (en) * | 2017-06-09 | 2022-12-27 | Beijing Boe Technology Development Co., Ltd. | Tensioning device, base, clamp and method for clamping mask plate |
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| GR01 | Patent grant |