CN206114928U - Terahertz is super material waveguide and device now - Google Patents
Terahertz is super material waveguide and device now Download PDFInfo
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- CN206114928U CN206114928U CN201621101068.XU CN201621101068U CN206114928U CN 206114928 U CN206114928 U CN 206114928U CN 201621101068 U CN201621101068 U CN 201621101068U CN 206114928 U CN206114928 U CN 206114928U
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- terahertz
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Abstract
The utility model relates to a terahertz wave leads technical field, provides a terahertz is super material waveguide and device now, terahertz super material waveguide now includes inferior wavelength stratum basale and metal level, has plated on a surface of inferior wavelength stratum basale the metal level, it is periodic a plurality of micropores of arranging to open on the metal level to have. The utility model discloses an adopt inferior wavelength stratum basale to plating to open to have on a surface of inferior wavelength stratum basale and being the periodic a plurality of mipor metal level of arranging, thickness of can greatly reduced terahertz wave leading and the terahertz wave's who transmits in terahertz wave leads transmission loss has practiced thrift manufacturing cost.
Description
Technical field
This utility model embodiment belongs to terahertz waveguide technical field, more particularly to a kind of waveguide of Terahertz Meta Materials and
Device.
Background technology
Terahertz waveguide is Terahertz system and the critical component in device, in the remote energy transmission of Terahertz, biology
All there is important function in chemical sensor and Terahertz integrated device application.
However, existing THz wave guide structure generally needs thicker thickness to meet the transmission need of THz wave
Ask, cause the loss of THz wave higher and increased manufacturing cost.
Utility model content
The purpose of this utility model is to provide a kind of waveguide of Terahertz Meta Materials and device, it is intended to solve existing terahertz
Hereby waveguiding structure generally needs thicker thickness to meet the transmission demand of THz wave, causes the loss of THz wave
Problem that is higher and increased manufacturing cost.
This utility model is achieved in that a kind of Terahertz Meta Materials waveguide, and the waveguide of Terahertz Meta Materials includes sub- ripple
Long basal layer and metal level a, plated surface of the sub-wavelength basal layer has the metal level, is provided with the metal level and is in
Multiple micropores of periodic arrangement.
Preferably, the plurality of micropore rectangular array arrangement or arranged in regular hexagon shape.
Preferably, the structural cycle scope of the plurality of micropore is 50 μm～100 μm, and the pore diameter range of the micropore is 40
μm～75 μm.
Preferably, the micropore is circular hole or regular polygon hole.
Preferably, the thickness range of the sub-wavelength basal layer is 12 μm～100 μm.
Preferably, the material for preparing of the sub-wavelength basal layer is mylar, Teflon, silicon or germanium.
Preferably, the material for preparing of the metal level is gold, silver, aluminum or copper.
This utility model also provides a kind of THz devices, including above-mentioned Terahertz Meta Materials waveguide.
Compared with prior art, its advantage is this utility model：
By using sub-wavelength basal layer, and it is provided with periodic arrangement on a plated surface of sub-wavelength basal layer
The metal level of multiple micropores, the thickness that terahertz waveguide can be substantially reduced and the THz wave transmitted in terahertz waveguide
Loss, has saved manufacturing cost.
Description of the drawings
Technical scheme in order to be illustrated more clearly that this utility model embodiment, below will be to needed for embodiment description
The accompanying drawing to be used is briefly described, it should be apparent that, drawings in the following description are some embodiments of the present utility model,
For those of ordinary skill in the art, on the premise of not paying creative work, can be with according to these accompanying drawings acquisitions
Other accompanying drawings.
Fig. 1 is the dimensional structure diagram of the Terahertz Meta Materials waveguide that this utility model embodiment is provided；
Fig. 2 is the structural representation of the metal level that one embodiment of the present utility model is provided；
Fig. 3 is the structural representation of the metal level that one embodiment of the present utility model is provided；
Fig. 4 is the structural representation of the metal level that one embodiment of the present utility model is provided；
Fig. 5 is the side view of the Terahertz Meta Materials waveguide that this utility model embodiment is provided；
Fig. 6 is the THz wave transmission spectrum analogous diagram of the Terahertz Meta Materials waveguide that this utility model embodiment is provided.
Specific embodiment
In order that those skilled in the art more fully understand this utility model scheme, below in conjunction with this utility model reality
The accompanying drawing in example is applied, the technical scheme in this utility model embodiment is explicitly described, it is clear that described embodiment
It is the embodiment of this utility model part, rather than the embodiment of whole.Based on the embodiment in this utility model, this area
The every other embodiment that those of ordinary skill is obtained under the premise of creative work is not made, should all belong to this practicality
Novel protected scope.
Term " including " and their any changes in specification and claims of the present utility model and above-mentioned accompanying drawing
Shape, it is intended that cover non-exclusive including.
As shown in figure 1, the present embodiment provides a kind of Terahertz Meta Materials waveguide, it includes sub-wavelength basal layer 10 and metal
Layer 20, a surface of sub-wavelength basal layer 10 is coated with metal level 20, is provided with metal level 20 multiple micro- in periodic arrangement
Hole 21.
In a particular application, a surface of sub-wavelength basal layer refers in two maximum surfaces of its area
It is individual.
In a particular application, the arrangement of the rectangular array of multiple micropores 21 or arranged in regular hexagon shape, micropore is specifically as follows circle
The hole in hole, regular polygon hole or other regular shapes, can be arranged according to actual needs.In Fig. 1, micropore 21 is rectangular battle array
The circular hole of row arrangement.
The structural cycle scope of multiple micropores 21 is 50 μm～100 μm, and pore diameter range is 40 μm～75 μm.
In one embodiment, micropore 21 is square hole, and its structural cycle is 50 μm, and aperture is 40 μm.
In one embodiment, micropore 21 is square hole, and its structural cycle is 100 μm, and aperture is 75 μm.
In one embodiment, micropore 21 is square hole, and its structural cycle is 150 μm, and aperture is 100 μm.
In a particular application, the length of side and structural cycle of micropore can be arranged according to actual needs, the size and knot of micropore
The structure cycle can require to be adjusted according to the cut-off frequency of the basic mode of Terahertz Meta Materials waveguide.In the present embodiment, from knot
The square hole that the structure cycle is 150 μm, aperture is 100 μm.
As shown in Fig. 2 the metal of the square hole for being provided with rectangular array arrangement provided for this utility model one embodiment
The structural representation of layer.P is the structural cycle of micropore 21 in Fig. 2, and a is the aperture of micropore 21.
As shown in figure 3, the regular hexagon hole for being provided with rectangular array arrangement provided for this utility model one embodiment
Metal level structural representation.
As shown in figure 4, the metal for being provided with the circular hole in arranged in regular hexagon shape provided for this utility model one embodiment
The structural representation of layer.
In a particular application, sub-wavelength basal layer prepare material can from mylar, Teflon, silicon or germanium,
Can be other sub-wavelength materials.In the present embodiment, sub-wavelength basal layer prepares material selection mylar, and it is in Terahertz
The refractive index of frequency range is～1.6 (about 1.6).
In a particular application, the thickness range of sub-wavelength basal layer can be 12 μm～100 μm, it is also possible to according to actual need
Select other thickness.The thickness for changing sub-wavelength basal layer will change the transmission characteristic of Terahertz Meta Materials waveguide.This enforcement
In example, the thickness of sub-wavelength basal layer is specifically as follows 12 μm, 36 μm or 50 μm.
In a particular application, the thickness of metal level can be arranged according to actual needs, and the thickness of metal level is different will to be changed
The transmission characteristic of Terahertz Meta Materials waveguide.In the present embodiment, the thickness of metal level is 200nm.
As shown in figure 5, the side view of the Terahertz Meta Materials waveguide provided for this utility model one embodiment.T in Fig. 5
The thickness of sub-wavelength basal layer is represented, d represents the thickness of metal level.
In a particular application, the material for preparing of metal level can be from gold, silver, aluminum or copper, or other metals.This
In embodiment, metal level prepare material selection silver.
In a particular application, micropore can be formed by photoetching process, chemical etching method or laser cutting parameter.
In a particular application, metal level can pass through a table of the thermal evaporation deposition method plating located at the sub-wavelength basal layer
Face.
In one embodiment, the preparation method of Terahertz Meta Materials waveguide is specially：By photoetching process in metal material
Upper etching micropore, by metal level mask is made, then metal level is plated in one of sub-wavelength basal layer by thermal evaporation deposition method
Surface.
In a particular application, the size of single Terahertz Meta Materials waveguide can need to be configured according to practical application.
In the present embodiment, the length of Terahertz Meta Materials waveguide is 40mm, and width is 6mm.
Shown in Fig. 6, for provided using this utility model embodiment Terahertz Meta Materials waveguide THz wave when, institute
The transmission characteristic analogous diagram of the THz wave for obtaining.Wherein, transverse axis represents the frequency (Frequency) of THz wave, and unit is
THz；The longitudinal axis represents the amplitude (Amplitude) of THz wave, and unit can be expressed as arb.unit with self-defined in figure；Curve
The transmission characteristic that A, B and C are respectively THz wave corresponding when the thickness of sub-wavelength basal layer is 12 μm, 36 μm and 50 μm is bent
Line.
In Fig. 6, when the thickness of sub-wavelength basal layer is 12 μm, corresponding THz wave transfer curve is in 1.0THz
There is obvious forbidden band at place, is determined by the Brillouin zone border of metal level, and cut-off frequency is 300 μm (1.0THz).It is less than
The THz wave of 1.0THz frequencies is the TEM basic modes of the structures shape by metal level, and is more than the THz wave of 1.0THz frequencies
It is the high-order TM1 patterns of the structures shape by whole Terahertz Meta Materials waveguide.
In the same manner, in Fig. 6, when the thickness of sub-wavelength basal layer is 36 μm or 50 μm, corresponding THz wave transmission characteristic
The cut-off frequency of curve remains as 1.0THz.
It should be noted that when the thickness of sub-wavelength basal layer is 36 μm or 50 μm, corresponding THz wave transmission characteristic
High-order mode in curve without frequency more than 1.0THz, is primarily due to thickening for Mylar material and enhances absorption damage
Consumption.Meanwhile, TEM moulds (transverse electromagnetic mode, transverse electromagnetic mode) have been divided into two wave bands,
Occur in that respectively less than 1.0THz by frequency, this reason surpasses mainly due to the thickness adjusted Terahertz of Mylar material
The effective refractive index of material waveguide.
The Terahertz Meta Materials waveguide that this utility model embodiment is provided, can pass through to change the structure of metal level, sub- ripple
The material and thickness of long basal layer is adjusting the transmission characteristic such as frequency, bandwidth, dispersion of THz wave；Metal level and sub-wavelength base
The thickness of thin of bottom, can effectively reduce the thickness of terahertz waveguide and the loss of THz wave, save manufacturing cost；
The waveguide of Terahertz Meta Materials can be prepared by metal film coating method, it is easy to be processed.
This utility model embodiment also provides a kind of THz devices, including above-mentioned Terahertz Meta Materials waveguide.
In a particular application, THz devices can be specifically Terahertz energy transmission class device, chemical biosensor,
Chip etc. on Terahertz two-dimensional slice.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit this utility model
Any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in this utility model
Protection domain within.
Claims (8)
1. a kind of Terahertz Meta Materials waveguide, it is characterised in that Terahertz Meta Materials waveguide include sub-wavelength basal layer and
Metal level a, plated surface of the sub-wavelength basal layer has the metal level, is provided with periodic arrangement on the metal level
Multiple micropores.
2. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the plurality of micropore rectangular array arrangement
Or arranged in regular hexagon shape.
3. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the structural cycle scope of the plurality of micropore
For 50 μm～100 μm, the pore diameter range of the micropore is 40 μm～75 μm.
4. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the micropore is circular hole or regular polygon
Hole.
5. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the thickness range of the sub-wavelength basal layer
For 12 μm～100 μm.
6. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the sub-wavelength basal layer prepares material
For mylar, Teflon, silicon or germanium.
7. Terahertz Meta Materials waveguide as claimed in claim 1, it is characterised in that the metal level prepare material for gold,
Silver, aluminum or copper.
8. a kind of THz devices, it is characterised in that include the Terahertz Meta Materials ripple as described in any one of claim 1～7
Lead.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201621101068.XU CN206114928U (en) | 2016-09-30 | 2016-09-30 | Terahertz is super material waveguide and device now |
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| CN201621101068.XU CN206114928U (en) | 2016-09-30 | 2016-09-30 | Terahertz is super material waveguide and device now |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018058802A1 (en) * | 2016-09-30 | 2018-04-05 | 深圳市太赫兹系统设备有限公司 | Terahertz metamaterial waveguide and device |
| CN110109198A (en) * | 2019-05-22 | 2019-08-09 | 清华大学 | A kind of metamaterial and its entangled photon pairs generation system of graded index |
| CN113237846A (en) * | 2021-05-06 | 2021-08-10 | 南京大学 | Preparation of pixilated terahertz spectrum sensing chip and preparation method thereof |
-
2016
- 2016-09-30 CN CN201621101068.XU patent/CN206114928U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018058802A1 (en) * | 2016-09-30 | 2018-04-05 | 深圳市太赫兹系统设备有限公司 | Terahertz metamaterial waveguide and device |
| US11275198B2 (en) | 2016-09-30 | 2022-03-15 | Shenzhen Terahertz System Equipment Co., Ltd. | Terahertz metamaterial waveguide and device |
| CN110109198A (en) * | 2019-05-22 | 2019-08-09 | 清华大学 | A kind of metamaterial and its entangled photon pairs generation system of graded index |
| CN113237846A (en) * | 2021-05-06 | 2021-08-10 | 南京大学 | Preparation of pixilated terahertz spectrum sensing chip and preparation method thereof |
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