CN206089057U - A central vacuum system for having more platform polycrystalline silicon stove - Google Patents
A central vacuum system for having more platform polycrystalline silicon stove Download PDFInfo
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- CN206089057U CN206089057U CN201620825586.XU CN201620825586U CN206089057U CN 206089057 U CN206089057 U CN 206089057U CN 201620825586 U CN201620825586 U CN 201620825586U CN 206089057 U CN206089057 U CN 206089057U
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- vacuum
- polycrystalline
- slide valve
- pump
- subsystem
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 86
- 238000006243 chemical reaction Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 238000004134 energy conservation Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model provides a central vacuum system for having more platform polycrystalline silicon stove especially relates to the mixed vacuum system of central authorities who is used for many polycrystalline silicon stoves, central authorities mix vacuum system and include high vacuum subsystem and low vacuum subsystem, the high vacuum subsystem includes high vacuum pipeline and at least two sets of parallelly connected joint pump packages, lobe pump and the 1# slide valve pump of joint pump package for establishing ties, the low vacuum subsystem includes black vacuum pipeline and two at least parallelly connected 2# slide valve pumps, every two branch roads of all installing the valve are told to the polycrystalline silicon stove, are used for respectively connecting the high vacuum subsystem with the low vacuum subsystem. Furthermore, the utility model also provides a central high vacuum system that is used for the central authorities of four polycrystalline silicon stoves to mix the low vacuum system of central authorities and one kind that vacuum system, one kind be used for many polycrystalline silicon stoves and is used for many polycrystalline silicon stoves to provide corresponding vacuum requirement for all polycrystalline silicon stoves that put into operation into operation.
Description
Technical field
The utility model is related to the vacuum system control technology field of multiple stage polycrystalline-silicon furnace, more particularly to a kind of for multiple stage
The central vacuum system of polycrystalline-silicon furnace, specifically a kind of central mixing vacuum system, Yi Zhongyong for multiple stage polycrystalline-silicon furnace
Central mixing vacuum system, a kind of central low vacuum system and one kind for multiple stage polycrystalline-silicon furnace in four polycrystalline-silicon furnaces
For the central high-vacuum system of multiple stage polycrystalline-silicon furnace, will so as to provide corresponding vacuum for all polycrystalline-silicon furnaces for putting into operation
Ask.
Background technology
Polycrystalline-silicon furnace vacuum system in the market use a set of vavuum pump drag a set of polycrystalline-silicon furnace " one drags
One " vacuum application, this mode is in early days normal, itself and early stage in the solar energy polycrystalline silicon production as emerging industry
The warming stove of single household, the window air conditioner in one room in a room are all a concepts.But with industry development and city
Field competition, each problem produced by one-to-one pattern gradually manifests：
1st, integrity problem：When operation or maintenance issues occurs in any vavuum pump, the use of the stove will be interrupted；
2nd, do not concentrate common source, in overall system reliability and it is non-optimal in the case of, equipment gross investment is excessive, and
And operation costs are also too high；
3rd, vavuum pump sum is more so that maintenance work amount is big, big to Influence of production.
Utility model content
The purpose of this utility model is to provide a kind of central vacuum system for multiple stage polycrystalline-silicon furnace, solves existing system
Vacuum application problem when a set of vavuum pump drags the consumption energy consumption of a set of polycrystalline-silicon furnace in system.
In order to realize object above, the utility model is employed the following technical solutions：In a kind of polycrystalline-silicon furnace for multiple stage
Centre mixing vacuum system, the central mixing vacuum system includes high vacuum subsystem and low vacuum subsystem；The high vacuum
Subsystem includes high vacuum pipe and at least two groups joint pump groups in parallel, and the joint pump group is that the lobe pump and 1# of series connection are slided
Valve pump；The low vacuum subsystem includes the 2# slide valve pumps of black vacuum pipeline and at least two parallel connections；Per polycrystalline-silicon furnace described in platform
Separate two and install valvular branch road, be respectively used to connect the high vacuum subsystem and the low vacuum subsystem.
The valve is preferably pneumatic ball valve.
Wherein, the multiple stage polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces, because above-mentioned technical proposal is being applied to 2-6 platforms
During polycrystalline-silicon furnace, energy-saving effect is optimum.
In view of the optimum optimization situation of equipment, the 2# slide valve pumps and the high vacuum in the low vacuum subsystem
The 1# slide valve pumps in subsystem share a slide valve pump, by slide valve pump described in the control realization of triple valve in the Gao Zhen
Conversion in vacant duct and the black vacuum pipeline.This technical characteristic so that total configuration number of slide valve pump is greatly reduced, and enters one
Reduce equipment investment fund to step.
Preferably, at least one 2# slide valve pumps individualism in the low vacuum subsystem, i.e., at least one institute
State 2# slide valve pumps to be only connected with the black vacuum pipeline and be not connected with the high vacuum pipe by the triple valve.
The utility model provide in particular a kind of central mixing vacuum system for being used for four polycrystalline-silicon furnaces, the central authorities
Mixing vacuum system includes high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem is including high vacuum pipe and extremely
Few two groups of joint pump groups in parallel, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；The low vacuum subsystem bag
The 2# slide valve pumps of black vacuum pipeline and at least two parallel connections are included, the 2# slide valve pumps of wherein at least 1 are common with the 1# slide valve pumps
With a slide valve pump；Two are separated per polycrystalline-silicon furnace described in platform and install valvular branch road, be respectively used to connect the Gao Zhen
Subsystem and the low vacuum subsystem.
Further, a kind of central mixing vacuum system for being used for four polycrystalline-silicon furnaces, the central mixing vacuum system
Including high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem includes high vacuum pipe and two groups of joints in parallel
Pump group, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；The low vacuum subsystem includes black vacuum pipeline and three
Platform 2# slide valve pumps in parallel, wherein 2 2# slide valve pumps share a slide valve pump with the 1# slide valve pumps；Per polycrystalline described in platform
Silicon stove separates two branch roads for being equiped with pneumatic ball valve, is respectively used to connect the high vacuum subsystem and low vacuum
System.
Further, when the 2# slide valve pumps and the 1# slide valve pumps share a slide valve pump, the high vacuum pipe with
The tie point that converges of the black vacuum pipeline is equiped with triple valve.
Certainly, above-mentioned technical proposal is that high vacuum and low vacuum system are integrated in a center system, in fact,
As needed, two systems can be directly split as, specifically：
A kind of central low vacuum system for multiple stage polycrystalline-silicon furnace, the central low vacuum system includes black vacuum pipeline
The 2# slide valve pumps of at least two parallel connections；Connect the black vacuum pipeline respectively per polycrystalline-silicon furnace described in platform, and in connection punishment
Valve is not equiped with it.
Further, the multiple stage polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces.
A kind of central high-vacuum system for multiple stage polycrystalline-silicon furnace, the central high-vacuum system includes high vacuum pipe
At least two groups joint pump groups in parallel, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；Per polysilicon described in platform
Stove connects respectively the high vacuum pipe, and is equiped with valve respectively in junction.
Further, the multiple stage polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces.
Wherein, valve described above can be pneumatic ball valve.
Wherein, the slide valve pump can be ET150 slide valve pumps；The lobe pump can be EMBD540 lobe pumps.
According to preferred embodiment of the present utility model, central vacuum system described in the utility model is also including PLC controls
Cabinet, it possesses can automatically select very with the start and stop of all devices in full automation control central vacuum system and according to vacuum
Operation quantity of empty acquisition equipment etc. meets the function of actual production demand.
Above-mentioned central vacuum system instead of the technology that tradition distinguishes matched with vacuum system to every polycrystalline-silicon furnace, its bag
Include slide valve pump, lobe pump, valve, pipeline etc., wherein lobe pump and slide valve pump is the equipment for ensureing vacuum acquirement, valve, pipeline
Deng separation and switching for low vacuum and high vacuum.
Above-mentioned all central vacuum systems for multiple stage polycrystalline-silicon furnace described in the utility model are true using a set of central authorities
Empty set system provides corresponding vacuum requirement for all polycrystalline-silicon furnaces for putting into operation, compares supporting true to every polycrystalline-silicon furnace difference
The technology of empty set system, the utility model has advantages below：
1st, reliability is high, and during using central vacuum system, all pumping equipments have backup, and any failure is all
The stove in normal production is not interfered with, the stopping production caused by pumping equipment failure is effectively prevent；
2nd, application cost is low, and the polycrystalline-silicon furnace entrained by central vacuum system is more, and the energy-conservation for being embodied is more obvious, with one
Drag as a example by four, about just can reach 90% with energy-conservation 70%, the especially energy-saving effect of only central low vacuum circuit；
3rd, maintenance workload is low, during using central vacuum system because the total quantity of vavuum pump reduce and employ can
With the pipeline lobe pump of convenient and swift replacing, the workload of vavuum pump maintenance is greatly reduced.
Description of the drawings
A kind of Fig. 1 one embodiment for the central mixing vacuum system for being used for four polycrystalline-silicon furnaces described in the utility model
Structure conspectus；
Fig. 2 is a kind of one embodiment of central low vacuum system for multiple stage polycrystalline-silicon furnace described in the utility model
Structure conspectus；
Fig. 3 is a kind of one embodiment of central high-vacuum system for multiple stage polycrystalline-silicon furnace described in the utility model
Structure conspectus.
Wherein, 1- high vacuum pipes, 2- joint pump groups, 21- lobe pumps, 22-1# slide valve pumps, 3- black vacuum pipelines, 4-2#
Slide valve pump, 5- polycrystalline-silicon furnaces, 6- pneumatic ball valves, 7- triple valves.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is a part of embodiment of the utility model, rather than the embodiment of whole.Based on the embodiment in the utility model, this
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
In description of the present utility model, it should be noted that term " " center ", " on ", D score, "left", "right", " perpendicular
Directly ", the orientation or position relationship of the instruction such as " level ", " interior ", " outward " is, based on orientation shown in the drawings or position relationship, to be only
For the ease of describe the utility model and simplify description, rather than indicate or imply indication device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.Additionally, term " 1# ",
" 2# " is only used for describing purpose, and it is not intended that indicating or implying relative importance.
In description of the present utility model, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or integratedly
Connection；Can be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in the utility model.
A kind of Fig. 1 one embodiment for the central mixing vacuum system for being used for four polycrystalline-silicon furnaces described in the utility model
Structure conspectus；Fig. 2 is a kind of central low vacuum system for multiple stage polycrystalline-silicon furnace described in the utility model
The structure conspectus of one embodiment；Fig. 3 is that a kind of central authorities for multiple stage polycrystalline-silicon furnace described in the utility model are high
The structure conspectus of one embodiment of vacuum system.
Reference picture 1-3, the utility model provides a kind of central mixing vacuum system for multiple stage polycrystalline-silicon furnace, described
Central mixing vacuum system includes high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem includes high vacuum pipe
1 and at least two groups joint pump groups 2 in parallel, the joint pump group 2 for series connection lobe pump 21 and 1# slide valve pumps 22；It is described low true
Subsystem includes the 2# slide valve pumps 4 of black vacuum pipeline 3 and at least two parallel connections；Two are separated per polycrystalline-silicon furnace described in platform 5
The branch road of valve 6 is equiped with, is respectively used to connect the high vacuum subsystem and the low vacuum subsystem.
The valve 6 is preferably pneumatic ball valve, using pneumatic ball valve according to the high low vacuum of needs of production free switching.
Wherein, the joint pump group adopts large-scale Roots's guiding valve unit.
The 2# slide valve pumps adopt the slide valve pump of big rate of air sucked in required.
Wherein, the multiple stage polycrystalline-silicon furnace 5 refers to 2-6 platform polycrystalline-silicon furnaces, because above-mentioned technical proposal is being applied to 2-6 platforms
During polycrystalline-silicon furnace, energy-saving effect is optimum.
In view of the optimum optimization situation of equipment, the 2# slide valve pumps 4 and the Gao Zhen in the low vacuum subsystem
The 1# slide valve pumps 22 in subsystem share a slide valve pump, by slide valve pump described in the control realization of triple valve 7 in institute
State the conversion in high vacuum pipe 1 and the black vacuum pipeline 3.This technical characteristic so that total configuration number of slide valve pump is significantly
Reduce, further reduce equipment investment fund.
Preferably, at least one individualism of 2# slide valve pumps 4 in the low vacuum subsystem, i.e., at least one institute
State 2# slide valve pumps 4 to be only connected with the black vacuum pipeline 3 and be not connected with the high vacuum pipe 1 by the triple valve 7.
The utility model provide in particular a kind of central mixing vacuum system for being used for four polycrystalline-silicon furnaces, the central authorities
Mixing vacuum system includes high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem includes the He of high vacuum pipe 1
At least two groups joint pump groups 2 in parallel, the joint pump group 2 is the lobe pump 21 and 1# slide valve pumps 22 of series connection；The low vacuum
Subsystem includes the 2# slide valve pumps 4 of black vacuum pipeline 3 and at least two parallel connections, the 2# slide valve pumps 4 of wherein at least 1 with it is described
1# slide valve pumps 22 share a slide valve pump；Two branch roads for being equiped with valve 6 are separated per polycrystalline-silicon furnace described in platform 5, is used respectively
In the connection high vacuum subsystem and the low vacuum subsystem.
Further, a kind of central mixing vacuum system for being used for four polycrystalline-silicon furnaces, the central mixing vacuum system
Including high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem includes high vacuum pipe 1 and two groups of connection in parallel
Pump group 2 is closed, the joint pump group 2 is the lobe pump 21 and 1# slide valve pumps 22 of series connection；The low vacuum subsystem includes black vacuum
Pipeline 3 and the 2# slide valve pumps 4 of three parallel connections, wherein 2 2# slide valve pumps 4 share a guiding valve with the 1# slide valve pumps 22
Pump；Two branch roads for being equiped with pneumatic ball valve 6 are separated per polycrystalline-silicon furnace described in platform 5, is respectively used to connect high vacuum
System and the low vacuum subsystem.
Further, when the 2# slide valve pumps and the 1# slide valve pumps share a slide valve pump, the high vacuum pipe with
The tie point that converges of the black vacuum pipeline is equiped with triple valve 7.
Certainly, above-mentioned technical proposal is that high vacuum and low vacuum system are integrated in a center system, in fact,
As needed, two systems can be directly split as, specifically：
A kind of central low vacuum system for multiple stage polycrystalline-silicon furnace, the central low vacuum system includes black vacuum pipeline
3 and the 2# slide valve pumps 4 of at least two parallel connections；Connect the black vacuum pipeline 3 respectively per polycrystalline-silicon furnace described in platform 5, and in connection
Place is equiped with respectively valve 6.
Further, the multiple stage polycrystalline-silicon furnace 5 refers to 2-6 platform polycrystalline-silicon furnaces.
A kind of central high-vacuum system for multiple stage polycrystalline-silicon furnace, the central high-vacuum system includes high vacuum pipe
1 and at least two groups joint pump groups 2 in parallel, the joint pump group 2 for series connection lobe pump 21 and 1# slide valve pumps 22；Per described in platform
Polycrystalline-silicon furnace 5 connects respectively the high vacuum pipe 1, and is equiped with valve 6 respectively in junction.
Further, the multiple stage polycrystalline-silicon furnace 5 refers to 2-6 platform polycrystalline-silicon furnaces.
Wherein, valve 6 described above can be pneumatic ball valve.
Wherein, the slide valve pump can be ET150 slide valve pumps；The lobe pump can be EMBD540 lobe pumps.
The utility model adopts the central vacuum system of simple structure, high Roughing line separation, lobe pump and slide valve pump
Multiple stage is backed up mutually.Specifically, the slide valve pump is used to obtain black vacuum effect and the fore pump as high vacuum is used；Institute
Lobe pump is stated for obtaining high vacuum effect.
According to preferred embodiment of the present utility model, central vacuum system described in the utility model is also including PLC controls
Cabinet, it possesses can automatically select very with the start and stop of all devices in full automation control central vacuum system and according to vacuum
Operation quantity of empty acquisition equipment etc. meets the function of actual production demand.
The PLC control cabinet is used for the whole central vacuum system of whole-process automatic control.PLC control cabinet can by wired or
Each equipment is wirelessly controlled, this is also not limited.Certainly, even without PLC control cabinet, operating personnel pass through hand
Move and carry out adjusting device and be also allowed.
In central vacuum system described in the utility model, parallel-connected pumps or pump group can simultaneously be run as needed or start
A certain group and several groups is run together, even if cannot start in damage or maintenance overhaul state in some pumping units, also will not shadow
The normal work for ringing central vacuum system is required with providing normal vacuum condition as multiple stage polycrystalline-silicon furnace.
It is, of course, preferable to ground, the pump housing as needed can be from the pump of the different model such as large-scale, medium-sized, small-sized, and this is all
It is unrestricted.All it is in protection domain of the present utility model as long as meeting inventive concept of the present utility model.
The acquisition equipment of low vacuum and high vacuum is all that multiple stage can be each other as backup, wherein during a failure completely not
Affect Central Vacuum vacuum, while be equipped with PLC control cabinet, can according in stove production need free switching needed for vacuum,
Flexible operation, it is applied widely.
Finally it should be noted that：Various embodiments above is only illustrating the technical solution of the utility model, rather than it is limited
System；Although being described in detail to the utility model with reference to foregoing embodiments, one of ordinary skill in the art should
Understand：It still can modify to the technical scheme described in foregoing embodiments, either to which part or whole
Technical characteristic carries out equivalent；And these are changed or are replaced, the essence for not making appropriate technical solution departs from this practicality newly
The scope of each embodiment technical scheme of type.
Claims (10)
1. a kind of central mixing vacuum system for multiple stage polycrystalline-silicon furnace, it is characterised in that the central mixing vacuum system
Including high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem include high vacuum pipe and at least two groups parallel connection
Joint pump group, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；The low vacuum subsystem includes black vacuum pipeline
The 2# slide valve pumps of at least two parallel connections；Two are separated per polycrystalline-silicon furnace described in platform and install valvular branch road, be respectively used to
Connect the high vacuum subsystem and the low vacuum subsystem.
2. the central mixing vacuum system for multiple stage polycrystalline-silicon furnace according to claim 1, it is characterised in that described many
Platform polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces.
3. the central mixing vacuum system for multiple stage polycrystalline-silicon furnace according to claim 1, it is characterised in that described low
The 2# slide valve pumps in vacuum sub-system share a slide valve pump with the 1# slide valve pumps in the high vacuum subsystem, lead to
Cross conversion of the slide valve pump described in the control realization of triple valve in the high vacuum pipe and the black vacuum pipeline.
4. the central mixing vacuum system for multiple stage polycrystalline-silicon furnace according to claim 3, it is characterised in that described low
At least one 2# slide valve pumps individualism in vacuum sub-system, i.e., at least one 2# slide valve pump is only thick true with described
Vacant duct is connected and is not connected with the high vacuum pipe by the triple valve.
5. a kind of central mixing vacuum system for being used for four polycrystalline-silicon furnaces, it is characterised in that the central mixing vacuum system
Including high vacuum subsystem and low vacuum subsystem；The high vacuum subsystem includes high vacuum pipe and two groups of joints in parallel
Pump group, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；The low vacuum subsystem includes black vacuum pipeline and three
Platform 2# slide valve pumps in parallel, wherein 2 2# slide valve pumps share a slide valve pump with the 1# slide valve pumps；Per polycrystalline described in platform
Silicon stove separates two and installs valvular branch road, is respectively used to connect the high vacuum subsystem and the low vacuum subsystem
System.
6. the central mixing vacuum system for being used for four polycrystalline-silicon furnaces according to claim 5, it is characterised in that the 2#
When slide valve pump shares a slide valve pump with the 1# slide valve pumps, the high vacuum pipe is connected with the converging for black vacuum pipeline
Point is equiped with triple valve.
7. a kind of central low vacuum system for multiple stage polycrystalline-silicon furnace, it is characterised in that the central low vacuum system includes
Black vacuum pipeline and the 2# slide valve pumps of at least two parallel connections；Connect the black vacuum pipeline respectively per polycrystalline-silicon furnace described in platform, and
Valve is equiped with respectively in junction.
8. the central low vacuum system for multiple stage polycrystalline-silicon furnace according to claim 7, it is characterised in that the multiple stage
Polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces.
9. a kind of central high-vacuum system for multiple stage polycrystalline-silicon furnace, it is characterised in that the central high-vacuum system includes
High vacuum pipe and at least two groups joint pump groups in parallel, the joint pump group is the lobe pump and 1# slide valve pumps of series connection；Per platform
The polycrystalline-silicon furnace connects respectively the high vacuum pipe, and is equiped with valve respectively in junction.
10. the central high-vacuum system for multiple stage polycrystalline-silicon furnace according to claim 9, it is characterised in that described many
Platform polycrystalline-silicon furnace refers to 2-6 platform polycrystalline-silicon furnaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620825586.XU CN206089057U (en) | 2016-08-02 | 2016-08-02 | A central vacuum system for having more platform polycrystalline silicon stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620825586.XU CN206089057U (en) | 2016-08-02 | 2016-08-02 | A central vacuum system for having more platform polycrystalline silicon stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206089057U true CN206089057U (en) | 2017-04-12 |
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ID=58467701
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| Application Number | Title | Priority Date | Filing Date |
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| Country | Link |
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| CN (1) | CN206089057U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112921304A (en) * | 2021-04-01 | 2021-06-08 | 无锡琨圣智能装备股份有限公司 | Atomic layer deposition equipment of many boiler tubes |
-
2016
- 2016-08-02 CN CN201620825586.XU patent/CN206089057U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112921304A (en) * | 2021-04-01 | 2021-06-08 | 无锡琨圣智能装备股份有限公司 | Atomic layer deposition equipment of many boiler tubes |
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