CN206074540U - Process the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride - Google Patents
Process the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride Download PDFInfo
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- CN206074540U CN206074540U CN201620876565.0U CN201620876565U CN206074540U CN 206074540 U CN206074540 U CN 206074540U CN 201620876565 U CN201620876565 U CN 201620876565U CN 206074540 U CN206074540 U CN 206074540U
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Abstract
The utility model provides a kind of characterization apparatus of the dry adsorption agent performance for processing poisonous gaseous hydride, it is characterised in that including adsorption experiment post, described adsorption experiment post connects purging system and poisonous gaseous hydride feed system respectively.The utility model determines the load capacity of active ingredient in adsorbent, water content by multiple means, mass change before and after absorption etc., the result being in harmony is derived from, the important performance indexes such as the utilization ratio for adsorbing active ingredient in ratio, adsorbent, the safety coefficient of adsorbent of adsorbent/toxic gas can be accurately obtained.
Description
Technical field
The utility model is related to a kind of device of the dry adsorption agent performance of the poisonous gaseous hydride of test processes.
Background technology
In IC manufacturing industry, arsine and phosphine are a kind of important N-shaped impurity gas and ion implanting gas.
With the continuous expansion in LED markets, arsine and phosphine are the important epitaxial gas of the red yellow light LED of GaP bases and infrared LED, consumption
It is very big.In recent years, as the domestic solar-grade polysilicon of the successive centering of USA and EU carries out " double anti-" investigation, it is originally used for
The iii-v multiple batteries of space solar cell have progressed into the sight line of industrial circle.Arsine and phosphine are condensation photovoltaics
(CPV), the important epitaxial gas of such as InGaP/GaAs/Ge.With the enforcement of " broadband China " national strategy, promote optic communication
Industry flourishes, and used as the core of optical communications industry, a large amount of optic communication chips are made based on InP materials, and phosphine is weight
The epitaxial gas wanted, consumption are very big.
In reaction, arsine and phosphine must be excessive to ensure that MO sources fully can be reacted, therefore also have in reaction end gas a large amount of
Arsine and phosphine gas, these gases can not be directly discharged in air, it is necessary to first which is processed, simultaneously because arsine and
Phosphine has severe toxicity, during emission treatment, usually which is diluted with a large amount of nitrogen, and the workload and difficulty of dilution is all very big.This
So that in tradition application, the cost of buying, process arsine and phosphine is all very big.It is one based on the processing scheme of dry adsorption agent
High efficiency, low cost, more environmentally friendly scheme are planted, absorption method reaction end gas of the process containing the gas such as arsine or phosphine are for absorption
The performance of agent has strict requirements.
The content of the invention
Problem to be solved in the utility model is to provide the dress of the test adsorbent absorption property of a set of quick, safety
Put.
In order to solve above-mentioned technical problem, the utility model provides a kind of dry adsorption for processing poisonous gaseous hydride
The characterization apparatus of agent performance, it is characterised in that including adsorption experiment post, described adsorption experiment post connect respectively purging system and
Poisonous gaseous hydride feed system.
Preferably, two end interfaces of described adsorption experiment post connect the second valve and the 3rd valve, the second valve respectively
It is connected with purging system and poisonous gaseous hydride feed system respectively.
It is highly preferred that described purging system includes purge gas steel cylinder and the first valve, purge gas steel cylinder connection the
One valve, the first valve connect the second valve.
It is highly preferred that described poisonous gaseous hydride feed system includes arsine or phosphine steel cylinder, arsine or phosphine steel
Bottle connects the second valve by pipeline.
Further, the pipeline between described arsine or phosphine steel cylinder and the second valve connects the 5th valve.
It is highly preferred that the 3rd described valve connects the 4th valve by pipeline.
Further, the pipeline between the 3rd described valve and the 4th valve is provided with pressure gauge.
Preferably, the draw ratio of described adsorption experiment post is 15～25.
Preferably, two end interfaces of described adsorption experiment post are VCR interfaces.
Compared with prior art, the beneficial effects of the utility model are：
The utility model determines the load capacity of active ingredient in adsorbent, water content by multiple means, before and after absorption
Mass change etc., is derived from the result being in harmony, and accurately can obtain in the absorption ratio of adsorbent/toxic gas, adsorbent effectively
The important performance indexes such as the utilization ratio of composition, the safety coefficient of adsorbent.
Description of the drawings
Fig. 1 is the characterization apparatus structural representation of the dry adsorption agent performance for processing poisonous gaseous hydride.
Specific embodiment
With reference to specific embodiment, the utility model is expanded on further.It should be understood that these embodiments are merely to illustrate this
Utility model rather than restriction scope of the present utility model.In addition, it is to be understood that in the content for having read the utility model instruction
Afterwards, those skilled in the art can be made various changes or modifications to the utility model, and these equivalent form of values equally fall within this Shen
Please appended claims limited range.
Embodiment
As shown in figure 1, the characterization apparatus structural representation of the dry adsorption agent performance to process poisonous gaseous hydride, institute
The characterization apparatus of the dry adsorption agent performance of the poisonous gaseous hydride of process stated include adsorption experiment post 21, described absorption reality
Test post 21 and connect purging system and poisonous gaseous hydride feed system respectively.
Two end interfaces of described adsorption experiment post 21 connect the second valve 12 and the 3rd valve 13, the second valve 12 respectively
It is connected with purging system and poisonous gaseous hydride feed system respectively.Described purging system includes 23 He of purge gas steel cylinder
First valve 11, purge gas steel cylinder 23 connect the first valve 11, and the first valve 11 connects the second valve 12.Described has poison gas
State hydride feed system includes AsH3Steel cylinder 22, AsH3Steel cylinder 22 connects the second valve 12 by pipeline.Described AsH3Steel cylinder
22 and second the pipeline between valve 12 connect the 5th valve 15.The 3rd described valve 13 connects the 4th valve by pipeline
14.Pipeline between the 3rd described valve 13 and the 4th valve 14 is provided with pressure gauge 16.
Described adsorption experiment post 21 is PFA materials, and draw ratio is 20.Adsorbent is provided with adsorption experiment post 21, it is described
Adsorbent include adsorbent base material and active ingredient, adsorbent base material can be aluminum oxide molecular sieve, carbon molecular sieve, zeolite
Molecular sieve, adsorbent active ingredient can be permanganate, hypochlorite.
In the utility model, each pipeline adopts PFA materials, and 21 liang of end interfaces of adsorption experiment post are VCR interfaces.
Nitrogen or helium are provided with described purge gas steel cylinder 23.
Using method of the present utility model is：
Before test, titration determines the content and load efficiency of active ingredient in adsorbent, by low-temperature vacuum drying
Determine the water content in adsorbent；The characterization apparatus for processing the dry adsorption agent performance of poisonous gaseous hydride are tested by pressurize
Afterwards, sample of sorbent numbering 1#, 2#, 3# respectively are chosen, and adsorbent 150.00g are accurately weighed with electronic balance, then will absorption
Agent loads adsorption experiment post 21, accesses the characterization apparatus of the dry adsorption agent performance for processing poisonous gaseous hydride.Open first
Valve 11, the second valve 12, the 3rd valve 13 and the 4th valve 14, are then turned on purge gas steel cylinder 23 (He steel cylinders) valve,
The whole experiment air-channel system of purging, opens the 5th valve 15.Purge gas steel cylinder 23 (He steel cylinders) valve is closed, the first valve is closed
The 11, the 3rd valve 13 of door, the 4th valve 14 and the 5th valve 15, open AsH322 valve of steel cylinder, makes AsH3Contact simultaneously with adsorbent
Adsorption reaction.After the color of adsorbent no longer changes, AsH is closed322 valve of steel cylinder, opens the first valve 11, opens purging
23 valve of gas bomb, purges whole gas circuit, and purges the unreacted AsH for being adsorbed in adsorbent surface3, open the 3rd valve
The 13, the 4th valve 14 of door, the 5th valve 15 are deflated, and circulation He is replaced 10 times, dismounting adsorption experiment post 21.Will be anti-in fume hood
Adsorbent after answering is poured in beaker and is weighed, and is changed with the chemical valence of each essential element in XPS instrument analytical reactions products, it is determined that
The chemical equation occurred in adsorption process, calculates the AsH for participating in reaction by chemical equation and difference assay3
Amount and adsorbent/AsH3Adsorbent ratio, properly disposes adsorbent.
Claims (9)
1. a kind of characterization apparatus of the dry adsorption agent performance for processing poisonous gaseous hydride, it is characterised in that real including absorption
Test post（21）, described adsorption experiment post（21）Connect purging system and poisonous gaseous hydride feed system respectively.
2. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 1, and its feature exists
In described adsorption experiment post（21）Two end interfaces connect the second valve respectively（12）With the 3rd valve（13）, the second valve
（12）It is connected with purging system and poisonous gaseous hydride feed system respectively.
3. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 2, and its feature exists
In described purging system includes purge gas steel cylinder（23）With the first valve（11）, purge gas steel cylinder（23）Connection first
Valve（11）, the first valve（11）Connect the second valve（12）.
4. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 2, and its feature exists
In described poisonous gaseous hydride feed system includes that arsine or phosphine steel cylinder, arsine or phosphine steel cylinder are connected by pipeline
Second valve（12）.
5. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 4, and its feature exists
In, described arsine or phosphine steel cylinder and the second valve（12）Between pipeline connect the 5th valve（15）.
6. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 2, and its feature exists
In the 3rd described valve（13）4th valve is connected by pipeline（14）.
7. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 6, and its feature exists
In the 3rd described valve（13）With the 4th valve（14）Between pipeline be provided with pressure gauge（16）.
8. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 1, and its feature exists
In described adsorption experiment post（21）Draw ratio be 15～25.
9. the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride are processed as claimed in claim 2, and its feature exists
In described adsorption experiment post（21）Two end interfaces be VCR interfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620876565.0U CN206074540U (en) | 2016-08-12 | 2016-08-12 | Process the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620876565.0U CN206074540U (en) | 2016-08-12 | 2016-08-12 | Process the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206074540U true CN206074540U (en) | 2017-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620876565.0U Active CN206074540U (en) | 2016-08-12 | 2016-08-12 | Process the characterization apparatus of the dry adsorption agent performance of poisonous gaseous hydride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206074540U (en) |
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2016
- 2016-08-12 CN CN201620876565.0U patent/CN206074540U/en active Active
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| GR01 | Patent grant | ||
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Effective date of registration: 20180419 Address after: 225500 129 Xingtang Road, modern science and Technology Industrial Park, Jiangyan District, Taizhou, Jiangsu Co-patentee after: SHANGHAI ZHENGFAN TECHNOLOGY CO., LTD. Patentee after: Jiangsu ever sail Semiconductor Equipment Co., Ltd. Address before: 201108 Xhenzhuang Industrial Zone, Minhang District, spring road, No. 56, No. Patentee before: SHANGHAI ZHENGFAN TECHNOLOGY CO., LTD. |