CN206073971U - Space displacement measurement sensor based on MEMS sensing technologies - Google Patents
Space displacement measurement sensor based on MEMS sensing technologies Download PDFInfo
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- CN206073971U CN206073971U CN201621032542.8U CN201621032542U CN206073971U CN 206073971 U CN206073971 U CN 206073971U CN 201621032542 U CN201621032542 U CN 201621032542U CN 206073971 U CN206073971 U CN 206073971U
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Abstract
This utility model discloses a kind of space displacement measurement sensor based on MEMS sensing technologies, is made up of clock unit, single chip control unit, reset circuit, mems accelerometer, MEMS gyroscope, power module, communication module and memory element.The collection of measured signal, filtering, calculating, store function are completed in the presence of single chip control unit.System completes collection, filtering and the calculating of signal according to the sample frequency that single chip control unit is arranged, and calculating achievement is stored, and host computer passes through serial communication or 4g radio communications and realizes interacting with controller.Thus, simple structure is reached, and it is easy to use, measure accurate beneficial effect.
Description
Technical field
This utility model is related to sensor technical field, particularly relates to a kind of space displacement based on MEMS sensing technologies and surveys
Quantity sensor.
Background technology
At present, mainly there are two kinds of technical sides of following M1, M2 in the deformation monitoring of tunnel, foundation ditch, bridge, side slope is measured
Case, mainly introduces the ultimate principle of both technical schemes and the defect of presence below：
The first：M1- manual measurements：
Manual measurement mainly coordinates prism to measure the in-plane displancement of objective body using total powerstation, coordinates indium steel using level gauge
The vertical displacement of ruler measurement objective body；
M1 schemes are based primarily upon the measurement of the plan-position in engineering surveying and measurement of higher degree principle, with more tight
Mathematical theory foundation, but while there is also following several point defects：
1. workload is big, labor intensive；A usual survey group needs the professional survey crew of configuration 2～3, needs experience to set
Stand, aim at, measuring, field note, interior industry can draw measurement achievement after arranging a set of flow processs such as calculating.
2. costly, deficiency in economic performance；As measurement workload is big and labor intensive, a large-scale measure the item is often
Need to configure multigroup survey engineer, can complete after the several months, therefore the program is costly, deficiency in economic performance.
3. data sampling frequency is low, affected by environment notable；Due to adopting measuring method, according to the measurement line of setting
Road can complete the measurement work of objective body, so data sampling frequency is very low, and in the case of needing objective body unscreened
Can complete to measure work, the interference for being frequently subjected to the impact or construction of objective body surrounding enviroment cannot complete to measure work
4. it is error-prone that work is measured；As M1 schemes need the engineering survey personnel of specialty implement, measurement process must
Must be in strict accordance with flow implementation, as flow process is complex, a little details mistake of survey crew will cause measurement circuitry
In certain node even data invalid of measurement circuitry really.
5. the measurement of target surface displacement can only be carried out, it is impossible to measure the misalignment inside objective body.
Second：M2- sensors are measured：
Displacement transducer general at present is mainly thread-vibration type device for sensing displacement, with the type vibration wire displacement meter that M2 schemes are commonly used
As a example by, thread-vibration type device for sensing displacement is by displacement drive link, driving spring, string wire, electrical measurement coil, string wire support, guide ring, inside and outside
The compositions such as protection sleeve, two ends cylinder lever connecting rod and universal joint.When displacement meter two ends extend or compress, driving spring causes string wire
In tensioning or relaxed state, now string wire frequency generation change, during tension, frequency increases, and when pressurized, frequency is reduced；Due to position
Move linear with the difference of two squares of frequency, therefore, frequency after displacement is measured, you can calculate the position of measured body according to the following formula
Shifting amount.
dt=K (f0 2—ft 2)
D in formulatFor the displacement at certain moment；K is sensitivity coefficient；f0For initial string wire frequency；ftFor t string wire frequency
Rate.
The program has the disadvantage that：
1. precision is not high；As type vibration wire displacement meter transmits displacement using mechanical component and then affects the frequency of string wire, thing
Reason amount is affected larger according to precision by mechanical component and string wire in transmittance process, while non-thread of the temperature to this kind of sensor
Property affect more significantly, it is therefore not high from precision in application effect.
2. the displacement in a direction can only be measured；This kind of sensor can only be on measuring sensor axis shift value, i.e.,
For the installation direction of sensor, and the direction cannot precision positioning, the space three-dimensional deformation behaviour that this is had with objective body not phase
Meet.
3. range of application is narrow；The measurement principle of the displacement meter determines that sensor base must be connected to datum mark by which
(as fixed point) could measure the relative displacement of objective body, to seek the stablizing datum mark of sensor, usually need to adopt deep drilling
Sensor is connected to rock-soil layer depths using rigid rod by the method in hole, and cannot find stable benchmark in most cases
Point disturbs construction, therefore its range of application is narrow, for example：
<1>Carry out when tunnel clearance is measured according to the sensor then direct interference construction, it is impossible to which love is implemented；
<2>When carrying out tunnel perimeter rock-soil layer displacement measurement using the sensor, then need to drill to stably using wind big gun
Rock-soil layer could obtain datum mark, and this drilling depth is generally 2～3 times of Tunnel footpath, and depth is very big, typically also not
Using.
Therefore, it is necessary to a kind of new space displacement measurement sensor based on MEMS sensing technologies is designed, with solution
State technical problem.
Utility model content
For problem present in background technology, the purpose of this utility model is to provide a kind of based on MEMS sensing technologies
Space displacement measurement sensor, simple structure are easy to use, and measurement is accurate.
What the technical solution of the utility model was realized in：A kind of space displacement measurement based on MEMS sensing technologies is passed
Sensor, including single chip control unit, collection testee acceleration change over process mems accelerometer, collection quilt
Survey the azimuthal MEMS gyroscope of object plane and the upper calculating being connected with single chip control unit by communication module
Machine, wherein, the mems accelerometer and MEMS gyroscope are connected with single chip control unit respectively, the Single-chip Controlling list
Unit is connected with memory element, power module, reset circuit and clock unit, and the power module is connected with clock unit, institute
State the data of memory element storage mems accelerometer and MEMS gyroscope collection；The single chip control unit control MEMS adds
Velometer and MEMS gyroscope obtain data and calculate shift value and deposit to the signals collecting of testee and from memory element
Storage is in memory element.
In above-mentioned technical proposal, the sensitivity of the mems accelerometer is 2x10-3m/s-2～2x10-5m/s-2。
In above-mentioned technical proposal, the frequency acquisition of the mems accelerometer be 10 time/second～60 time/second.
In above-mentioned technical proposal, the frequency acquisition of the MEMS gyroscope and the frequency acquisition one of mems accelerometer
Sample.
In above-mentioned technical proposal, the communication module supports serial RS-232/RS-485,3G/4G communication mode.
In above-mentioned technical proposal, the memory element is built-in to be provided with ROM, RAM two parts.
In above-mentioned technical proposal, the power module has UPS functions, can maintain system 72 hours under powering-off state
Operation.
Space displacement measurement sensor of this utility model based on MEMS sensing technologies, by clock unit, Single-chip Controlling
Unit, reset circuit, mems accelerometer, MEMS gyroscope, power module, communication module and memory element composition.In monolithic
The collection of measured signal, filtering, calculating, store function are completed in the presence of machine control unit.System is according to Single-chip Controlling list
The sample frequency that unit is arranged completes collection, filtering and the calculating of signal, and calculating achievement is stored, and host computer passes through
Serial communication or 4g radio communications are realized interacting with controller.Thus, reaching simple structure, easy to use, measurement accurately has
Beneficial effect.
Description of the drawings
Fig. 1 is the space displacement measurement sensor structured flowchart based on MEMS sensing technologies；
Fig. 2 is Computing Principle schematic diagram.
Specific embodiment
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model, rather than the reality of whole
Apply example.Based on the embodiment in this utility model, those of ordinary skill in the art institute under the premise of creative work is not made
The every other embodiment for obtaining, belongs to the scope of this utility model protection.
As shown in figure 1, a kind of space displacement measurement sensor based on MEMS sensing technologies described in the utility model, bag
Include single chip control unit 1, mems accelerometer 2, MEMS gyroscope 3, communication module 4, host computer 5, memory element 6,
Power module 7, reset circuit 8 and clock unit 9.
Wherein, mems accelerometer 2 and MEMS gyroscope 3 are connected with single chip control unit 1 respectively, Single-chip Controlling list
Unit 1 is used to control the signals collecting of mems accelerometer 2 and MEMS gyroscope 3 to testee；Mems accelerometer 2 is signal
One of sensing element, its sensitivity are 2x10-3m/s-2～2x10-5m/s-2, for gathering change of the testee acceleration with the time
Change process, frequency acquisition be 10 time/second～60 time/second；MEMS gyroscope 3 is also one of signal sensing element, for gathering quilt
The grid azimuth of object is surveyed, frequency acquisition is the same with the frequency acquisition of mems accelerometer.
Host computer 5 is connected with single chip control unit 4 by communication module 4, wherein, communication module 4 supports serial
RS-232/RS-485,3G/4G communication mode, is responsible for the transmission of the instruction of host computer 5, and gathered data (signal, physical quantity)
To the transmission of computer 5.
1 connect setting memory element 6 of single chip control unit, power module 7, reset circuit 8 and clock unit 9, power supply
Module 7 is connected with clock unit 9, wherein, memory element 6 is used to store the number that MEMS acceleration 2 and MEMS gyroscope 3 are collected
According to.As the signal for collecting is：" acceleration ", " grid azimuth ", " zenith distance ", " time ", memory element 6 needs constantly
These signals, time data are stored, so as to when these data are taken out in 1 timing of single chip control unit from memory element 6 to be come pair
Between integral and calculating shift value, while the shift value for calculating will be also stored in memory element 6；Therefore, memory element 6 needs
Built-in ROM, RAM two parts of configuration larger capacity.
On the one hand power module 7 ensures that system is run under the conditions of mains-supplied, while also having UPS functions, it is ensured that disconnected
The system operation of 72 hours can be maintained in the case of electricity；Reset circuit 8 and clock unit 9 are the connection lists directly related with single-chip microcomputer
Unit, and composition single-chip microcomputer meat and potatoes, here, reset circuit 8 and clock unit 9 not being particularly limited and being retouched
State.
Space displacement measurement sensor of this utility model based on MEMS sensing technologies, be integrated with mems accelerometer and
MEMS gyroscope, by pair when m- accelerating curve quadratic integral calculating the space displacement of measuring point.In order to improve the system
Accuracy in measurement, the three-dimensional acceleration alpha of △ t, side are spaced to obtain spatial point tiny time by the sampling of the altofrequency of sensor
Parallactic angle θ, zenith distance φ, calculate the deformation values of output measuring point by built-in MCU.Data acquiring frequency with 2 secondary data per second is
Example, elaborates the deformation measurement principle of the system.
Demarcate when if sensor dispatches from the factory absolute N (X) to H (Z), the azimuth of its output is then for absolute azimuth and absolutely
To zenith distance, then what the system calculated output is then the displacement vector values under absolute coordinate system.
As shown in Fig. 2 point A (sensor mass center) within 2 time cycles completes to accelerate in three dimensions twice,
The spent time be Δ t (sampling period), vectorAccelerate for the 1st time, its acceleration is (a1X、a1Y、a1Z), vectorFor the 2nd uniformly accelerated motion, its acceleration is (a2X、a2Y、a2Z)。
Vector in figureFor space motion path vectorProjection in plane NAE (horizontal plane), vector
For space motion path vectorProjection in plane NAE (horizontal plane).
It is assumed that：1. the initial velocity of A is 0 (for convenience of illustrating)；2. the initial orientation angle of A points is θ1(azimuth is by passing
Sensor gyro module is measured and is exported), initial zenith distance is Φ1；3., after moving to B points, sensor orientation angle is θ2, its day
Apex distance is Φ2；
Define vectorComponent on three change in coordinate axis direction is
Define vectorComponent on three change in coordinate axis direction is
Then definable, vectorComponent on three change in coordinate axis direction is
Then sensor displacement over a period of time is vectorLength, can be calculated with formula (1)：
Component in formula (1)Can be calculated using formula (2)～(4)：
6 components in formula (2)～(4)Can be calculated by following formula：
I.e.：
If the sampling time is sufficiently small, i.e., when Δ t is sufficiently small, it is believed that for constant, then 6 components Can be calculated by following formula (5)～(10) and be obtained：
Computing Principle shown in above formula (1)～formula (10) is expanded to into the time range of T=n x Δ t, then can be calculated
The absolute displacement amount of any time T in sensor space motion track.
Space displacement measurement sensor of this utility model based on MEMS sensing technologies, has the advantages that：
The fundamental measurement principle of 1.DSM displacement transducers is Newton's second law and acceleration defined formula, by time shafts
Abundant discrete integration, mathematical principle are very tight, and this is that other sensors are musted at present can compare, and this is high-precision displacement
Theoretical basiss have been established in measurement.
2.DSM displacement sensings calculate shift value to the integration of time based on acceleration, can be used for 3 to (X/Y/Z) displacement
Measurement；And string formula displacement transducer can only measure the displacement in single direction, and displacement measurement direction accurately cannot determine.
3., compared to manually carrying out 3 to displacement measurement using optical instrument, DSM displacement transducers are not limited by sighting condition
System, does not disturb construction, and due to its size it is little, lightweight so that its application receives space, environmental constraints little, and in installation process
Without the need for the auxiliary installation measure that drilling etc. is responsible for.
4. measure and do not limited by sensor itself, can be used for the measurement of large deformation, this is current other displacement transducers
(other displacement transducers are only used for small deformation measurement at present) not reached.
5. accuracy in measurement is high, DSM sensor integration gyroscopes, the orientation in measurement sensor motor process, to being surveyed
Displacement carries out spin axis amendment, to obtain determining the three direction displacement value of reference axial direction.
6. temperature effects are good；Using acceleration, stabilizer unit there are better stability and temperature effects, sensor is steady
It is qualitative good, and thread-vibration type device for sensing displacement is then floatd by temperature and affects larger.
Preferred embodiment of the present utility model is the foregoing is only, it is not to limit this utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc. should be included in this utility model
Protection domain within.
Claims (7)
1. a kind of space displacement measurement sensor based on MEMS sensing technologies, it is characterised in that：Including single chip control unit,
Collection testee acceleration changes over the mems accelerometer of process, the MEMS tops of collection testee grid azimuth
Spiral shell instrument and the host computer being connected with single chip control unit by communication module, wherein, the mems accelerometer and
MEMS gyroscope is connected with single chip control unit respectively, and the single chip control unit is connected with memory element, power supply mould
Block, reset circuit and clock unit, the power module are connected with clock unit, and the memory element stores mems accelerometer
With the data of MEMS gyroscope collection；The single chip control unit control mems accelerometer and MEMS gyroscope are to measured object
The signals collecting of body and data are obtained from memory element calculate and shift value be stored in memory element.
2. the space displacement measurement sensor based on MEMS sensing technologies according to claim 1, it is characterised in that：It is described
The sensitivity of mems accelerometer is 2x10-3m/s-2～2x10-5m/s-2。
3. the space displacement measurement sensor based on MEMS sensing technologies according to claim 1, it is characterised in that：It is described
The frequency acquisition of mems accelerometer be 10 time/second～60 time/second.
4. the space displacement measurement sensor based on MEMS sensing technologies according to claim 3, it is characterised in that：It is described
The frequency acquisition of MEMS gyroscope is as the frequency acquisition of mems accelerometer.
5. the space displacement measurement sensor based on MEMS sensing technologies according to claim 1, it is characterised in that：It is described
Communication module supports serial RS-232/RS-485,3G/4G communication mode.
6. the space displacement measurement sensor based on MEMS sensing technologies according to claim 1, it is characterised in that：It is described
Memory element is built-in to be provided with ROM, RAM two parts.
7. the space displacement measurement sensor based on MEMS sensing technologies according to claim 1, it is characterised in that：It is described
Power module has UPS functions, and the system operation of 72 hours can be maintained under powering-off state.
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| CN201621032542.8U CN206073971U (en) | 2016-08-31 | 2016-08-31 | Space displacement measurement sensor based on MEMS sensing technologies |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106323225A (en) * | 2016-08-31 | 2017-01-11 | 潘卫东 | MEMS sensing technology based space displacement measurement sensor |
| CN107576978A (en) * | 2017-07-10 | 2018-01-12 | 嘉兴市纳杰微电子技术有限公司 | A kind of integrated circuit suitable for single-sheet miniature location navigation time dissemination system |
| CN109099828A (en) * | 2018-07-13 | 2018-12-28 | 北京市劳动保护科学研究所 | The real-time acquisition system of dynamic displacement and method based on Arduino |
-
2016
- 2016-08-31 CN CN201621032542.8U patent/CN206073971U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106323225A (en) * | 2016-08-31 | 2017-01-11 | 潘卫东 | MEMS sensing technology based space displacement measurement sensor |
| CN107576978A (en) * | 2017-07-10 | 2018-01-12 | 嘉兴市纳杰微电子技术有限公司 | A kind of integrated circuit suitable for single-sheet miniature location navigation time dissemination system |
| CN109099828A (en) * | 2018-07-13 | 2018-12-28 | 北京市劳动保护科学研究所 | The real-time acquisition system of dynamic displacement and method based on Arduino |
| CN109099828B (en) * | 2018-07-13 | 2024-02-13 | 北京市劳动保护科学研究所 | Arduino-based dynamic displacement real-time acquisition system and method |
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| CB03 | Change of inventor or designer information |
Inventor after: Li Wenjian Inventor after: Pan Weidong Inventor after: Li Haojun Inventor after: Sheng Xiaolong Inventor before: Pan Weidong Inventor before: Sheng Xiaolong |