CN206057221U

CN206057221U - The small-sized xrf analysis instrument of new type of high sensitivity

Info

Publication number: CN206057221U
Application number: CN201620990291.8U
Authority: CN
Inventors: 郑素华
Original assignee: Individual
Current assignee: Individual
Priority date: 2016-08-30
Filing date: 2016-08-30
Publication date: 2017-03-29
Anticipated expiration: 2026-08-30

Abstract

This utility model is related to a kind of small-sized xrf analysis instrument of new type of high sensitivity, and which belongs to X-ray Detection Techniques field.It mainly includes base plate, and x-ray device, detection device, sample conveying device and sample fixing device are provided with base plate；The x-ray device includes X-ray tube first, X-ray tube second and X-ray tube third, and the crystal case of built-in crystal wafer is equipped with outside the projection mouth of the third end of X-ray tube first, the X-ray tube second and X-ray tube；The detection device is supported on the detector above base plate and is constituted by gripper shoe；The sample conveying device includes the shift fork on leading screw, and the leading screw is driven by spindle motor；The sample fixing device includes the sample carrier on vertical shaft, and the vertical shaft is moved up and down by Motor drive.The beneficial effects of the utility model are：It is balanced to improve different Element detection sensitivity.Choose different x-ray light pipe target so as to which energy is close to difference element absorption line, different Element detection sensitivity are improved with balanced.

Description

The small-sized xrf analysis instrument of new type of high sensitivity

Technical field

This utility model is related to a kind of small-sized xrf analysis instrument of new type of high sensitivity, and which belongs to X-ray Detection Techniques field.

Background technology

Using energy dispersion technology excite in general miniaturization instrument Beam Spectra complexity and x-ray bombardment in sample There is background in product and strengthen and weaken effect, detectivity is 10^-4、10^-5Level, to the accurate of multielement simultaneous quantitative measurement Property is poor.

The shortcoming of prior art：

1st, detectivity is low, to currently not adapting in fields such as environmental protection, industrial materials, agriculturals；

2nd, as excitaton source has differential responses section, the difference of sensitivity, single excitaton source to different elements in sample Detection elemental range is little, not high to many Element detection sensitivity；

Each physical quantity, even if adopting fundamental parameters method, can not accurately be used method accurate in fitting by the 3, quantitative difference Really it is fitted, therefore, error problem is exactly a big problem to multielement measurement, even if international major company, such as：Bruker companies it is complete Reflection xrf analysis instrument also fails to solve problems very well；

4th, the current pollution element detection in food safety is to trace element detection, the detection of air PM2.5, soil and water In, X-ray Fluorescence Analyzer is entirely capable of reaching in terms of can not reaching many elements test limit, multielement Simultaneous Quantitative Analysis To requiring；

5th, existing glistening light of waves color xrf analysis instrument high cost, efficiency are low, and time-consuming, and when multielement is measured, every kind of element is equal Three kinds and above standard specimen need to be surveyed, such as 10 kinds elements need to survey 30 or more standard specimens.

The sensitivity for analysis of existing small-sized (desk-top, portable) xrf analysis instrument μ g levels between 100ppm-10ppm；It is accurate Exactness≤± 10%；Quantitative every kind of element is both needed to do the calibration curve of the element, not so affects quantitative result.

The content of the invention

This utility model is directed to above-mentioned deficiency, there is provided a kind of new Gao Ling that balanced can improve different Element detection sensitivity The small-sized xrf analysis instrument of sensitivity.

The technical scheme that this utility model solves above-mentioned technical problem is as follows：

A kind of small-sized xrf analysis instrument of new type of high sensitivity, including base plate, are provided with x-ray device, detection on base plate Device, sample conveying device and sample fixing device；The x-ray device includes the X-ray tube above base plate is supported on by support first First, supported by support second and support third respectively and through the X-ray tube second and X-ray tube third of base plate, in the X-ray tube first, X-ray tube The crystal case of built-in crystal wafer is equipped with outside the projection mouth of the third end of second and X-ray tube；The detection device is supported by gripper shoe Detector composition above base plate；The sample conveying device includes the shift fork on leading screw, and the leading screw is by spindle motor Drive；The sample fixing device includes the sample carrier on vertical shaft, and the vertical shaft is moved up and down by Motor drive；Institute The incident point for stating X-ray tube first, X-ray tube second and X-ray tube third is gathered on sample carrier, and the sensing point of the detector is located at sample carrier On frame, the end of the shift fork is covered in above sample carrier, and can hold sample carrier and passed through by the middle part of which.

Compared with prior art, the beneficial effects of the utility model are：It is balanced to improve different Element detection sensitivity.Photoelectricity Effect is the foundation of x-ray fluorescence analysiss, and photoelectric effect section and excitation energy relation：The n powers of τ inverse ratio excitation energies E； Therefore, choose different x-ray light pipe target so as to which energy is close to difference element absorption line, different Element detections are improved with balanced Sensitivity.

Sample analysis sensitivity (minimum detectability)≤1ng；Analytical precision≤± 5%；Accuracy of analysis≤± 5%； Analytical element scope：Na-U；Arbitrary known constituent content Crestor measures other elements content；Sample size limits highest milligram Level, (full-reflection X fluorescence analyser highest sample size is less than or equal to 10 μ g levels)；A calibration curve is needed during quantitative measurement sample only Other elements content can be provided；Can high-sensitivity measurement Rh, Pa, Cd, Sn, Sb, Te, Ag, Pd, Na, Mg, Al etc..

On the basis of above-mentioned technical proposal, this utility model can also do following improvement.

Further, chiller is provided with the projection mouth of the third end of X-ray tube first, the X-ray tube second and X-ray tube, it is described Chiller is aluminium block；Inorganic material of the sample carrier using thickness≤1 micron, or using the organic of thickness≤2 micron Material.

Using the beneficial effect of above-mentioned further scheme it is：Chiller is cooled down to x-ray device, it is ensured that X-ray device normal work.

Description of the drawings

Fig. 1 is structural representation of the present utility model；

Fig. 2 is top view of the present utility model；

Fig. 3 is the A-A of Fig. 2 to sectional view；

Fig. 4 is the C-C of Fig. 3 to sectional view.

In figure, 1, base plate；2nd, X-ray tube second；3rd, support second；4th, support third；5th, X-ray tube third；6th, motor；7th, vertical shaft；8、 Sample carrier；9th, crystal case；10th, crystal wafer；11st, support first；12nd, chiller；13rd, X-ray tube first；14th, detector；15th, prop up Fagging；16th, spindle motor；17th, shift fork；18th, leading screw.

Specific embodiment

Principle of the present utility model and feature are described below in conjunction with accompanying drawing, example is served only for explaining this practicality It is new, it is not intended to limit scope of the present utility model.

A kind of small-sized xrf analysis instrument of new type of high sensitivity, including base plate 1, are provided with x-ray device on base plate 1, visit Survey device, sample conveying device and sample fixing device；The x-ray device includes being supported on the X above base plate 1 by support first 11 Light pipe first 13, supported by support second 3 and support the third 4 respectively and through the X-ray tube second 2 and X-ray tube the third 5 of base plate 1, in the X The crystal case 9 of built-in crystal wafer 10 is equipped with outside the projection mouth of the third 5 end of light pipe first 13, X-ray tube second 2 and X-ray tube；The spy Survey device is supported on the detector 14 above base plate 1 and is constituted by gripper shoe 15；The sample conveying device is included on leading screw 18 Shift fork 17, the leading screw 18 driven by spindle motor 16；The sample fixing device includes the sample carrier on vertical shaft 7 Frame 8, the vertical shaft 7 are driven by motor 6 and are moved up and down；The incident point of the X-ray tube first 13, X-ray tube second 2 and X-ray tube the third 5 gather in On sample carrier 8, the sensing point of the detector 14 is located on sample carrier 8, and the end of the shift fork 17 is covered in sample carrier Above frame 8, and sample carrier 8 can be held passed through by the middle part of which.

The cooling that material is aluminium block is provided with the projection mouth of the third 5 end of the X-ray tube first 13, X-ray tube second 2 and X-ray tube Device；The organic material of inorganic material or thickness≤2 micron of the sample carrier 8 using thickness≤1 micron.

Three pipes are excited, and are powered using DC source, power supply and master Machine is separated, main frame size about 300mm × 300mm × 250mm, and its objective is can be portable.

Power≤the 50W of this utility model product, sample analysis sensitivity (minimum detectability)≤5ng (as Pa, Ag, Cd, In, Sn, Sb, Te, Pb, Hg, Au, Bi etc.)；To the minimum detection of V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, As, Br, Rb, Sr, Y Limit≤1-2ng；Analytical precision≤± 5%, accuracy of analysis≤± 5；Analytical element scope：Na-U, arbitrary known element contain Amount Crestor measures other elements content；Sample size limits highest milligram level, and full-reflection X fluorescence analyser highest sample size is less than Equal to 10 μ g levels；A calibration curve is needed during quantitative measurement sample only by provide other elements content；Can high-sensitivity measurement Rh, Pa, Cd, Sn, Sb, Te, Ag, Pd, Na, Mg, Al etc.；Coordinate proper crystal monochromator or secondary target.

This utility model product operationally, sample be positioned on shift fork 17 and by spindle motor 16 drive leading screw 18 by its Push to above sample carrier 8, then startup motor 6 drives vertical shaft 7 that sample carrier 8 is held up sample and enters test position, X-ray Pipe first 13, X-ray tube second 2 and X-ray tube the third 5 sends roentgenization to sample, signal is analyzed by detector 14, completes right The detection of sample；In this detection process, cooling drop is carried out to X-ray tube first 13, X-ray tube second 2 and X-ray tube the third 5 by chiller 12 Temperature, it is ensured that their normal works.

Preferred embodiment of the present utility model is the foregoing is only, it is not to limit this utility model, all in this practicality Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model Within the scope of shield.

Claims

1. the small-sized xrf analysis instrument of a kind of new type of high sensitivity, including base plate (1), it is characterised in that：X is provided with base plate (1) Light ray device, detection device, sample conveying device and sample fixing device；The x-ray device is included by support first (11) Support X-ray tube first (13) above the base plate (1), respectively by support second (3) and the support of support third (4) and through the X of base plate (1) Light pipe second (2) and X-ray tube third (5), outside the projection mouth of the X-ray tube first (13), the third (5) end of X-ray tube second (2) and X-ray tube Portion is equipped with the crystal case (9) of built-in crystal wafer (10)；The detection device is supported on above base plate (1) by gripper shoe (15) Detector (14) is constituted；The sample conveying device includes the shift fork (17) on leading screw (18), and the leading screw (18) is by leading screw Motor (16) drives；The sample fixing device includes the sample carrier (8) on vertical shaft (7), and the vertical shaft (7) is by electricity Machine (6) drives and moves up and down；Gather in sample carrier in the incident point of the X-ray tube first (13), X-ray tube second (2) and X-ray tube third (5) (8), on, the sensing point of the detector (14) is located on sample carrier (8), and the end of the shift fork (17) is covered in sample carrier Above frame (8), and sample carrier (8) can be held passed through by the middle part of which.

2. the small-sized xrf analysis instrument of new type of high sensitivity according to claim 1, it is characterised in that：In the X-ray tube first (13), chiller is provided with the projection mouth of the third (5) end of X-ray tube second (2) and X-ray tube.

3. the small-sized xrf analysis instrument of new type of high sensitivity according to claim 2, it is characterised in that：The chiller For aluminium block.

4. the small-sized xrf analysis instrument of new type of high sensitivity according to claim 1, it is characterised in that：The sample carrier (8) using the inorganic material of thickness≤1 micron.

5. the small-sized xrf analysis instrument of new type of high sensitivity according to claim 1, it is characterised in that：The sample carrier (8) using the organic material of thickness≤2 micron.