CN206045742U - Exhaust gas processing device - Google Patents
Exhaust gas processing device Download PDFInfo
- Publication number
- CN206045742U CN206045742U CN201621041007.9U CN201621041007U CN206045742U CN 206045742 U CN206045742 U CN 206045742U CN 201621041007 U CN201621041007 U CN 201621041007U CN 206045742 U CN206045742 U CN 206045742U
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- China
- Prior art keywords
- absorption tower
- storage tank
- exhaust gas
- processing device
- gas processing
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- 238000010521 absorption reaction Methods 0.000 claims abstract description 138
- 238000003860 storage Methods 0.000 claims abstract description 56
- 239000007921 spray Substances 0.000 claims abstract description 13
- 238000005507 spraying Methods 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 19
- 238000005192 partition Methods 0.000 claims description 12
- 239000007787 solid Substances 0.000 abstract description 18
- 239000002245 particle Substances 0.000 abstract description 14
- 239000003921 oil Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses a kind of exhaust gas processing device, including：The first absorption tower connected with exhaust pipe, has the first sprinkling equipment for being used to spraying tail gas inside first absorption tower；It is arranged at below first absorption tower, and the first storage tank communicated with first absorption tower；Second absorption tower, the second absorption tower are connected with first absorption tower by airduct, have the second sprinkling equipment for being used to spraying tail gas in the second absorption tower；Below the second absorption tower, and the second storage tank communicated with the second absorption tower；The blower fan connected with the gas outlet of the second absorption tower.Solid particle in tail gas is isolated by way of spray by the tail gas unit in this utility model, and the solid particle isolated is fallen in the first storage tank or the second storage tank, so as to ensure being smoothed out for vent gas treatment.
Description
Technical field
This utility model is related to chemical vapor deposition production technical field, more particularly, it relates to a kind of vent gas treatment dress
Put.
Background technology
Chemical vapor deposition is that reacting substance issues biochemical reaction in gaseous condition, generates solid matter and is deposited on heating
Solid matrix surface, and then be obtained solid material Technology.During production, harmful gass can be produced, be needed
Can just be discharged in air after processing to tail gas.But, in tail gas, can usually contain some solid particles, these solids
Grain can affect the process of tail gas.
Therefore, how solid particle is isolated from tail gas, so that it is guaranteed that being smoothed out for vent gas treatment, is this area
Technical staff's critical problem urgently to be resolved hurrily.
Utility model content
The purpose of this utility model is to provide a kind of exhaust gas processing device, the exhaust gas processing device can by solid particle from
Isolate in tail gas, so that it is guaranteed that vent gas treatment is smoothed out.
To reach above-mentioned purpose, this utility model provides technical scheme below：
A kind of exhaust gas processing device, including：
The first absorption tower connected with exhaust pipe, has for spraying tail gas first to spray inside first absorption tower
Pouring equipment；
It is arranged at below first absorption tower, and the first storage tank communicated with first absorption tower；
Second absorption tower, the second absorption tower are connected with first absorption tower by airduct, the second absorption tower
It is interior with for spraying the second sprinkling equipment of tail gas；
Below the second absorption tower, and the second storage tank communicated with the second absorption tower；
The blower fan connected with the gas outlet of the second absorption tower.
Preferably, first absorption tower be venturi absorption tower, offer at the top of first absorption tower with it is described
The inlet exhaust gas of exhaust pipe connection, the bottom on first absorption tower offers the offgas outlet connected with the airduct.
Preferably, the second absorption tower includes the multistage absorption tower for sequentially connecting, last in the second absorption tower
The offgas outlet of first grade absorption tower is connected with the blower fan, the inlet exhaust gas on the first order absorption tower in the second absorption tower with
The airduct connection.
Preferably, the inlet exhaust gas on the absorption tower of every one-level of the second absorption tower may be contained within the bottom on this grade of absorption tower
End, the offgas outlet on the absorption tower of every one-level of the second absorption tower may be contained within the top on this grade of absorption tower.
Preferably, polyhedron empty ball is provided with the absorption tower of every one-level of the second absorption tower.
Preferably, the airduct includes two sections of tipping tubes being interconnected.
Preferably, adjusting valve is provided with the airduct；Watch window is provided with the airduct.
Preferably, first storage tank has dismountable oil suction top board, and the oil suction top board is used to absorb described first
Mechanical pump oil in absorbing liquid in storage tank.
Preferably, the first dividing plate, first dividing plate and first storage tank are connected with the inwall of the oil suction top board
Base plate between have gap；Second partition, the second partition and institute are connected with the inwall of the base plate of first storage tank
State；
The liquid return hole connected with first absorption tower, institute are provided with the top of its first side on first storage tank
State and the bottom of its second side is provided with liquid outlet on the first storage tank, between the liquid return hole and the liquid outlet successively,
It has been arranged alternately first dividing plate and the second partition.
Preferably, first storage tank and second storage tank are respectively positioned on support, and the support is located in pallet.
From above-mentioned technical proposal as can be seen that after tail gas enters the first absorption tower, being sprayed by the first sprinkling equipment, tail
In gas, by spray-absorption, in tail gas, most solid particle is sprayed most harmful gass
Interior, tail gas enters second absorption tower afterwards, further receives spray process, and the solid particle in second absorption tower is fallen after humidifying
Enter in the second storage tank, the harmful gass in second absorption tower are discharged by blower fan by further spray-absorption, last tail gas.This reality
Solid particle in tail gas is isolated by way of spray with the tail gas unit in new, the solid particle isolated falls into
In first storage tank or the second storage tank, so as to ensure being smoothed out for vent gas treatment.
Description of the drawings
For the scheme being illustrated more clearly that in this utility model embodiment, will make to required described in embodiment below
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present utility model,
For those skilled in the art, on the premise of not paying creative work, can be obtaining other according to these accompanying drawings
Accompanying drawing.
The structure of the exhaust gas processing device of the chemical vapor deposition production that Fig. 1 is provided for one specific embodiment of this utility model
Schematic diagram；
The structural representation of the first storage tank that Fig. 2 is provided for one specific embodiment of this utility model.
Wherein, 1 be the first absorption tower, 11 be the first sprinkling equipment, 2 be second absorption tower, 21 be the second sprinkling equipment, 22
For polyhedron empty ball, 3 be airduct, 4 be adjusting valve, 5 be the first storage tank, 51 be liquid return hole, 52 be liquid outlet, 53 be suction opeing, 6
For the second storage tank, 7 be blower fan, 8 be pallet, 9 be oil suction top board, 10 be the first dividing plate, 20 be second partition.
Specific embodiment
This utility model provides a kind of exhaust gas processing device, and the exhaust gas processing device can be by solid particle from tail gas
Isolate, so that it is guaranteed that vent gas treatment is smoothed out.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the present utility model, rather than all
Embodiment.Based on embodiment of the present utility model, those of ordinary skill in the art are not making the premise of creative work
Lower obtained all other embodiment, belongs to the scope of this utility model protection.
Refer to accompanying drawing 1-2.In one specific embodiment of this utility model, the vent gas treatment dress of chemical vapor deposition production
Put including the first absorption tower 1, the first storage tank 5, airduct 3, second absorption tower 2, the second storage tank 6 and blower fan 7.
First absorption tower 1 is connected with exhaust pipe, has the first sprinkling equipment for being used to spraying tail gas in the first absorption tower 1
11.First storage tank 5 is located at the lower section on the first absorption tower 1, also, the first absorption tower 1 is communicated with the first storage tank 5.Second absorption tower 2
Inside there is the second sprinkling equipment 21, second absorption tower 2 is connected with the first absorption tower 1 by airduct 3.Through the first sprinkling equipment
The tail gas of 11 sprays is entered in second absorption tower 2 by airduct 3.Second storage tank 6 is located at the lower section of second absorption tower 2, and with
Second absorption tower 2 is communicated.Blower fan 7 is connected with the gas outlet of second absorption tower 2, for tail gas is extracted out.First sprinkling equipment 11
Collar plate shape be can be designed to the shower nozzle of the second sprinkling equipment 21, be so able to ensure that in the range of 360 ° spray and arrived.
In the present embodiment, after tail gas enters the first absorption tower 1, sprayed by the first sprinkling equipment 11, it is big in tail gas
By spray-absorption, in tail gas, most solid particle is sprayed partial harmful gass, it
Tail gas enters second absorption tower 2 afterwards, further receives spray process, and the solid particle in second absorption tower 2 is fallen into after humidifying
In second storage tank 6, the harmful gass in second absorption tower 2 are discharged by blower fan 7 by further spray-absorption, last tail gas.This
Solid particle in tail gas is isolated by way of spray by the tail gas unit in utility model, and the solid particle isolated falls
Enter in the first storage tank 5 or the second storage tank 6, so as to ensure being smoothed out for vent gas treatment.
In one specific embodiment of this utility model it is above-mentioned in the first absorption tower 1 be preferably venturi absorption tower.First
The top on absorption tower 1 offers inlet exhaust gas, and the inlet exhaust gas are connected with exhaust pipe.The bottom on the first absorption tower 1 offers
Offgas outlet, the offgas outlet are connected with blower fan 7.
In one specific embodiment of this utility model, second absorption tower 2 includes the multistage absorption tower for sequentially connecting.Second inhales
The offgas outlet for receiving the afterbody absorption tower in tower 2 is connected with blower fan 7, the tail on the first order absorption tower in second absorption tower 2
Gas import is connected with airduct 3.Such as include three-level absorption tower, the inlet exhaust gas on first order absorption tower are connected with airduct 3, the first order
The offgas outlet on absorption tower is connected with the inlet exhaust gas on second level absorption tower, and offgas outlet and the third level on second level absorption tower inhale
The inlet exhaust gas connection of tower is received, the offgas outlet on third level absorption tower is connected with blower fan 7.The series of second absorption tower 2 is according to tail
Tolerance is determining.When tail is large-minded, series is more, and tail gas amount hour, series are few.
In one specific embodiment of this utility model, the inlet exhaust gas on the absorption tower of every one-level of second absorption tower 2 are all provided with
The bottom on this grade of absorption tower is placed in, the offgas outlet on the absorption tower of every one-level of second absorption tower 2 may be contained within this grade of absorption tower
Top.
The multistage absorption tower of second absorption tower 2 can share second storage tank 6.Can also be under every first grade absorption tower
Side is provided with second storage tank 6, and each second storage tank 6 is independent.
In order that the tail gas in second absorption tower 2 obtains sufficient spray process, it is concrete real in this utility model one
Apply in example, polyhedron empty ball 22 is provided with the absorption tower of every one-level of second absorption tower 2.Polyhedron empty ball 22 can prolong
The motion path of long tail gas, extends time of the tail gas in second absorption tower 2, makes tail gas obtain sufficient spray process.
Tail gas Jing after 1 spray process of the first absorption tower is entered in second absorption tower 2 by airduct 3.At spray
Contain moisture in the tail gas of reason, it is in order to avoid moisture accumulation blocks airduct 3 in airduct 3, concrete real in this utility model one
Apply in example, airduct 3 includes two sections of inclined pipes, first paragraph pipe is inclined upwardly from the offgas outlet on the first absorption tower 1, second segment
Pipe is downward-sloping from first paragraph pipe, finally connects with the inlet exhaust gas of second absorption tower 2.Water in first paragraph pipe can be to
In the first absorption tower 1 of lower inflow, the water in second segment pipe can be flowed downwardly in second absorption tower 2.
In order that the treatment effect that exhaust gas processing device is optimal, in one specific embodiment of this utility model, in wind
Adjusting valve 4 is provided with pipe 3, the adjusting valve 4 is used for the air inflow for controlling tail gas.In addition, in order to grasp the work in airduct 3 in time
Make situation, watch window can be set on airduct 3.
A certain amount of mechanical pump oil is carried in the tail gas in the first absorption tower 1, in order to reclaim these mechanical pump oils,
In one specific embodiment of this utility model, limit the first storage tank 5 and there is dismountable oil suction top board 9.The oil suction top board 9 is used for
Absorb the mechanical pump oil in the absorbing liquid in the first storage tank 5.Oil suction top board 9 can be sponge top board.
In one specific embodiment of this utility model, the first dividing plate 10 and second partition 20 are provided with the first storage tank 5.
First dividing plate 10 is connected on the inwall of oil suction top board 9, also, has one between the base plate of the first dividing plate 10 and the first storage tank 5
Fixed gap.Second partition 20 is connected on the inwall of the base plate of the first storage tank 5, between second partition 20 and oil suction top board 9
With certain interval.The liquid return hole 51 connected with the first absorption tower 1 is provided with the top of its first side on first storage tank 5,
The bottom of its second side is provided with liquid outlet 52 on first storage tank 5, between liquid return hole 51 and liquid outlet 52 successively, replace
It is provided with the first dividing plate 10 and second partition 20.First dividing plate 10 and second partition 20 can stand the absorption in the first storage tank 5
Liquid, so that solid isolated deposition is in the bottom land of the first storage tank 5, is easy to reclaim；Make mechanical pump oil float on groove top, be easy to oil suction
The absorption of top board 9.The cleaning of the first storage tank 5 for convenience, can arrange sewage draining exit on the first storage tank 5.In order to will be into
Tail gas in one storage tank 5 is transported in second absorption tower 2, and suction opeing 53 can be arranged on the first storage tank 5, the suction opeing 53 with
Second absorption tower 2 is connected.
In order to prevent absorbing liquid from leaking on ground, in one specific embodiment of this utility model, by the first storage tank 5 and
Two storage tanks 6 have been arranged on support, and support is placed in pallet 8.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use that this practicality is new
Type.Various modifications to these embodiments will be apparent for those skilled in the art, determined herein
The General Principle of justice can be realized in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (10)
1. a kind of exhaust gas processing device, it is characterised in that include：
The first absorption tower connected with exhaust pipe, is had inside first absorption tower and is set for the first spray for spraying tail gas
It is standby；
It is arranged at below first absorption tower, and the first storage tank communicated with first absorption tower；
Second absorption tower, the second absorption tower are connected with first absorption tower by airduct, tool in the second absorption tower
Have for spraying the second sprinkling equipment of tail gas；
Below the second absorption tower, and the second storage tank communicated with the second absorption tower；
The blower fan connected with the gas outlet of the second absorption tower.
2. exhaust gas processing device according to claim 1, it is characterised in that first absorption tower is that venturi absorbs
Tower, offers the inlet exhaust gas connected with the exhaust pipe, the bottom on first absorption tower at the top of first absorption tower
Portion offers the offgas outlet connected with the airduct.
3. exhaust gas processing device according to claim 1, it is characterised in that the second absorption tower includes what is sequentially connected
Multistage absorption tower, the offgas outlet on the afterbody absorption tower in the second absorption tower are connected with the blower fan, and described second
The inlet exhaust gas on the first order absorption tower in absorption tower are connected with the airduct.
4. exhaust gas processing device according to claim 3, it is characterised in that the absorption of every one-level of the second absorption tower
The inlet exhaust gas of tower may be contained within the bottom on this grade of absorption tower, the offgas outlet on the absorption tower of every one-level of the second absorption tower
May be contained within the top on this grade of absorption tower.
5. exhaust gas processing device according to claim 4, it is characterised in that the absorption of every one-level of the second absorption tower
Polyhedron empty ball is provided with tower.
6. exhaust gas processing device according to claim 1, it is characterised in that the airduct includes that be interconnected two sections are inclined
Inclined tube.
7. exhaust gas processing device according to claim 1, it is characterised in that be provided with adjusting valve in the airduct；It is described
Watch window is provided with airduct.
8. exhaust gas processing device according to claim 1, it is characterised in that first storage tank has dismountable oil suction
Top board, the oil suction top board are used to absorb the mechanical pump oil in the absorbing liquid in first storage tank.
9. exhaust gas processing device according to claim 8, it is characterised in that is connected with the inwall of the oil suction top board
There is between the base plate of one dividing plate, first dividing plate and first storage tank gap；The inwall of the base plate of first storage tank
On be connected with second partition, between the second partition and the oil suction top board have gap；
It is provided with the liquid return hole connected with first absorption tower on first storage tank at the top of its first side, described the
The bottom of its second side is provided with liquid outlet on one storage tank, between the liquid return hole and the liquid outlet successively, replace
It is provided with first dividing plate and the second partition.
10. the exhaust gas processing device according to claim 1-9 any one, it is characterised in that first storage tank and institute
State the second storage tank to be respectively positioned on support, the support is located in pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621041007.9U CN206045742U (en) | 2016-09-06 | 2016-09-06 | Exhaust gas processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621041007.9U CN206045742U (en) | 2016-09-06 | 2016-09-06 | Exhaust gas processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206045742U true CN206045742U (en) | 2017-03-29 |
Family
ID=58369659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621041007.9U Active CN206045742U (en) | 2016-09-06 | 2016-09-06 | Exhaust gas processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206045742U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523177A (en) * | 2019-07-29 | 2019-12-03 | 聊城盐杉新材料科技有限公司 | A kind of wet method dedusting system for the dry tail gas of sodium formate |
-
2016
- 2016-09-06 CN CN201621041007.9U patent/CN206045742U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523177A (en) * | 2019-07-29 | 2019-12-03 | 聊城盐杉新材料科技有限公司 | A kind of wet method dedusting system for the dry tail gas of sodium formate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181123 Address after: 511500 Tellurium Chemical Workshop of Guangdong Pioneer Rare Materials Co., Ltd., Heyun Town, Qingxin District, Qingyuan City, Guangdong Province Patentee after: Guangdong Pioneer Precious Metals Material Co.,Ltd. Address before: 511500 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Patentee before: FIRST RARE MATERIALS Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200525 Address after: 239000 east of yongyang Road, west of Nanjing Road, north of Anqing road and south of Lu'an road in Langya Economic Development Zone, Langya District, Chuzhou City, Anhui Province Patentee after: Anhui Guangzhi Technology Co.,Ltd. Address before: 511500 Tellurium Chemical Workshop of Guangdong Pioneer Rare Materials Co., Ltd., Heyun Town, Qingxin District, Qingyuan City, Guangdong Province Patentee before: Guangdong Pioneer Precious Metals Material Co.,Ltd. |
|
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020110000017 Denomination of utility model: Automobile exhaust gas processing apparatus Granted publication date: 20170329 License type: Common License Record date: 20200723 |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020110000017 Date of cancellation: 20220413 |
|
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Denomination of utility model: Tail gas treatment unit Granted publication date: 20170329 License type: Common License Record date: 20220520 |
|
| EC01 | Cancellation of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Date of cancellation: 20230103 |